Advancing Thermal Scanning Probe Lithography

Zurich, Switzerland — Following the successful introduction of the modular NanoFrazor nanolithography system in 2024, Heidelberg Instruments is proud to announce the installation of the newest NanoFrazor. The system is equipped with the recent modules, enabling parallelized thermal scanning probe lithography (t-SPL). The beta site is hosted by the research partner EPFL, the Swiss Federal Institute of Technology in Lausanne, Switzerland. The installation marks a significant step forward in joint efforts to bring next-generation nanofabrication technologies into practice, promising advances in nanoscale research and applications.

Designed for high-resolution lithography down to 20 nm, with application flexibility and increased throughput, the system features parallelized t-SPL with ten heated tips writing simultaneously, Direct Laser Sublimation (DLS), and advanced automation. “Parallelizing t-SPL was the logical next step in advancing thermal nanolithography. The implementation, however, was far from trivial.” states Dr. Emine Cagin, CTO of Heidelberg Instruments Nano AG. “Parallelization required a decade of development, culminating in a new and scalable framework for electronics and software that now powers the new NanoFrazor.”

The new module, named the Decapede, increases the throughput up to tenfold, without compromising on high-resolution capabilities. “With improved throughput, we are considering upscaling grayscale nano surfaces that enable deterministic and localized strain engineering of 2D materials from chip-level to wafer-scale for potential industrial integration”, says Berke Erbas, Postdoctoral Researcher in the Microsystems Laboratory at EPFL. “We also aim to upscale grayscale nanoimprint lithography stamps fabricated through t-SPL and dry-etching approaches.”

EPFL — A Hub for Innovation
EPFL’s expertise in t-SPL and broad nanofabrication capabilities make it an ideal beta site and mark the continuation of a long-standing, trusted partnership with Heidelberg Instruments. The consortium of research groups involved brings together a combination of deep knowledge in t-SPL and diverse nanofabrication techniques, along with fresh ideas and challenging applications. The generous commitment to providing continuous feedback will help Heidelberg Instruments further validate the system performance and refine user interfaces.

From Nanoelectronics to Quantum Devices, a Look Ahead
The EPFL beta site is not only a testing and validation site for the system’s capabilities but first and foremost a catalyst for innovation in nanolithography. Applications at the EPFL beta site span nanoelectronics, plasmonics, quantum devices, and bio-nano-sensors. Jürgen Brugger, Professor in Microengineering and Materials Science at EPFL, highlights: “t-SPL has proven to be an excellent tool for educating junior researchers due to its capabilities for fast prototyping with a low threshold to create nano-patterns in short time scales. We are excited to expand towards parallel writing capabilities.” For example, the Laboratory of Nanoscience for Energy Technologies (LNET), Professor Giulia Tagliabue, is exploring the use of its gray-scale functionalities for realizing advanced metasurfaces that can strongly confine light at nanoscale dimensions for energy conversion and probing of interfacial processes.

We are looking forward to seeing how the beta site will accelerate discoveries and enable new possibilities in nanoscale science, both in research and educational use of the NanoFrazor system.

Further information: https://heidelberg-instruments.com/product/nanofrazor/

• Read more about Heidelberg Instruments — Beta Site Installation of NanoFrazor with Parallelization Capabilities at EPFL

High-tech systems developer Demcon has established a local presence in North America by opening a new office in San Jose, California. The Dutch contract engineering company brings decades of expertise and know-how in hardware research, design and development to the heart of Silicon Valley, where software and AI are the main focus areas.

Hardware-centric development and engineering

The brand-new office will function as a local point of contact for US customers, delivering direct project management and system architecting support. The full Demcon engineering power in the Netherlands is available for early-phase concept development, engineering, prototyping and testing, with manufacturing as an optional service. Demcon has over 30 years of experience in systems engineering for high-tech solutions, in amongst others semiconductors, photonics and quantum technology.

Demcon’s capabilities range from fundamental and essential domains such as mechanics, mechatronics, software and electronics, to crucial additional competences in multiphysics simulation, thermal management, optics & vision, and data science & AI. "With our extensive group of engineers and specialists, we have the critical mass necessary to uphold an extremely high level in all these domains", says Amir Bar, general manager at Demcon USA. "For every customer project and every challenge they bring, we pick and choose the best possible team to find the optimal solution for our customers."

As a decades-long engineering professional in the American semiconductor industry, with leading roles at Applied Materials and KLA Tencor, Bar knows firsthand what Demcon has to offer: "With the focus on software and AI, there is a shortage in hardware engineers in the US. The Netherlands, home to some of the world’s leading hardware-centric semiconductor companies, have a much stronger base in that area. Through Demcon’s US office, American customers can tap into that potential."

Expanding horizons in the American market
For Demcon, the expansion in North America is very much a strategic decision. The company is already active in the US market for 20 years. "But we see ample room for growth", says Eric Slakhorst, Vice President Demcon high-tech systems. "The country is home to many potential large customers that prefer to keep their research and development close by. Often, they are challenged by time-to-market demands and capacity constraints. We set ourselves apart by offering the possibility to outsource part of their R&D, without the obligation to give away IP, and by our fast development cycle, from feasibility study to functional prototype in 12-15 months."

As our engineers are deeply embedded in the research process with our customers, proximity is key. "To ensure an optimal result, we need to be close, as regular face-to-face interaction is vital," says Slakhorst. "That’s why we are building an engineering hub in the US to support local partners with project management and system architecting. Detailed engineering can take place in the Netherlands."

• Read more about Demcon high-tech systems extends US presence with local office

Ball Wave Inc., a pioneer in advanced chemical sensing technology, today announced that its FT-450WT online trace moisture analyzer has received full certification from Taiwan's most advanced semiconductor manufacturer following rigorous validation testing. This milestone validates Ball Wave's proprietary ball SAW sensor technology and establishes the company as a strategic supplier in the critical semiconductor manufacturing equipment sector. The certification comes at a pivotal time as semiconductor manufacturers worldwide face increasing pressure to improve yield rates and reduce contamination in advanced node production. Ball Wave's technology addresses a critical pain point in fab operations, where even parts-per-billion levels of moisture can compromise chip quality and manufacturing efficiency. The successful certification demonstrates the analyzer's reliability in the most demanding production environments and opens significant commercial opportunities for specialty gas manufacturers who are the key players plagued with trace moisture contamination. 

Ball Wave President Shingo Akao stated, "This certification validates our core technology platform and demonstrates our ability to meet the stringent requirements of the world's most sophisticated semiconductor fabs to help them avoid unplanned shutdowns due to trace moisture contamination. Ball Wave's patented ball SAW sensor represents a fundamental breakthrough in trace moisture detection, offering speed and precision unmatched by legacy technologies. With proven performance in production environments and a robust IP portfolio, we are well-positioned to capture significant market share in the rapidly growing semiconductor manufacturing equipment sector, which is projected to exceed $156 billion by 2027¹."

Business Impact: For advanced semiconductor fabs operating at 3nm and below, moisture contamination can cost $5-10 million per incident² in scrapped wafers and production delays. Industry data shows that facilities with inadequate moisture monitoring experience maintenance ratios below 1.0, where unplanned repairs consume over 50% of total downtime. Ball Wave's real-time detection capability enables preventive action before contamination reaches critical levels, helping customers avoid these costly failures and maintain the operational stability (M-ratio >4.0) essential for profitable advanced node production. This value proposition has resonated strongly with leading fabs, creating a clear path to rapid customer adoption.

About the FT-450WT and Ball Wave's Technology Platform: The FalconTrace ultra-trace moisture meter uses a proprietary ball SAW sensor to quantitatively measure the trace amounts of water molecules contained in industrial gases and natural gases. Its extremely fast response time allows for real-time monitoring of changes in moisture content, and it is also capable of measuring both moisture content and background gas composition. It can accurately measure moisture concentrations in gases down to the 1 ppbv (parts per billion) level, representing 10-100x improvement over competing technologies. The FT-450WT is a high-end model that maintains its fast response time while prioritizing integration into equipment, and the separation of the sensor unit and main body allows for greater layout flexibility in fab retrofits and new tool installations. 

Ball Wave's technology platform extends beyond moisture analysis to a broader range of chemical sensing applications, creating multiple revenue streams and cross-selling opportunities within semiconductor fabs and adjacent industries, including pharmaceuticals, aerospace, and industrial gases. 

Market Opportunity and Strategic Position: Ball Wave has established relationships with leading semiconductor manufacturers in Taiwan, with active discussions underway in South Korea, Japan, and the United States 

• The company's technology addresses a growing market as advanced node production (5nm and below) requires increasingly stringent contamination control
• Ball Wave holds key patents in ball SAW sensor technology with additional applications pending in major semiconductor manufacturing regions
• The company's university origins provide access to cutting-edge MEMS research and ongoing innovation pipeline

About Ball Wave Inc.: Ball Wave Inc. is a technology company specializing in advanced chemical sensing solutions for critical industrial applications. Founded as a spin-out from Tohoku University, a global center of excellence in MEMS technology, Ball Wave leverages proprietary ball SAW sensor technology to deliver breakthrough performance in trace contamination detection. The company serves semiconductor manufacturers, industrial gas suppliers, and other industries requiring ultra-precise gas analysis. Ball Wave is headquartered in Sendai, Japan.

For inquiries regarding this matter, please contact: Ball Wave Inc., Corporate Strategy Division, Yusuke Tsukahara 

[email protected] 

Telephone: +81-3-5979-2357 

https://www.ballwave.jp/ 

1. https://www.semi.org/en/semi-press-release/global-semiconductor-equipment-sales-projected-to-reach-a-record-of-156-billion-dollars-in-2027-semi-reports 

2. https://www.mckinsey.com/industries/semiconductors/our-insights/need-to-boost-semiconductor-fab-efficiency-look-to-maintenance

• Read more about Ball Wave Receives Certification from Taiwan's Leading Semiconductor Manufacturer for Revolutionary PPB-rated, Real-time, In-situ, Trace Moisture Analyzer

Gütenbach, Germany – December 16, 2025 – RENA Technologies is proud to be a key industrial partner in a new 1.3 million Euro Government-funded project led by the National Physical Laboratory (NPL) and supported by the Department for Science, Innovation and Technology (DSIT). The initiative will establish critical new metrology capabilities to strengthen the UK’s semiconductor innovation infrastructure and accelerate the development and adoption of next-generation semiconductor materials and processes.

This strategic investment underlines the UK’s commitment to maintaining global competitiveness in semiconductors, helping to attract private investment, strengthen supply chains, and support long-term economic growth. As advanced semiconductor materials become central to technologies such as electric vehicles, renewable energy, 5G communications and advanced electronics, robust measurement, verification and standards are increasingly essential.

The project brings together a broad consortium spanning industry and academia. Together, the partners cover the full innovation landscape, from materials research and process development to device fabrication and performance verification.

“At RENA, we develop advanced wet processing and surface treatment solutions that are critical in manufacturing of compound semiconductors and emerging materials. Through this collaboration, RENA will contribute industrial insight and process expertise to ensure that new measurement and testing capabilities are closely aligned with real manufacturing challenges.” States Peter Schneidewind, CEO of RENA Technologies.

While silicon remains the foundation of much of today’s semiconductor industry, many high-growth applications increasingly depend on advanced materials such as gallium arsenide (GaAs), gallium nitride (GaN), silicon carbide (SiC), and indium phosphide (InP). These materials offer superior performance in high-power, high-frequency and optoelectronic applications, but they also introduce new complexities in processing, characterization and quality assurance. Reliable standards and independent measurement methods are therefore essential to derisk innovation and support scale-up.

Through this project, consortium partners will work with NPL to:
• Develop new UK measurement and test capabilities for advanced semiconductor materials by combining academic research excellence with world-leading metrology expertise.
• Apply these capabilities to critical industry challenges, including assessing material integrity, verifying RF performance, and testing device reliability under demanding operating conditions.
• Share the resulting capabilities openly with industry, helping to build national consensus and strengthen the UK’s influence in international standards development for novel semiconductor technologies.

Following extensive consultation the consortium has identified three priority application areas where the UK can have the greatest global impact: power electronics, RF-communications, and optoelectronics. These areas align closely with RENA’s customer base and technology roadmap, particularly in power and compound semiconductor manufacturing.
By participating in this program, RENA reinforces its commitment to supporting the UK semiconductor ecosystem with industrially relevant innovation, enabling customers to adopt advanced materials with confidence, and helping position the UK as a global leader in next-generation semiconductor technologies.

About NPL
The National Physical Laboratory (NPL) is the UK's National Metrology Institute (NMI), developing and maintaining the national primary measurement standards, as well as collaborating with other NMIs to maintain the international system of measurement. As a public sector research establishment, it delivers extraordinary impact by providing the measurement capability that underpins the UK's prosperity and quality of life. NPL develops the metrology required to ensure the timely and successful deployment of new technologies and work with organizations as they develop and test new products and processes.

About RENA Technologies GmbH
RENA Technologies is a leading global supplier of production machines for wet chemical surface preparation. RENA products are used in path-breaking application fields such as semiconductors, MedTech, renewable energies, and the glass industry. RENA equipment is used to treat or modify surfaces of, for example, semiconductor wafers, solar cells, glass, optical substrates or other high-tech products using wet chemical processes. RENA offers proven standard machines as well as customer-specific solutions and process support.

• Read more about RENA joins UK Government-funded consortium to strengthen national semiconductor metrology capabilities

Kitchener, Ontario, December 15, 2025 – PEER Group®, the largest supplier of innovative factory automation software products for the semiconductor industry, has appointed IBM Japan Ltd. as its exclusive distributor in Japan.

Under this agreement, IBM Japan manages sales and provides frontline support for PEER Group’s full suite of automation, connectivity, and test products, as well as its comprehensive Professional Services offerings, for all customers based in Japan. Previously, Mizuho Research & Technologies, Ltd. acted as PEER Group’s exclusive Japanese distributor.

“We are honored to partner with IBM Japan to serve our current and future customers in the Japanese market,” says Mike Kropp, Co-founder, President, and CEO of PEER Group. “IBM Japan’s leadership in semiconductor manufacturing technology and highly respected engineering and sales capabilities make them the ideal representative of PEER Group’s products and services,” says Kropp, while adding: “We also extend our thanks to Mizuho for their support over the past 18 years.”

Founded in 1992, PEER Group supplies high-quality, high-performance, and cybersecure solutions for both semiconductor OEMs and fabs. Its software portfolio includes flagship automation and connectivity products PEER® Tool Orchestrator (PTO®), PEER FACTORY® Station Controller (PFSC™), EIB® OEM, as well as a host of other communications and test applications, such as GWGEM®Plus, ConX300™, and SECSIM Pro®+. As an active contributor to SEMI Standards development, PEER Group helps customers achieve compliance with the latest automation, connectivity, and emerging cybersecurity standards.

“This marks the beginning of a long-standing partnership between two industry leaders that will greatly benefit OEMs and factories in Japan,” says Mike Barrett, Vice President, Global Sales at PEER Group. “PEER Group’s best-in-class products and expertise in SEMI Standards compliance are a natural fit with IBM’s proven capabilities and deep knowledge in factory automation and MES software.”

PEER Group and IBM Japan will kick off the partnership at SEMICON Japan. Attendees are encouraged to visit booth E6527 and connect with representatives to discuss factory or equipment automation and connectivity projects. For more information, visit: https://www.peergroup.com/news-events/events/semicon-japan-2025.

About PEER Group
PEER Group® is the leading global supplier of innovative factory and tool automation and connectivity software for the semiconductor industry. Since our founding in 1992, we have been committed to developing best-in-class solutions that help OEMs and factories reduce their time to market, risk, and costs by solving their most challenging automation, connectivity, and SEMI Standards compliance problems. Follow PEER Group on. Follow PEER Group on LinkedIn.

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Tirana, November 2025 – Atronix Sh.p.k., Albania’s pioneering Electronics Manufacturing Services company, officially inaugurated in November its new production facility at Tirana Industrial Park. The event marks a historic moment for Albania’s industrial landscape, establishing the country’s first advanced EMS factory with capacity to serve European and North American markets.

Equipped with the latest generation of JUKI SMT Production line with advanced AOI/X-ray inspection ERSA selective and wave soldering, and fully integrated traceability systems, Atronix introduces advanced technological capabilities. 

The inauguration ceremony brought together distinguished guests, including leading figures from the European electronics industry Mr. Dieter Weiss, EBRD representatives. Ms. Ekaterina Solovova, Ms. Egla Ballta, JUKI Europe Mr. Kenji Hirohata, Mr. Rui Vidal and Mr. Davor Jakulin international and national business partners, representatives from the Albanian Government, Academia and Universities, etc. 

“Our vision from the beginning was clear: to build a factory that stands at the same level with Europe’s most advanced EMS providers,” said Ms. Enkeleda Kuka, Founder & CEO of Atronix. “Today, we are proud to show that Albania can compete in high-precision electronics manufacturing.” During the ceremony, Atronix extended appreciation to its international collaborators, including JUKI Europe, Kurtz-Ersa, and several global clients and advisors who have contributed to the company’s rapid development. 

“In this challenging business climate, it is very good to see a new EMS company being opened in Albania. Eastern Europe will see a strong growth of electronic production in the future and Atronix will participate in this development.” said Mr. Dieter G. Weiss, European EMS industry expert and longstanding supporter of the project. 

This factory sets a new standard for high-value manufacturing in the country and demonstrates how it can transform Albania's industrial landscape. EBRD has supported Atronix through our Advice for Small Business program and looks forward to the future successes of Atronix" said Ms Ekaterina Solovova, Head of Albania, EBRD.

With its inaugural production lines now operational, Atronix is preparing for a strong expansion phase, targeting new partnerships in Electronic Manufacturing and broader industrial integration across Europe and North America. 

“Atronix symbolizes what the next chapter of Albanian industry can look like,” added Ms. Kuka. “We are committed not only to manufacturing high-quality electronics, but also to building trust, reliability, and long-term value for every client who chooses Albania as their production base. 

www.atronix.al; [email protected]; Tirana Industrial Park 48, Kashar, Tirana,  Albania

• Read more about Atronix Inaugurates Albania’s First Advanced Electronics Manufacturing Factory

Validation underscores DAS EE’s 35 years of leadership in advanced and sustainable abatement solutions
Dresden, Germany, November 28, 2025 — As the semiconductor industry intensifies its efforts to reach net-zero emissions, the recently published SEMI SCC Whitepaper “Overview of F-GHG and Nitrous Oxide Semiconductor Abatement Technologies” (2024) establishes new industry performance benchmarks for greenhouse gas abatement. The report defines a minimum Destruction and Removal Efficiency (DRE) for CF₄ of >95% and a maximum goal of >99% for process gas abatement systems.

These new reference points represent a significant step beyond the legacy assumptions used in many ESG reports and supplier requirements, which have historically relied on conservative default values for greenhouse gas abatement performance. However, even the upper range of the SEMI SCC targets does not yet represent the full potential of modern technology.

DAS Environmental Expert GmbH demonstrates with its TILIA abatement system that destruction efficiencies exceeding 99.9% for CF₄ and other F-GHGs are both technically feasible and economically advantageous. These systems outperform the benchmarks set forth by the SEMI SCC whitepaper and contribute directly to the industry's carbon reduction goals.

“Systems like TILIA prove that it is not only possible but also economically rational to exceed the current industry benchmarks,” says Stephan Raithel, Chief Operating Officer Gas Treatment at DAS Environmental Expert GmbH. “With rising carbon taxes and tightening sustainability targets, investing in high-efficiency abatement translates directly into operational and financial benefits.”

The global semiconductor industry emits thousands of tons of CF₄ annually, a gas with a Global Warming Potential (GWP) of 7,390. Even a few tons of unmitigated emissions correspond to millions of tons of CO₂ equivalents. While current industry practice aims to meet the SCC-recommended minimum DREs, only systems operating consistently above 99.9% will enable the industry to meet its net-zero commitments.

The SEMI SCC Whitepaper emphasizes that achieving these higher efficiencies is crucial for the industry’s sustainability roadmap and requires broad adoption of next-generation abatement technologies. DAS Environmental Experts’ proven TILIA platform exemplifies this transition – setting a new benchmark for “Best in Class” abatement performance in the semiconductor industry.

About the Company
DAS Environmental Experts Group (DAS Group), headquartered in Dresden, Germany, was founded in 1991 and is now a global organization with subsidiaries on three continents and more than 950 employees worldwide. Over the past three decades, DAS Group has become one of the leading technology and equipment providers for waste gas abatement solutions with a focus on semiconductor industry.
In addition, DAS Group develops advanced process and system solutions for industrial water treatment, with extensive expertise in the recycling and reuse of wastewater from the semiconductor industry.
DAS solutions are engineered to meet the stringent purity requirements of semiconductor manufacturing, helping clients comply with global environmental standards.

• Read more about Best in Class Abatement System: DAS Environmental Experts Exceeds Efficiency Benchmarks in Semiconductor Greenhouse Gas Treatment