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November 10, 2026 - November 12, 2026

ESGS Event Tile

Driving Innovation Across the Electronic Gases Ecosystem

ESGS 2026 will take place at a new venue—the Hyatt Regency Phoenix—from November 10–12, building on the overwhelming success and momentum of last year’s event.

Add to Calendar 2026-11-10 00:00:00 2026-11-12 00:00:00 ESGS 2026—Electronic Specialty Gases & Systems Conference Driving Innovation Across the Electronic Gases EcosystemESGS 2026 will take place at a new venue—the Hyatt Regency Phoenix—from November 10–12, building on the overwhelming success and momentum of last year’s event. Hyatt Regency Phoenix 122 N 2nd St Phoenix, AZ 85004 United States SEMI.org [email protected] America/Phoenix public
Location

Hyatt Regency Phoenix
122 N 2nd St
Phoenix, AZ 85004
United States

ESGS Event Tile

The Electronic Specialty Gases & Systems Conference (ESGS) provides a forum of engagement and learning around the market, technology trends, and market drivers for electronic gases. The conference includes sections focusing on developments in the bulk, rare and specialty gas markets that are critical to the continued growth of the electronics industry.

The conference is designed for executives, buyers, product managers, and strategic planners from the electronic gases value chain including end-users, producers, and equipment suppliers. The conference features knowledgeable experts in the industry, who understand the key developments and challenges unique to this market.

Agenda

TUESDAY, NOVEMBER 10, 2026

7:00 am - 8:00 am

Breakfast

8:00 am - 8:10 am
Mike Corbett
Mike Corbett
Managing Partner
Linx Consulting

Opening Day Remarks

8:10 am - 8:30 am
Joe Stockunas, SEMI Americas
Joe Stockunas
President
SEMI Americas

Opening Keynote

8:30 am - 9:15 am
Bruce Gall, Google
Bruce Gall
Strategic Partnerships
Google

Keynote Presentation

9:15 am - 9:45 am

US Semiconductor Public Policy Update

9:45 am - 10:15 am
Rebecca Routson
Rebecca Routson
Principal Director
National Institute of Standards and Technology, NIST

Measuring the Future: CHIPS Metrology Program Updates

10:15 am - 11:00 am

Networking Break

11:00 am - 11:30 am
Photo Coming Soon
Gustavo Albuquerque
PTD Gas Systems Engineer
Intel

Gas Systems Challenges as Moore’s Law Advances

11:30 am - 12:00 pm
Mark O'Neill, Entegris
Mark O'Neill
Vice President, R&D and Engineering,
Entegris

12:00 pm - 1:15 pm

Lunch

Vapor Phase Materials and Electronics Specialty Gases

1:15 pm - 1:20 pm
Venkat Pallam
Venkat Pallam
Deputy CTO & Technology Director, Thin Film Processing
Air Liquide

Opening Session Remarks

1:20 pm - 1:50 pm
David Mandia_LAM
David Mandia, PhD
Staff Process Engineer
Lam Research

Large Grain Molybdenum Deposition

1:50 pm - 2:20 pm
Photo Coming Soon
Feng Li
Senior R&D Manager
Air Liquide Advanced Materials

Solid Precursor Delivery: Challenges and Solutions

2:20 pm - 2:50 pm
Rachel Potter EMD
Rachel Potter
VP, Specialty Gases
EMD Electronics

Tungsten Powder Supply Chain Issues & Impacts

2:50 pm - 3:35 pm

Networking Break

Contamination Control and Yield

3:35 pm - 3:40 pm
Sarah Vogt
Sarah Vogt
Director, E/R&D Gas Purification
Entegris

Opening Session Remarks

3:40 pm - 4:10 pm
Photo Coming Soon
Vindhya Kunduru
Supply Chain Engineer
Intel

IRDS Update

4:10 pm - 4:40 pm
Photo Coming Soon
Rocky Gibson
Senior Research & Development Manager
Entegris

Defining and Solving Contamination Challenges of Hydrogen Halides

4:40 pm - 5:10 pm
Photo Coming Soon
Steve Bovair
Sales Manager
deutraMed

Deuterium Supply Chain & Purity Considerations

5:10 pm - 5:20 pm
Mike Corbett
Mike Corbett
Managing Partner
Linx Consulting

Closing Remarks

WEDNESDAY, NOVEMBER 11, 2026

7:00 am - 8:00 am

Breakfast

New Technology Advancements

8:30 am - 8:40 am
Mike Corbett
Mike Corbett
Managing Partner
Linx Consulting

Opening Day Remarks

8:40 am - 8:45 am
Ashwini Sinha
Linde

Opening Session Remarks

8:45 am - 9:15 am
Photo Coming Soon
Heejeong Kim
Samsung Electronics

Isotropic Dry-Cleaning Technology for Next-Generation Semiconductor Devices

9:15 am - 9:45 am
Photo Coming Soon
Stefano Marani
President
ASP

Advanced Isotopes in SEMI

9:45 am - 10:15 am
Elizaveta Kossoy
Elizaveta Kossoy
Principal Scientist
EMD Electronics

Tailoring New Etch Gases to Challenging Applications

10:15 am - 11:00 am

Break

11:00 am - 11:30 am
Photo Coming Soon
Michael Denny
Qnity Electronics

Innovative Low-Permeation Sealing Solutions for Specialty Gas Systems

11:30 am - 12:00 pm
Jake Armstrong_Micron
Jake Armstrong
Principal Chemical Engineer
Micron
Jonathan Graham
Johnathen Graham
Senior Sales Engineer
Wonik Holdings USA

AI Applications in Automated Gas Handling/Cylinder Changeout

12:00 pm - 12:30 pm
Photo Coming Soon
Kris Chupka
Director of R&D, Gas Analysis
Nippon Sanso Matheson

Point of Use NANOCHEM Purifiers for Ultra-High Purity Inert Purge Gas Delivery in EUV Lithography Tools

Facilities and Infrastructure

12:00 pm - 1:30 pm

Lunch

1:30 pm - 1:35 pm
Kurtis Fairley
Kurtis Fairley
Director, Technical Programs North America
Edwards Vacuum

Opening Session Remarks

1:35 pm - 2:05 pm
Erin Lavigne
Erin Lavigne
Senior Director of EUV Technology Strategy and Partnerships
NY Creates

NY Creates HNA EUV Facilities and Sustainability Effort

2:05 pm - 2:35 pm
Ilya Zabelinsky
CTO
ISRL

Industry Collaboration, Roadmaps, and Pre-Competitive Action in Sub Fab

2:35 pm - 3:05 pm
Kim Fjeldsted
Sr. Applications Specialist
Ceres

Integrated Molecule Delivery Solutions for Semiconductor Manufacturing

3:05 pm - 3:50 pm

Break

Sustainability

3:50 pm - 3:55 pm
Peilun Sun headshot
Peilun Sun
Consortium Manager, SCC
SEMI

Opening Session Remarks

4:25 pm - 4:55 pm
Chris Jones
Chris Jones
Environment and Sustainability Manager
Edwards Vacuum

Abatement Update / Catalytic

4:55 pm - 5:25 pm
Blake Ericson
Onterris

Bridging the Measurement Gap: Enhancing Sustainability Compliance via Emissions Monitoring

5:25 pm - 5:30 pm
Mike Corbett
Mike Corbett
Managing Partner
Linx Consulting

Closing Remarks

6:00 pm - 8:00 pm

Networking & Poster Session Reception

THURSDAY, NOVEMBER 12, 2026

7:00 am - 8:00 am

Breakfast

Gas Metrology

8:00 am - 8:10 am
Nithin Yathapu
Senior Director, Yield Strategy
Intel

Opening Session Remarks

8:10 am - 8:40 am
Berc Kalanyan
NIST

Stability of MoCl5 in Heated Canisters and During Delivery

8:40 am - 9:10 am
Chad Nelson
Product Manager, High Purity Division
Process Insights

Fast Impurity Measurements in Electronic-Grade Rare Gases

9:10 am - 9:40 am
Connor Martens
Global Marketing Development
Thermo Fisher Scientific

Real-Time PPT Impurity Detection in Ultra-High Purity Gases for Semiconductor Fabs

9:40 am - 9:50 am
Mike Corbett
Mike Corbett
Managing Partner
Linx Consulting

Closing Remarks

Market Review and Updates

10:20 am - 10:30 am
Mark Thirsk
Mark Thirsk
Managing Partner
Linx Consulting

Opening Session Remarks

10:30 am - 11:00 am
Duncan Meldrum, Headshot
Duncan Meldrum
Chief Economist and Founder
Hilltop Economics

Economic Update

11:00 am - 11:30 am
 Inna Skvortsova
Inna Skvortsova
Research Manager, Market Intelligence
SEMI

SEMI Fab Capacity and Equipment Update

11:30 am - 12:00 pm
Phil Kornbluth
Phil Kornbluth
Founder & President
Kornbluth Helium Consulting

Helium Market Overview, Outlook & Trends

12:00 pm - 12:30 pm
Andy Tuan, Linx Consulting
Andy Tuan
Managing Director, Asia
Linx Consulting

Specialty Gas Market Update

Registration

Early Bird Pricing (Ends Sept 21)

Member: $1,295

Non-Member: $1,555

Regular Pricing

Member: $1,555

Non-Member: $1,865

Krish Raghunath
Program Manager, Programs & Committees, SEMI
[email protected]

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Travel

ESGS Hyatt Regency Phoenix

Hyatt Regency PhoenixBook your room!  

122 North Second Street, Phoenix, Arizona, 85004

Service and Benefits 
  • $219/night
  • No resort fee
  • Standard high-speed wireless Internet access
  • Shuttle Transportation (Phoenix Premium Outlets, Aji Spa & Whirlwind Golf Club) 

 

 

ESGS Hyatt Regency Phoenix

Sponsors

Thank You to Our ESGS 2026 Sponsors

Platinum

Entegris

Gold

Thermo Fisher Logo 170x65

Silver

ASTG_25 Years_170x65
Brooks Instruments 170x65
EBARA 170x65
Horiba 170x65
Process Insights_2026_170x65

Bronze

Become a Sponsor

View the 2026 ESGS Sponsorship Brochure

Sponsoring will associate your company with the industry's most respected senior executives. Sponsorship opportunities can be tailored to meet your specific branding and marketing objectives.

Contact Tim Janes at +1.720.939.4992 or [email protected]