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 Reserve Your Booth Now! 

Floor plan MEMS and Imaging Sensors Summit 2019


Until 29 Feb 2020

  • SEMI Members: 2,285 EUR | Non-Members: 2,795 EUR

From 1 March 2020

  • SEMI Members: 2,680 EUR | Non-Members: 3,295 EUR

*price in Euro, VAT excl.

Exhibition fee includes:

  • 4 m2 Turnkey booth
  • Free conference access for one person (Access to all plenary sessions, exhibition, one-on-one business meeting service, welcome cocktail, lunches, and proceedings.)
  • Possibility to get one discounted ticket for 680 €

Modular stand includes:

  • Aluminium structure with melamine panels
  • A4 sign with company name
  • 1 Table and 2 chairs
  • 1 power socket
  • 3 spotlights
  • 1 trash bin

See photos of exhibition in 2019

Reviliani Gani at

Reserved Booths









Plasma Therm



BOOTH #42 & 43

Solmates BV




Beneq is the home of ALD, offering a wide portfolio of equipment products and development services. Today Beneq leads the market with innovative solutions for advanced R&D (TFS 200, R2), flexible high-volume manufacturing (ALD 3, ALD 4), ultra-fast high precision spatial ALD coatings (C2R), roll-to-roll thin film coating of continuous webs (WCS 600), and specialized batch production for thicker film stacks (P400, P800). Headquartered in Espoo, Finland Beneq is dedicated to making ALD technology accessible for researchers and providing the invisible advantage in emerging semiconductor applications.



Since 1981, CMP is a Multi-Project Wafer (MPW) service organization in ICs, Photonic ICs and MEMS for prototyping and low volume production. CMP enables prototypes fabrication on industrial processes at very attractive costs and offers it great technical expertise in providing MPW and related services for Universities, Research Laboratories and Industrial companies’ prototyping. CMP can handle low volume production from some dozens to some thousands pieces. Chips are normally untested and delivered packaged or not. Advanced industrial technologies are made available in CMOS, SiGe BiCMOS, HV-CMOS, SOI, MEMS, 3D-IC, etc. CMP distributes the design rules for each technology and the standard cell libraries for each specific software tool (design kits) free of charge and supports several CAD software tools for both Industrial Companies and Universities.


DELO Industrial Adhesives

DELO is a leading manufacturer of industrial adhesives with its headquarters in Windach near Munich, Germany, and subsidiaries in the USA, China, Singapore and Japan. In the fiscal year 2019 the company generated sales revenues of EUR 156 million; for 2020, Euro 170 million are expected. DELO employs more than 780 people and supplies customized adhesives and associated technology for high-tech industries such as automotive, consumer electronics, optoelectronics and aviation. DELO's customers include Bosch, Daimler, Huawei, Osram, Siemens and Sony.



EV Group

EV Group (EVG) is a leading supplier of equipment and process solutions for the manufacture of semiconductors, microelectromechanical systems (MEMS), compound semiconductors, power devices, and nanotechnology devices. Key products include wafer bonding, thin-wafer processing, lithography/nanoimprint lithography (NIL) and metrology equipment, as well as photoresist coaters, cleaners and inspection systems. Founded in 1980, EV Group services and supports an elaborate network of global customers and partners all over the world. More information about EVG is available at


Fraunhofer IPMS

The Fraunhofer Institute for Photonic Microsystems IPMS is one of currently 72 institutes of the Fraunhofer-Gesellschaft, the leading organization for applied research in Germany, and also in Europe. It is devoted to research of practical utility in the field of optical sensors and actuators, integrated circuits, microsystems.


KST World Corp.

KST World Corp. services as a wafer foundry providing various services, especially super thick oxide film up to 12 inch size over 25um, with patented technology for over 20 years. Using thick oxide film technology, we provide unique thick BOX SOI wafers, not only normal SOI wafer or cavity SOI wafer. Today, KST World's unique and advanced technologies meet and drive customer's technological requirements in worldwide market.


MASER Engineering BV

MASER Engineering is an independent engineering service provider for reliability test and failure analysis of micro-electronic components and systems. We offer advanced facilities for Integrated Device Manufacturers, Fabless and Labless IC manufacturers as well as the Original Equipment Manufacturing companies in our main lab in Enschede, The Netherlands.




Plasma-Therm is a U.S. manufacturer of advanced plasma-processing equipment, providing etch, deposition, and plasma dicing technologies used in semiconductor packaging, solid-state lighting, power, data storage, renewable energy, MEMS, nanotechnology, photonics, and wireless communication markets. The VERSALINE platform is the workhorse for a variety of applications in specialty semiconductor markets and the Singulator® systems bring the precision and speed of plasma dicing to chip-packaging applications. Named the #1 Etch Equipment Supplier in 2019, Plasma-Therm has more than two decades of awards in the VLSIresearch Customer Satisfaction Survey, including the highest score ever earned by a semiconductor equipment company.



SAES Getters S.p.A.

A pioneer in the development of getter technology, SAES® Getters is the world leader in a variety of applications where stringent vacuum conditions are required. In more than 70 years of activity, SAES supported innovation in many different market segments. Starting in 2004 SAES introduced dedicated getter solution for MEMS vacuum packaging both at discrete and wafer level.  More recently,  SAES introduced a new service to help the customers to finalize their  packaging needs, offering a vacuum packaging service foundry. Operating in 100 class clean room with state of the art discrete sealing equipment SAES is now capable to offer  a vertical integrated service facility able to operate with any discrete packaging solutions.



Solmates is an ambitious and fast-growing equipment supplier of thin film deposition tools based on PLD, Pulsed Laser Deposition. Our mission is to develop and mature PLD so it can be considered a mainstream deposition technology as currently employed in semiconductor and MEMS. With its unique deposition characteristics, PLD be positioned as a perfect marriage between ALD and sputtering. Solmates has developed knowledge on several strategic processes and applications. Solmates has gained global attention in both research and (pilot)-production thin film technology, which resulted in a wide-spread global installed base. Solmates offers large area PLD systems that suit a variety of different applications and customers' requirements.


SÜSS MicroTec 

SUSS MicroTec is a leading supplier of equipment and process solutions for micro structuring in the semiconductor industry and related markets. Our portfolio covers a comprehensive range of products and solutions for backend lithography, wafer bonding and photomask processing, complemented by micro-optical components.  In close cooperation with research institutes and industry partners SUSS MicroTec contributes to the advancement of next-generation technologies such as 3D Integration and nanoimprint lithography as well as key processes for MEMS and LED manufacturing. With a global infrastructure for applications and service, SUSS MicroTec supports more than 8.000 installed systems worldwide.



SVCS Process Innovation

SVCS designs and manufactures horizontal/vertical thermal reactors (furnaces) for mass production as well as compact tabletop versions for R&D or pilot project applications. The equipment can be used for process development and growth of materials in many areas of research including semiconductor, PV, MEMS and other nanotechnology applications. Typical processes are annealing, diffusion, oxides, LPCVD and PECVD nitrides and many others. The supporting equipment starts from Ultra High Purity (UHP) gas cabinets, gas panels for inert or purging gases, followed by liquid precursor delivery systems. Last but not least, our total solution also includes the exhaust media abatement system (a scrubber).


VIAVI Solution

VIAVI Solutions (NASDAQ: VIAV) is a global leader in both network and service enablement and optical security performance products and solutions. Our technologies contribute to the success of a wide range of customers – from the world’s largest mobile operators and governmental entities to enterprise network and application providers to contractors laying the fiber and building the towers that keep us connected.



Zemax software helps companies get to a qualified design more quickly by streamlining the workflow and communication between optical and mechanical engineers. Zemax Virtual Prototyping tools include OpticStudio®, the industry-leading optical design software, and LensMechanix®, the best application for mechanical engineers to package optical systems in CAD software. OpticStudio and LensMechanix use the same physics core relied on by NASA and industry leaders to analyze and validate complete product designs.


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