A review of the key objectives of the voltage sag task force will be discussed along with the characteristics of the power quality events that are still causing semiconductor plant process downtime. A new look at the sensitivities in the tooling and process equipment is required to determine any potential adjustments to equipment design, facility design, utility systems or standards to further reduce voltage sag induced losses by the semiconductor industry. This important work will help utilities, semiconductor manufacturers, and tool equipment providers to better understand the tolerance and susceptibility of today’s generation of semiconductor processing tools and then to develop effective strategies to improve uptime and lower product losses due not only to single-phase (Type I) and two-phase (Type II) voltage sag events but for three-phase (Type III) events as well.

A review of voltage sags at a National Grid substation which were produced by two lightning-caused three-phase transmission faults at locations fairly remote to the substation.  This will show the regional effect of transmission level faults on voltage.  The voltage sags will be compared to the existing SEMI-F47 standard and the accepted sag definition.  Additionally, a proposed regional voltage sag study will be considered in light of the changing make-up of the future electric system and the influx of large inverter-based resources.

Co- presenters:
Greg Rieder, GlobalFoundries
Josh Burroughs, VELCO
John Fiske, VELCO

VELCO recently conducted a refurbishment of its STATCOM facility as part of a planned controls system upgrade. The system planning need for this facility is to provide area voltage support during transmission system contingencies. The refurbishment project team recognized the benefits of the STATCOM’s ability to provide voltage support during system faults and specified fault performance requirements in the vendor specifications. This presentation will discuss those performance requirements, review pre and post project upgrade system fault record’s and review project lessons learned. The second half of the presentation will cover utility fault mitigation design strategies for substation and transmission line assets as well as protective relaying techniques to improve power quality

In this presentation we will discuss the importance of having power quality-based metering on both sides of the point of connection and other parts of the distribution system.  Mike will share some examples and stories of how important that can be.

This presentation will summarize efforts to categorize events automatically that exceed SEMI F47 limits, and to determine the source of those disturbances. It will also present recent efforts to analyze the impact of voltage sags automatically on electrical loads. This research has resulted in automatic algorithms to determine which voltage sags caused downtime and which ones did not. Combining all of this information together provides a means to more precisely and effectively diagnose, manage, and mitigate voltage sag disturbances.

Power Quality (PQ) has a long and diverse history dating back to the first power grids in the United States. Impacts and concerns about PQ events have evolved and will continue to evolve as our usage of electricity changes. Recent natural disasters have highlighted the importance of a robust power grid and the changing landscape of power generation presents new PQ challenges. As power consumers, a key element in any PQ strategy is adequate power monitoring. This provides the data that can drive conversation with the utility, discover opportunities in our infrastructure and deliver to our facilities the power quality necessary to sustain our businesses.

This presentation will address power quality perspectives and consideration from the point of a lithographic tools manufacture. Effect of different test methods on the sag immunity, test strategy on systems, sub-systems and components. How to divide a large installation up in to testable units and maintaining performance integrity. 3 phase type III test generator topology and the impact on harmonic emission and immunity in relation to voltage sag immunity.

Disturbances in utility power during semiconductor manufacturing can result in loss of revenue, productivity, production yields, and product quality. Focus on power quality continues to grow as new fabs are built in developing regions, which historically suffer from poor infrastructure. Highly automated fabs have driven a demand for systems that can ride through power glitches without shutting down tools and production lines. This presentation examines how power quality, most typically resulting in voltage sag events, affects semiconductor manufacturing and how industry standards and guidelines for tool immunity to those events affect the design of power supplies.

Based on the initial findings from utility and fab power quality data, the task force is poised to move forward to re-evaluate semiconductor tools against voltage sag additional characteristics that are indicative of measured events still causing downtime. Utilities, semiconductor fabs and equipment OEMs will be invited to actively participate in this effort to obtain the required test data.

James Amano, SEMI

Sponsored By

Agenda & Speaker Bios

Designing next-generation sensor-based systems like those found in wearables, IoT and medical devices poses many challenges. MEMS and sensor design is challenging due to the use of unique materials, fabrication processes and packaging. The age of COVID has necessitated designers working remotely and collaborating over time zones. These factors have led to a gap in design, modeling and simulation capability for creating the billions of interconnected sensors required by future applications.

This webinar discusses MEMS and sensor design challenges and how Digital Twins can be used for facilitating the design of sensor-based products. The talk will describe how Digital Twins may be applied in many phases of the design process from materials design optimization all the way to artificial intelligence algorithm training and virtual product testing. Examples will be given illustrating the use of Digital Twins to create a Digital Factory to increase sensor manufacturing yield and how Digital Twins are being used in sensor-based medical product design.

Agenda & Speaker Bios

Drawing on our experience in successfully executing more than 400 MEMS development projects at AMFitzgerald, we will present a practical overview on navigating the technical and business challenges of MEMS product development. We will describe helpful strategies and tactics discussed in our new book, MEMS Product Development: From Concept to Commercialization, that when practiced diligently, can shorten development timelines, help avoid common pitfalls, and improve the odds of success, especially when resources are limited. We illuminate what it really takes to develop a novel MEMS product so that innovators, designers, entrepreneurs, product managers, investors, and executives may properly prepare their companies to succeed.

Agenda & Speaker Bios

MEMS-based devices are experiencing significant market expansion in consumer, industrial, medical and automotive applications.  With the expansion in the marketplace, there is a growing focus on the importance and unique challenges of MEMS reliability.  This talk will explore MEMS reliability from concept and application-based customer requirements, through design and development processes with a demonstration of meeting industry reliability standards, similar to other semiconductor products.  We also will consider MEMS reliability throughout semiconductor and customer manufacturing processes.  In some cases, it has been found that standard manufacturing handling can result in environments for MEMS devices that are more strenuous than the final application.  Through a better understanding of the factors impacting MEMS reliability, proper alignment of development and industrialization processes can help all of us introduce robust MEMS products into the market.

Paul Trio, Senior Manager, Strategic Initiatives
SEMI

Patrick Martin, Business Development, New Markets and Alliances
Applied Materials

Speaker Bios

David Laube, CTO,
Pentagon Technologies

Speaker Bios

Reed Rosenberg, CTO
Cleanpart USA

Speaker Bios

Victor Chia, International Expert; Director, Surface Contamination Technologies
Air Liquide / Balazs NanoAnalysis

Speaker Bios

Max van den Berg, System Architect, Electronics and Assembly, Global Application Engineering
Festo

Speaker Bios

Biography

Biography

Indoor air quality is essential for human well-being, and the concentration of various gases such as carbon dioxide (CO2) is a good indicator of it. However, today's state of the art CO2 sensor solutions are bulky, limiting their adoption at scale. Thanks to the advancement in technology, the Photo Acoustic Principle (PAS) can be miniaturized and be used to detect gas concentrations at ppm level. A new era of smaller gas sensors will enable the scalability of numerous use-cases that impact our quality of life in indoor spaces, ranging from more efficient ventilation systems to even reducing the risk of COVID-19 transmission. To facilitate the adoption of this new technology, complete system solutions are being requested by device manufacturers to quickly deploy the sensors for optimal interoperation of distributed systems.

Biography

Recent progress in computing hardware, machine learning algorithms and networks and availability of large datasets for model training have created a strong momentum in development and wide deployment of game changing AI applications. Intelligent devices with human-like senses have enabled a variety of new use cases and applications transforming the way we interact with each other and our surroundings. Dedicated hardware becomes tiny and very energy efficient (with mW or less power consumption), algorithms and models - smaller (down to 10s of kB of memory requirements), software – lighter down to deployment on deeply embedded platforms. This enormous technology innovative wave and fast growing tinyML ecosystem create a strong momentum towards new applications and business opportunities. On the other side of the physical world spectrum, MEMS and other sensors are becoming more sophisticated, sense a variety of modalities (vision, sound, environmental, motion/vibrations, etc.) and are being deployed in billions every day. The “collision” of these two powerful driving forces, tinyML and tiny smart sensors, establishes a unique opportunity for edge computing and on-device analytics that will be happening everywhere and anytime. As an end result, this will create a better, healthier and more sustainable environment for all.

This presentation will review the state-of-the-art of tinyML (including hardware, algorithmic and software framework aspects), describe some practical examples of technologies and products pioneered at Qualcomm and else, and discusses near-term trends and opportunities, as well as call to actions.

Biography

Berkeley Lights is a leading Digital Cell Biology company focused on enabling and accelerating the rapid development and commercialization of biotherapeutics and other cell-based products. The Berkeley Lights Platform captures deep phenotypic, functional, and genotypic information for thousands of single cells in parallel and can also deliver the live biology customers desire in the form of the best cells. This is a new way to capture and interpret the qualitative language of biology and translate it into single-cell specific digital information, referred to as Digital Cell Biology. We currently focus on enabling the large and rapidly growing markets of antibody therapeutics, cell therapy and synthetic biology with our platform. Our goal is to establish the Berkeley Lights Platform as the standard throughout the cell-based product value chain by increasing the probability of successful product development for our customers.

Since early February when COVID-19 became more prevalent, Berkeley Lights Inc. prioritized helping its customers who are actively involved in finding a cure for COVID-19. With the Berkeley Lights Platform, our customers can execute our workflows at early time points, to provide one of the fastest paths to functionally validated antibodies. Although the spike protein isn’t a particularly hard target to find antibodies for, sometimes being fast and finding the best cells matters.

The time is now to think ahead and invest in solutions, putting the technology and systems in place that are ready to fight the next virus wherever it appears before it becomes a pandemic. We believe that the speed and ability to respond to emerging pathogens can be dramatically improved by deploying our solution globally, to recover antibodies directly from recovering patients from the initial outbreak for rapid development into therapeutics or to accelerate the development of vaccines.

Biography

Biography

Due to the recent COVID-19 outbreak, Elevated Body Temperature (EBT) screening is being deployed as a tool and help limit the spread of the disease. To be effective and allow wide-scale use, EBT screening equipment requires high accuracy and precision as well as low system and operation cost. The low cost and high performance of microbolometer cameras make them an obvious choice for EBT systems. This technology is expected to have long term use, even after COVID-19, and will expand into new markets. Opportunities in commercial, residential and personal device application will be discussed, along with the anticipated trends for higher volume, lower cost and increased integration.

Biography

This presentation will review DNA sequencing and Genapsys CMOS electrical solution.

Biography

COVID-19 has brought the limitations of life science to solve problems into a global focus. Cardea is a Tech+Bio Infrastructure company that mends the missing link between biology and technology by creating a direct electronic connection between molecular signals and computers. This is a fundamental paradigm shift in life science as, until now, it’s mostly been based on optical systems that produces one-dimensional data-sets. With the biocompatible nanomaterial graphene, Cardea mass-produces proprietary Biology-gated Transistors, or Cardean Transistors™, that, when combined with versatile hardware and cloud-based computational power (such as machine learning and artificial intelligence), can provide virtually live insight to life and biology. Together with their Innovation Partners, Cardea is building a new generation of “Powered by Cardea” products and applications that will enable humanity to finally gain control over complex problems of health, environmental safety, food security and much more.

Biography

Biography

Sensory motion tracking enabled by smart sensors is at the forefront of our fourth industrial age, pushing the boundaries of artificial intelligence and machine learning further than we could have imagined. Already widely used in animation productions, elite athletes now use motion sensors to enhance their performance and sports enthusiasts to improve their tennis serve or golf swing. In healthcare, motion tracking is helping people to monitor their heart rates, sleep patterns and fitness levels. Motion tracking technology is opening the possibilities for entrepreneurs and innovators to transform their own industries. Our physical, biological and technological worlds are merging like never before, and the potential of sensory motion capture is only restricted by the extent of our imagination.

Biography

Individualized digital health monitors benefit wearers with chronic illness or those at risk of acute infectious diseases with rapid onsets. As technology leaders are making vital sign sensors convenient and affordable for mobile and fitness applications, US Centers for Medicaid and Medicare Services and other healthcare policy makers, have adopted reimbursement policies to encourage remote patient monitoring practices. The global pandemic has only further accelerated these initiatives.

Even with these economic tailwinds, addressing novel use cases can face many hurdles. Conventional medical diagnoses rely, in part, on a few test results taken under sterile clinical settings. Getting ground truth on subjects in natural settings, finding relevant longitudinal clinical studies, collecting large datasets congruent with actual form factors and workflows, and correlating all that back to clinical diagnoses often require innovative solutions.

This presentation illustrates this using two case studies of individualized, continuous health monitoring solutions. It provides an overview of their use cases and hurdles to provide a discussion on how technical communities could help to accelerate more innovation.

Biography

Biography

2020 has been a challenging year in many aspects and the consequences of the pandemic are expected to further impact the upcoming years, possibly even decade. Also the MEMS industry is experiencing multiple challenges: Firstly, development costs for new generations of MEMS sensors are increasing and hence wider, diverse markets are required to compensate the growing development expenses and to lower the risks. Secondly, a sole focus on hardware is not sufficient anymore. End-device manufacturers more and more frequently want to differentiate themselves by new features and functionalities which have to be enabled by software to remain cost-efficient. Such software competence was traditionally not available in most hardware-focused companies, creating a need to develop new competencies in our organizations. Finally, customers increasingly demand complete solutions instead of single components. Plug-and-play solutions such as development boards and reference designs created with partners are increasingly expected by our customers and partners. All along, digital tools and services need to be offered to reach a growing, increasingly diverse target group to offer a positive user experience.

In his talk, Jens Fabrowsky, Executive Vice President Automotive Electronics at Bosch, will explore the opportunities and challenges of the MEMS industry in the upcoming ten years and provide an outlook on possible solutions based on specific examples. Jens will also give a call to action for the industry on how it can embrace and contribute to the changes.

Biography

Biography

Biography

Ensuring safe social distancing in the workplace is one piece of the puzzle to enable people to work safely in the age of COVID-19. One means of ensuring safe social distancing is via wearables that continuously measure the distance between personnel. While providers of existing tracking technology based on Bluetooth low-energy (BLE) or RFID trackers are attempting to position their solutions for social distancing, finer accuracy requirements narrow down the options to ultrasonic and ultrawideband (UWB), with ultrasonic delivering a greater accuracy of < 1 cm versus < 10 cm for UWB. Relative to UWB, MEMS ultrasonic time-of-flight (ToF) range sensors consume much less power: a Chirp ToF solution can operate at 1% of the power required by UWB chips, enabling a coin-cell tag to operate for an entire workweek. In addition, electromagnetic range sensing solutions such as UWB have a critical failing for social distancing solutions: UWB cannot natively determine whether people are separated by a barrier, such as a door, window, wall, or partition. Because ultrasound propagates through air, only ultrasonic sensing can natively determine whether people are safely separated in the workplace. In this presentation, I will describe how tracking solution-providers are using Chirp’s MEMS ultrasonic ToF range sensors to create social-distancing solutions that respect an individual’s privacy but also permit an automated contact tracing capability to notify affected individuals and their emergency contact or direct management, providing a cost-effective way to minimize workforce disruption and stop chains of infection from propagating.

Biography

In this presentation we will introduce the technology behind Butterfly iQ, the worlds first and only handheld ultrasound system. Enabled by Butterfly's Transducer-on-CMOS, iQ is 10x less expensive than any comparable traditional ultrasound and provides less expert users witha connected and easy-to-use diagnostic solution.

Biography

In this presentation, we will explore how ultrasound and UltraSense’ TouchPoint technology can be used to replace mechanical buttons and why certain markets are ready or need to transform rapidly from mechanical to seamless virtual buttons.

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