This report was developed to support the adoption of circular design principles and resource recovery practices across the semiconductor manufacturing value chain. This report streamlines discovery, accelerates adoption, and creates greater visibility into how peers are advancing circularity.
It is a consolidation of publicly available knowledge on best-known methods for recovering and recycling spent chemicals, wastewater treatment by-products, tool packaging, and other manufacturing wastes generated by integrated device manufacturers (IDMs), foundries, outsourced semiconductor assembly and test (OSAT) facilities. The review also draws on corporate sustainability reports, waste treatment technology publications, and industry data compiled by SEMI, complemented by professional experience in chemical waste management in the EU and USA. equipment manufacturers, and material suppliers.
The report identifies existing technological, regulatory, and economic enablers for material recovery, as well as barriers in legacy facility design. The primary recommendation is to accelerate adoption of proven circular solutions by improving visibility of peer practices, aligning regulatory strategies, and strengthening return-on-investment (ROI) assessments to support informed decision-making.
Tables of Contents
- Introduction & Methodology
- Current Industry Waste Paths for Circularity
- Common waste streams from semiconductor manufacturers
- Established methodologies for managing waste streams.
- Material circularity barriers in legacy fabrication plants
- Best practice by industry leaders
- Investment rationale and Return on Investment (ROI) for circular solutions
- Cost considerations and pathways to value
- Data requirements for an ROI assessment
- Regulatory assessment.
- U.S. Resource Conservation and Recovery Act
- EU Waste Framework Directive
- Considerations for Cross-Border and International Application
- Emerging Technologies for Upcycling.
- Conclusion