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January 27, 2021

Beneq webinar

Webinar

Enhancing Yield by Minimizing Contamination

Sponsored by
 

Beneq

 

Time

9:00 am - 10:00 am

Add to Calendar 2021-01-27 09:00:00 2021-01-27 10:00:00 Webinar - Enhancing Yield by Minimizing Contamination Webinar Enhancing Yield by Minimizing Contamination Sponsored by     Online, Central European Time Alemania SEMI.org contact@semi.org Europe/Berlin public
Location

Online, Central European Time
Germany

Beneq webinar

Semiconductor manufacturing involves corrosive gases in multiple processes. As we transition to each new technology node, e.g. from 10nm to 7nm and to 5nm, there are even more stringent fab requirements against metal and particle contamination. This poses challenges for existing coating methods such as anodization or plasma spray, which may not provide complete protection especially on critical chamber components with complex geometry. 

This webinar is particularly helpful for process engineers, equipment engineers and others, who are responsible for contamination control and equipment yield. 

Learn more about 

  • Common issues of metal or particle contamination on critical chamber components 
  • Common coating methods against corrosion, and how they compare 
  • What properties to look for e.g. purity, uniformity, when evaluating the optimal protective coating solution 
  • Unique benefits of ALD coatings with Al2O3 and Y2O3 
  • Working with your OEM partner to design, test and implement an ALD coating solution for your equipment 

Agenda

9:00 am - 9:05 am

Welcome remarks by SEMI

9:05 am - 9:45 pm
Sami Sneck
Sami Sneck
Business Executive
Beneq

Presentation by Beneq ​

Biography
Mr. Sneck, Business Executive at Beneq, joined Beneq in 2005. Since then he has held various professional and management positions at Beneq, including Product Manager, Application Manager, Director of ALD group, Head of Sales and Head of Asia, in which position he spent 2 years in Shanghai, China. He received his MSc degree in Chemical Engineering in 2001 from Helsinki University of Technology. Mr. Sneck has special expertise in Atomic Layer Deposition technology and business development. He has played a vital role in introducing various ALD production concepts and solutions to several industries ranging from jewelry to photovoltaics, electronics and semiconductor industry. Currently Mr. Sneck is responsible of Beneq’s semiconductor part coating business.

Abstract
Semiconductor manufacturing involves corrosive gases in multiple processes. As we transition to each new technology node, e.g. from 10nm to 7nm and to 5nm, there are even more stringent fab requirements against metal and particle contamination. This poses increasing challenges for existing coating methods such as anodization or plasma spray.

9:45 am - 10:00 am

Q&A and Conclusions​

REGISTRATION

Beneq webinar

This webinar is free of charge. 

Not able to attend? Register anyway. We'll send you a link to the webinar archive so you can view it at your own convenience.

Beneq webinar

PRESS AND MEDIA

If you are interested in partnering with us or have any questions about press and media, please contact us.

Serena Brischetto, Senior Manager, Marketing and Communications at sbrischetto@semi.org