October 8, 2025
Enhancing Voltage Sag Immunity: SEMI F47 Standard Updates & Insights Workshop
This is a must-attend session for professionals involved in semiconductor manufacturing, power quality engineering, and equipment design.
Time
2:30 pm - 4:30 pm
Location
In-Person—Mountain Time
Phoenix Convention Center
North Building, 200 Level, Room 229B
Phoenix, AZ
United States
Overview
Since 2018, the SEMI Voltage Sag Task Force—comprising Fabs, Utilities, OEMs, Tool Suppliers, and EPRI—has collaborated to address a persistent challenge: why do tools remain vulnerable to voltage sags despite the implementation of SEMI F47?
Over seven years, the task force has investigated the power quality environment, tool susceptibility, testing methodologies, and mitigation strategies. This deep dive has led to actionable recommendations for strengthening the SEMI F47 standard and improving tool resilience in future builds.
What to Expect
Join us for a comprehensive workshop that will:
- Review the task force’s findings and collaborative efforts
- Share insights from key stakeholders
- Present proposed revisions to the SEMI F47 standard
- Discuss how these updates can enhance tool performance and reliability
Agenda
SEMI F47 Background & Voltage Sag Immunity Task Force Review
Biography
Mark will present the background of the 7-year effort, the findings from the work , proposed updates and pathways towards improvements and will close out with a summary and next steps.
Baselining PQ Data from Semiconductor Fabs
Insights from Global Foundries
Biography
Zack will present on Global Foundries experiences with semiconductor tool shutdowns, efforts toward improvement and the types of voltage sags that are still causing tool downtime.
Experiences from National Grid
Biography
Clay will discuss the power quality environment, relay concepts such as area of vulnerability, and the need for including some level of three-phase voltage sag testing.
Key Findings from Research and Testing
Proposed Updates to the SEMI F47 Standard from Task Force Work
Facilities Korea TC Chapter Input
Voltage Sag Generator Readiness
Summary and Next Steps
This event is over. Contact Laura Nguyen for additional information.
To access the recording, when available it will be posted here: https://www.semi.org/en/products-services/standards/step