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Heidelberg/Würzburg – "1 - 10 - 100 - 1000" – Achievable component heights of over 1 cm, surfaces with roughness in the order of 10 nm, structure sizes of less than 100 nm, and writing speeds over 1000 mm/s: At the SPIE Photonics West in San Francisco, from January 25th to 27th, Heidelberg Instruments will be presenting, for the first time, the new two-photon polymerization MPO 100, a multi-user tool that combines both the requirements of 3D lithography with resolutions in the 100 nm range and 3D microprinting with structure heights of over one centimeter, all in one device.

"The MPO 100 is a unique tool for microfabrication and achieves the highest resolution among additive manufacturing processes at 100 nanometers. Furthermore, the 1-10-100-1000 capability of the MPO 100 will enable users at universities, R&D institutions, as well as the industry and offer significant advantages for new developments in areas such as micro-optics, microfluidics, and biomedicine," says Dr. Benedikt Stender of Multiphoton Optics GmbH, the subsidiary of Heidelberg Instruments where the development of the MPO 100 was carried out.

The MPO 100 works with a laser wavelength in the green spectral range, which is ideally suited for the 3D structuring of typical photoresists. Furthermore, MPO 100 is optimized to use the hybrid polymers (ORMOCER®s), particularly important for various applications. In addition to sophisticated algorithms to maximize structure quality, the synchronized scanning system offers the possibility of stitching-free patterning. In addition, the MPO 100 is currently the only tool in the market equipped with a flowbox that guarantees temperature stability of up to 0.1°C and thus provides the necessary stability for large-scale exposures. Application-specific writing modes enable customer-specific printing requirements and distinguish the MPO 100 as a multi-user tool.

"With the MPO 100, we have combined the strengths of both companies in one system: Multiphoton Optics' sophisticated exposure unit for two-photon polymerization and Heidelberg Instruments' industrial platform, which guarantees the required stability and meets the necessary industry standards. The capabilities of the MPO 100 are already very popular with our customers, who benefit from the worldwide support from our service organization and ISO-certified production," says Steffen Diez, COO of Heidelberg Instruments.

Contact for further questions:
Veronika Loose, Marketing and Communications
[email protected]
+49 931 90879288

More information:
https://heidelberg-instruments.com/
https://multiphoton.de

About Heidelberg Instruments Mikrotechnik GmbH
With over 35 years of experience and more than 1,000 installed systems, Heidelberg Instruments is one of the leading international players in the development and production of high-precision photolithography systems and nanofabrication tools. Heidelberg Instruments systems are installed in industrial and scientific facilities around the world. They are used for efficient direct writing, as well as for photomask fabrication for a wide range of industries - including semiconductors, quantum computing, photonics, 2D materials, IoT, and many related application fields.

About Multiphoton Optics
Multiphoton Optics GmbH, a wholly owned subsidiary of Heidelberg Instruments Mikrotechnik GmbH, is a global solution provider for 3D lithography via two-photon polymerization (TPP). This disruptive technology enables the production of complex functional structures in micro-optics and microsystems technology, optical interconnect technology, micromechanics, and biomedical technology. The modular 3D printing platform enables the high-precision fabrication of structures in the submicrometer to millimeter range with very high throughput.

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Moore’s Law continues to evolve - dramatically changing the Field Effect Transistor (FET).  As FinFETs reach their performance limits, attention is turning to Gate All Around (GAA) architectures based on Horizontal Nanosheet technology. Such a fundamental shift in transistor architecture will create new challenges to processes and materials, presenting opportunities for companies well-positioned for this shift.

In this webinar, SEMI EMG brings experts to explain the technology trends driving the industry adoption of Gate All Around, how the major players are approaching this transition, and the implications this will have on the material supply chain

10:00 am - 11:00 am Off Add to Calendar Disabled America/Los_Angeles
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ESPOO, Finland, 3rd of February 2022 – Picosun Group and Shincron Co., Ltd. have joined forces for development and commercialization of Atomic Layer Deposition (ALD) for optical coatings. ALD technology provides uniform and conformal coatings to the even most challenging structures and is therefore well suited for high-end optical applications.

The R&D teams from both companies have worked together to tailor existing ALD processes optimizing them for the use in optical applications. In addition to standard ALD optical films, ALD magnesium fluoride (MgF2) has been researched and is now available for commercial use for the first time. So far, ALD MgF2 processes have been only presented in academic research by universities and science institutes. MgF2 is a desired material in optical applications due to its low refractive index at visible light and high transmittance in FUV optical region. It can be used as a single layer or as part of an optical stack combining low and high refractive index materials. It has also other features, such as barrier properties and high chemical stability, which bring big advantages in some applications.

The collaboration agreement was first signed in 2019 including the appointment of Shincron as Picosun’s sales representative and ALD product distributor in Japan. The collaboration was extended with Joint Development Agreement (JDA) in 2020 with the aim to develop novel and advanced ALD coatings for optical applications.

“We are very excited about the collaboration. The teamwork has been fruitful, and the results obtained now are excellent. We see optical coatings as one of the emerging ALD applications and believe in strong growth in this market”, says Jussi Rautee, CEO of Picosun.

“We are happy to add ALD technology to our offering. This way we can increase our services for our customers. We have set up a demo capability for ALD optical coatings and Japanese optical companies have shown high interest for this process”, says Masaya Narita, CEO of Shincron.

Read more: picosun.com/optics/magnesiumfluoride

More information:
Jussi Rautee
CEO, Picosun Group
Tel: +358 50 345 4457
Email: [email protected]
www.picosun.com

Masaya Narita
CEO, Shincron Co., Ltd.
Tel: +81 45 650 2411
Email: [email protected]
www.shincron.co.jp/en/

About Picosun
Picosun provides the most advanced ALD (Atomic Layer Deposition) thin film coating solutions for global industries. Picosun’s ALD solutions enable technological leap into the future, with turn-key production processes and unmatched, pioneering expertise in the field – dating back to the invention of the technology itself. Today, PICOSUN® ALD equipment are in daily manufacturing use in numerous leading industries around the world. Picosun is based in Finland, with subsidiaries in Germany, USA, Singapore, Japan, South Korea, China mainland and Taiwan, offices in India and France, and a world-wide sales and support network. Visit www.picosun.com.

About Shincron
Shincron is a leading global supplier of innovative vacuum thin film deposition equipment. Visit www.shincron.co.jp/en/ for more information.

Cranston, RI USA - Technic is proud to announce its commitment to the MATQu project, which aims to drive materials and technology options for quantum computing by bringing together leading European companies, academia, and consortia. As demand for complex computing and ever-increasing volumes of data continue to grow, quantum computing is a key emerging technology. Technic’s breadth of technology offerings in electrochemistry and semiconductor surface preparation, cleaning and etching afford a unique opportunity to accelerate development in this exciting field.

“MATQu – Materials for Quantum Computing”, led by the joint business office of the Fraunhofer Group for Microelectronics and the Research Fab Microelectronics Germany (GS VUE/FMD) as well as Fraunhofer IAF, started in June 2021 intending to support the creation of a Pan-European research infrastructure for advanced computing technologies. The project brings together world-class European research and technology organizations, industrial fabrication facilities, and leading application partners in the domain of solid-state qubits — a subject of intense global competition — to realize the vision of a European supply chain for materials and processes.

The project will create a European eco-system to expand the applicability of core components of solid-state qubits—such as Superconducting Josephson junctions (SJJs)—by improving materials, as well as processing and characterization technologies for quantum computing hardware. In the three-year project, SJJs is the primary use case as they are currently the most mature solid-state platform to realize stable superconducting qubits.

The main technical goal of the project “MATQu” is to improve and transfer materials and technologies for superconducting qubits from laboratories to the market. Several project partners have extensive infrastructures suited for this purpose and will contribute with their expertise in materials, process integration, and research to build robust and reproducible qubits. Industry-style fabrication infrastructures will allow optimizing process parameters and systematically improving the performance of superconducting qubits.

“As demand for complex computing and ever-increasing volumes of data continue to grow, quantum computing is a key emerging technology. Technic’s breadth of offerings in electrochemistry and semiconductor surface preparation, cleaning and etching afford a unique opportunity to accelerate development in this exciting field.”

- Douglas Holmes, Global Business Development Manager of Semiconductor Technology

Technic supplies some of the most advanced solutions for semiconductor fabrication and packaging in the industry including electroplating chemistry, photoresist strippers, cleaners (post-etch residue removers), metal etchants, and high purity wet chemistry, as well as manufacturing equipment and analytical controls.

Learn more about Technic Semiconductor products at https://www.technic.com/applications/semiconductor/semiconductor-fabric… or contact us at (401) 781-6100

About Technic
For over 75 years, Technic has been a global supplier of specialty chemicals, custom finishing equipment, engineered powders, and analytical control systems to the semiconductor, electronic component, printed circuit board, industrial finishing, and decorative industries. Technic is also a major supplier of engineered metal powders to the solar industry.

KITCHENER, ON, February 3, 2022 – PEER Group® is thrilled to be celebrating its 30th anniversary in 2022. The company, which opened its doors on February 3, 1992, was founded by Mike Kropp and Bob Harris, two engineers with an idea to develop reusable software that connects automated equipment with factory information systems. Since then, PEER Group has grown from two employees to more than 230, and has become a global leader in innovative factory automation software solutions for the semiconductor and related industries.

“I am as ecstatic as I am proud to be celebrating this milestone,” says Mike Kropp, PEER Group’s co-founder, president, and CEO. “When Bob and I started on this journey, neither of us could have predicted all the phenomenal experiences, challenges, accomplishments, colleagues, and customers we encountered along the way.” Echoing the sentiment of his co-founder, Harris, who serves as PEER Group’s chairman, remarks “how grateful we both are for the continued success. Nothing would have been achievable without our incredibly talented employees and world-class customers and clients.”

Highlights throughout the three decades include the opening of PEER Group’s current office space in the heart of downtown Kitchener’s Innovation District in 2000, the 2003 acquisition of TRW’s high-technology systems integration business and the subsequent establishment of an EU office in Dresden, Germany, and winning Semiconductor International’s Best Product award for PEER Tool Orchestrator (PTO) in 2007. Additionally, PEER Group has been the recipient of several industry awards and accolades, including being named a winner of Intel’s Preferred Quality Supplier (PQS) award in 2020, which recognizes companies that are part of Intel’s supply chain “whose performance consistently exceeds expectations.” PEER Group is also a ten-time recipient of Canada’s Best Medium-sized Workplaces award issued by Great Place to Work® Canada, as well as being recognized as a Great Place to Work for Women, Inclusion, Millennials, Mental Wellness, and Giving Back, among other categories.

“What’s most exciting about reaching 30 years is that the best is yet to come,” shares Kropp, noting that the global microchip shortage has drastically increased demand for PEER Group’s software and automation expertise. “We are experiencing explosive growth and as a result, we are actively adding team members across all company departments and will be opening office space in Toronto to take advantage of the engineering talent that exists in the Toronto-Waterloo Region Corridor,” says Kropp, while adding: “I can’t wait to see what the next 30 years will bring.”

About PEER Group
Smart Manufacturing starts with factory automation software. PEER Group® is the largest supplier of factory automation software for OEMs and factories in the semiconductor and related industries. We help lower the cost of automation for our customers by solving their most challenging equipment automation, data management and process control problems.

Follow us on LinkedIn and on Twitter @peergroup_inc.

ESPOO, Finland, 18th of January 2022 – Picosun takes part as an industrial partner in QuTI, a recently launched extensive research project aiming to develop new components, manufacturing and testing solutions that are needed in quantum technology. Quantum technology has gained interest in a vast array of industries on a large scale. The remarkable performance improvements it offers enable for example powerful computing and benefits in communications, healthcare, sensors, imaging and measurement applications.

The QuTI project is coordinated by VTT Technical Research Centre of Finland, and it has a total budget of around 10 million euros. Other industrial partners of the consortium include Bluefors, Afore, IQM, Rockley Photonics, CSC, Quantastica, Saab and Vexlum. The research partners are VTT, Aalto University and the University of Tampere.

“Quantum technology is a multidisciplinary and rapidly advancing field. The QuTI consortium provides an ideal starting point for strengthening the international competitiveness of Finnish technology and industry in this fast-growing field,” says QuTI project’s coordinator, Research Professor Mika Prunnila from VTT.

“Quantum technology has already taken the step from research laboratories to commercial applications. We look forward in supporting this development trend even further and being part of creating a globally competitive industrial ecosystem in Finland around this technology,” says Dr. Jani Kivioja, CTO of Picosun Group.

“Atomic Layer Deposition, or ALD, is the advanced thin film coating method for ultra-thin, highly uniform and conformal material layers that enables the digital solutions of today. It will also play a crucial role in future innovations and in the quantum computing, communication and sensing devices that will be developed in the QuTI project”, continues Jussi Rautee, CEO of Picosun Group.

More information:
Jani Kivioja
CTO, Picosun Group
Tel: +358 46 922 8804
Email: [email protected]
www.picosun.com

About Picosun
Picosun provides the most advanced ALD (Atomic Layer Deposition) thin film coating solutions for global industries. Picosun’s ALD solutions enable technological leap into the future, with turn-key production processes and unmatched, pioneering expertise in the field – dating back to the invention of the technology itself. Today, PICOSUN® ALD equipment are in daily manufacturing use in numerous leading industries around the world. Picosun is based in Finland, with subsidiaries in Germany, USA, Singapore, Japan, South Korea, China mainland and Taiwan, offices in India and France, and a world-wide sales and support network. Visit www.picosun.com.

YES (Yield Engineering Systems, Inc.), a leading manufacturer of process equipment for semiconductor advanced packaging, life sciences and “More-than-Moore” applications, today announced that Victor Huang has joined the company as its first Vice President of Legal Affairs.

Mr. Huang has served as both General Counsel for startups and Intellectual Property Counsel for some of the world’s leading technology firms, including eBay and Illumina, and has built and strategically managed patent portfolios in a variety of markets. While working to safeguard and expand YES’s intellectual property assets, he will also build the legal function and advise the company on licensing and joint development agreements, M&A activity, and a diverse range of corporate legal tasks and concerns including employment and compliance.

“Victor’s extensive experience in the strategic management of worldwide IP portfolios will be a great resource for YES as we continue our international expansion. We feel that his engineering background, coupled with his history of building scalable processes for business and legal operations in a fast-growing environment, make him an especially good fit for our team,” said Rezwan Lateef, President of YES.

Mr. Huang holds a bachelor’s degree in Electrical Engineering from the University of California at Davis, and received his JD from the University of San Francisco School of Law. He has a particular interest in issues relating to open source programs, including compliance, product security, and community relations.

About YES
YES (Yield Engineering Systems, Inc.) is a preferred provider of high-tech, cost-effective equipment for transforming surfaces, materials, and interfaces. The company’s product lines include thermal processing systems, chemical vapor deposition (CVD) systems, plasma etching tools, and wet process equipment used for the precise surface modification of semiconductor substrates, semiconductor and MEMS devices, and biodevices. With YES, customers ranging from startups to Fortune 100 companies can create and volume-produce products in a wide range of markets, including Advanced Packaging, MEMS, Augmented Reality/Virtual Reality and Life Sciences. YES is headquartered in Fremont, California, with a growing global presence. For more information, please visit www.yieldengineering.com.

Wooptix SL, a Spanish company dedicated to developing advanced imaging solutions for the semiconductor industry, will be presenting a new technique for Patterned Wafer Geometry at the upcoming SPIE Advanced Lithography conference on February 28th, 2022, in a paper published together with Applied Materials. The flatness of the silicon wafer used to manufacture integrated circuits is controlled to tight tolerances to ensure the full wafer is sufficiently flat for lithographic processing. In recent years, a metrology tool based on double Fizeau interferometry has been used to generate wafer geometry maps to correct for process induced focus issues and overlay problems. In the upcoming paper, WFPI is used successfully on patterned silicon wafers to acquire 7.65 million data points in 5 seconds on the full 300mm patterned wafer with a lateral resolution of 96µm to generate the wafer shape.

About Wooptix
Based in La Laguna Tenerife, Canary Islands, Wooptix is founded on decades of optical research done at the astrophysics department at La Laguna University in conjunction with Teide Observatory in Tenerife, one of the world’s most important astronomy research centers. Wooptix, being a venture funded company and an Intel Capital portfolio company, has used the venture funds to develop Phemet and bring it to commercialization for semiconductor the lab market and is currently in the early stages of bringing the technique in to a fully automated fab tool.

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