October 8, 2025
SEMI Analytical Workshop
Time
9:00 am - 11:30 am
Location
In-Person—Mountain Time
Phoenix Convention Center
North Building, 200 Level, Room 229B
Phoenix, AZ
United States
Overview
The IRDS Roadmap has identified near-term challenges related to measurements of particles, trace metals and organics in liquid chemicals at levels required to meet the needs of the industry. The identified challenges are measurement of 10 nm and smaller particles, sub ppt measurement of metallic impurities, measurement of particle precursors and trace organics and online speciation of trace organics. The focus of the workshop will be on recent advances in analytical methodology and instrumentation that will enable the industry to meet these challenges.
Agenda
Chemical Quality and Consistency Requirements for the Semiconductor Industry
Analysis of Challenging Semiconductor Chemicals by ICP-MS
Addressing IRDS Yield Enhancement Challenges in Liquid Chemical Metrology
Metrology for Detection of Particle Precursor and Sub-10 nm Particles In Liquids and On-Wafer
Identification of Organic Particle Precursors using FTIR-ATR, SERS and AFM-IR
Closing Remarks
This event is over. Contact Laura Nguyen for additional information.
To access the recording, when available it will be posted here: https://www.semi.org/en/products-services/standards/step