November 10, 2026 - November 12, 2026
Driving Innovation Across the Electronic Gases Ecosystem
ESGS 2026 will take place at a new venue—the Hyatt Regency Phoenix—from November 10–12, building on the overwhelming success and momentum of last year’s event.
Location
Hyatt Regency Phoenix
122 N 2nd St
Phoenix, AZ 85004
United States
The Electronic Specialty Gases & Systems Conference (ESGS) provides a forum of engagement and learning around the market, technology trends, and market drivers for electronic gases. The conference includes sections focusing on developments in the bulk, rare and specialty gas markets that are critical to the continued growth of the electronics industry.
The conference is designed for executives, buyers, product managers, and strategic planners from the electronic gases value chain including end-users, producers, and equipment suppliers. The conference features knowledgeable experts in the industry, who understand the key developments and challenges unique to this market.
Agenda
TUESDAY, NOVEMBER 10, 2026
Breakfast and Conference Registration
Opening Day Remarks
KEYNOTE—From AI to Atoms: How the Next Semiconductor Wave Will Reshape Electronic Gases
Breaking the Commercial Deadlock: Industry-Led Strategies for Low-GWP Adoption
Does the Global Economy Matter for Semiconductors?
Networking Break
Sustaining the Leading Edge: Evolving UHP Gas Systems for Advanced Nodes
From Molecules to Manufacturing: Leveraging AI to Accelerate Integrated Advanced Specialty Gas Solutions
Lunch
Vapor Phase Materials and Electronics Specialty Gases
Opening Session Remarks
Large-Grain Molybdenum Deposition for Advanced Interconnects
Solid Precursor Delivery: Challenges and Solutions
Tungsten Powder Supply Chain Issues & Impacts
Networking Break
Contamination Control and Yield
Opening Session Remarks
The IRDS Roadmap: Origins, Structure, and the Gas/Precursor Mission
Defining and Solving Contamination Challenges of Hydrogen Halides
Deuterium Supply Chain & Purity Considerations
Closing Remarks
WEDNESDAY, NOVEMBER 11, 2026
Breakfast
New Technology Advancements
Opening Day Remarks
Opening Session Remarks
Isotropic Dry-Cleaning Technology for Next-Generation Semiconductor Devices
Zero-Nuclear-Spin Isotopes: Bridging Electronic Gases, Semiconductor Fabs & Quantum Computing
Tailoring New Etch Gases to Challenging Applications
Break
Sealing in Advanced Semiconductor Gas Delivery: Permeation, Contamination, and Reliability Tradeoffs
AI Applications in Automated Gas Handling/Cylinder Changeout
Point of Use NANOCHEM Purifiers for Ultra-High Purity Inert Purge Gas Delivery in EUV Lithography Tools
Lunch
Facilities and Infrastructure
Opening Session Remarks
Advancing Sustainable Semiconductor Innovation: NY Creates' High NA EUV Lithography Center
Precursor Sources to Process Chamber: Principles of Delivery and Control
Break
Sustainability
Opening Session Remarks
Abatement – Past, Present and Future
Bridging the Measurement Gap: Enhancing Sustainability Compliance via Emissions Monitoring
Closing Remarks
Networking & Poster Session Reception
THURSDAY, NOVEMBER 12, 2026
Breakfast
Gas Metrology
Opening Session Remarks
Stability of MoCl5 in Heated Canisters and During Delivery
Fast Impurity Measurements in Electronic-Grade Rare Gases
Advancing High Purity Gas Analysis for Semiconductor Manufacturing: Achieving part-per-trillion detection with APIMS
Break
Market Review and Updates
Opening Session Remarks
Scaling Manufacturing to Meet AI Demand - Fab Investments and Equipment Market Outlook
Impact of the Middle East Crisis on Helium Supply
Electronic Specialty Gases Market Update – From AI Demand to ESG Market Outlook
Closing Remarks
Grab n' Go Lunch
Registration
Conference Pricing
Member: $1,555
Non-Member: $1,865
Krish Raghunath
Program Manager, Programs & Committees, SEMI
[email protected]
Travel
Hyatt Regency Phoenix—Book your room!
122 North Second Street, Phoenix, Arizona, 85004
Service and Benefits
- $219/night
- No resort fee
- Standard high-speed wireless Internet access
- Shuttle Transportation (Phoenix Premium Outlets, Aji Spa & Whirlwind Golf Club)
Sponsors
Thank You to Our ESGS 2026 Sponsors
Platinum
Gold
Silver
Bronze
Event
Become a Sponsor
View the 2026 ESGS Sponsorship Brochure
Sponsoring will associate your company with the industry's most respected senior executives. Sponsorship opportunities can be tailored to meet your specific branding and marketing objectives.
Contact Tim Janes at +1.720.939.4992 or [email protected]
Exhibitor Floorplan | View the Companies You Will Meet