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BIOGRAPHY Shumei Fu is a Staff Engineer in Wet Process Engineering at Micron Technology, Inc., with extensive experience in advanced semiconductor manufacturing. Her work focuses on wet and dry...

Does Pressure Drop Correlate with Filter Lifetime of Sub-50NM Filtration Solutions?ABSTRACTContamination control in semiconductor unit processes relies on various filtration solutions. These...

Wafer-level Validation of Si Trimming Process by Wet Etching in 3D DRAM ApplicationsABTRACTThree-dimensional DRAM (3D DRAM) architectures require highly uniform isotropic silicon etching within...

Reducing CFET wet clean process defectivity with advanced liquid filtration solutions ABSTRACTControlling contamination in the advanced semiconductor manufacturing process continues to grow in...

Use of Silicon-Based Additives and Their Mechanistic Role in Enhancing the Selectivity of Wet Etching Process on Sige over Si/SioABSTACTSelective etching is a critical enabler for nascent advanced...

Challenges and Benefits of Using 2-in-1 Filtration Solutions for Contamination Control in Semiconductor Deionized Water (Diw) ApplicationsABSTACTUltrapure deionized water (DIW) is essential in...

NMP Free Positive Photo Resist Stripping with E-GRADE® MEOXABSTACTHuntsman is committed to delivering solutions that support a more sustainable future. Our technologies help address critical...

Development of Highly Sensitive Detection for Impurities and Nanoparticles in Liquid Chemicals Using Aerosol TechnologyABSTRACTIn semiconductor manufacturing, a wide variety of chemical solutions are...

Atmospheric Plasma–Based Surface Cleaning Solutions for Advanced Electronics ManufacturingABSTRACTSThe continuous scaling and increasing complexity of electronic devices demand advanced surface...

The Critical Role of Pre-Saturated Cleanroom Wipers in Contamination Control for Advanced Semiconductor ManufacturingABSTRACTAs semiconductor feature sizes continue to shrink and yield requirements...

Low Stiction PFR FFKM and Related Test Method ABSTRACTPerfluoroelastomers (FFKMs) are key raw materials for producing seal elements for applications in semiconductor manufacturing. Beside the...