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Chip Integration Technology Center (CITC) and Henkel announced today that the organizations have formalized an agreement to collaborate on the development of high-thermal die attach solutions for RF and power electronics. Under the terms of the partnership, Henkel will supply commercialized and developmental pressureless sintering die attach formulations and CITC will provide testing and analysis of the materials within next-generation package designs.

CITC’s Thermal High-Performance Packaging program focuses on thermo-mechanical design strategies and device packaging platforms that integrate low-stress, high-reliability rugged interconnect solutions. As die attach and molding materials are often limiting factors for the optimal operation of RF and power packages, Henkel is the ideal partner or innovation in this application area.

In addition to ongoing work in its state-of-the-art R&D centers, Henkel wants to accelerate time-to-market for its semiconductor packaging materials through strategic relationships across industry, government, and academia. CITC, which collaborates with leading power and RF device packaging companies, provides a unique opportunity to characterize and analyze Henkel’s high-thermal die attach formulations as an enabler for leading-edge device designs.

“Henkel’s pressureless sintering die attach materials are already proven in certain mobile applications,” explained Ramachandran “Ram” Trichur, the company’s Global Market Segment Head, Semiconductor Packaging Materials. “We want to extend that success to other sectors such as automotive, where large, high-power chips are the norm. Our pressureless sintering solutions are unique because they deliver the simple, low-stress processability of conventional die attach adhesives and very high thermal conductivity capabilities. The work at CITC will augment our in-house projects, allowing additional performance and reliability validation.”

The new die attach technology has the potential to enable the replacement of lead (Pb) within RF and power semiconductor devices that incorporate larger die on copper leadframes, allowing the introduction of high operating temperature gallium nitride (GaN) and silicon carbide (SiC) power die technologies. Many of CITC’s partners are actively integrating these new chip structures, making the cooperative project an excellent proving ground for Henkel’s pressureless sintering platform.

“In Henkel, we have found a material innovator that will enable the development of power and RF devices with a holistic approach that leverages the latest in die attach technology,” concluded CITC General Manager, Jeroen van den Brand. “With many major power device manufacturers based in Europe, and in Nijmegen in particular, we view this partnership as vital to satisfying the current and future demands within these important market sectors.”

About CITC
Chip Integration Technology Center (CITC) is a non-profit joint innovation center specializing in heterogeneous integration and advanced chip packaging technology. CITC has created an effective ecosystem in which companies, research and educational institutes work on bridging the gap between academics and industry. CITC’s contribution to the ecosystem is to provide access to innovation, infrastructure and education.
www.citc.org

About Henkel
Henkel operates globally with a well-balanced and diversified portfolio. The company holds leading positions with its three business units in both industrial and consumer businesses thanks to strong brands, innovations and technologies. Henkel Adhesive Technologies is the global leader in the adhesives market – across all industry segments worldwide. In its Laundry & Home Care and Beauty Care businesses, Henkel holds leading positions in many markets and categories around the world. Founded in 1876, Henkel looks back on more than 140 years of success. In 2021, Henkel reported sales of more than 20 billion euros and adjusted operating profit of about 2.7 billion euros. Henkel employs about 53,000 people globally – a passionate and highly diverse team, united by a strong company culture, a common purpose to create sustainable value, and shared values. As a recognized leader in sustainability, Henkel holds top positions in many international indices and rankings. Henkel’s preferred shares are listed in the German stock index DAX.
www.henkel-adhesives.com/electronics

Contact
CITC: Marco Koelink | M +31 6 15 15 66 41 | E [email protected]
Henkel: Ruud de Wit | M +31 6 43 37 21 08 | E [email protected]

Yield Engineering Systems, Inc. (YES), a leading manufacturer of process equipment for semiconductor advanced packaging, life sciences, and “More-than-Moore” applications, today announced that Russ Sanchez has joined the company’s senior leadership team as Vice President of Quality and Managing Director of YES’s new Technology Center in Chandler, Arizona.

Mr. Sanchez, who is based in Chandler, is a seasoned operations and business leader with over two decades of experience driving excellence in the manufacturing operations of semiconductors, microelectronics, printed electronics, antenna technology, and hard drives.

“Russ has an impressive track record of developing technology centers and manufacturing operations to support the growth of high-technology sector customers,” said Rezwan Lateef, President of YES. “His ability to implement quality systems and to partner closely with our customers to realize their next-generation devices will be invaluable as we move into the next phase of our company’s growth.”

Mr. Sanchez came to YES from NthDegree Worldwide Technologies, where he was Vice President of Operations. Before that, he held a variety of roles within Manufacturing and Quality at technology companies including Airgain, NXP Semiconductors, ST Microelectronics/Western Digital Corporation, Hynix Semiconductor of America, and Philips Semiconductors. He holds a Bachelor of Science degree in Business Administration from the University of Phoenix.

About YES
Yield Engineering Systems, Inc. (YES) is a preferred provider of high-tech, cost-effective equipment for enhancing surfaces and materials. The company’s product lines include thermal processing systems, chemical vapor deposition (CVD) systems, and wet process equipment used for the precise surface modification of semiconductor substrates, semiconductor and MEMS devices, LED displays, and biodevices. Customers ranging from startups to Fortune 100 companies rely on YES systems to create and volume-produce innovative products in a wide range of markets. YES is headquartered in Fremont, California, with a growing global presence. For more information, please visit yieldengineering.com.

A long-term, strategic, enterprise-level technology collaboration aims to further increase production efficiencies and reduce costs for Micron and its suppliers.

Cambridge, MA, July 13, 2022 – Today, Athinia™ announced that Micron Technology, Inc. (Nasdaq: MU), a global leader in innovative memory and storage solutions, plans to use the Athinia™ data analytics platform to create a pioneering data collaboration ecosystem that will help lead a continued journey of digital transformation with Micron’s critical suppliers. Athinia™’s state-of-the-art AI-driven quality control methodology will be able to further improve process and device yield, reduce costs and accelerate time to value generation using select data and insights from Micron’s supply chain. Athinia™, launched in December 2021, is a partnership between Merck KGaA, Darmstadt, Germany (DAX:MKGAF) and Palantir Technologies Inc. (NYSE:PLTR).

“The secure architecture provided by Athinia™ will allow Micron and its suppliers to share a single source of real-time data without compromising data ownership, governance, privacy and security,” said Laura Matz, CEO of Athinia™ and Chief Science and Technology Officer of Merck, KGaA, Darmstadt, Germany. “Through data sharing and collaboration, the platform leverages machine learning-driven analytics to solve critical challenges.”

Using Athinia™’s platform, Micron’s suppliers will be able to share their process and manufacturing data as well as key parameters, offering secure collaboration on a much larger population of critical data analytics. Micron and its suppliers can expect to see improvements in yields, shortened qualification times and enhanced quality.

“Micron is leading the industry in adopting the Athinia™ platform for its new ecosystem. Through data collaboration, Athinia™ can help to achieve key objectives for the semiconductor industry such as the improvement of material quality and sustainability, supply chain resilience as well as the acceleration of innovation cycles,” said Kai Beckmann, Member of the Executive Board of Merck KGaA, Darmstadt, Germany and CEO Electronics. “Ultimately, data analytics and collaboration will allow a wide range of benefits to the entire semiconductor industry.”

“The production and delivery of semiconductors is absolutely vital to our collective welfare and security,” said Alexander C. Karp, co-founder and chief executive officer of Palantir Technologies Inc. “We are committed to ensuring that Micron and Athinia™ have the software they need to address the supply chain challenges involved in the distribution of one of the world’s most essential and important products.”

About Athinia Technologies LLC
Data for Pioneers. Athinia™ provides a data analytics platform that brings manufacturers and materials suppliers together to share, aggregate, and analyze data to unlock efficiencies and time to market, while improving quality, supply chain and sustainability. All this without taking ownership of data.

Athinia™ is a partnership between Merck KGaA, Darmstadt, Germany (DAX:MKGAF), and Palantir Technologies Inc. (NYSE:PLTR). Athinia is headquartered in Cambridge, MA, USA. Athinia operates independently from the Electronics business of Merck KGaA, Darmstadt, Germany. More information can be found at www.athinia.com, LinkedIn and Twitter.

About Merck KGaA, Darmstadt, Germany
Merck KGaA, Darmstadt, Germany, a leading science and technology company, operates across healthcare, life science and electronics. Around 60,000 employees work to make a positive difference to millions of people’s lives every day by creating more joyful and sustainable ways to live. From advancing gene editing technologies and discovering unique ways to treat the most challenging diseases to enabling the intelligence of devices – the company is everywhere. In 2021, Merck KGaA, Darmstadt, Germany, generated sales of € 19.7 billion in 66 countries.

The company holds the global rights to the name and trademark “Merck” internationally. The only exceptions are the United States and Canada, where the business sectors of Merck KGaA, Darmstadt, Germany, operate as EMD Serono in healthcare, MilliporeSigma in life science, and EMD Electronics in electronics. Since its founding in 1668, scientific exploration and responsible entrepreneurship have been key to the company’s technological and scientific advances. To this day, the founding family remains the majority owner of the publicly listed company.

About Palantir Technologies Inc.
Foundational software of tomorrow. Delivered today. Additional information is available at https://www.palantir.com.

For more information please contact [email protected]

Sikama International is excited to exhibit at SEMICON West 2022 this July, presenting the innovative Electron Attachment fluxless reflow technology, our upcoming 40th anniversary, and an extensive product line for a broad range of applications providing customers with the highest efficiency, smallest footprint, and most versatility in the industry. Our patented Electron Attachment technology, developed in partnership with AirProducts™, provides unmatched performance offering truly safe and residue-free fluxless reflow. The system is operated with N2 cover gas and an H2/N2 blend with less than 5% hydrogen, ensuring safe operation. The EA UP1200 utilizes an electrically isolated ceramic roller transport mechanism to move the work item from zone-to-zone through the oven. The work item is deoxidized in the EA zones prior to reflow which eliminates the need for flux coating or washing. This technology has shown to be superior to formic acid processes time and time again. In addition, this revolutionary breakthrough offers the safest and lowest cost per wafer yet for the semiconductor packaging industry.

Sikama is looking forward to discussing their full product line at SEMICON West this year. Visit our booth #1447 to learn more and enter to win an iPad Air!

Yield Engineering Systems, Inc. (YES), a leading manufacturer of process equipment for semiconductor advanced packaging, life sciences, and “More-than-Moore” applications, today announced that it has promoted Dan O’Connell to Vice President of Strategic Accounts.

Mr. O’Connell joined YES in November of 2021 as Senior Director of Key Account Management. In his newly expanded role, he will work closely with the company’s Sales, Marketing and Technology teams to nurture strategic customer relationships and ensure YES’s alignment with current and future customer technology requirements.

“Dan’s extensive strategic account experience in the semiconductor industry has contributed to our rapid growth,” said Rezwan Lateef, President of YES. “His proven ability to develop strong industry relationships aimed at enabling technology roadmaps, coupled with his intimate knowledge of Advanced Packaging processes, make Dan a valued addition to our senior leadership team.”

Prior to joining YES, Mr. O’Connell held senior key account management positions of increasing responsibility at ASM Pacific Technology Ltd., Tokyo Electron (TEL), LAM/Novellus, and Ebara. He holds a bachelor’s degree in Chemical Engineering from Worcester Polytechnic Institute.

About YES
Yield Engineering Systems, Inc. (YES) is a preferred provider of high-tech, cost-effective equipment for enhancing surfaces and materials. The company’s product lines include thermal processing systems, chemical vapor deposition (CVD) systems, and wet process equipment used for the precise surface modification of semiconductor substrates, semiconductor and MEMS devices, LED displays, and biodevices. Customers ranging from startups to Fortune 100 companies rely on YES systems to create and volume-produce innovative products in a wide range of markets. YES is headquartered in Fremont, California, with a growing global presence. For more information, please visit yieldengineering.com.

CHANDLER, AZ — Yield Engineering Systems (YES) has leased 123,000 square feet within the Price Corridor in Chandler, Arizona. The facility will support YES in serving the region’s thriving semiconductor industry.

YES develops and manufactures thermal, deposition, and wet process equipment that is used in semiconductor, life sciences, and display manufacturing. The Chandler facility will house a “Technology Center” with R&D functions, cleanroom operations, advanced manufacturing, customer support, and office space.

“Our new Technology Center will provide us with valuable proximity to key customers and vendors, as well as access to the highly skilled workforce that defines Chandler’s business ecosystem,” said Rezwan Lateef, President of YES. “We are grateful to Chandler’s Economic Development team, Greater Phoenix Economic Council, and Arizona Commerce Authority for their assistance with this major milestone in our mission to serve the semiconductor market as a preferred provider.” Mark Donahue is the local YES manager overseeing the project.

The company plans to have approximately 100 highly educated employees based at the Chandler facility, mostly in technology and engineering positions. The multi-million-dollar capital investment to build out the space will enable the development of advanced technology that supports the US semiconductor manufacturing sector.

“YES marks another California-based company drawn to Arizona, highlighting the state’s unmatched business climate,” said Sandra Watson, President and CEO of the Arizona Commerce Authority. “We are grateful to YES for their commitment to Arizona, creating new jobs while strengthening the state’s robust semiconductor supply chain.”

"The Greater Phoenix semiconductor ecosystem has quickly become a top global destination for leading manufacturers like YES," said Chris Camacho, President and CEO of the Greater Phoenix Economic Council. "This multimillion-dollar investment provides high-quality job opportunities for residents, and we look forward to supporting YES in its future growth and successful integration into the market."

“The long-term vision for Price Corridor continues to be realized as we welcome another dynamic and market-leading company to Chandler,“ said Chandler Mayor Kevin Hartke. “We would like to thank YES for their investment and trust in Chandler, as we know there are many options throughout the world for cutting-edge facilities like this.”

Yield Engineering Systems’ Chandler facility adds to the state’s booming semiconductor industry. In the past six months, EMD Electronics announced an expansion of its chemical delivery systems business at a new factory in Chandler, creating over 100 jobs and Edwards announced a new manufacturing facility also in Chandler, creating 200 jobs.

Media Contacts
Victoria Barnes, Yield Engineering Systems, [email protected]
Alyssa Tufts, Arizona Commerce Authority, [email protected]
Stephanie Romero, City of Chandler, [email protected]

About Yield Engineering Systems (YES)
Yield Engineering Systems, Inc. (YES) is a preferred provider of high-tech, cost-effective equipment for enhancing surfaces and materials. The company’s product lines include thermal processing systems, chemical vapor deposition (CVD) systems, and wet process equipment used for the precise surface modification of semiconductor substrates, semiconductor and MEMS devices, LED displays, and biodevices. Customers ranging from startups to Fortune 100 companies rely on YES systems to create and volume-produce innovative products in a wide range of markets. YES is headquartered in Fremont, California, with a growing global presence. For more information, please visit yieldengineering.com.

About the Arizona Commerce Authority
The Arizona Commerce Authority (ACA) is the state's leading economic development organization with a streamlined mission to grow and strengthen Arizona's economy. The ACA uses a three-pronged approach to advance the overall economy: attract, expand, create - attract out-of-state companies to establish operations in Arizona; work with existing companies to expand their business in Arizona and beyond; and help entrepreneurs create new Arizona businesses in targeted industries. For more information, please visit azcommerce.com and follow the ACA on Twitter @azcommerce.

About City of Chandler, Arizona
Chandler, Arizona has built a reputation as a Community of Innovation. Life in Chandler goes beyond a thriving and dynamic business community with progressive entrepreneurship. Known for its rich diversity, the City offers an outstanding quality of life for all generations with great schools and recreational opportunities. Chandler has grown to become the state's fourth largest City with a population of more than 281,000. Chandler has been named one of the nation's Best Places to Find a Job and Best Cities for Women in Tech. The City also is one of the safest communities in the nation and boasts AAA bond ratings from all three national rating agencies, one of only 40 communities to achieve this distinction. For more information, visit the City website, or connect with the City on social media.

Nijmegen, the Netherlands, April 12, 2022

Chip Integration Technology Center (CITC) has signed a Memorandum of Understanding (MoU) with the Electronics & Photonics Innovation Centre (EPIC) in Torbay, UK. The move offers an exciting opportunity for both organizations to collaborate and benefit from the synergies that exist between the two centers.

EPIC is located within a rich cluster of microelectronics and photonics packaging specialists. The center offers businesses access to labs, offices, >€3M of prototyping capability and a classified cleanroom. Dutch-owned EFFECT Photonics have chosen EPIC as their R&D facility and have benefited from extensive local funding to support this growth. Other businesses located within EPIC include Spanish MEMS innovators Nanusens and photonics packaging specialists Bay Photonics.

CITC is a non-profit innovation center specializing in heterogeneous integration and advanced chip packaging technology for semiconductor and photonic applications. It is a place where companies, research and educational institutes work together on bridging the gap between academics and industry and creating a new generation of packages providing smart, safe and rugged housing for chips.

The MoU will see both parties sharing information with their respective businesses to showcase the technical capability and services on offer at both centers. EPIC and CITC will also be exploring opportunities to add each other’s centers to future funding bids with a view of generating additional revenue for both projects.

Both centers have close links to relevant universities and higher education partners therefore encouraging collaboration between academia will also be explored.

EPIC Centre Director, Wayne Loschi, is excited about the partnership: “There are so many clear opportunities for collaboration which will benefit our respective centers and our businesses. We’d love to see our companies working closer with CITC to improve innovation and equally we’d welcome more Dutch companies to join EFFECT Photonics within EPIC”.

CITC Business Development Manager, Marco Koelink, is also looking forward to starting the relationship: “EPIC offers a rich ecosystem in microelectronic and photonic R&D and assembly activities. Collaboration, especially in photonic packaging is crucial to develop high-volume and low-cost solutions for meaningful application areas such as communications, medical and automotive. CITC and EPIC jointly strengthen their value proposition in providing access to innovation, infrastructure and education”.

ESPOO, Finland, 5th of April 2022 – Picosun Atomic Layer Deposition (ALD) has played a vital role in enhancing electro-optical characteristics of micro-LEDs in research done by National Yang Ming Chiao Tung University (NYCU) in Taiwan.

The usage of dielectric films as a passivation material is a popular technique to suppress dangling bonds as well as to improve output power and external quantum efficiency in LEDs. The study conducted at NYCU compared III-Nitride micro-LEDs of different sizes with and without ALD Al2O3 passivation. The results showed external quantum efficiency enhancement of 70% for 5 µm × 5 µm micro-LEDs and 60% for 10 µm ×10 µm micro-LEDs when using ALD Al2O3 passivation.

In addition, to achieve full color display, an inkjet printing to pattern quantum dots automatically has been developed at NYCU. The solution can considerably improve the precision of color pixels and satisfy the high-resolution requirements. Picosun ALD passivation technology was successfully used for preventing the quantum dots from photo-oxidation and degradation. After a 500 hours environmental reliability test, the color gamut remained at excellent level.*

“Micro-LED technology has been the disruptive technology in the next generation displays, and more application areas are emerging its benefits being long lifetime, high power efficiency and high brightness. With quantum dot-based technology micro-LEDs can be used in applications such as virtual and mixed reality as they allow the use of single-color, blue, micro-LED chips resulting in lower manufacturing costs. Our study has proved that ALD passivation plays a key role in upcoming nanometer-scale devices”, says Hao-Chung Kuo, professor at NYCU.

“Picosun’s ALD technology has been production-proven at many prominent LED manufacturers. ALD films’ superior conformality and uniformity, and their ability to ensure reliable, pinhole-free encapsulation even at extremely low film thicknesses is a key benefit. Furthermore, the ALD process can be run at moderate temperatures”, explains Juhana Kostamo, VP, Industrial Business Area of Picosun Group.

*NTSC and Rec. 2020 standards: Color gamut 99% and 90% at 50% humidity and 50℃ temperature
NTSC: Analog television format encoding system developed by National Television Standards Committee
Rec. 2020: International Telecommunication Union Recommended standard defining various aspects of ultra-high-definition television with standard dynamic range and wide color gamut.

More information:
Juhana Kostamo
Vice President, Industrial Business Area, Picosun Group
Tel: +358 50 369 9565
Email: [email protected]
www.picosun.com

About Picosun
Picosun provides the most advanced ALD (Atomic Layer Deposition) thin film coating solutions for global industries. Picosun’s ALD solutions enable technological leap into the future, with turn-key production processes and unmatched, pioneering expertise in the field – dating back to the invention of the technology itself. Today, PICOSUN® ALD equipment are in daily manufacturing use in numerous leading industries around the world. Picosun is based in Finland, with subsidiaries in Germany, USA, Singapore, Japan, South Korea, China mainland and Taiwan, offices in India and France, and a world-wide sales and support network. Visit www.picosun.com.

ESPOO, Finland, 22nd of March 2022 – Picosun Atomic Layer Deposition (ALD) has been demonstrated to be a suitable solution for protection of surfaces exposed to atomic oxygen degradation in Low Earth Orbit. High material survivability is a requirement for objects sent to space as they are faced with a number of degrading circumstances, such as exposure to atomic oxygen.

Researchers at the European Space Agency (ESA) have tested and analysed various material samples provided by Picosun to verify the protective coatings’ suitability for protection against atomic oxygen. This testing was performed in the ESTEC TEC-QEE Laboratory LEOX facility as part of an “open lab” test campaign. These campaigns are intended to provide access to ESA’s unique space environmental test facilities and allow collaboration with ESA’s research fellows, especially for SMEs and institutes new to the space business.

The test simulates the corroding effect of atomic oxygen, for which satellites, including the International Space Station (ISS), are exposed to. The results of the tests, performed on Kapton® HN polyimide film, silicon pieces and PCBs (Printed Circuitry Boards) protected with Picosun ALD coating clearly demonstrated the erosion protection provided by the ALD coating. The demonstrated low temperature (125 °C) film was relatively thin (20 nm) enabling coating of different relevant materials. Decreased thickness of ALD coating is known to withstand more deformation required for flexible materials than thick layers. Also, ALD coating can be applied to a 3D surface with extreme aspect ratios. The analysis performed by ESTEC consisted of mass measurement, Scanning Electron Microscope (SEM) inspection and thermo-optical properties measurement, partially, before and after the test.

“Atomic oxygen erosion has a major impact on the choice of external materials available for spacecrafts and satellites operating in Low Earth Orbit. Picosun ALD showed atomic oxygen resistance in the tests and forms a suitable protective coating for extreme environmental conditions, applicable also for flexible materials”, explains Adrian Tighe, Senior Materials Engineer in the Materials’ Physics and Chemistry Section at ESA.

“ALD is an advanced thin film coating method for ultra-thin, highly uniform and conformal material layers. It has proved to be the coating solution of choice already in production in solutions and innovations operating in extreme environments. Today, they can be found everywhere from deep seabed to Mars”, says Juhana Kostamo, VP, Industrial Business Area of Picosun Group.

More information:
Juhana Kostamo
Vice President, Industrial Business Area, Picosun Group
Tel: +358 50 369 9565
Email: [email protected]
www.picosun.com

About Picosun
Picosun provides the most advanced ALD (Atomic Layer Deposition) thin film coating solutions for global industries. Picosun’s ALD solutions enable technological leap into the future, with turn-key production processes and unmatched, pioneering expertise in the field – dating back to the invention of the technology itself. Today, PICOSUN® ALD equipment are in daily manufacturing use in numerous leading industries around the world. Picosun is based in Finland, with subsidiaries in Germany, USA, Singapore, Japan, South Korea, China mainland and Taiwan, offices in India and France, and a world-wide sales and support network. Visit www.picosun.com.

BENEQ, PRESS RELEASE, March 10, 2022, 14.00 EEST

Beneq, the home of Atomic Layer Deposition (ALD), has introduced BeneqCare, a new modular solution to offer support and maintenance services to organizations that own and operate Beneq ALD equipment.

Beneq leads the market with ALD products for R&D, semiconductor device fabrication, 3D and batch production, ultra-fast spatial ALD (C2R), and roll-to-roll ALD. Today, the company has launched BeneqCare to help customers in the EU, Asia and the USA maximize the value of their ALD tools throughout their equipment’s life cycles.

“We have been investing heavily in widening our service capabilities worldwide. Now, we offer service coverage in all regions. We have also established spare part hubs in every region at Beneq offices,” says Hans Fabritius, Vice President, Life Cycle Services at Beneq.

“BeneqCare simplifies ALD equipment ownership by helping our customers maximize uptime and gain access to the right support at every stage of their tool’s life cycle. We are ready to assist our customers in meeting their productivity requirements –from training personnel in using the equipment to meeting any unscheduled maintenance or spare parts needs,” asserts Fabritius.

BeneqCare provides Beneq customers who operate in the industrial and research sectors with a wide range of service modules to suit their operations, from extended warranty and training services to remote or onsite support.

“Our customers have high expectations for the performance of their Beneq ALD tools. BeneqCare brings them versatile support and service plans that grow with their businesses,” says Fabritius.

Companies and research facilities that have commissioned Beneq ALD equipment can avail of a variety of BeneqCare service modules to suit their unique requirements. Among the BeneqCare modules are technical support services, including remote support via Augmented Reality (AR); spare part services; extended warranties; preventive as well as unscheduled maintenance services; and training.

Learn more about BeneqCare: www.beneq.com/beneqcare/

Further information
Lie Luo, Head of Marketing, [email protected]

About Beneq
Beneq is the home of atomic layer deposition. In 1984, we established the world’s first industrial production using ALD. Today, we lead the market with products for R&D (TFS 200, TFS 500, R2), semiconductor device fabrication (Transform®), 3D and batch production (P400A, P800, P1500), ultra-fast spatial ALD (C2R), and roll-to-roll ALD (Genesis).

Beneq’s unique Development Service simplifies customer adoption and proof-of-concept for new ALD processes, while our Coating Service cuts down time to market by outsourcing state of the art ALD production. Our team of engineers and experts is dedicated to making ALD tools accessible for researchers.