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SEMI Japan Office
26F, xLINK Marunouchi Eiraku Bldg.
1-4-1 Marunouchi, Chiyoda-ku
Tokyo
1000005
Japan

Standards

FPD Materials & Components Japan TC Chapter Meeting 

Date: Friday, October 9, 2026

Time: 3:00 PM - 5:00 PM (JST)

via Official Virtual TC Chapter Meeting + SEMI Japan (Hybrid)

Please note that the meeting venue might be changed due to room capacity.  If there is any change, we will inform you once it is confirmed.

 

AGENDA

 

Standards Contact Information:

Nahoko Koga

Coordinator, Standards & EHS, SEMI Japan

Email: [email protected]

 

NOTE:

Standards meetings are open to all, but you must be a SEMI Standards Program Member to attend.

If you are not a Member, please register for the International SEMI Standards Program and start making a big contribution to the industry’s progress, complete an application form today!

 

Questions? Contact your local staff coordinator: Click here

3:00 pm - 5:00 pm Off Add to Calendar 2026-10-09 15:00:00 2026-10-09 17:00:00 FPD Materials & Components Japan TC Chapter Meeting FPD Materials & Components Japan TC Chapter Meeting Date: Friday, October 9, 2026Time: 3:00 PM - 5:00 PM (JST)via Official Virtual TC Chapter Meeting + SEMI Japan (Hybrid)Please note that the meeting venue might be changed due to room capacity.  If there is any change, we will inform you once it is confirmed. AGENDA Standards Contact Information:Nahoko KogaCoordinator, Standards & EHS, SEMI JapanEmail: [email protected] NOTE:Standards meetings are open to all, but you must be a SEMI Standards Program Member to attend.If you are not a Member, please register for the International SEMI Standards Program and start making a big contribution to the industry’s progress, complete an application form today! Questions? Contact your local staff coordinator: Click here SEMI Japan Office 26F, xLINK Marunouchi Eiraku Bldg. 1-4-1 Marunouchi, Chiyoda-ku Tokyo 1000005 Japan SEMI.org [email protected] Asia/Tokyo public Asia/Tokyo
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SEMI Japan
26F, xLINK Marunouchi Eiraku Bldg.
1-4-1 Marunouchi
Chiyoda-ku, Tokyo
1010005
Japan

Standards

3D Packaging & Integration  Japan TC Chapter Meeting 

Date: Friday, September 25, 2026

Time: 2:00 PM - 4:00 PM JST

via OVTCCM/ SEMI Japan Office (Hybrid)

 

AGENDA

 

Standards Contact Information:

Akiko Yoshida

Manager, SEMI Japan

Email: [email protected]

 

NOTE:

Standards meetings are open to all, but you must be a SEMI Standards Program Member to attend.

If you are not a Member, please register for the International SEMI Standards Program and start making a big contribution to the industry’s progress, complete an application form today!

Questions? Contact your local staff coordinator: Click here

2:00 pm - 4:00 pm Off Add to Calendar 2026-09-25 14:00:00 2026-09-25 16:00:00 3D Packaging & Integration Japan TC Chapter Meeting 3D Packaging & Integration  Japan TC Chapter Meeting Date: Friday, September 25, 2026Time: 2:00 PM - 4:00 PM JSTvia OVTCCM/ SEMI Japan Office (Hybrid) AGENDA Standards Contact Information:Akiko YoshidaManager, SEMI JapanEmail: [email protected] NOTE:Standards meetings are open to all, but you must be a SEMI Standards Program Member to attend.If you are not a Member, please register for the International SEMI Standards Program and start making a big contribution to the industry’s progress, complete an application form today!Questions? Contact your local staff coordinator: Click here SEMI Japan 26F, xLINK Marunouchi Eiraku Bldg. 1-4-1 Marunouchi Chiyoda-ku, Tokyo 1010005 Japan SEMI.org [email protected] Asia/Tokyo public Asia/Tokyo
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Secure your spot today!

Don't forget to register for a SEMICON West badge and participate in any of the SEMI Standards Meetings happening all week!

Learn More: https://www.semiconwest.org/special-features/standards

 

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Overview

The workshop will focus on recent advances in analytical methods and instrumentation that address near-term particle metrology challenges identified in the 2024 IRDS Roadmap.

Near-Term Metrology Challenges

ChallengeDescription
#5 — Slurry Particle CharacterizationInsufficient metrology capability and other impurity monitoring.
#7 — Liquid Chemicals: Particles > Critical Size (#/ml)Need reliable monitoring of particles < 10nm.
#8 — CMP Slurries: Large Particles > MPS (#/ml)Need reliable LPC metrology that can measure targeted particle sizes and concentrations that ignore MPS sizes and do not require sample dilution to obtain the measurement.
#9 — Post-CMP (pCMP) Cleans ParticlesSome pCMP cleans have volatile or highly reactive ingredients that form bubbles, requiring new metrology to differentiate bubbles from real particles. Cleans containing surfactants form micelle particles that must be distinguished from foreign particles.
#16 — Particle Precursor Metrology < 10nmNeed better understanding of particle precursors and critical concentrations to form particles, and the relationship between species/concentration and particle size.

Moscone Center
South Building, 300 Level, Room 314
San Francisco, CA
United States

8:30 am
PT
Paul Trio
Director, Standards
SEMI

Welcome

Suhas Ketkar headshot
Moderator
Suhas Ketkar
Elemental Scientific
8:35 am
Juan Atkinson Mora headshot
Juan Atkinson Mora
Carl ZEISS

New Developments in Metrologies to Characterize Particle Size Distribution in CMP Slurries

8:55 am
Tyler Roberts Headshot
Tyler Roberts
Shimadzu Scientific Instruments

Dynamic Image Analysis and Machine Learning for Large Particle Metrology in CMP Slurries

9:15 am
Lisa Mey-Ami Headshot
Lisa Mey-Ami
Air Liquide Balazs

Analytical Advances in Sub-10 nm Nanoparticle Characterization for Next-Generation Semiconductor Manufacturing

9:35 am
Hwan Kim Headshot
Hwan Kim
Principal Scientist
Elemental Scientific

Advances in Analytical Technology – Online Measurement of 5nm Metallic Nanoparticles in Liquid Chemicals

9:55 am
Shane Hale Headshot
Shane Hale
Kanomax FMT

Aerosolization-based Metrology for sub-10 nm Particles & Precursors in Liquid Chemicals

10:15 am
Suhas Ketkar headshot
Moderator
Suhas Ketkar
Elemental Scientific

Q&A Panel Discussion (with first 5 presenters)

10:35 am

Networking Break

10:50 am
Marie Tripp Headshot
Dr. Marie Tripp
VP, North America and Explorer Product Manager
UNISERS AG

Bridging the Gap Between Liquid Contamination and On-Wafer Defectivity

11:10 am
 Haruka Nishikawa Headshot
Haruka Nishikawa
Rorze Automation Inc.

Direct Nanoparticle Analysis on 300 mm Silicon Wafers Using LA-GED-MSAG-ICP-MS

11:30 am
Derrick Quarles Headshot
Derrick Quarles
Elemental Scientific

Exploring the Capabilities of LA-ICPMS and LIBS for Surface, Spatial, and Depth Detection of Nanoparticles and Contaminants in Si and SiC Wafers

11:55 am
Suhas Ketkar headshot
Moderator
Suhas Ketkar
Elemental Scientific

Q&A Panel Discussion (with final 3 presenters)

12:10 pm - 12:15 pm
Suhas Ketkar headshot
Suhas Ketkar
Elemental Scientific

Closing Remarks

Standards

SEMI Standards

Liquid Chemicals Analytical Forum

8:30 am - 12:15 pm Off Add to Calendar 2026-10-14 08:30:00 2026-10-14 12:15:00 SEMI Liquid Chemicals Analytical Forum SEMI StandardsLiquid Chemicals Analytical Forum Moscone Center South Building, 300 Level, Room 314 San Francisco, CA United States SEMI.org [email protected] America/Los_Angeles public

Contact

For any questions about the event, please contact:

Laura Nguyen
Sr. Coordinator, International Standards

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SEMI Japan
26F, xLINK Marunouchi Eiraku Bldg.
1-4-1 Marunouchi
Chiyoda-ku, Tokyo
1010005
Japan

Standards

EHS Japan TC Chapter Meeting 

 

Date: Wednesday, September 16, 2026

Time: 10:00 AM - 12:00 PM JST

Location: SEMI Japan/ Official Virtual TC Chapter Meeting (Hybrid)

 

AGENDA

 

Standards Contact Information:

Akiko Yoshida

Manager, Standards & EHS, SEMI Japan
Email: [email protected]

 

NOTE:

Standards meetings are open to all, but you must be a SEMI Standards Program Member to attend.

If you are not a Member, please register for the International SEMI Standards Program and start making a big contribution to the industry’s progress, complete an application form today!

Questions? Contact your local staff coordinator: Click here

10:00 am - 12:00 pm Off Add to Calendar 2026-09-16 10:00:00 2026-09-16 12:00:00 EHS Japan TC Chapter Meeting EHS Japan TC Chapter Meeting  Date: Wednesday, September 16, 2026Time: 10:00 AM - 12:00 PM JSTLocation: SEMI Japan/ Official Virtual TC Chapter Meeting (Hybrid) AGENDA Standards Contact Information:Akiko YoshidaManager, Standards & EHS, SEMI JapanEmail: [email protected] NOTE:Standards meetings are open to all, but you must be a SEMI Standards Program Member to attend.If you are not a Member, please register for the International SEMI Standards Program and start making a big contribution to the industry’s progress, complete an application form today!Questions? Contact your local staff coordinator: Click here SEMI Japan 26F, xLINK Marunouchi Eiraku Bldg. 1-4-1 Marunouchi Chiyoda-ku, Tokyo 1010005 Japan SEMI.org [email protected] Asia/Tokyo public Asia/Tokyo
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1-4-1 Marunouchi,
Chiyoda-ku, Tokyo
1000005
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Standards

Physical Interfaces & Carriers Japan TC Chapter Meeting 

Date: Friday, September 11, 2026

Time: 1:30 pm - 4:30 pm JST

Venue: SEMI Japan Office Board Room + OVTCCM (Hybrid)

 

AGENDA

 

Standards Contact Information:

Takeaki Hirabara

Standards & EHS, SEMI Japan

Email: [email protected]

 

NOTE:

Standards meetings are open to all, but you must be a SEMI Standards Program Member to attend.

If you are not a Member, please register for the International SEMI Standards Program and start making a big contribution to the industry’s progress, complete an application form today!

Questions? Contact your local staff coordinator: Click here

1:30 pm - 4:30 pm Off Add to Calendar 2026-09-11 13:30:00 2026-09-11 16:30:00 Physical Interfaces & Carriers Japan TC Chapter Meeting Physical Interfaces & Carriers Japan TC Chapter Meeting Date: Friday, September 11, 2026Time: 1:30 pm - 4:30 pm JSTVenue: SEMI Japan Office Board Room + OVTCCM (Hybrid) AGENDA Standards Contact Information:Takeaki HirabaraStandards & EHS, SEMI JapanEmail: [email protected] NOTE:Standards meetings are open to all, but you must be a SEMI Standards Program Member to attend.If you are not a Member, please register for the International SEMI Standards Program and start making a big contribution to the industry’s progress, complete an application form today!Questions? Contact your local staff coordinator: Click here SEMI Japan 1-4-1 Marunouchi, Chiyoda-ku, Tokyo 1000005 Japan SEMI.org [email protected] Asia/Tokyo public Asia/Tokyo
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SEMI Japan
26F, xLINK Marunouchi Eiraku Bldg.
1-4-1 Marunouchi,
Chiyoda-ku, Tokyo
1000005
Japan

Standards

Information & Control Japan TC Chapter Meeting 

Date: Friday, September 11, 2026

Time: 10:00 am - 12:00 pm JST

Venue: SEMI Japan Office Room 1 + OVTCCM (Hybrid)

 

AGENDA

 

Standards Contact Information:

Takeaki Hirabara

Standards & EHS, SEMI Japan

Email: [email protected]

 

NOTE:

Standards meetings are open to all, but you must be a SEMI Standards Program Member to attend.

If you are not a Member, please register for the International SEMI Standards Program and start making a big contribution to the industry’s progress, complete an application form today!

Questions? Contact your local staff coordinator: Click here

10:00 am - 12:00 pm Off Add to Calendar 2026-09-11 10:00:00 2026-09-11 12:00:00 Information & Control Japan TC Chapter Meeting Information & Control Japan TC Chapter Meeting Date: Friday, September 11, 2026Time: 10:00 am - 12:00 pm JSTVenue: SEMI Japan Office Room 1 + OVTCCM (Hybrid) AGENDA Standards Contact Information:Takeaki HirabaraStandards & EHS, SEMI JapanEmail: [email protected] NOTE:Standards meetings are open to all, but you must be a SEMI Standards Program Member to attend.If you are not a Member, please register for the International SEMI Standards Program and start making a big contribution to the industry’s progress, complete an application form today!Questions? Contact your local staff coordinator: Click here SEMI Japan 26F, xLINK Marunouchi Eiraku Bldg. 1-4-1 Marunouchi, Chiyoda-ku, Tokyo 1000005 Japan SEMI.org [email protected] Asia/Tokyo public Asia/Tokyo
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SEMI Japan
26F, xLINK Marunouchi Eiraku Bldg.
1-4-1 Marunouchi
Chiyoda-ku, Tokyo
1000005
Japan

Standards

Liquid Chemicals Japan TC Chapter Meeting 

Date: Friday, September 4, 2026

Time: 3:30 pm - 5:00 pm JST

Venue: SEMI Japan Office + OVTCCM (Hybrid)

 

AGENDA

 

Standards Contact Information:

Takeaki Hirabara

Standards & EHS, SEMI Japan

Email: [email protected]

 

NOTE:

Standards meetings are open to all, but you must be a SEMI Standards Program Member to attend.

If you are not a Member, please register for the International SEMI Standards Program and start making a big contribution to the industry’s progress, complete an application form today!

Questions? Contact your local staff coordinator: Click here

3:30 pm - 5:00 pm Off Add to Calendar 2026-09-04 15:30:00 2026-09-04 17:00:00 Liquid Chemicals Japan TC Chapter Meeting Liquid Chemicals Japan TC Chapter Meeting Date: Friday, September 4, 2026Time: 3:30 pm - 5:00 pm JSTVenue: SEMI Japan Office + OVTCCM (Hybrid) AGENDA Standards Contact Information:Takeaki HirabaraStandards & EHS, SEMI JapanEmail: [email protected] NOTE:Standards meetings are open to all, but you must be a SEMI Standards Program Member to attend.If you are not a Member, please register for the International SEMI Standards Program and start making a big contribution to the industry’s progress, complete an application form today!Questions? Contact your local staff coordinator: Click here SEMI Japan 26F, xLINK Marunouchi Eiraku Bldg. 1-4-1 Marunouchi Chiyoda-ku, Tokyo 1000005 Japan SEMI.org [email protected] Asia/Tokyo public Asia/Tokyo
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SEMI Japan
26F, xLINK Marunouchi Eiraku Bldg.
1-4-1 Marunouchi
Chiyoda-ku, Tokyo
1000005
Japan

Standards

Silicon Wafer Japan TC Chapter Meeting


Date: Friday, August 28, 2026

Time: 1:00PM - 4:00PM JST

Location: SEMI Japan Office/ Official Virtual TC Chapter Meeting (Hybrid)

 


AGENDA

 

Standards Contact Information:

Akiko Yoshida
Manager, SEMI Japan
E-mail: [email protected] 

 

NOTE:

Standards meetings are open to all, but you must be a SEMI Standards Program Member to attend SEMI Standards meetings.

If you are not a Program Member, please register for the International SEMI Standards Program and start making a big contribution to the industry’s progress. Complete an application form today!

Questions? Contact your local staff coordinator: Click here

1:00 pm - 4:00 pm Off Add to Calendar 2026-08-28 13:00:00 2026-08-28 16:00:00 Silicon Wafer Japan TC Chapter Meeting Silicon Wafer Japan TC Chapter MeetingDate: Friday, August 28, 2026Time: 1:00PM - 4:00PM JSTLocation: SEMI Japan Office/ Official Virtual TC Chapter Meeting (Hybrid) AGENDA Standards Contact Information:Akiko YoshidaManager, SEMI JapanE-mail: [email protected]  NOTE:Standards meetings are open to all, but you must be a SEMI Standards Program Member to attend SEMI Standards meetings.If you are not a Program Member, please register for the International SEMI Standards Program and start making a big contribution to the industry’s progress. Complete an application form today!Questions? Contact your local staff coordinator: Click here SEMI Japan 26F, xLINK Marunouchi Eiraku Bldg. 1-4-1 Marunouchi Chiyoda-ku, Tokyo 1000005 Japan SEMI.org [email protected] Asia/Tokyo public Asia/Tokyo
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SEMI Japan
26F, xLINK Marunouchi Eiraku Bldg.
1-4-1 Marunouchi, Chiyoda-ku
Chiyoda-ku, Tokyo
1000005
Japan

Standards

Traceability Japan TC Chapter Meeting 

Date: Tuesday, July 28, 2026

Time: 10:00 AM - 11:00 AM (JST)

via Official Virtual TC Chapter Meeting + SEMI Japan (Hybrid)

Please note that the meeting venue might be changed due to room capacity.  If there is any change, we will inform you once it is confirmed.

 

AGENDA

 

Standards Contact Information:

Nahoko Koga

Coordinator, Standards & EHS, SEMI Japan

Email: [email protected]

 

NOTE:

Standards meetings are open to all, but you must be a SEMI Standards Program Member to attend.

If you are not a Member, please register for the International SEMI Standards Program and start making a big contribution to the industry’s progress, complete an application form today!

 

Questions? Contact your local staff coordinator: Click here

10:00 am - 11:00 am Off Add to Calendar 2026-07-28 10:00:00 2026-07-28 11:00:00 Traceability Japan TC Chapter Meeting Traceability Japan TC Chapter Meeting Date: Tuesday, July 28, 2026Time: 10:00 AM - 11:00 AM (JST)via Official Virtual TC Chapter Meeting + SEMI Japan (Hybrid)Please note that the meeting venue might be changed due to room capacity.  If there is any change, we will inform you once it is confirmed. AGENDA Standards Contact Information:Nahoko KogaCoordinator, Standards & EHS, SEMI JapanEmail: [email protected] NOTE:Standards meetings are open to all, but you must be a SEMI Standards Program Member to attend.If you are not a Member, please register for the International SEMI Standards Program and start making a big contribution to the industry’s progress, complete an application form today! Questions? Contact your local staff coordinator: Click here SEMI Japan 26F, xLINK Marunouchi Eiraku Bldg. 1-4-1 Marunouchi, Chiyoda-ku Chiyoda-ku, Tokyo 1000005 Japan SEMI.org [email protected] Asia/Tokyo public Asia/Tokyo
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SEMI Japan
26F, xLINK Marunouchi Eiraku Bldg.
1-4-1 Marunouchi, Chiyoda-ku
Chiyoda-ku, Tokyo
1000005
Japan

Standards

Flexible Hybrid Electronics Japan TC Chapter Meeting 

Date: Friday, July 10, 2026

Time: 3:00 PM - 5:00 PM (JST)

via Official Virtual TC Chapter Meeting + SEMI Japan (Hybrid)

Please note that the meeting venue might be changed due to room capacity.  If there is any change, we will inform you once it is confirmed.

 

AGENDA

 

Standards Contact Information:

Nahoko Koga

Coordinator, Standards & EHS, SEMI Japan

Email: [email protected]

 

NOTE:

Standards meetings are open to all, but you must be a SEMI Standards Program Member to attend.

If you are not a Member, please register for the International SEMI Standards Program and start making a big contribution to the industry’s progress, complete an application form today!

 

Questions? Contact your local staff coordinator: Click here

3:00 pm - 5:00 pm Off Add to Calendar 2026-07-10 15:00:00 2026-07-10 17:00:00 Flexible Hybrid Electronics Japan TC Chapter Meeting Flexible Hybrid Electronics Japan TC Chapter Meeting Date: Friday, July 10, 2026Time: 3:00 PM - 5:00 PM (JST)via Official Virtual TC Chapter Meeting + SEMI Japan (Hybrid)Please note that the meeting venue might be changed due to room capacity.  If there is any change, we will inform you once it is confirmed. AGENDA Standards Contact Information:Nahoko KogaCoordinator, Standards & EHS, SEMI JapanEmail: [email protected] NOTE:Standards meetings are open to all, but you must be a SEMI Standards Program Member to attend.If you are not a Member, please register for the International SEMI Standards Program and start making a big contribution to the industry’s progress, complete an application form today! Questions? Contact your local staff coordinator: Click here SEMI Japan 26F, xLINK Marunouchi Eiraku Bldg. 1-4-1 Marunouchi, Chiyoda-ku Chiyoda-ku, Tokyo 1000005 Japan SEMI.org [email protected] Asia/Tokyo public Asia/Tokyo
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