Registration
Conference Pricing
Member: $1,555
Non-Member: $1,865
Krish Raghunath
Program Manager, Programs & Committees, SEMI
[email protected]
Travel
Hyatt Regency Phoenix—Book your room!
122 North Second Street, Phoenix, Arizona, 85004
Service and Benefits
- $219/night
- No resort fee
- Standard high-speed wireless Internet access
- Shuttle Transportation (Phoenix Premium Outlets, Aji Spa & Whirlwind Golf Club)
Thank You to Our ESGS 2026 Sponsors
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Become a Sponsor
View the 2026 ESGS Sponsorship Brochure
Sponsoring will associate your company with the industry's most respected senior executives. Sponsorship opportunities can be tailored to meet your specific branding and marketing objectives.
Contact Tim Janes at +1.720.939.4992 or [email protected]
Exhibitor Floorplan | View the Companies You Will Meet
The Electronic Specialty Gases & Systems Conference (ESGS) provides a forum of engagement and learning around the market, technology trends, and market drivers for electronic gases. The conference includes sections focusing on developments in the bulk, rare and specialty gas markets that are critical to the continued growth of the electronics industry.
The conference is designed for executives, buyers, product managers, and strategic planners from the electronic gases value chain including end-users, producers, and equipment suppliers. The conference features knowledgeable experts in the industry, who understand the key developments and challenges unique to this market.
Hyatt Regency Phoenix
122 N 2nd St
Phoenix, AZ 85004
United States
TUESDAY, NOVEMBER 10, 2026
Breakfast
Opening Day Remarks
Opening Keynote
Featured Presentation
U.S. Semiconductor Public Policy Update
Measuring the Future: CHIPS Metrology Program Updates
Networking Break
Gas Systems Challenges as Moore’s Law Advances
Lunch
Vapor Phase Materials and Electronics Specialty Gases
Opening Session Remarks
Large Grain Molybdenum Deposition
Solid Precursor Delivery: Challenges and Solutions
Tungsten Powder Supply Chain Issues & Impacts
Networking Break
Contamination Control and Yield
Opening Session Remarks
IRDS Update
Defining and Solving Contamination Challenges of Hydrogen Halides
Deuterium Supply Chain & Purity Considerations
Closing Remarks
WEDNESDAY, NOVEMBER 11, 2026
Breakfast
New Technology Advancements
Opening Day Remarks
Opening Session Remarks
Isotropic Dry-Cleaning Technology for Next-Generation Semiconductor Devices
Tailoring New Etch Gases to Challenging Applications
Break
Sealing in Advanced Semiconductor Gas Delivery: Permeation, Contamination, and Reliability Tradeoffs
AI Applications in Automated Gas Handling/Cylinder Changeout
Point of Use NANOCHEM Purifiers for Ultra-High Purity Inert Purge Gas Delivery in EUV Lithography Tools
Facilities and Infrastructure
Lunch
Opening Session Remarks
Advancing Sustainable Semiconductor Innovation: NY Creates' High NA EUV Lithography Center
Industry Collaboration, Roadmaps, and Pre-Competitive Action in Sub Fab
Integrated Molecule Delivery Solutions for Semiconductor Manufacturing
Break
Sustainability
Opening Session Remarks
Abatement Update / Catalytic
Bridging the Measurement Gap: Enhancing Sustainability Compliance via Emissions Monitoring
Closing Remarks
Networking & Poster Session Reception
THURSDAY, NOVEMBER 12, 2026
Breakfast
Gas Metrology
Opening Session Remarks
Stability of MoCl5 in Heated Canisters and During Delivery
Fast Impurity Measurements in Electronic-Grade Rare Gases
Real-Time PPT Impurity Detection in Ultra-High Purity Gases for Semiconductor Fabs
Closing Remarks
Market Review and Updates
Opening Session Remarks
Does the Global Economy Matter for Semiconductors?
SEMI Fab Capacity and Equipment Update
Helium Market Overview, Outlook & Trends
Specialty Gas Market Update
Driving Innovation Across the Electronic Gases Ecosystem
ESGS 2026 will take place at a new venue—the Hyatt Regency Phoenix—from November 10–12, building on the overwhelming success and momentum of last year’s event.
Off Add to Calendar 2026-11-10 00:00:00 2026-11-12 00:00:00 ESGS 2026—Electronic Specialty Gases & Systems Conference Driving Innovation Across the Electronic Gases EcosystemESGS 2026 will take place at a new venue—the Hyatt Regency Phoenix—from November 10–12, building on the overwhelming success and momentum of last year’s event. Hyatt Regency Phoenix 122 N 2nd St Phoenix, AZ 85004 United States SEMI.org [email protected] America/Phoenix public America/Phoenix 1Share on LinkedIn
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SEMI U Course
Monday, November 9, 2025 | 8:00am-5:00pm
Enhance your ESGS Conference experience with this exclusive SEMI U training course led by Jean-Pierre (JP) Deluca, a leak detection expert with more than 40 years of experience across the semiconductor, aerospace, automotive, medical, pharmaceutical, and refrigeration industries.
Fundamentals of Vacuum Technology and Helium Leak Detection is a comprehensive course designed to provide attendees with a practical understanding of vacuum systems, leak formation, leak measurement, and helium leak detection techniques used in semiconductor, aerospace, research, manufacturing, and high-technology industries. Participants will learn the principles of vacuum generation, gas flow, outgassing, permeation, conductance, pumping technologies, and helium mass spectrometer leak detection. The course also covers leak rate determination, industry standards, troubleshooting techniques, and real-world leak detection applications to help improve equipment reliability, product quality, and process performance.
What Attendees Will Learn
Upon completion of this course, attendees will be able to:
- Define leaks, leak flow, virtual leaks, and their impact on vacuum systems and product quality.
- Understand contaminant sizes, equivalent leak hole sizes, and leak-related defects.
- Explain vacuum fundamentals, including pressure measurement, gas density, vacuum scales, and temperature effects.
- Identify sources of gas loads, outgassing, permeation, and virtual leaks, and apply methods to minimize their impact.
- Understand vacuum flow regimes, conductance, and how they influence pumping performance.
- Compare rough vacuum and high-vacuum pumping technologies, including rotary vane, scroll, Roots, and turbomolecular pumps.
- Understand the operation and capabilities of helium mass spectrometer leak detectors.
- Explain helium properties, sources, applications, and why helium is the preferred tracer gas for leak testing.
- Select and apply appropriate helium leak testing methods, including sniffing, accumulation, hard vacuum, bombing, and split-flow techniques.
- Interpret leak detector response times, background helium levels, and published leak detector specifications.
- Establish leak rate acceptance criteria and understand common leak rate units and conversions.
- Troubleshoot high helium background conditions and improve leak detection sensitivity.
- Apply leak detection principles to real-world vacuum systems and large vacuum chamber testing applications.
Who Should Attend
This course is intended for:
- Semiconductor equipment engineers and technicians
- Vacuum system engineers and maintenance personnel
- Manufacturing, process, and reliability engineers
- Field service engineers and installation specialists
- Quality, test, and validation engineers
- Research and development personnel
- Aerospace and defense manufacturing personnel
- Leak detection and vacuum equipment users
- Facilities and equipment support personnel
- Individuals new to vacuum technology or helium leak detection who require a practical, industry-focused foundation
Recommended Experience: No prior leak detection experience is required. A basic understanding of manufacturing, engineering, or technical equipment operation is helpful but not necessary.
Already attending the ESGS Conference? Add this SEMI U course to your registration for just $695 and gain valuable technical knowledge from one of the industry's most experienced instructors.
Interested in the course only? You can register for the SEMI U Course Only Pass for $795, making this training accessible even if you are not attending the full ESGS Conference.
