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SEMI EHS has a working group addressing member compliance issues related to the EU RoHS regulation. The group has worked on addressing RoHS regulatory exclusions for "Large-Scale Stationary Industrial Tools" (LSIT or LSSIT). As part of the on-going activities for this, the group produced a Whitepaper recommending size and weight metrics for addressing "large-scale." The White Paper is for use by SEMI members and their partners to help them understand how their products may fit under the exclusion.

For more information, contact Olivier Corvez at SEMI at 



March, 2013  Recommending Size and Weight Metrics to be Considered when Identifying Equipment as “Large-scale” for EU RoHS2

October, 2018 SEMI Shares Industry Feedback on RoHS Review Roadmap with European Commission