Materials Innovation Electronic Packaging Materials for SiC Power Modules, Michael Jörger, Head of Business Line Power Electronic Materials, Heraeus Electronics Designing Atomic Level Process Chemistries. The Role of Atomistic Simulation in Developing Sustainable Deposition and Etch Processes., Michael Nolan, Head of Group Materials Modelling for Devices, Tyndall National Institute Epitaxial Growth of SiGe/Si Multi-Layers for Advanced Logic Devices, Rami Khazaka, Principal Technologist and Epitaxy Program Manager, ASM Carbon Nanotube Membranes for EUV Photolithography– a Versatile Material Platform, Emma Salmi, Carbon Nanotechnology Engineer, Canatu 2D Materials for Future Microelectronic Devices, Lucie Le Van-Jodin, Project leader, CEA/Leti By downloading this presentation/file, you agree to not use or distribute this presentation/file without permission from SEMI and the speakers.