IRDS YE WECC Gas Team Update 2026
ABSTRACT
The International Roadmap for Devices and Systems (IRDS) serves as a collaborative platform within the semiconductor industry, uniting manufacturers, equipment suppliers, gas and chemical providers, component specialists, analytical laboratories, and metrology experts. This presentation delivers the annual update from the IRDS contamination control working group, focusing on the evolving challenges and future needs in gas purity and CVD/ALD precursor contaminants.
As semiconductor architectures become increasingly complex, contamination control has emerged as a critical factor in ensuring device reliability and yield. The working group conducts a comprehensive risk assessment across four dimensions:
Device Risks: Evaluating the implications of IC design and architectural shifts on contamination sensitivity.
Impact Risks: Assessing the likelihood and consequences of contamination from process gases.
Occurrence Risks: Investigating the probability of contaminant introduction through manufacturing, purification, and logistics.
Non-Detect List: Identifying gaps in metrology capabilities that hinder detection of critical contaminants.
The 2026 focus areas included:
Compiling FMEAs for 65+ bulk and spec gases to include critical contaminants, manufacturing process risks, and available purification
Collaboration with the Emerging Research Material Team to develop a comprehensive list of ALD/CVD/ALE precursors and identify future potential candidates
Identifying gas/precursor contamination risks with the move to complex 3D architectures.
This update not only reflects the current state of contamination control but also anticipates future challenges driven by technological advancements. It aims to foster industry-wide dialogue, solicit feedback, and establish a foundation for ongoing collaboration in developing robust contamination mitigation strategies.
BIOGRAPHY
Dr. Vindhya Kunduru is a Supply Chain Engineer specializing as Filtration Technologist at Intel Corporation in Hillsboro, Oregon, where she serves as a subject matter expert in semiconductor filtration technologies spanning liquid, airborne molecular contamination (AMC), gas purification, and contamination control systems. She is responsible for driving filtration strategy, technology development, supplier qualification, and process optimization across advanced semiconductor manufacturing operations.
Prior to her current role, Dr. Kunduru worked in process and tool engineering in Lithography at Intel, Oregon. She holds a Ph.D. in Biomedical Engineering from North Carolina State University and an M.S. in Electrical and Computer Engineering from Portland State University. Her research has resulted in multiple peer-reviewed publications and contributions spanning biosensors, nanotechnology, microfluidics, and semiconductor manufacturing technologies.