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Controlling the Molybdenum Dissolution and Oxidation During Post-CMP CleaningABSTRACTMolybdenum (Mo) is rapidly emerging as a potential replacement for tungsten (W) in advanced semiconductor...

Use of Silicon-Based Additives and Their Mechanistic Role in Enhancing the Selectivity of Wet Etching Process on Sige over Si/SioABSTRACTSelective etching is a critical enabler for nascent advanced...

Thermal Vacuum Analysis and Identification of Contaminant Outgassing from Polymer SealsABSTRACTOrganic outgassing from polymeric materials, particularly elastomer seals and o-rings used in...

Enabling Novel innovation in Containers profile Sculpting for Cell Structure improvementAs dynamic random-access memory (DRAM) technology continues to scale, the shrinking capacitor feature size...

BIOGRAPHY  Deepak Kumar is working as Technical Program Director at ACM Research for the past 3 years. Prior to joining ACM Research, he worked for AGC Electronics...

SEMI Releases White Paper on PM Automation as a Key Enabler of Autonomous FabsBy Natalie Shim, SEMI KoreaSEMI has released a new white paper outlining a standardization strategy for preventive...

Smart Manufacturing at SEMICON Japan 2025Shared Challenges Identified from Multiple Perspectives and the Next Step ForwardBy Akiko Yoshida, SEMI JapanBackground: Why Smart Manufacturing Is Gaining...

New Standards Initiatives Kicks Off in Japan TC ChaptersBy Takeaki Hirabara, SEMI JapanA new Task Force, the Maintenance Robot Communication (MRC) Task Force, has been established under the...

SEMI Standards Leaders Honored at SEMICON Japan 2025By Takeaki Hirabara, SEMI JapanEach year at SEMICON Japan, SEMI Japan recognizes the outstanding contributions of its Standards Program Members....