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New Standards Available: Guides for Assessing Particulate Surface Contamination on Critical Chamber Components and Coupons

 By Michelle Sun, SEMI HQ

During the North America Metrics Technical Committee Chapter Meeting in February 2025, two SEMI Draft Documents originating from the Critical Chamber Components (CCC) Test Methods Task Force were reviewed and approved:

  • Document 7130C, New Standard: Test Method Using Adhesive Replacement Substrates to Assess Particulate Surface Contamination of Critical Chamber Components
  • Document 7324, New Standard: Guide to Using a Liquid Particle Counter to Assess Particulate Surface Contamination on Critical Chamber Components and Coupons

First proposed by the Semiconductor Component, Instrumentation & Subsystems (SCIS) Working Group's CCC and Particles Subcommittee, these documents describe industry-approved methods for measuring surface contamination for critical chamber components. For more information on these test methods, please visit:

https://www.semi.org/en/standards-watch-2023-jun/setting-the-standard-advancing-test-methods-for-particle-and-contamination-analysis

While Document 7324 is now available for purchase as SEMI E194, Guide to Using a Liquid Particle Counter to Assess Particulate Surface Contamination on Critical Chamber Components and Coupons, Document 7130 is expected to be published in late August 2025.

Semiconductor Device Manufacturing in a Cleanroom: Best Practices to Improve Product Reliability and Yield

In conjunction with these standards, SEMI is pleased to offer an in-person course on cleanroom best practices on Thursday, October 9 at SEMICON West in Phoenix, Arizona. This course aims to provide fundamental information on the standards mentioned above, as well as effective processes to improve production reliability and yield. It is split into four sections:

  • Module 1: AMC and SMC in the Cleanroom
  • Module 2: Contamination Troubleshooting for Root Source Identification
  • Module 3: Process Tool Parts Cleanliness and Testing
  • Module 4: Best Practices for Clean Manufacturing

If interested, the course is open for registration on the SEMICON website at: https://www.semi.org/en/event/trainings-semicon-west#overview

Get Involved

SEMI Standards development activities take place throughout the year in all major manufacturing regions. To get involved, join the SEMI International Standards Program at: www.semi.org/standardsmembership.

For more information, please visit our main Web site and current events page. If you have any questions regarding SEMI Standards activities, please contact your local SEMI Standards staff.

 

Standards Watch
SEMI
www.semi.org
August 22, 2025