Electronic Specialty Gases & Systems Conference—ESGS

SEMI U Course

Monday, November 9, 2025 | 8:00am-5:00pm

Enhance your ESGS Conference experience with this exclusive SEMI U training course led by Jean-Pierre (JP) Deluca, a leak detection expert with more than 40 years of experience across the semiconductor, aerospace, automotive, medical, pharmaceutical, and refrigeration industries.

Fundamentals of Vacuum Technology and Helium Leak Detection is a comprehensive course designed to provide attendees with a practical understanding of vacuum systems, leak formation, leak measurement, and helium leak detection techniques used in semiconductor, aerospace, research, manufacturing, and high-technology industries. Participants will learn the principles of vacuum generation, gas flow, outgassing, permeation, conductance, pumping technologies, and helium mass spectrometer leak detection. The course also covers leak rate determination, industry standards, troubleshooting techniques, and real-world leak detection applications to help improve equipment reliability, product quality, and process performance.

What Attendees Will Learn

Upon completion of this course, attendees will be able to:

• Define leaks, leak flow, virtual leaks, and their impact on vacuum systems and product quality.
• Understand contaminant sizes, equivalent leak hole sizes, and leak-related defects.
• Explain vacuum fundamentals, including pressure measurement, gas density, vacuum scales, and temperature effects.
• Identify sources of gas loads, outgassing, permeation, and virtual leaks, and apply methods to minimize their impact.
• Understand vacuum flow regimes, conductance, and how they influence pumping performance.
• Compare rough vacuum and high-vacuum pumping technologies, including rotary vane, scroll, Roots, and turbomolecular pumps.
• Understand the operation and capabilities of helium mass spectrometer leak detectors.
• Explain helium properties, sources, applications, and why helium is the preferred tracer gas for leak testing.
• Select and apply appropriate helium leak testing methods, including sniffing, accumulation, hard vacuum, bombing, and split-flow techniques.
• Interpret leak detector response times, background helium levels, and published leak detector specifications.
• Establish leak rate acceptance criteria and understand common leak rate units and conversions.
• Troubleshoot high helium background conditions and improve leak detection sensitivity.
• Apply leak detection principles to real-world vacuum systems and large vacuum chamber testing applications.

Who Should Attend

This course is intended for:

• Semiconductor equipment engineers and technicians
• Vacuum system engineers and maintenance personnel
• Manufacturing, process, and reliability engineers
• Field service engineers and installation specialists
• Quality, test, and validation engineers
• Research and development personnel
• Aerospace and defense manufacturing personnel
• Leak detection and vacuum equipment users
• Facilities and equipment support personnel
• Individuals new to vacuum technology or helium leak detection who require a practical, industry-focused foundation

Recommended Experience: No prior leak detection experience is required. A basic understanding of manufacturing, engineering, or technical equipment operation is helpful but not necessary.

Already attending the ESGS Conference? Add this SEMI U course to your registration for just $695 and gain valuable technical knowledge from one of the industry's most experienced instructors.

Interested in the course only? You can register for the SEMI U Course Only Pass for $795, making this training accessible even if you are not attending the full ESGS Conference.