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Course Description
By the end of this course, participants will understand the scope of SubFAB and its critical role within the semiconductor manufacturing ecosystem, tracing its evolution and recognizing new trends. They will be able to identify and describe the core SubFAB systems and interpret typical facility layouts and equipment installation specifics. Learners will assess the environmental, and sustainability impacts of modern SubFABs. They will map a standard SubFAB organizational chart, typical roles, and responsibilities, and simulate incident-response workflows to reinforce operational readiness. Participants will be exposed to preventive maintenance and safety best practices to ensure reliability and compliance with regulations.
Who Should Attend
This course is designed for engineers and technicians in semiconductor manufacturing, equipment suppliers/OEM on-site service personnel, IE and MEP designers.
Course Outline
- Introduction & Course Logistics
- Welcome, introductions, and platform quick start
- Learning objectives and course flow
- Module 1: SubFAB Fundamentals
- Definition & scope of SubFAB
- Historical evolution (from early fabs to today)
- Core equipment & support systems overview
- Typical facility layouts and installation configurations
- Module 2: Environmental & Sustainability Considerations
- Key environmental impacts (emissions, water/chemical use)
- Gas abatement and PFAS management fundamentals
- Metrics & case studies in sustainable SubFAB operation
- Module 3: Organizational & Operational Structures
- SubFAB org charts and stakeholder roles
- Operational workflows (from tool install to maintenance)
- Incident-response and escalation paths (role-play)
- Module 4: Safety, Maintenance, & Reliability
- Preventine- maintenance best practices
- Safety protocols and hazard identification
- Reliability metrics and continuous improvement loops
- Module 5: Emerging Trends & Innovations
- Automation, digital twins, and Industry 4.0 in SubFAB
- Advanced materials handling and process integration
- Open discussion: Where SubFAB will go next
- Wrap-Up & Next Steps
- Final Q&A and feedback collection
- Certification requirements and further resources
- Suggested post-course readings and SEMI standard references
Instructor

Ilya Zabelinksy
Important Information
Note that only the person who registered will receive a certificate of completion. This virtual training will not be recorded. Attendees must be present to access the course knowledge.
Can't find the training link day of? After you register, you will receive the link to the live training via the email address you provided. In addition, you will receive email reminders about 24 hours in advance and an hour before with the same link. Please keep these emails on hand to access the training on time. If you do not see any confirmation emails, please check your junk/spam folders before contacting SEMI U for support.
United Kingdom
SEMI USubFAB 101: Foundations of Semiconductor Support Facilities is a 4-hour course that covers SubFAB basics and its critical role within the semiconductor manufacturing ecosystem, including its evolution and new trends.
- Jerusalem: 10 am - 2 pm
- India: 12:30 pm - 4:30pm
- England: 8 am -12 pm
Pricing
- Members: $349
- Non-Members: $399
* For group orders with 10+ attendees, and for Students/Veterans, discounted pricing, please contact [email protected].
9:00 am - 1:00 pm Off Add to Calendar 2026-07-15 09:00:00 2026-07-15 13:00:00 SubFAB 101: Foundations of Semiconductor Support Facilities (Americas/EU) SubFAB 101: Foundations of Semiconductor Support Facilities is a 4-hour course that covers SubFAB basics and its critical role within the semiconductor manufacturing ecosystem, including its evolution and new trends. Jerusalem: 10 am - 2 pm India: 12:30 pm - 4:30pmEngland: 8 am -12 pm PricingMembers: $349Non-Members: $399* For group orders with 10+ attendees, and for Students/Veterans, discounted pricing, please contact [email protected]. United Kingdom SEMI.org [email protected] Europe/Brussels public Europe/Brussels Register Now

