Environment, Health & Safety

PFAS Working Group

Perfluoroalkyl and Polyfluoro Alkyl Substances (PFAS) are vital to the industry due to their unique and unparalleled properties that enable them to be used in the demanding conditions of semiconductor manufacturing. Lack of continued access to PFAS could lead to an inability to produce and supply the world with semiconductor manufacturing technology.

REACH

The European Union established a chemical control regulation named Registration Evaluation, Authorisation and Restriction of Chemicals (REACH). The regulation requires companies to identify and manage risks linked to the substances they manufacture. If such chemicals have health or environmental risks, the chemicals can be restricted from being present in the European Union.

EU Machinery Directive

The European Machinery Directive promotes the free movement of machinery within the European Single market and guarantees a high level of protection for EU workers and citizens. The Directive is currently under revision, with a Regulation on machinery products proposed to replace the Directive. 

ROHS Regulations

The European Union Restriction of Hazardous Substances (RoHS) Directive lays down rules on the restriction of the use of hazardous substances in electrical and electronic equipment (EEE). Time-limited exemptions are in place for certain applications. Although a majority of semiconductor manufacturing and related equipment (including facility equipment used in semiconductor manufacturing factories) are outside the scope of the RoHS Directive because of the large-scale stationary industry tools (LSSIT) or large-scale fixed installations (LSFI) exclusion, many critical components used in semiconductor manufacturing and related equipment consist of various in-scope EEE. 

The renewal processes of the time-limited application specific exemptions require input from the relevant stakeholders. Therefore, SEMI also needs to respond to protect some of these exemptions. It should also be noted that a revision of the RoHS Directive is on  its way, which would require full attention of the RoHS Working Group. 

TSCA

The US Environmental Protection Agency’s Toxic Substances Control Act (TSCA)​ is applicable to a broad number of industries in the US, including semiconductors. These regulations will affect a company’s ability to import and sell components in the US.

SEMI Safety Standards - S2

The SEMI EHS Standards Committee develops Standards that promote safe and environmentally responsible design, selection, facilitization, operation, maintenance, service, decommissioning, and disposition of equipment and materials.

Semiconductor Climate Consortium

The Semiconductor Climate Consortium has formed to align the semiconductor value chain on climate related agreements and accords driving the 1.5 degree C pathway and drive collaboration, transparency and ambition.