PFAS is an acronym used to describe a large family of substances that contain fluorine and carbon. The exact meaning of “PFAS” varies depending on the context of discussion, but PFAS have recently risen to a high level of concern across the globe due to their health impacts, persistence in the environment and pervasive use in society.

 PFAS also enable nearly every aspect of the Semiconductor value chain, from simple electronic components used in production equipment, to specialized fluid and gas management systems in factories to carefully crafted process chemicals essential to photolithography. 

Nearly every company in the semiconductor industry relies on some aspect of PFAS. The PFAS “Explainer” is intended to provide companies in the semiconductor manufacturing supply chain with some basic, and some detailed, information about PFAS. It focuses on components that are incorporated into semiconductor manufacturing equipment (sometimes known as “tools” in the semiconductor industry) and the equipment that is built into semiconductor manufacturing facilities but many of its concepts and information are applicable to critical industry chemicals.  

The PFAS concern has an impact on the triple bottom line: People, Planet, and Profit.  Beyond the health (people) and environmental (planet) concerns the ongoing debate and regulations on PFAS will likely have a direct impact on the profitability of your company.  Investigating and understanding where PFAS are present in your products and supply chain is critical in preventing or minimizing disruptions to your business.  

Download a copy of the SEMI PFAS Explainer

The PFAS Explainer was developed by the SEMI PFAS working group and is maintained under their oversight. The working group aims for it to be as clear and concise as possible, while also explaining some of the important, but finer points in the PFAS discussion with sufficient detail. 

The working group plans to modify the PFAS Explainer from time to time as needed. If you have any concerns about the document or would like to offer some additional ideas for it, please contact [email protected].
 

Please note:  SEMI makes no warranties or representation to the accuracy or usefulness of the information contained on this webpage. Accuracy is solely the responsibility of the user.  Users are cautioned to refer to other relevant literature of the subject matter herein.  This information is subject to change without notice. This "explainer" was developed by members of the SEMI PFAS Working Group. Please send suggestions for improvement to [email protected]