Q3 2025 was packed with activity. From finalizing the Standards program for SEMICON West, to organizing the event’s corresponding Global Standards Summit (GSS), the Standards team is excited to share its most recent quarterly developments.
On Tuesday, October 7, leaders from across the industry convened in Phoenix, Arizona, for the second annual GSS. This half-day summit focused on future standardization needs for supply chain traceability and environmental sustainability.
In addition, the Standards team conducted two workshops at SEMICON West. The first, SEMI Liquid Chemicals Analytical Workshop, detailed recent advances in analytical methodology and instrumentation related to particle measurement, trace metals, and organics in liquid chemicals. The second, Enhancing Voltage Sag Immunity: SEMI F47 Standards Updates & Insights Workshop, offered a forum for sharing improvements to SEMI Standard F47 to further enhance tool performance and reliability.
Finally, Q3 saw the official introduction of SEMI Standards T26 and E195. SEMI T26-0925, Specification for Electronic Supply Chain Traceability Using Distributed Ledger Technology, will be crucial for improving security and transparency for the industry’s supply chain. Additionally, SEMI E195-0925 is now available for purchase. This standard, Test Method Using Adhesive Replacement Substrates to Assess Particulate Surface Contamination on Critical Chamber Components, offers a testing approach for measuring the ISO 14644-9 cleanliness of a critical chamber component.
To participate in upcoming standard developments, learn more about becoming a member of the SEMI International Standards Program.
Global Standards Summit
The SEMI GSS made its North American debut at this year’s SEMICON West in Phoenix. Building on its inaugural event at SEMICON Japan 2024, GSS is a strategic forum dedicated to creating an industry-wide standardization roadmap for the next three and seven-year benchmarks. The 2025 GSS continued conversations from SEMICON Japan on environmental sustainability, while expanding its program to include supply chain traceability.
As geopolitical tensions, mounting cybersecurity threats, and rising technological demands continue testing the limits of the industry’s supply chain, the need for global standardization is becoming increasingly apparent. The 2025 GSS program addressed these concerns and others across multiple sessions, offering insight on how these challenges are being addressed in the industry while highlighting critical areas still in need for standards development. Key outcomes from the GSS program include:
Addressing data sharing across multiple supply chain tiers while protecting IP rights and a call for harmonization across standards. The presentation by Randy Hall from the Provenance Chain Network, offered approaches on how data owners can share information with authorized users without compromising sensitive manufacturing details. While there are standards gaps that hinder broader adoption, there is opportunity to address insufficient visibility across the industry’s supply chain amid ongoing cybersecurity threats by harmonizing across existing standards implementations.
An integrated modeling framework for informing energy efficiency and carbon reduction approaches. Developed by the International Roadmap for Devices and Systems (IRDS) Environmental Sustainability for Semiconductor Facilities (ESSF) team, this effort helps address demands for maintaining rapid technological progress while still meeting the industry’s ambitious sustainability goals.
Standardization opportunities for improving sustainability within manufacturing facilities. Nate Monosoff from Jacobs offered insight into the decision-making tradeoffs that balance sustainability with other facility performance areas, focusing on standard methods for calculating ESG performance.
GSS concluded with a panel discussion that featured leaders from AMD, FTD Solutions, Intel, The Provenance Chain Network, Jacobs, Qualcomm, and Tokyo Electron. In this session, our thought leaders discussed the fundamental importance of standardization for our industry, standards adoption, incentivizing stakeholders, and how standards can be designed to remain flexible and adaptive as technologies and regulatory landscapes evolve.
SEMI Standard T26
In line with the 2025 GSS theme of supply chain traceability, the Standards team is pleased to introduce SEMI T26, Specification for Electronic Supply Chain Traceability Using Distributed Ledger Technology. This standard was published in September to define a secure and decentralized traceability system that all members of the electronics supply chain can safely share. This system is based on distributed ledger technology to improve industry-wide reliability assurance.
Update on Document 7130C
In February, Document 7130C was approved during the North America Metrics Technical Committee Chapter Meeting. The document officially became SEMI E195 - Test Method Using Adhesive Replacement Substrates to Assess Particulate Surface Contamination of Critical Chamber Components in September.
SEMI E195 describes a quantitative method for measuring the ISO 14644-9 surface cleanliness for particle concentration of a critical chamber component (CCC), by means of an adhesive replacement substrate. The purpose of this standard is to ensure measuring and reporting consistency across CCCs or processing equipment manufacturers.
To help acquaint the industry with this standard, SEMI offered a combined, in-person course on SEMI E194 and SEMI E195 during SEMICON West. The course provided fundamental information on each standard, in addition to other process approaches for improving reliability and yield.
Other SEMI Updates:
SEMI Preventive Maintenance Automation White Paper
SEMI Korea conducted a Global PM Automation Survey in August to better understand today’s preventive maintenance readiness issues for autonomous fabs. The results will be included in SEMI’s upcoming PM Automation Whitepaper and will ultimately guide future developments for related SEMI Standards.
Standardized Semiconductor Cyber Assessment Framework
In Q3, the Semiconductor Manufacturing Cybersecurity Consortium (SMCC) released its Standardized Semiconductor Cyber Assessment (SSCA) framework. This document provides a detailed cybersecurity readiness plan for semiconductor companies across the supply chain. Its goals are to standardize industry-wide cybersecurity risk evaluations, establish and accelerate the adoption of best practices, and improve information sharing and collaboration.
Download the SSCA framework for free.
New Data Standard for Equipment Edge Governance
In June, Document 6938C was approved during the Taiwan Information & Control Technical Committee Chapter Meeting. The document officially became SEMI E196 - Guide for Equipment Edge Data Governance. SEMI E196 provides guidance for identifying equipment data supplied by manufacturers that can be used in equipment engineering or analysis applications.
New Guide to Meet IRDS Yield Table Recommendations
At the NA Summer Meetings, Document 6601B passed TC Chapter review with technical changes and a Ratification Ballot was issued in Cycle 7-2025. Pending final Procedural Review, Guide for Meeting IRDS Yield Table Recommendations for High Purity Polymer Materials and Components Used in Ultrapure Water, will cover areas that establish criteria for allowable contribution by critical components used for UPW treatment plant and distribution system. This document will be proactively updated to manage the risks associated with the high purity polymer materials used in the semiconductor process. The biggest challenges today are metals and particles and certain organics.
Flex Standards Meeting at FLEX 2026
Meet the leaders of the SEMI Standards Flexible Hybrid Electronics (FHE) Task Forces at Flex 2026, in Arizona, February 24-26, and learn about ongoing FHE standardization efforts!
Standards Introduced in Q3 2025
New and revised standards released in Q3.
Get Involved
SEMI Standards development activities take place throughout the year in all major manufacturing regions. To participate, join the SEMI International Standards Program.
SEMI Standards are available through individual download purchases or online via SEMIViews. Sign up for a 30-day SEMIViews trial.
For more information, please visit the Standards website and events page. For any questions regarding SEMI Standards activities, please contact your local SEMI Standards staff.
Paul Trio is Director of Standards at SEMI.
