downloadGroupGroupnoun_press release_995423_000000 copyGroupnoun_Feed_96767_000000Group 19noun_pictures_1817522_000000Member company iconResource item iconStore item iconGroup 19Group 19noun_Photo_2085192_000000 Copynoun_presentation_2096081_000000Group 19Group Copy 7noun_webinar_692730_000000Path
Skip to main content
Default Banner Image

Standards

United States standards-500w.jpg

United States

Standards

Physical Interfaces & Carriers North America TC Chapter

Fall Meeting

Date: Thursday, December 11

Time: 1600-18:00 Pacific Time

via Virtual Meeting

 

AGENDA

(subject to change) 

Last updated: November 11, 2025

4:00 pm - 6:00 pm Off Add to Calendar 2025-12-11 16:00:00 2025-12-11 18:00:00 Physical Interfaces & Carriers North America TC Chapter Fall Meeting Physical Interfaces & Carriers North America TC ChapterFall MeetingDate: Thursday, December 11Time: 1600-18:00 Pacific Timevia Virtual Meeting AGENDA(subject to change) Last updated: November 11, 2025 United States SEMI.org [email protected] America/Los_Angeles public America/Los_Angeles

Voting Instructions

To Vote During TC Chapter Meetings

  1. Open a separate Web browser and go to:  https://svm.semi.org/
  2. Click “Login”
  3. Enter your Standards Membership username and password (same login you use for voting on ballots)
  4. Find the meeting room you wish to attend under “Room Name”
  5. Click “Go” to enter the meeting room.

 

NOTE: You must be a registered SEMI Standards Program Member to gain access. Reach out to your staff contact if you are unable to log on, or if your "voting interest" is incorrect or shows "NONE".

 

Next Meetings

Save the Date!

North America Winter Meetings
February 9-12, 2026 [Virtual]

 

Contact

Please email staff contact below for virtual information:

Laura Nguyen
Sr. Coordinator, International Standards
 

Event format
Tab Order
Overview
Agenda
Registration
New Tab 1
Travel
Sponsors
Call for Abstracts
Call for Papers
Technology Showcase
Press
New Tab 2
Photo Gallery
Promote in calendar
Off
Japan standards Technical
Highlighted content

SEMI Japan
26F, xLINK Marunouchi Eiraku Bldg.
1-4-1 Marunouchi, Chiyoda-ku
Chiyoda-ku, Tokyo
1000005
Japan

Standards

Automation Technology Japan TC Chapter Meeting 

Date: Friday, December 12, 2025

Time: 1:30 PM - 3:00 PM (JST)

via Official Virtual TC Chapter Meeting + SEMI Japan (Hybrid)

Please note that the meeting venue might be changed due to room capacity.  If there is any change, we will inform you once it is confirmed.

 

AGENDA

 

Standards Contact Information:

Nahoko Koga

Coordinator, Standards & EHS, SEMI Japan

Email: [email protected]

 

NOTE:

Standards meetings are open to all, but you must be a SEMI Standards Program Member to attend.

If you are not a Member, please register for the International SEMI Standards Program and start making a big contribution to the industry’s progress, complete an application form today!

Questions? Contact your local staff coordinator: Click here

1:30 pm - 3:00 pm Off Add to Calendar 2025-12-12 13:30:00 2025-12-12 15:00:00 Automation Technology Japan TC Chapter Meeting Automation Technology Japan TC Chapter Meeting Date: Friday, December 12, 2025Time: 1:30 PM - 3:00 PM (JST)via Official Virtual TC Chapter Meeting + SEMI Japan (Hybrid)Please note that the meeting venue might be changed due to room capacity.  If there is any change, we will inform you once it is confirmed. AGENDA Standards Contact Information:Nahoko KogaCoordinator, Standards & EHS, SEMI JapanEmail: [email protected] NOTE:Standards meetings are open to all, but you must be a SEMI Standards Program Member to attend.If you are not a Member, please register for the International SEMI Standards Program and start making a big contribution to the industry’s progress, complete an application form today!Questions? Contact your local staff coordinator: Click here SEMI Japan 26F, xLINK Marunouchi Eiraku Bldg. 1-4-1 Marunouchi, Chiyoda-ku Chiyoda-ku, Tokyo 1000005 Japan SEMI.org [email protected] Asia/Tokyo public Asia/Tokyo
Event format
Promote in calendar
Off

Registration

Registration is Required!

After registering, you will receive a confirmation email that includes:

  • Virtual + Voting Instructions
  • Additional virtual meeting information (updated periodically before the meeting)

PLEASE NOTE:

To participate in the meetings, you must be a SEMI Standards Program Member.
Membership is FREE!

Complete the Application Form to become a Standards Member.

standards-500w.jpg Technical

United States

Only TC Chapter Meetings are listed. Please refer to FULL SCHEDULE for all other meetings.

MONDAY, FEBRUARY 9

10:00 am - 11:00 am

MEMS/NEMS North America Technical Committee Chapter Meeting

TUESDAY, FEBRUARY 10

9:00 am - 12:00 pm

Facilities & Gases Joint North America Technical Committee Chapter Meeting

1:00 pm - 4:00 pm

Liquid Chemicals North America Technical Committee Chapter Meeting - Day 1

WEDNESDAY, FEBRUARY 11

9:00 am - 4:00 pm

Information & Control North America Technical Committee Chapter Meeting

9:00 am - 12:00 pm

Physical Interfaces & Carriers North America Technical Committee Chapter Meeting

1:00 pm - 4:00 pm

Liquid Chemicals North America Technical Committee Chapter Meeting - Day 2

Tentative

THURSDAY, FEBRUARY 12

8:00 am - 5:00 pm

Environmental, Health & Safety North America Technical Committee Chapter Meeting

1:00 pm - 2:30 pm

3D Packaging & Integration North America Technical Committee Chapter Meeting

1:00 pm - 3:00 pm

Metrics North America Technical Committee Chapter Meeting

Times are listed in PT (Pacific Time).

- Standards

Join us for the SEMI Standards Meetings

VIRTUAL Only!
 

Remember to save the dates for the upcoming Spring meetings (Albany, NY) in conjunction with SEMI ASMC (May 11-14, 2026) and SEMICON West moving back to San Francisco, CA October 13-15, 2026. 

SEMI Standards will host 9 committees + over 30 task forces engaged in various standardization activities, including:

  • Environmental, Health, and Safety (EH&S)
  • Facilities
  • Gases
  • Information & Control
  • Liquid Chemicals
  • Metrics
  • MEMS/NEMS
  • Physical Interfaces & Carriers
  • 3D Packaging & Integration

Note | Some Technical Committees + Task Forces may meet virtually outside of this Meeting set.

FULL SCHEDULE | PDF or Excel |

All meetings are in Pacific Time.
Subject to change, please check back frequently.
Last updated: Feb 10, 2026

Off Add to Calendar Disabled

Next Meetings

Save the Date!

North America Standards Spring Meetings
May 11-14, 2026 @ Hilton Albany, Albany, New York

SEMICON West Standards Meetings
October 12-15, 2026 @ Moscone Center, San Francisco, California

Contact

Kevin Nguyen
Manager, International Standards Operations
(EH&S)

Laura Nguyen
Sr. Coordinator, International Standards
(Facilities, Gases, Liquid Chemicals, MEMS/NEMS, Physical Interfaces & Carriers, 3D Packaging & Integration)

Michelle Sun
Coordinator, International Standards
(Information & Control, Metrics, Traceability)

Register Now
Event format
Promote in calendar
Off
Japan standards Technical
Highlighted content

SEMI Japan
26F, xLINK Marunouchi Eiraku Bldg.
1-4-1 Marunouchi
Chiyoda-ku, Tokyo
1010005
Japan

Standards

3D Packaging & Integration  Japan TC Chapter Meeting 

Date: Monday, March 9, 2026

Time: 2:00 PM - 5:00 PM JST

via OVTCCM/ SEMI Japan Office (Hybrid)

 

AGENDA

 

Standards Contact Information:

Akiko Yoshida

Senior Cooordinator, SEMI Japan

Email: [email protected]

 

NOTE:

Standards meetings are open to all, but you must be a SEMI Standards Program Member to attend.

If you are not a Member, please register for the International SEMI Standards Program and start making a big contribution to the industry’s progress, complete an application form today!

Questions? Contact your local staff coordinator: Click here

2:00 pm - 5:00 pm Off Add to Calendar 2026-03-09 14:00:00 2026-03-09 17:00:00 3D Packaging & Integration Japan TC Chapter Meeting 3D Packaging & Integration  Japan TC Chapter Meeting Date: Monday, March 9, 2026Time: 2:00 PM - 5:00 PM JSTvia OVTCCM/ SEMI Japan Office (Hybrid) AGENDA Standards Contact Information:Akiko YoshidaSenior Cooordinator, SEMI JapanEmail: [email protected] NOTE:Standards meetings are open to all, but you must be a SEMI Standards Program Member to attend.If you are not a Member, please register for the International SEMI Standards Program and start making a big contribution to the industry’s progress, complete an application form today!Questions? Contact your local staff coordinator: Click here SEMI Japan 26F, xLINK Marunouchi Eiraku Bldg. 1-4-1 Marunouchi Chiyoda-ku, Tokyo 1010005 Japan SEMI.org [email protected] Asia/Tokyo public Asia/Tokyo
Event format
Promote in calendar
Off
https://www.semiconjapan.org SEMICON Japan Tile Expositions
Highlighted content

Tokyo
Japan

- APHI CAST EHS NBMC SCM Smart MFG Smart Mobility Smart MedTech Smart Data & AI SMG Sustainability EMG ESD Alliance FlexTech FOA ITL MSIG SCIS SE&A SiPAT SOI Standards Workforce Development Off Add to Calendar 2025-12-17 00:00:00 2025-12-19 00:00:00 SEMICON Japan 2025 Tokyo Japan SEMI.org [email protected] America/Los_Angeles public
Event format
Promote in calendar
Off
Germany https://www.semiconeuropa.org/ SEMICON Europa Tile Expositions
Highlighted content

Munich
Germany

- APHI CAST EHS NBMC SCM Smart MFG Smart Mobility Smart MedTech Smart Data & AI SMG Sustainability EMG ESD Alliance FlexTech FOA ITL MSIG SCIS SE&A SiPAT SOI Standards Workforce Development Off Add to Calendar 2025-11-18 00:00:00 2025-11-21 00:00:00 SEMICON Europa 2025 Munich Germany SEMI.org [email protected] America/Los_Angeles public
Event format
Promote in calendar
Off
Germany EDA_Tile Training
Highlighted content

Class Modules

Module 1 – EDA Standards Suite

  • Session 1 – Overview: Background, Motivation, Basics

    This session introduces the EDA standards at a high level, explaining the historical industry context that motivated the semiconductor factory automation community to define these standards, informed the initial set of functional requirements and performance expectations, provided the engineering and administrative resources to support this multi-year effort, and drove the implementation and validation processes to successful completion of the first version. 

    In summary, this session describes much of the “why” the EDA standards exist.

  • Session 2 – Deeper Dive: Specifications, Interaction, Performance

    This session shows how the standards in the EDA suite work together to meet the requirements described in Session 1, describing the overall system architecture and component technologies used. It then goes into depth for each of the major standards, which include SEMI E120 (Specification for the Common Equipment Model), SEMI E125 (Specification for Equipment Self Description), SEMI E132 (Specification for Equipment Client Authentication and Authorization), SEMI E134 (Specification for Data Collection Management), and SEMI E164 (Specification for EDA Common Metadata). 

    Since it is more instructive to “see” data collection in action rather than imagining it through specifications and animated PowerPoint, this session includes demonstrations of the standards using equipment simulators and reference client (host) software to bring the EDA standards to life. 

    In summary, this session describes most of the “what” for the EDA standards.

Module 2 – Best Practices for EDA Standards Implementation and Testing

  • Session 3 – Equipment Suppliers

    This session describes the implementation process an equipment supplier would use to provide an EDA interface on its equipment based on the requirements specified in the SEMI standards themselves and whatever additional information may be provided by their customer(s), the semiconductor manufacturers. Most of the best practices outlined in this session apply to EDA interface design and implementation whether or not the supplier chooses to build the interface in house or purchase and configure a third-party software package. 

    This session also covers the validation checklist defined and published by ISMI (International Sematech Manufacturing Initiative) in its “ISMI EDA Evaluation Method” and the use of standards validation software to automate most of this process.

    In summary, this session is a useful “how to” guide for equipment (and/or software) suppliers who want to implement the EDA standards.

  • Session 4 – Best Practices for EDA Standards Implementation and Testing

    This session can be thought of as the “mirror image” of Session 3 and focuses on what the factory automation and equipment integration staff in the chip factories must do to implement the “client” (host) side of the EDA standards. Simply put, the factories are the collectors and consumers of the equipment and process data that are produced by the equipment. And as before, the topics covered in this session apply equally for in-house software development and the purchase of third-party software.

    Since the EDA standards do not explicitly define many of the practical aspects of a communications interface (e.g., computing platform on which the interface runs, content of the equipment metadata model, performance requirements such as data granularity, sampling frequency, total data volume), this session also describes a process for crafting the EDA sections of an equipment purchase specification; these additional requirements form the data collection “contract” between the equipment supplier and its customer so rather than leaving this important topic to chance.

    In summary, this session is a useful “how  to” guide for factories that want to make the most of the EDA interfaces on their purchased equipment.

Module 3 – Example Use Cases and Customer Benefits

  • Session 5 – Equipment-focused Applications

    This session addresses the “How do these standards benefit your company?” question that may be posed to equipment suppliers who have chosen to implement the EDA standards. In fact, there are a number of applications that equipment suppliers can implement and sell that offer added value to their customers. 

    Examples include equipment/process characterization utilities, throughput monitoring, component and subsystem fingerprinting, AI/ML (artificial intelligence/machine learning) model development support, remote diagnostic support, among others. This session will explain how some of these applications can leverage the capabilities of the EDA standards without negatively impacting the factory customers’ equipment integration environment. 

  • Session 6 – Factory-focused Applications

    This session answers the “Now what?” question that was actually posed to one of our standards promotion team when presenting the EDA standards at a standards technology seminar. At the time, he was focused on the detailed content and implementation process for the standards and didn’t have a satisfactory answer for why a factory would want to use these new (at the time) standards. 

    Such an excellent question deserved an equally excellent answer, so we spent the next 6 months meeting with the early adopters of the EDA standards to see what applications made particularly effective use of the EDA capabilities beyond what they had accomplished to date with the GEM/GEM300 standards. The applications outlines in this session are the result of those meetings and subsequent discussions.

Module 4 – Current Standardization Activities and Evolution

  • Session 7 – Freeze 3 Technologies and Outlook

    This session covers the Freeze 3 release of the EDA standards suite, focusing especially on the recent technologies (e.g., gRPC, protocol buffers) that are being incorporated to improve data collection performance. It also compares Freeze 3 with the Freeze 2 version so people familiar with the current suite know what to expect. Finally, it will reference other standards that will impact the content of the SEMI E120/E125 equipment metadata model; examples include the GEM300 standards updates which now contain a set of “Well-Known Names” for common parameters and event, and SEMI E190/E190.1 (Equipment Data Publication) which go beyond E164 to list process-specific parameters that should appear in the EDA interface. 

    In summary, this session answers the question “What’s next?” for the EDA standards.

  • Session 8 – Support for AI/ML-based Initiatives

    This session describes some of the unique and challenging characteristics of AI/ML-based systems that the EDA standards were (in hindsight) designed to support. This not only includes collecting massive amounts of detailed equipment and process data to feed these algorithms but also managing the available context information necessary for correct training and tuning machine learning models and selecting the appropriate model for a given production situation. Finally, this session will highlight a number of promising AI/ML use cases that have already been implemented.

    In summary, this session answers the question “How can I leverage the EDA standards to support the wave of AI/ML implementations currently and/or soon to be underway?”

 

Instructor

Alan Weber

Instructor Bio

 

Mihai Bodea

Instructor Bio

 

Sreeraj

Instructor Bio

SEMICON Europa
Munich
Germany

Standards

The EDA Standards course is an all-day workshop aiming to provide a comprehensive understanding of the standards used in semiconductor factory automation. Beginning with an overview of EDA, the course will focus on best practices for implementing and testing EDA interfaces from both an equipment supplier and factory perspective. You will learn how EDA interfaces can benefit your company’s existing processes through multiple real-world use cases.

Pricing

  • Members: $695
  • Non-members: $795
  • Students: $595

* Coffee, refreshments, and lunch will be provided for all attendees.

* During this course, we will be covering the basics of SEMI E120 (Specification for the Common Equipment Model), SEMI E125 (Specification for Equipment Self Description), SEMI E132 (Specification for Equipment Client Authentication and Authorization), SEMI E134 (Specification for Data Collection Management), and SEMI E164 (Specification for EDA Common Metadata). These Standards are recommended, but not required for this course.

Who Should Attend

  • Automation staff at semiconductor manufacturing equipment suppliers and semiconductor factories

  • Manufacturing application software suppliers

  • Automation consultants 

  • Manufacturing data scientists

Prerequisites

  • Familiarity with basic factory automation terminology
  • Familiarity with basic communication protocol terminology
  • Familiarity with common semiconductor manufacturing artifacts
9:00 am - 6:00 pm Off Add to Calendar 2025-11-20 09:00:00 2025-11-20 18:00:00 Everything You Need to Know about the SEMI Equipment Data Acquisition (EDA) Standards Suite The EDA Standards course is an all-day workshop aiming to provide a comprehensive understanding of the standards used in semiconductor factory automation. Beginning with an overview of EDA, the course will focus on best practices for implementing and testing EDA interfaces from both an equipment supplier and factory perspective. You will learn how EDA interfaces can benefit your company’s existing processes through multiple real-world use cases.PricingMembers: $695Non-members: $795Students: $595* Coffee, refreshments, and lunch will be provided for all attendees.* During this course, we will be covering the basics of SEMI E120 (Specification for the Common Equipment Model), SEMI E125 (Specification for Equipment Self Description), SEMI E132 (Specification for Equipment Client Authentication and Authorization), SEMI E134 (Specification for Data Collection Management), and SEMI E164 (Specification for EDA Common Metadata). These Standards are recommended, but not required for this course.Who Should AttendAutomation staff at semiconductor manufacturing equipment suppliers and semiconductor factoriesManufacturing application software suppliersAutomation consultants Manufacturing data scientistsPrerequisitesFamiliarity with basic factory automation terminologyFamiliarity with basic communication protocol terminologyFamiliarity with common semiconductor manufacturing artifacts SEMICON Europa Munich Germany SEMI.org [email protected] Europe/Berlin public Europe/Berlin Register Now
Event format
Promote in calendar
Off
United States standards-500w.jpg Technical

United States

Standards

Join us for the SEMI Standards

3D Packaging & Integration (3DP&I)

North America Technical Committee Chapter Fall Meeting

Date: Tuesday, October 14, 2025

Time: 13:00-14:30 Pacific Time

Online via Web Conference

To receive the calendar invite, please reach out to the contact below.

 

AGENDA

(Subject to change)

Last updated:  September 14, 2025

 

1:00 pm - 2:30 pm Off Add to Calendar 2025-10-14 13:00:00 2025-10-14 14:30:00 3D Packaging & Integration North America TC Chapter Fall Meeting 2025 Join us for the SEMI Standards3D Packaging & Integration (3DP&I)North America Technical Committee Chapter Fall MeetingDate: Tuesday, October 14, 2025Time: 13:00-14:30 Pacific TimeOnline via Web ConferenceTo receive the calendar invite, please reach out to the contact below. AGENDA(Subject to change)Last updated:  September 14, 2025  United States SEMI.org [email protected] America/Los_Angeles public

Virtual + Voting Instructions

SEMI uses RingCentral to host virtual meetings.

To receive the calendar invite, please reach out to the contact below.

To Vote During TC Chapter Meetings

  1. Open a separate Web browser and go to:  https://svm.semi.org/
  2. Click “Login”
  3. Enter your Standards Membership username and password (same login you use for voting on ballots)
  4. Find the meeting room you wish to attend under “Room Name”
  5. Click “Go” to enter the meeting room.

NOTE: You must be a registered SEMI Standards Program Member to gain access. Reach out to your staff contact if you are unable to log on, or if your "voting interest" is incorrect or shows "NONE".

Contact

Laura Nguyen
Sr. Coordinator, International Standards

Event format
Promote in calendar
Off
Japan standards Technical
Highlighted content

SEMI Japan
26F, xLINK Marunouchi Eiraku Bldg.
1-4-1 Marunouchi,
Chiyoda-ku, Tokyo
1010005
Japan

Standards

Information & Control Japan TC Chapter Meeting 

Date: Tuesday, October 21, 2025

Time: 9:30 am - 12:00 pm JST

Venue: SEMI Japan Office Room 1 + OVTCCM (Hybrid)

 

AGENDA

 

Standards Contact Information:

Takeaki Hirabara

Standards & EHS, SEMI Japan

Email: [email protected]

 

NOTE:

Standards meetings are open to all, but you must be a SEMI Standards Program Member to attend.

If you are not a Member, please register for the International SEMI Standards Program and start making a big contribution to the industry’s progress, complete an application form today!

Questions? Contact your local staff coordinator: Click here

9:30 am - 12:00 pm Off Add to Calendar 2025-10-21 09:30:00 2025-10-21 12:00:00 Information & Control Japan TC Chapter Meeting Information & Control Japan TC Chapter Meeting Date: Tuesday, October 21, 2025Time: 9:30 am - 12:00 pm JSTVenue: SEMI Japan Office Room 1 + OVTCCM (Hybrid) AGENDA Standards Contact Information:Takeaki HirabaraStandards & EHS, SEMI JapanEmail: [email protected] NOTE:Standards meetings are open to all, but you must be a SEMI Standards Program Member to attend.If you are not a Member, please register for the International SEMI Standards Program and start making a big contribution to the industry’s progress, complete an application form today!Questions? Contact your local staff coordinator: Click here SEMI Japan 26F, xLINK Marunouchi Eiraku Bldg. 1-4-1 Marunouchi, Chiyoda-ku, Tokyo 1010005 Japan SEMI.org [email protected] Asia/Tokyo public Asia/Tokyo
Event format
Promote in calendar
Off
Japan standards-500w.jpg Technical
Highlighted content

KOMORI CORPORATION, Tsukuba Plant
203-1 Nakayama
Tsukuba-shi, Ibaraki
300-1268
Japan

Standards

Flexible Hybrid Electronics (FHE) Japan TC Chapter Meeting 

Date: Friday, October 17, 2025

Time: 3:30 PM - 5:30 PM JST

via OVTCCM/ KOMORI CORPORATION, Tsukuba Plant, Ibaraki, Japan (Hybrid)

 

AGENDA

 

Standards Contact Information:

Nahoko Koga

Coordinator, SEMI Japan

Email: [email protected]

 

NOTE:

Standards meetings are open to all, but you must be a SEMI Standards Program Member to attend.

If you are not a Member, please register for the International SEMI Standards Program and start making a big contribution to the industry’s progress, complete an application form today!

Questions? Contact your local staff coordinator: Click here

3:30 pm - 5:30 pm Off Add to Calendar 2025-10-17 15:30:00 2025-10-17 17:30:00 Flexible Hybrid Electronics Japan TC Chapter Meeting Flexible Hybrid Electronics (FHE) Japan TC Chapter Meeting Date: Friday, October 17, 2025Time: 3:30 PM - 5:30 PM JSTvia OVTCCM/ KOMORI CORPORATION, Tsukuba Plant, Ibaraki, Japan (Hybrid) AGENDA Standards Contact Information:Nahoko KogaCoordinator, SEMI JapanEmail: [email protected] NOTE:Standards meetings are open to all, but you must be a SEMI Standards Program Member to attend.If you are not a Member, please register for the International SEMI Standards Program and start making a big contribution to the industry’s progress, complete an application form today!Questions? Contact your local staff coordinator: Click here KOMORI CORPORATION, Tsukuba Plant 203-1 Nakayama Tsukuba-shi, Ibaraki 300-1268 Japan SEMI.org [email protected] Asia/Tokyo public Asia/Tokyo
Event format
Promote in calendar
Off