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Technical

This event is over. Contact Laura Nguyen for additional information.

To access the recording, when available it will be posted here: https://www.semi.org/en/products-services/standards/step

United States standards watch banner image dec 2019 upw Business Technical

Overview

The IRDS Roadmap has identified near-term challenges related to measurements of particles, trace metals and organics in liquid chemicals at levels required to meet the needs of the industry.  The identified challenges are measurement of 10 nm and smaller particles, sub ppt measurement of metallic impurities, measurement of particle precursors and trace organics and online speciation of trace organics.  The focus of the workshop will be on recent advances in analytical methodology and instrumentation that will enable the industry to meet these challenges. 

In-Person—Mountain Time
Phoenix Convention Center
North Building, 200 Level, Room 229B
Phoenix, AZ
United States

9:00 am
PT
Paul Trio
Director, Standards
SEMI

Welcome

Suhas Ketkar headshot
Moderator
Suhas Ketkar
Elemental Scientific
9:05 am - 9:15 am
don hadder
Don Hadder
OTF Planar Staff IC
Intel

Chemical Quality and Consistency Requirements for the Semiconductor Industry

9:15 am - 9:45 am
Aaron_Hineman
Aaron Hineman
Inorganic Product Line Leader, Americas
PerkinElmer

Analysis of Challenging Semiconductor Chemicals by ICP-MS

9:45 am - 10:15 am
Daniel Wiederin headshot
Daniel Wiederin
President
Elemental Scientific

Addressing IRDS Yield Enhancement Challenges in Liquid Chemical Metrology

10:15 am - 11:00 am
Gary Van Schooneveld headshot
Gary Van Schooneveld
President
CT Associates, Inc.
Derek Oberreit headshot
Derek Oberreit
Chief Technology Officer
Kanomax Holdings
Marie Tripp Headshot
Dr. Marie Tripp
VP of Customer Relations
UNISERS AG

Metrology for Detection of Particle Precursor and Sub-10 nm Particles In Liquids and On-Wafer

11:00 am - 11:30 am
Larry Zazzera headshot
Larry Zazzera, Ph.D.
Corporate Scientist
CT Associates, Inc.
Greg Haugstad headshot png
Greg Haugstad, Ph.D.
Principal Researcher and Technical Director, CharFac
Dept. of Chemical Engineering, University of Minnesota

Identification of Organic Particle Precursors using FTIR-ATR, SERS and AFM-IR

11:30 am
Suhas Ketkar headshot
Suhas Ketkar
Elemental Scientific

Closing Remarks

Standards

SEMI Analytical Workshop

9:00 am - 11:30 am Off Add to Calendar 2025-10-08 09:00:00 2025-10-08 11:30:00 SEMI Liquid Chemicals Analytical Workshop SEMI Analytical Workshop In-Person—Mountain Time Phoenix Convention Center North Building, 200 Level, Room 229B Phoenix, AZ United States SEMI.org [email protected] America/Los_Angeles public

Contact

For any questions about the event, please contact:

Laura Nguyen
[email protected]

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This event is over. Contact Laura Nguyen for additional information.

To access the recording, when available it will be posted here: https://www.semi.org/en/products-services/standards/step

United States F47 Ad Business Technical

Overview

Since 2018, the SEMI Voltage Sag Task Force—comprising Fabs, Utilities, OEMs, Tool Suppliers, and EPRI—has collaborated to address a persistent challenge: why do tools remain vulnerable to voltage sags despite the implementation of SEMI F47?

Over seven years, the task force has investigated the power quality environment, tool susceptibility, testing methodologies, and mitigation strategies. This deep dive has led to actionable recommendations for strengthening the SEMI F47 standard and improving tool resilience in future builds.

What to Expect

Join us for a comprehensive workshop that will:

  • Review the task force’s findings and collaborative efforts
  • Share insights from key stakeholders
  • Present proposed revisions to the SEMI F47 standard
  • Discuss how these updates can enhance tool performance and reliability

In-Person—Mountain Time
Phoenix Convention Center
North Building, 200 Level, Room 229B
Phoenix, AZ
United States

2:30 pm
PT
Paul Trio
Director, Standards
SEMI

Welcome Remarks

2:35 pm
Mark Stephens EPRI
Task Force Leader
Mark Stephens
Program Manager
EPRI

SEMI F47 Background & Voltage Sag Immunity Task Force Review

Biography
Mark will present the background of the 7-year effort, the findings from the work , proposed updates and pathways towards improvements and will close out with a summary and next steps.

2:50 pm

Baselining PQ Data from Semiconductor Fabs

3:05 pm
Zack Pike
Zachary Pike
SMTS Facilities Electrical Engineer
GlobalFoundries

Insights from Global Foundries

Biography
Zack will present on Global Foundries experiences with semiconductor tool shutdowns, efforts toward improvement and the types of voltage sags that are still causing tool downtime.

2:20 pm
Clay Burns
Clayton Burns
Principal Engineer, Transmission Planning & Asset Management
National Grid

Experiences from National Grid

Biography
Clay will discuss the power quality environment, relay concepts such as area of vulnerability, and the need for including some level of three-phase voltage sag testing.

3:35 pm
Mark Stephens EPRI
Task Force Leader
Mark Stephen
Program Manager
EPRI

Key Findings from Research and Testing

3:50 pm

Proposed Updates to the SEMI F47 Standard from Task Force Work

4:05 pm

Facilities Korea TC Chapter Input

4:15 pm

Voltage Sag Generator Readiness

4:25 pm - 4:30 pm

Summary and Next Steps

Standards

Enhancing Voltage Sag Immunity: SEMI F47 Standard Updates & Insights Workshop

This is a must-attend session for professionals involved in semiconductor manufacturing, power quality engineering, and equipment design.

2:30 pm - 4:30 pm Off Add to Calendar 2025-10-08 14:30:00 2025-10-08 16:30:00 Enhancing Voltage Sag Immunity: SEMI F47 Standard Updates & Insights Workshop Enhancing Voltage Sag Immunity: SEMI F47 Standard Updates & Insights WorkshopThis is a must-attend session for professionals involved in semiconductor manufacturing, power quality engineering, and equipment design. In-Person—Mountain Time Phoenix Convention Center North Building, 200 Level, Room 229B Phoenix, AZ United States SEMI.org [email protected] America/Los_Angeles public

Contact

For any questions about the event, please contact:

Laura Nguyen
[email protected]

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United States http://flex.semi.org/ 425x187@2_Flex_event_Tile Business Expositions Technical

Phoenix, AZ
United States

- APHI CAST EHS NBMC SCM Smart MFG Smart Mobility Smart MedTech Smart Data & AI SMG Sustainability EMG ESD Alliance FlexTech FOA ITL MSIG SCIS SE&A SiPAT SOI Standards Workforce Development Off Add to Calendar 2026-02-24 00:00:00 2026-02-26 00:00:00 Flex 2026 Phoenix, AZ United States SEMI.org [email protected] America/Los_Angeles public
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SEMI Japan
26F, xLINK Marunouchi Eiraku Bldg.
1-4-1 Marunouchi
Chiyoda-ku, Tokyo
1000005
Japan

Standards

Automation Technology Japan TC Chapter Meeting 

Date: Friday, September 19, 2025

Time: 1:30 PM - 3:00 PM JST

via OVTCCM/ SEMI Japan Office (Hybrid)

 

AGENDA

 

Standards Contact Information:

Nahoko Koga

Coordinator, SEMI Japan

Email: [email protected]

Phone: 81.3.3222.6018

 

NOTE:

Standards meetings are open to all, but you must be a SEMI Standards Program Member to attend.

If you are not a Member, please register for the International SEMI Standards Program and start making a big contribution to the industry’s progress, complete an application form today!

Questions? Contact your local staff coordinator: Click here

1:30 pm - 3:00 pm Off Add to Calendar 2025-09-19 13:30:00 2025-09-19 15:00:00 Automation Technology Japan TC Chapter Meeting Automation Technology Japan TC Chapter Meeting Date: Friday, September 19, 2025Time: 1:30 PM - 3:00 PM JSTvia OVTCCM/ SEMI Japan Office (Hybrid) AGENDA Standards Contact Information:Nahoko KogaCoordinator, SEMI JapanEmail: [email protected]: 81.3.3222.6018 NOTE:Standards meetings are open to all, but you must be a SEMI Standards Program Member to attend.If you are not a Member, please register for the International SEMI Standards Program and start making a big contribution to the industry’s progress, complete an application form today!Questions? Contact your local staff coordinator: Click here SEMI Japan 26F, xLINK Marunouchi Eiraku Bldg. 1-4-1 Marunouchi Chiyoda-ku, Tokyo 1000005 Japan SEMI.org [email protected] Asia/Tokyo public Asia/Tokyo
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Webinar-EU CRA Regulator Technical Training
Highlighted content

As the European Union enacts the Cyber Resilience Act (CRA), the semiconductor industry must rapidly adapt to evolving cybersecurity requirements that will impact product design, software compliance, and the global supply chain. Join the Semiconductor Manufacturing Cybersecurity Consortium (SMCC) for a live webinar unpacking what the CRA means for semiconductor companies and how to prepare for compliance.

This session will provide expert insight, practical guidance, and live Q&A with cybersecurity leaders from top technology firms.

Key Topics

  • Overview of the EU Cyber Resilience Act and its latest updates
  • How CRA regulations apply to semiconductor manufacturing, equipment, and design
  • Risk management strategies and third-party software compliance
  • Real-world approaches to implementation from leading global firms
  • Open Q&A with cybersecurity and compliance experts

Who Should Attend

  • Cybersecurity and compliance professionals
  • Semiconductor design and manufacturing leaders
  • Legal and regulatory affairs professionals
  • Product development and software teams
  • Government and policy stakeholders

United States

3:00 pm - 5:00 pm Off Add to Calendar 2025-09-17 15:00:00 2025-09-17 17:00:00 EU CRA Updates United States SEMI.org [email protected] America/Los_Angeles public

Speakers

Uwe Rueddenklau
Head of Infineon Global Standardization & Associations, Infineon
Gerard Mas
Corporate Standards and Alliances Director, STMicroelectronics
Ben KokxBen Kokx
Director of Product & Systems Security, Philips
 
SZ LinSZ Lin
President, ISA Taiwan Section| Chief Cybersecurity Advisor, Sun Square
 
Wilko BaksWilko Baks
Manager, Product Security and 3rd Party Software Compliance, ASML
 
Konstantinos Papapanagiotou
Principal Consultant, Styx Cybersecurity Services
 
Register Now
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SEMI Japan
26F, xLINK Marunouchi Eiraku Bldg.
1-4-1 Marunouchi
Chiyoda-ku,, Tokyo
1000005
Japan

Standards

Liquid Chemicals Japan TC Chapter Meeting 

Date: Thursday, September 4, 2025

Time: 3:00 pm - 5:00 pm JST

Venue: SEMI Japan Office + OVTCCM (Hybrid)

 

AGENDA

 

Standards Contact Information:

Takeaki Hirabara

Standards & EHS, SEMI Japan

Email: [email protected]

 

NOTE:

Standards meetings are open to all, but you must be a SEMI Standards Program Member to attend.

If you are not a Member, please register for the International SEMI Standards Program and start making a big contribution to the industry’s progress, complete an application form today!

Questions? Contact your local staff coordinator: Click here

3:00 pm - 5:00 pm Off Add to Calendar 2025-09-04 15:00:00 2025-09-04 17:00:00 Liquid Chemicals Japan TC Chapter Meeting Liquid Chemicals Japan TC Chapter Meeting Date: Thursday, September 4, 2025Time: 3:00 pm - 5:00 pm JSTVenue: SEMI Japan Office + OVTCCM (Hybrid) AGENDA Standards Contact Information:Takeaki HirabaraStandards & EHS, SEMI JapanEmail: [email protected] NOTE:Standards meetings are open to all, but you must be a SEMI Standards Program Member to attend.If you are not a Member, please register for the International SEMI Standards Program and start making a big contribution to the industry’s progress, complete an application form today!Questions? Contact your local staff coordinator: Click here SEMI Japan 26F, xLINK Marunouchi Eiraku Bldg. 1-4-1 Marunouchi Chiyoda-ku,, Tokyo 1000005 Japan SEMI.org [email protected] Asia/Tokyo public Asia/Tokyo
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Germany Japan South Korea Taiwan United States ESDA Advocacy Webinar Tile 800x800 Business Technical
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Join us for a webinar that will explore the role of SEMI’s Public Policy and Advocacy (PP&A) team in driving policy developments that are relevant to the ESDA community. PP&A staff will present on SEMI’s advocacy efforts, how you can interface with our team in DC, and how we work with member companies to advance key legislative and advocacy priorities in specific policy areas including:

  • Trade and Export Controls
  • Tax Policy
  • CHIPS Implementation
  • Workforce Development

United States

APHI ESD Alliance SiPAT

The ESD Alliance, a SEMI Technology Community, is hosting a free webinar, "SEMI's Public Policy & Advocacy Office—A Valuable Resource for The Electronic Design Automation Industry," to share how this team can help you navigate global trade complexities and stay ahead of evolving policy challenges. 

10:00 am - 11:00 am Off Add to Calendar Disabled America/Los_Angeles REGISTER NOW
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SEMI Members:  $75

Use your corporate email address during log in to be recognized as a SEMI Member.

Non-Members:  $149

Students:  Free

Contact Basak Ulutas Ozturkler ([email protected]) with a picture of your student ID to receive your discount code.

Belgium Germany Singapore Taiwan United States Masterclass #28 Business Executive Technical
Highlighted content

Improved materials are required for progress in fields including printed electronics, semiconductors, aerospace & defense, energy, and life sciences/medical care.  Developing such materials and chemicals involves considerations of performance, cost, manufacturability, safety, and stability.  Scaling production of new materials is a very different challenge than making 50 grams in a laboratory.  Transitioning/commercializing new materials is a separate effort where intellectual property, regulation, quality control, system documentation, supply chain development, and business relationships become key.  This talk will address these aspects of introducing a new material into our enterprise.

ABOUT THE SPEAKER:

Larry Takiff, PhD

Larry Takiff is co-Founder and President of Akita Innovations LLC, a small business in Massachusetts that develops and produces novel chemicals and materials for government and commercial customers.  He founded Akita in 2012 with Lawrence Hancock after working at Polaroid Corporation, Aprilis Inc., and Nomadics/ICx/FLIR Systems.  He is a chemist by training and a businessman by necessity.  At Akita, he has initiated and led projects in materials R&D and pilot production for a variety of government agencies/DoD components and for commercial partners.  Currently he is leading an effort to scale production of a decontamination fluid for the Defense Threat Reduction Agency (DTRA), and a FlexTech project to advance the TRL/MRL of a dielectric ink for printed electronics, as well as several Phase II SBIR development projects.

United States

lt
Larry Takiff, PhD
President
Akita Innovations LLC
Gity Samadi
Moderator
Gity Samadi
Sr. Director, R&D Programs
SEMI
NBMC Smart MedTech FlexTech

Join us for this insightful Master Class with Larry Takiff, PhD, Co-Founder and CEO of Akita Innovations LLC, as he explores the path from lab-scale breakthroughs to scalable material solutions across high-impact industries. Dr. Takiff will dive into the challenges and strategies of transitioning novel materials such as those used in printed electronics, semiconductors, aerospace, and medical devices into commercial success.

10:00 am - 11:30 am Off Add to Calendar 2025-11-12 10:00:00 2025-11-12 11:30:00 FEMC#28 Development, Scaling, and Transition of Novel Chemicals & Materials Join us for this insightful Master Class with Larry Takiff, PhD, Co-Founder and CEO of Akita Innovations LLC, as he explores the path from lab-scale breakthroughs to scalable material solutions across high-impact industries. Dr. Takiff will dive into the challenges and strategies of transitioning novel materials such as those used in printed electronics, semiconductors, aerospace, and medical devices into commercial success. United States SEMI.org [email protected] America/Los_Angeles public Watch on-demand
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United States Get Connected for Latest Updates ESGS Event Tile Executive Technical

Thank You to Our ESGS 2026 Sponsors

Silver

Brooks Instruments 170x65

Bronze

Become a Sponsor

View the 2026 ESGS Sponsorship Brochure

Sponsoring will associate your company with the industry's most respected senior executives. Sponsorship opportunities can be tailored to meet your specific branding and marketing objectives.

Contact Tim Janes at +1.720.939.4992 or [email protected]

The Electronic Specialty Gases & Systems Conference (ESGS) provides a forum of engagement and learning around the market, technology trends, and market drivers for electronic gases. The conference includes sections focusing on developments in the bulk, rare and specialty gas markets that are critical to the continued growth of the electronics industry.

The conference is designed for executives, buyers, product managers, and strategic planners from the electronic gases value chain including end-users, producers, and equipment suppliers. The conference features knowledgeable experts in the industry, who understand the key developments and challenges unique to this market.


2026 Agenda Coming Soon 

Hyatt Regency Phoenix
122 N 2nd St
Phoenix, AZ 85004
United States

TUESDAY, NOVEMBER 4, 2025

7:00 am - 8:00 am

Breakfast

8:00 am - 8:05 am
Ed Hall
Edwin Hall
Sr. Manager, Market Data/Standards
SEMI

Opening Remarks

8:05 am - 8:15 am
Mike Corbett
Mike Corbett
Managing Partner
Linx Consulting

Opening Remarks

8:15 am - 9:00 am
Takashi Hayakawa - TEL
Takashi Hayakawa
TOKYO ELECTRON LIMITED

Keynote: Concept & Vision of Future Wafer Fab Equipment

9:00 am - 9:45 am
Laura Matz, Merck KGaA
Laura Matz
Chief Science and Technology Officer
Merck KGaA, Darmstadt, Germany

The Glue Layer of Semiconductors: How AI Powers New Materials

9:45 am - 10:15 am
Erin Lavigne
Erin Lavigne
Senior Director of EUV Technology Strategy and Partnerships
NY CREATES

NY Creates Advanced Patterning Technology Development Programs

10:15 am - 11:00 am

Networking Break

11:00 am - 11:30 am
Jamie Girard, Girard Government Relations
Jamie Girard
Principal
Girard Government Relations

Keynote: Certain Uncertainty: U.S. Semiconductor Public Policy in 2025 & Beyond

11:30 am
Duncan Meldrum, Hilltop Economics
Duncan Meldrum
Chief Economist and Founder
Hilltop Economics

Economic Uncertainty and the Outlook Economic Growth and Semiconductors: Looking at Risks

12:00 pm - 1:15 pm

Lunch

Vapor Phase Materials and Electronics Specialty Gases

1:15 pm - 1:20 pm
Venkat Pallam
Venkat Pallam
Deputy CTO & Technology Director, Thin Film Processing
Air Liquide

Opening Session Remarks

1:20 pm - 1:50 pm
Joseph Rivers
Joseph Rivers
Senior Director
Entegris

Enabling the Molybdenum Ecosystem

1:50 pm - 2:20 pm
Tan Lu
Tan Lu
Global Product Manager
Air Liquide

Green Electronic Specialty Materials (ESM)

2:20 pm - 2:50 pm
Jeff Catlin - Photronics
Jeff Catlin
Senior Vice President of Global Sales
Photronics

Tier 2 Perspectives: ESGS Supply Chain Challenges and Opportunities

2:50 pm - 3:35 pm

Networking Break

Contamination Control and Yield

3:35 pm - 3:40 pm
Sarah Vogt
Sarah Vogt
Director, Gas Purification Technology
Entegris

Opening Session Remarks

3:40 pm - 4:10 pm
Mike Tseng
Mike Tseng
IMQR Manager
TSMC

Supply Chain Quality for Advanced Semiconductor Manufacturing

4:10 pm - 4:40 pm
Chris Ebert, Linde
Chris Ebert
Associate Director, Product Development Analytical Laboratory
Linde
Florian Adler
Florian Adler
Lead Scientist & Technical Product Manager
Process Insights
4:40 pm - 5:10 pm
Christopher Derrick
Christopher Derrick
ASNA Territory Manager
ASNA Global

SEMI Semiconductor Components and Instruments & SubSystems (SCIS) Technology Coalition

5:10 pm - 5:20 pm
Mike Corbett
Mike Corbett
Managing Partner
Linx Consulting

Closing Remarks

WEDNESDAY, NOVEMBER 5, 2025

New Technology Developments

7:00 am - 8:00 am

Breakfast

8:00 am - 8:10 am
Mike Corbett
Mike Corbett
Managing Partner
Linx Consulting

Opening Day Remarks

8:10 am - 8:15 am
Jared Piette
Jared Piette
Product Manager
Linde

Opening Session Remarks

8:15 am - 8:45 am
Wojciech Osowiecki
Wojtek Osowiecki, PhD
Product Marketing Engineer
Lam Research

Akara® and ALTUS® Halo: How New Lam Research Products Enable Next-Gen Materials in the Semiconductor Industry

8:45 am - 9:15 am
Jongjoon Kim Resonac
Jongjoon Kim
Sales Manager - Electronics Wafer Process Materials
Resonac America

Resonac’s CO₂ Reduction Roadmap in High-Purity Gas Business

9:15 am - 9:45 am
Oleg Byl
Oleg Byl
R&D Manager
Linde

Selective Si Etching with Fluorine and Additive Compositions

9:45 am - 10:30 am

Networking Break

10:30 am - 11:00 am
Laura Nereng
Laura Nereng
VP of Business Development
SKYRE

Advancing Decarbonization Through Electrochemical-Based Solutions to Reliably Produce Low-Cost Hydrogen from Waste Streams, Green Hydrogen and Fuels and Chemicals

11:00 am - 11:30 am
Kibyung Park
Kibyung Park 
Samsung Electronics

Isotropic Dry Cleaning Technologies Using Gases and Radical

11:30 am - 12:00 pm
Dawood Abugharbieh - Exentec
Dawood Abugharbieh, PhD
Sr. Vice President - Sales & Marketing
Exentec
Ben Green
Benjamin Green
Sr. Digitalization Consultant
Siemens

Adaptive Approach to Digital Twins

12:00 pm - 1:00 pm

Lunch

Facilities and Infrastructure

1:00 pm - 1:05 pm
Kurtis Fairley
Kurtis Fairley
Director, Technical Programs North America
Edwards Vacuum

Opening Session Remarks

1:05 pm - 1:35 pm
Saurav Bhattacharjee
Saurav Bhattacharjee
Technical Design Lead
Micron
Doug Tervo
Doug Tervo
Senior Process Gas Engineer
Micron

Innovations in Electronic Specialty Gas Systems

1:35 pm - 2:05 pm
John Makin, Ebara Technologies
John Makin
Product & Strategic Marketing Manager
Ebara Technologies

Integrated Vacuum & Abatement Systems

2:05 pm - 2:35 pm
Scott Balaguer
Scott Balaguer
ISRL

Bridging the SubFAB Gap: A Call for Collaborative Innovation in Gas Systems and Materials Handling

2:35 pm - 3:20 pm

Networking Break

Sustainability

3:20 pm - 3:25 pm

Opening Session Remarks

3:25 pm - 3:55 pm
Bruce Ernst
Bruce Ernst
Founder
Orizaba

The American Innovation and Manufacturing (AIM) Act: Status and Implications for the U.S. Semiconductor Industry

3:55 pm - 4:25 pm
James Amano
James Amano
Senior Director, EHS
SEMI

Update on SEMI EHS Advocacy

4:25 pm - 4:30 pm
Mike Corbett
Mike Corbett
Managing Partner
Linx Consulting

Closing Remarks

6:00 pm - 8:00 pm

Conference Reception

THURSDAY, NOVEMBER 6, 2025

Market Review and Updates

7:00 am - 8:00 am

Breakfast

8:00 am - 8:10 am
Mike Corbett
Mike Corbett
Managing Partner
Linx Consulting

Opening Day Remarks

8:10 am - 8:40 am
Inna Skvortsova, SEMI
Inna Skvortsova
Research Manager, Market Intelligence
SEMI

SEMI Fab Capacity and Materials Market Outlook

8:40 am - 9:10 am
Phil Kornbluth
Phil Kornbluth
Founder & President
Kornbluth Helium Consulting

Helium Market Overview, Outlook & Trends

9:10 am - 9:40 am
Andy Tuan, Linx Consulting
Andy Tuan
Managing Director
Linx Consulting

Electronic Specialty Gases (ESG) Market Update

9:40 am - 10:15 am

Networking Break

Gas Metrology

10:15 am - 10:20 am
Jesus Chavez
Jesus Chavez
Supply Chain Engineer - Yield Strategic Sourcing
Intel

Opening Session Remarks

10:20 am - 10:50 am
Florian Adler
Florian Adler
Lead Scientist & Technical Product Manager
Process Insights

Real-Time Impurity Measurements for Electronic-Grade Oxygen with Modern Analytical Systems

10:50 am - 11:20 am
  Daniel Merriman
Daniel Merriman
Senior Advisor to Marketing
Thermo Fisher Scientific

Advancing High Purity Gas Analysis for Semiconductor Manufacturing: Achieving part-per-trillion detection with APIMS

11:20 am - 11:50 am
Joseph Ha
Joseph Ha
Global Market Segment Director, Purity & Specialty
Servomex
Andrew Wright, Servomex
Andrew Wright, PhD
Senior Scientist
Servomex
11:50 am - 12:00 pm
Mike Corbett
Mike Corbett
Managing Partner
Linx Consulting

Closing Remarks

12:00 pm - 1:00 pm

Lunch

Advanced Metrology Workshop

1:00 pm - 1:05 pm
Nithin Yathapu
Nithin Yathapu
Director, Yield Strategy
Intel

Opening Session Remarks

1:05 pm - 1:30 pm
Stephen Hermens
Stephen Hermens
Technologist, Facilities Chemical Engineer
Intel

Keynote: IDM Perspectives on Next Generation Metrology Requirement

1:30 pm - 1:50 pm
Scott Hoover, KLA
Scott Hoover
Director of Yield Solutions
KLA

Turning Variability into Insight: A Holistic Approach to Optical Inspection

1:50 pm - 2:10 pm
Raghu Nayak
Raghu Nayak
Director of Business Development & New Product Introduction
Zeiss

Metrology for 3D Devices

2:10 pm - 2:30 pm
James Amano
James Amano
SEMI

Regulatory Updates: US-EU considerations on PFAS

2:30 pm - 3:00 pm

Coffee Break

3:00 pm - 3:10 pm
imec

From Chips to Atoms: A Tour Inside imec’s Materials and Components Analysis Lab (Video)

3:10 pm - 3:30 pm
Ganesh Vanamu, Nova
Ganesh Vanamu
Director of Strategic Marketing
Nova

Advanced Logic Device Architectures - Challenges & Solutions in Materials Metrology

3:30 pm - 3:50 pm
Thomas Phely-Bobin
Thomas Phely-Bobin
VP, Engineering, R&D, and Applications, Liquid Microcontamination Control
Entegris

Advanced Metrology for the Development and Manufacturing of Critical Filtration and Purification Products

3:50 pm - 4:10 pm
Ripudaman Shekhawat
Ripudaman Shekhawat
Senior Field Application Engineer
Elemental Scientific

Online Monitoring of PPQ-Level Metals, Nanoparticles, and Molecular Organic Impurities in Semiconductor Process Chemicals

4:10 pm - 4:30 pm
Marshall R Allin
Marshall R Allin
Technical Sales Specialist
Thermo Fisher Scientific

Innovations in Instrumentation from Thermo Fisher Scientific, Addressing Challenges in Elemental Analysis and Other Techniques

4:30 pm - 5:20 pm

Panel: Forward Looking Collaborative Inspection, Metrology & Analytical Solutions in Angstrom Era

Elemental Scientific, Entegris, Intel, KLA, NIST, Nova, Thermo Fisher Scientific, Zeiss

5:20 pm - 5:30 pm
Nithin Yathapu
Nithin Yathapu
Director, Yield Strategy
Intel

Closing Remarks

-

Driving Innovation Across the Electronic Gases Ecosystem

ESGS 2026 will take place at a new venue—the Hyatt Regency Phoenix—from November 10–12, building on the overwhelming success and momentum of last year’s event.

Off Add to Calendar 2026-11-10 00:00:00 2026-11-12 00:00:00 ESGS 2026—Electronic Specialty Gases & Systems Conference Driving Innovation Across the Electronic Gases EcosystemESGS 2026 will take place at a new venue—the Hyatt Regency Phoenix—from November 10–12, building on the overwhelming success and momentum of last year’s event. Hyatt Regency Phoenix 122 N 2nd St Phoenix, AZ 85004 United States SEMI.org [email protected] America/Phoenix public America/Phoenix 1
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