Serena Brischetto

Sapphire is a precious gemstone, consisting of aluminum oxide (α-Al2O3) with occasional traces of other elements such as iron, titanium, chromium, vanadium or magnesium. While sapphire stones found in nature mostly go to jewelry applications, the lab-grown sapphire – produced in a scale of up to several hundred tons per year – is widely used by the electronic industry. Now one can hardly find a branch of technology where this crystal is not used.Sapphires are mainly applied in infrared optical components, high-durability windows, wristwatch crystals, and the very thin electronic wafers used as the insulating substrates of solid-state electronics. High thermal conductivity, low reactivity, and appropriate unit cell size make sapphire an ideal material for a wide range of such electronic substrates for manufacturing of components such as LEDs and CMOS chips.SEMI spoke with Ivan Orlov, CEO of Scientific Visual, after his presentation at SEMI Strategic Materials Conference at SEMICON Europa, 12-15 November, 2019 in Munich, Germany, to learn more about the future of sapphire.SEMI: Why is sapphire an ideal material for a wide range of electronic substrates? Orlov: Sapphire undoubted advantages are its chemical inertness and ability to withstand high temperature, radiation and mechanical loads. In addition, it exhibits low dielectric loss and very good electrical insulation that makes sapphire a good candidate for substrates for LEDs and laser diodes or wafers for epitaxial growth. However, the most important advantage is that sapphire crystal lattice does very well matching semiconductor materials deposited to its surface, in particular nitrides of group III elements. To plainly benefit from these features, the grown sapphire must have as few macro- and micro-defects as possible, as substrate defects are inherited by semiconductors layers grown on the substrate surface. Hence the importance to detect defects in the raw sapphire material. This is the area where our team at Scientific Visual contributes. SEMI: Flaws are usually identified only after costly wafering and polishing steps, because rough surface of raw crystals prevents detection of the defects. What can be done to prevent defects?Orlov: Today, major players are investing in growing larger crystals without mastering in depth the growth process. Let’s face it, the semiconductor substrate industry, which is primarily based in Asia, is using empirical research methods. The raw sapphire boules are still inspected manually, and this qualitative assessment is exploited in two folds. The first step is to further process the boule. Furnace operators then adjust the growing parameters depending on the results of the manual inspection.Due to the lack of visibility into internal crystal defects, the crystal growth and its downstream processing remain an art rather than a science. The primary reasons are the difficulty to measure, locate and quantify precisely the defects in the full crystal volume. Scientific Visual equipment enables defects in raw boules to be fully quantified and categorized. With such objective measurements and knowing the full set of growth parameters, the Process Engineering (PE) team can, with the assistance of deep learning algorithms, considerably improve the growing process. Our quality control tools give Process Engineering team the “eyes” to see complete defect distribution in raw crystals, enabling it to make minor modifications in the growth process to improve yields, reduce costs and shorten the time to market for products.SEMI: What lead to those advancements and what problems did your team set out to solve? Orlov: Breakthroughs in immersion tomography, machine vision and parallel computing drove advancements in automated quality control technology. Previously crystal inspection accuracy was limited by the acuity of the operator’s eye and subjective bias. Light distortion and the diffusion of crystals made it impossible to accurately identify internal defects.Scientific Visual equipment give operators an undistorted 3D view of all defects in a crystal boule or ingot. However, only deep learning technology can correlate a hundred thousand growth data points to identify a final defect pattern.Defect pattern in non-processed item cored from EFG sapphire plate. Well visible is a typical wavy pattern of surface layers and sandwich structure in the volume. Color code marks sapphire defect density: from deep blue (non-defective material) to deep red (highest defectiveness.) SEMI: What challenges are addressed by your approach? Orlov: Increasing the yield of semiconductor substrates like Sapphire, Gallium Nitride and Silicon Carbide is paramount to reducing the price of wafers while increasing their quality. The upstream growth and downstream wafering processes are not deterministic. So far, most of the producers can only determine the quality during the late stages of the process. This condition creates huge constraints for teams in charge of production and processing. Automated Quality Control (QC) at the early stage of the production chain relieves all the unknowns, ultimately reduce the cost of material.SEMI: And what are the main opportunities?Orlov: There are massive opportunities to increase the yield and to ease the full processing chain from growth to the wafering process. Objective Quality Control (OQC) paves the way to industry-wide standards that categorize crystal quality at each step of growth to enable full certification of the defectiveness of the material and facilitate its trade and exchange.SEMI: What’s one of your predictions for the future of new materials?Orlov: The explosion of e-mobility and electric vehicles and the development of other green technologies will drive rising demand for low-defect sapphire, silicon carbide and gallium nitride substrates thanks to the streamlining of the full processing chain. Manual quality control will soon give way to full automation as quality control in sapphire and other raw crystals production is the only missing link in a fully automated semiconductor production chain. I believe that in five years, automated raw crystal inspection will become standard in the industry. Our mission is to empower every crystal grower to achieve this important milestone.Dr. Ivan Orlov obtained a Ph.D. in Crystallography from the Federal University of Technology in Switzerland EPFL and an MSc in Solid-State Physics in Moscow, Russia. Ivan co-founded Scientific Visual in 2010 to answer the challenge of the synthetic crystals industry struggling with high defect yield. Prior to this he worked in a company specialized in diamond optics. He has more than 10 years of experience in R D with focus on optical materials, industrial crystals and non-destructive quality control technologies. Dr. Orlov was a SEMI Task Force member for sapphire standard development in China and collaborates with ISO committee in Switzerland to establish industry-wide sapphire quality standards.Serena Brischetto is senior marketing and communications manager at SEMI Europe.

Healthcare has traditionally focused on one-size fits-all medication to treat populations instead of tailoring treatments to individual patients. Recent advances in stem cell technology allow researchers to create disease models for personalized medicine. SEMI spoke with Thomas Pauwelyn, Postdoctoral Researcher at imec, about trends in medical technology innovation such as organ-on-chip devices and their applications. Pauwelyn shared his views ahead of his presentation at the SEMI SMART MedTech Forum, 13-14 November, in Hall B2 (Inspiration Hub) at SEMICON Europa, 12-15 November, 2019, in Munich, Germany. Join us at the event to meet experts from imec.xpand and other key industry influencers. Registration is open. Participation is free of charge for SEMICON Europa visitors. SEMI: What triggered the healthcare move from a one-size fits-all medication to treat populations to tailored treatments? What advancements allowed researchers to create models for personalized medicine? Pauwelyn: One of the main triggers for this transition is the inefficiency of the current healthcare system. The top 10 highest grossing drugs in the U.S. are effective for only between 1 in 25 to 1 in 4 patients. Not only do most medicines only help a small share of the patients, but they are often developed in classical clinical trials with predominantly western or male participants.Recent advances in stem cell technology allow researchers to create disease models for individual patients. In other words, researchers can reprogram cells from a patient’s skin or blood sample to various cell types, including cardiac or neuronal cells, through stem cell techniques. These samples reflect the traits that make a patient unique.However, patient-in-a-dish models expose cells to very artificial environments. So these models look very different from their counterparts in the body. Organ-on-chip systems address these issues by exposing cells to physiologically relevant conditions and create more mature models. SEMI: What is exactly an organ-on-chip? Pauwelyn: Organ-on-chip devices are microfluidic cell culture chips that can revolutionize the development of drugs and personalized treatments. These devices model the pathophysiological behavior of organs and tissues. Inside these chips, cell cultures are grown and exposed to conditions that better resemble in vivo microenvironment. Different organ models can be created by exposing different cell types to an engineered microenvironment. Common examples are the heart-on-chip, lung-on-chip, gut-on-chip or brain-on-chip.SEMI: Medical technology has made astonishing advances over the years. As new medical devices emerge, what are the main challenges?Pauwelyn: Meeting stringent regulatory requirements is one of the main challenges for medical devices. Technologies related to personalized medicine do not neatly fit in existing health technology assessments and reimbursement processes.In the case of organ-on-chip devices, there are challenges related to production, qualification and adoption. Increased standardization will also help scientists compare and interpret their findings. Currently, various research groups obtain different results from own organ-on-chip systems. These systems may be fabricated from different or exotic materials, expose cells to different microenvironments or rely on other cell models. Often, only a few devices are available for testing due to limited fabrication scalability.SEMI: What did imec do to overcome those challenges?Pauwelyn: imec turned to its expertise in chip design and technology to develop a novel organ-on-chip platform in close collaboration with Micronit Microtechnologies in the InForMed project funded by the ECSEL Joint Undertaking (ECSEL2014-2-662155). The platform’s main requirements were that it could reduce handling variability by microfluidic automation, be fabricated with conventional materials compatible with production upscaling, and produce high-quality electrical recordings of cellular activity. Another essential requirement was the compatibility of the device to the standard workflow of pharmaceutical research. The user interface is based a conventional 96-well plate, and peristaltic pumps are integrated into the device.SEMI: How does the CMOS-based microelectrode array work and where do you see potential for applications in the field of personalized medicine?The imec-developed CMOS-based microelectrode array is the sensor in our organ-on-chip system that monitors the cell culture. The sensor consists of 16,384 electrodes distributed over 16 independent microfluidic wells. It detects cellular activity down to the single-cell level, including intracellular action potentials or extracellular signals from electrically active cells or impedance caused by cells growing directly over the electrode.We believe this technology has great potential for developing miniaturized patient models in the lab. By using patient cells reprogrammed to the desired cell types through stem cell technologies, we can develop patient-on-chip systems. These systems would be able to predict which treatment is best suited for a specific patient or how drugs affect certain subpopulations.SEMI: What are your expectations for the SMART MedTech Forum at SEMICON Europa 2019 in Munich? Pauwelyn: The SMART MedTech Forum brings together an interesting mixture of researchers, entrepreneurs and stakeholders in the future of healthcare. I look forward to hearing their perspectives and to discuss how personalized medicine and MedTech will help tackle current challenges.SEMI: Can you share one prediction for the future of MedTech? Pauwelyn: I believe that MedTech in the future will help us tailor treatments to each patient. Doctors will have a wide arsenal of tools available to predict which treatment will deliver both the highest chance of success and the lowest chance of adverse reactions. One of these tools could be a human-patient-on-chip system. It would consist of interlinked organ-on-chip modules with patient-derived cell models. In this way, the reaction of patients to specific treatments could be predicted without ever exposing them to potentially harmful compounds.Dr. Thomas Pauwelyn currently is a post-doctoral researcher with an Innovation Mandate grant from VLAIO, investigating strategies to valorize the results from his research. Pauwelyn’s research focuses on developing novel organ-on-chip systems for predictive toxicology and drug development. He also investigates how organ-on-chip devices may help stratify patients and help enable personalized medicine. Pauwelyn has studied at KU Leuven, Belgium, since 2008. He earned his BSc in Bioscience Engineering specializing in Catalytic Technologies in 2011 and a Master’s in Nanoscience and Nanotechnology with the Bioscience Engineering option in 2013. He completed an IWT fellowship for a PhD at KU Leuven and imec’s Life Science Technologies group in 2018.Serena Brischetto is senior manager, marketing and communications, at SEMI Europe.

The microelectronics industry is entering the era of Cloud Engineering Simulation to slash the costs and risks of new technology development and speed time-to-market in spaces like semiconductors, MEMS sensors, RF front ends, biomedical and driverless cars. In the run-up to SEMICON Europa, 12-15 November, 2019, in Munich, Germany, SEMI spoke with Ian Campbell, CEO of OnScale, about the new paradigm of Cloud Engineering Simulation. Campbell shared his views ahead of the SMART Design Forum, 14 November, 2019, 14:30 to 17:00, in Hall B1, TechARENA 1 at SEMICON Europa. Registration is open. Join the forum to meet experts from OnScale and other key industry influencers. Attendance is free of charge for all SEMICON Europa visitors.SEMI: How did your adventure with OnScale start?Campbell: I’m an engineer. When I was still in high school, I took a night class at Nashville Tech to learn AutoCAD R14, and I’ve been designing and engineering things ever since. I was introduced to Desktop Simulation in my bachelors of mechanical engineering program and used many types of simulation tools for massive design studies at the Aerospace Systems Design Lab at Georgia Tech. I’m a simulation junkie.I started my first Silicon Valley high-tech company, NextInput, in 2012 with Dr. Ryan Diestelhorst (now VP of Strategy at OnScale), to commercialize new ForceTouch and 3D Touch technologies based on our patented MEMS force sensors. At NextInput, we bought hundreds of thousands of dollars of engineering software, but were always frustrated by slow, inaccurate engineering simulation results. We dreamed about running massive simulations on Cloud Supercomputers and creating true Digital Prototypes that could replace costly, time-consuming, and risky physical prototypes.When I got the chance to join the team that became OnScale in 2017, I jumped at the opportunity. At OnScale, we took engineering simulation solvers that had been developed for the U.S. military to run on U.S. Department of Defense and DARPA supercomputers and built a cloud supercomputer platform on Amazon Web Services to run the solvers. The net-net is the world’s first on-demand, infinitely scalable Cloud Engineering Simulation platform. Now, we routinely run massive multi-billion degree of freedom simulations for Fortune 100 companies, including many from the semiconductor and MEMS industries. Since our business model is to charge per core-hour for simulations, the incredible capability we built is cost-effective and available to small startups as well. SEMI: How is the semiconductor design ecosystem evolving? How is Cloud Engineering Simulation applied to semiconductor and design industries?Campbell: The entire industry is experiencing a massive acceleration in product launch cycles and increased competition. New markets like IoT and 5G are reducing semi/MEMS product cycles from years to months. That, in turn, puts enormous pressure on semiconductor and MEMS designers. Missing a key product introduction like a flagship smartphone launch can literally make or break a company.A reliance on traditional engineering methods – schematic capture and layout of a chip, taping out (physically prototyping the chip), performing engineering validation on an e-bench, qualifying the chip (or not qualifying it and going back to the drawing board), and finally launching mass production – is no longer sustainable from a competitive perspective.Instead, market-leading firms are turning to Cloud Engineering Simulation and Digital Prototypes to explore massive design spaces, find optimum designs that beat the competition in every KPI (size, power, performance), and digitally qualify designs before ever cutting silicon, ensuring that designs are robust over their intended operating environments and performance envelopes. Large thermal analysis of a chip on a circuit board executed quickly on the OnScale Cloud Simulation Platform SEMI: Can you give us an example? Campbell: A great example is thermal analysis. Thermal effects have always had huge impacts on MEMS device performance and, more recently, they are beginning to impact performance of next-gen semiconductors, especially GaN power electronics for electric vehicles (EVs).Conducting a full system-level thermal analysis of something like an EV power management system – a power IC in a package, on a board, in an enclosure, under various loading conditions – has been a challenge from a simulation complexity perspective (degrees of freedom) and from a parametric sweep perspective (running hundreds or thousands of simulations to optimize chip placement, routing, etc.). To run these sets of simulations using legacy desktop simulation would take weeks, perhaps even a month or more. To run these massive simulations in parallel on cloud supercomputers using OnScale takes days or even hours.Our customers routinely run very large simulation studies on OnScale Cloud for thermal simulations, RF filter simulations, MEMS simulations, packaging simulations (what we call Digital Qualification), and many more use cases.SEMI: What’s one of your strategic objectives for 2020? Campbell: For 2020, we’re doubling down on MEMS and semi simulation capabilities. We will be launching additional solver capabilities like EM that will be critical in our strategic markets like 5G. We will also be launching a Cloud API so that engineers can integrate OnScale directly into their existing engineering workflows (e.g. MATLAB or EDA/CAD tools) with just a few Python commands.SEMI: Can you share one prediction for the future of semiconductor design solutions? share?Campbell: I think we will continue to see MEMS and semi designers push the envelope and bring smaller, more performant, more cost-effective solutions to market. I’d like to see more highly cost-effective flexible semi/MEMS designs come to market to enable next-gen IoT and IIoT applications. I’d also like to see more biomedical applications – biomems, microfluidics, and labs on a chip for all sorts of life-enhancing applications.SEMI: What are your expectations regarding the SMART Design Forum at SEMICON Europa 2019 in Munich? Campbell: I’m looking forward to getting back to my roots in MEMS/semi design and chatting with other designers about the future of engineering and the future of semi! Ian Campbell is a twice venture-backed Silicon Valley CEO and expert in MEMS sensors, semiconductor technology, and engineering software. Most recently, Ian co-founded OnScale, a Cloud Engineering Simulation startup backed by Intel Capital and Google’s Gradient Ventures. OnScale is revolutionizing engineering by combining world-class multiphysics solvers with Cloud supercomputers, machine learning, and artificial intelligence. Prior to co-founding OnScale, Campbell served as founder and CEO of NextInput, where he led the startup through multiple rounds of funding – totaling $12 million and an additional $4 million in research contracts with government and industry partners – and built a world-class team of engineers and scientists who developed 3D Touch and ForceTouch technologies for smartphones, wearables, industrial, and automotive interface applications. He also secured the first major smartphone OEM design wins in Asia. Campbell earned his B.S. in mechanical engineering from Middle Tennessee State University, and his MSAE in aerospace engineering and MBA from Georgia Institute of Technology.Serena Brischetto is senior manager, marketing and communications, at SEMI Europe.

Artificial intelligence and machine learning are reshaping electronic system design as consumer-facing companies like Facebook and Google design their own hardware. Electronic system design is enabling rapid changes and new innovation in automotive. Designing microchips for the commercialization of outer space faces stiff challenges.These are just a few topics that companies driving technology innovation in electronic system design will discuss at SEMICON Europa, 12-15 November 2019 in Munich, Germany. In the run-up to the event, SEMI spoke with Bob Smith, executive director of the Electronic System Design (ESD) Alliance, a SEMI Strategic Association Partner, about how the integration of the ESD Alliance with SEMI’s global platforms is extending design expertise in the worldwide electronics industry. Smith shared his views ahead of the SMART Design Forum, 14 November 2019, 14:30 to 17:00, at SEMICON Europa. Registration is open. Join the forum to meet experts from ESD Alliance and other key industry influencers. Attendance is free of charge for all SEMICON Europa visitors (Hall B1, TechARENA 1).SEMI: In August of last year, SEMI announced the ESD (Electronic System Design) Alliance joined SEMI as a Strategic Association Partner. How does this partnership benefit the design and semiconductor industries?Smith: As indicated back then by Ajit Manocha, president and CEO of SEMI, “Design is the very foundation of semiconductor innovation and manufacturing.” The integration of the ESD Alliance with SEMI’s event and global platforms enables the design community to expand its expertise to the worldwide electronics industry. The integration helps streamline collaboration and connection of SEMI members with the electronic system design, IP and fabless communities.ESD Alliance members are now able to more efficiently engage with the electronics manufacturing supply chain on technical and business issues and gain access to comprehensive global resources and platforms. Those resources include SEMI’s technology communities and activities in areas such as advocacy, international standards and environment, health and safety (EH S), industry statistics, trade and regulatory initiatives.SEMI: And what were the main opportunities for the ESD Alliance to present the scope of the brand-new collaboration? How did the ESD Alliance enlarge the scope of the semiconductor and design industries?Smith: Although the ESD Alliance has international member companies, the reach and focus of our activities was limited to North America. SEMI’s global platform allows us to spread our design initiatives worldwide. In 2019 we introduced design at SEMICON events in China, Taiwan, the U.S. and now Europe with our participation in SEMICON Europa’s SMART Design Forum. By introducing design into these global events, we are advancing SEMI’s expanded mission to represent the entire global electronic design and manufacturing chain and tighten the connection between the semiconductor and design industries.Industrywide events like SEMICON Europa and its SMART Design Forum bring the entire electronic product supply chain closer together by focusing on commercial achievements in design and presenting forward-looking, system-centric views. The Smart Design Forum is a great opportunity for attendees to deepen their understanding of the links across design and manufacturing and throughout the supply chain during sessions and informal discussions at networking and social events. These exchanges help foster the collaborations essential to addressing technical challenges and ushering exciting new electronic products from concept to consumer.SEMI: How is the semiconductor design ecosystem evolving? What disciplines are becoming integrated with those that have historically governed the scene? Can you tell us more about the concept of system-centric view?Smith: In the early days of electronic design automation (EDA), design was largely separated from manufacturing. On the design side, the goal was to design and tape-out chips. After tape-out, the chip was handed off to the manufacturing group and the design team went on to a new project. We refer to this era as chip-centric.Now, given the complexity of both chips and electronic systems, design and manufacturing can no longer be separated. Instead, they must collaborate from the beginning of a project on all aspects of system design. This system-centric view enables the delivery of smarter, faster, more powerful, and more affordable electronic products. This is a big responsibility and meeting it demands tight cooperation and collaboration across multiple disciplines including semiconductor design, packaging, software development, materials and manufacturing, system integration and testing.SEMI: What’s one of your strategic objectives for 2020? Smith: In 2020 we plan to launch our Connecting the Divide initiative to bring the design and manufacturing communities closer together to help both better understand the role of the other, the value each provides and the unique challenges each community faces. The goal is to increase the rate of collaboration between design and manufacturing in answering both industries’ need for a system-centric approach to new electronic product/system design.SEMI: Do we have good reason to be optimistic about opportunities on the horizon? What’s one prediction for the future of semiconductor design solutions you’d like to share?Smith: We seem to be surrounded by almost limitless opportunities. In terms of design, my prediction is that we will see higher levels of system design abstraction that will allow systems to be rapidly configured and verified in a way that we cannot do today. In essence, we will be able to build virtual systems rapidly to reduce the risk and cost of developing new electronic products.SEMI: What are your expectations regarding the SMART Design Forum at SEMICON Europa 2019 in Munich? Smith: We are excited to be bringing the design conversation into SEMICON Europa at the SMART Design Forum. Europe has been recognized as a leading region in embracing and driving system design. Our objective is to move deeper into system-centric design through the exchange of information and ideas at the SMART Design Forum.Robert (Bob) Smith is Executive Director of the Electronic System Design (ESD) Alliance, a SEMI Strategic Association Partner. The ESD Alliance is an international trade association of companies providing goods and services throughout the semiconductor design ecosystem. Bob began his career as an analog design engineer at Hewlett-Packard working on disk drive technology. Since then, he has spent more than 30 years in various roles in executive management, marketing, and business development primarily working with startup and other early stage companies in Electronic Design Automation (EDA) and semiconductor IP. These companies include IKOS Systems, Synopsys, LogicVision, Magma Design Automation and Uniquify. He was a member of the IPO teams that took Synopsys public in 1992 and Magma public in 2001. Bob received his BSEE from U.C. Davis and his MSEE from Stanford University. Serena Brischetto is a marketing and communications manager at SEMI Europe.

The combination of state-of-the-art semiconductor devices and upcoming manufacturing technologies for cost-effective processing of flexible film substrates has paved the way for a large variety of new applications in the emerging Flexible Hybrid Electronics (FHE).SEMI spoke with Professor Christoph Kutter, executive director, Fraunhofer EMFT, about current FHE technologies and market opportunities ahead of the Get Started with Flexible Hybrid Electronics workshop organized by Fraunhofer EMFT and supported by SEMI, 15 October, 2019, in Munich, Germany. To register for the event, click here.SEMI: Recent developments in thin semiconductors, new materials and cost-effective processing techniques have opened the door to a plurality of new applications and future products. What are the most innovative integration approaches?Kutter: Most interesting is the hybrid integration approach – the combination of most modern printing technologies and lithographically defined semi-additive copper wiring systems with state-of-the-art semiconductor components. Combining these best-of-breed technologies enables low-cost and high-volume printing but also ultra-low power electronics, which is important for every wireless device without or with limited power supply.SEMI: Integrating sensors, integrated circuits (IC), displays, antennas and communication devices on film substrates enables extremely thin and bendable form factors for applications where existing board-level technologies fall short. What are the key enabler technologies?Kutter: Key enabling technologies are fabrication of high-performance wiring patterns, integration of ultra-thin bare dies/components and ongoing advancements in roll-to-roll processing of film substrates. Besides the manufacturing technologies, materials such as electronic inks, substrates, isolation and passivation layers play a key role.SEMI: Are you currently working and experimenting on something particularly exciting?Kutter: We are in the process of developing an adaptive roll-to-roll direct imaging system that analyzes the position of the components manufactured before adaptive lithography steps are carried out in real time. We think that this concept will open up completely new processing possibilities for us. The technical infrastructure making this development possible is funded within the framework of the Research Fab Microelectronics Germany (FMD), the largest cross-site R D cooperation for microelectronics and nanoelectronics in Europe.SEMI: Can you share some details about the Fraunhofer EMFT roadmap?Kutter: Fraunhofer will push the hybrid integration – for example, combining printing technologies with high-performance CMOS – since we are convinced that hybrid integration is the only way to offer low-power systems for IoT with the highest performance and at the lowest cost. For this purpose, we are currently setting up a roll-to-roll die bond and component assembly machine.SEMI: What are your expectations for the future of flexible electronics and why would you recommend attending the workshop in Munich?Kutter: Flexible hybrid integration is becoming more important and offers the best of both worlds: mass volume printing technologies integrated with high performance ultra-low power electronics. You will see many examples of hybrid integration approaches during the workshop. This is a very important opportunity to highlight the latest developments in the semiconductor industry. Researchers, market analysts, material and product developers, and equipment suppliers will gather to provide insights into the latest flexible hybrid electronics innovations. We are particularly proud to organize this platform with SEMI and FlexTech Alliance.Agenda - Get Started with Flexible Hybrid ElectronicsLocation: Fraunhofer EMFT, Hansastrasse 27d, 80686 Munich, GermanyConference Chair: Prof. Dr. Christoph KutterENTRANCE Fees: 150 € VAT excl.Contact: [email protected] Prof. Dr. Christoph Kutter is the director of the Fraunhofer EMFT, focusing on sensing technologies based on silicon electronics and flexible hybrid integration technologies.Kutter completed his physics studies at TU Munich. In 1995, he earned his doctorate in physics at the University of Konstanz. Serena Brischetto is a marketing and communications manager at SEMI Europe.

The evolution of industrial and non-industrial automation, smart manufacturing, and Industry 4.0 technologies have increased demand for vision systems that support robust, reliable imaging industrial applications. What factors are driving growth in the machine vision market today?SEMI spoke with Frederic Laune, Business Manager, European Technology, Corning, about how Corning® Varioptic® Lenses are vital to advancing the speed, efficiency, and integration of products using computer imaging. Laune shared his views ahead of his presentation at SEMI MEMS Imaging Sensors Summit, 25-27 September, 2019, at the WTC in Grenoble, France. Join us at the event to meet Corning and many other key industry influencing players. Registration is open.SEMI: Corning's markets include optical communications, mobile consumer electronics, display technology, automotive, and life sciences vessels. Back in June 2019, Corning Incorporated announced that it had delivered its 2 millionth Corning® Varioptic® Lens for industrial applications. What drove this great milestone?Laune: This milestone was met thanks to the fact that Corning Varioptic’s solution solves several problems generated by classical motorized solutions used in industrial applications: limited number of actuation cycles, poor vibration and shock resistance, size (meaning bulky), and high-power consumption. Before Varioptic, there was no variable focus solution that worked well.In addition, the explosion of the CMOS sensor technology helped drive down the cost of imaging solutions for industrial devices, increasing the number of applications and shipping volumes.SEMI: What inspired Corning Varioptic Lenses?Laune: Varioptic was started in 2002 by Dr. Bruno Berge, a French physicist turned entrepreneur. Inspired by the work of Gabriel Lippmann, the 1908 Nobel Prize winner for the invention of color photography, Dr. Berge explored the shape-altering effects of an electric charge when applied to two liquids, a phenomenon referred to as electrowetting. His research ultimately led to the creation of liquid lenses.Fast forward to 2017, when Varioptic became a part of Corning through an acquisition that included Varioptic and Invenios technologies. We believe the synergies from this acquisition will lead to exciting new liquid lens application opportunities that align with Corning’s growth strategy and core capabilities. Corning is one of the world’s leading innovators in materials science. For more than 165 years, Corning has applied its unparalleled expertise in glass science, ceramic science, and optical physics to develop products that transform industries and enhance people’s lives.SEMI: What differentiates traditional camera systems from adjustable lens solutions?Laune: Traditional industrial cameras are usually fixed focus, meaning that the image is sharp only in a limited distance range. Unlike consumer camera applications, there were no good solutions for variable or auto focus cameras in the industrial space. This is due to the intrinsic limitations of motorized technologies.Therefore, customers were using, for example, several cameras to focus at several distances. This compromises the optical quality by closing the objective in order to increase the depth of field, therefore limiting resolution and leading to a need for more light.The cameras using Corning Varioptic’s technology offer more functionality with their ability to focus, whatever the distance, in a fast, reliable, and accurate fashion, and with lower power consumption than traditional mechanical solutions. The upshot is that the product that can withstand heat, vibration, mechanical shocks, and high numbers of focus cycles in tough industrial environments. SEMI: And how is electrowetting enabling industrial devices to capture images and process information quickly and clearly? Laune: In two words: fast and accurate.Electrowetting has unique features – with our two-liquid solution, we combine fast focus with high vibration and shock resistance, and the added benefit of low power consumption.What’s more, our programmable lens can be reconfigured on demand. The lens adapts rapidly and continuously from diverging to converging and can be modeled to support demanding variable focus applications. Our lenses can change their focus in milliseconds, similar to the human eye, and capture fast-moving objects at varying distances. The use of liquid, over mechanical solutions, allows us to create a small form factor, saving precious space and reducing power consumption.SEMI: What industrial applications are taking advantage of this technology? Can you name one example?Laune: 2D barcode readers and industrial vision are our main markets. There is also a strong adoption of our technology in medical applications.SEMI: What does the rise of machine vision mean for manufacturers? Give us one prediction about the opportunities offered by advanced imaging applications.Laune: A great example is the use of 2D barcode readers and liquid lenses to track your ecommerce order, point to point. Another example is full product traceability by implementing a 2D barcode on every component of a given product globally to improve product quality. The varying and adjustable focus abilities of our liquid lens technology make it possible for barcode scanners to track products of different heights, allowing manufactures to improve their processes and logistics.Beyond these examples, tracking and analyzing are booming, thanks to the combination of low-cost CMOS sensor technology, increasing processing power, innovative algorithms (deep learning, AI, neuromorphic processors, etc.), and better image quality due to the progress of lens technology, Varioptic being one.We see an opportunity to improve people’s lives, such as enabling better analysis of medical images and improving the use of cameras in biomedical technologies.SEMI: Quality inspection and automation, adoption of Industrial 4.0 technologies, government initiatives. If you were to choose one, what main factor will drive growth in the machine vision market?Laune: It is difficult to pick just one. I believe that full traceability (monitoring individual parts throughout the production process) has interesting implications as compliance and regulatory efforts ramp up and stronger security of goods becomes more important, particularly as consumers become engaged in food safety and tracing products throughout the supply chain.SEMI: What are your expectations for the SEMI MEMS Imaging Sensors Summit and why would you invite your peers to attend? Laune: I strongly believe in the power of human interactions in technology and science! Ideas come from discussions and physical interactions. The SEMI MEMS Imaging Sensors Summit is a great place to network, meet people, and think about the future! Frederic Laune is the business manager leading the Corning® Varioptic® Lenses business. Laune joined Varioptic as an R D engineer in 2003 after spending the first eight years of his career developing novel active components for the optical telecom industry. At the time, Varioptic was a newly created start-up aiming to develop liquid lens technology for industrial applications. After designing the first two Varioptic commercial products, the Arctic 320 and Artic 416, Laune stepped up as head of Varioptic’s R D department to focus on product and performance improvements. In 2010, he was appointed sales and marketing lead for the company. Varioptic was acquired by Corning Incorporated in early 2017. Laune received a master’s degree in physics and optics from University Pierre and Marie Curie (Paris) in 1995.Serena Brischetto is a marketing and communications manager at SEMI Europe.

SEMI spoke with Dr. Mikko Söderlund, sales director for Beneq’s semiconductor business, about trends in Atomic Layer Deposition (ALD) applications. Söderlund shared his views ahead of his presentation at SEMI MEMS Imaging Sensors Summit, 25-27 September, 2019, at the WTC in Grenoble, France. Join us at the event to meet Beneq and other key industry influencers. Registration is open.SEMI: The Backside Illuminated (BSI) CMOS Image Sensors (CIS) market continues to experience steady growth. Which applications are currently driving market growth?Söderlund: BSI CMOS Image Sensor market continues to be driven by mobile, security, automotive and Internet of Things (IoT) applications – so there seems to be plenty of opportunities for BSI CIS market to grow further.SEMI: What is critical for advanced thin-film deposition methods to extract best electrical performance?Söderlund: It is critical to control the material properties of the deposited layer (such as charge density, resistivity or barrier property) and of course, film uniformity and conformality. Furthermore, controlling material interfaces is also important, especially for sensitive III-V materials. {% video_player "embed_player" overrideable=False, type='scriptV4', hide_playlist=True, viral_sharing=False, embed_button=False, width='350', height='197', player_id='12721134435', style='margin: 0px auto; display: block; float: right; margin-left: auto; margin-right: auto; width: 350px;' %} Coatings and material features based on existing standard techniques can be very expensive, or not feasible at all. What does Atomic Layer Deposition (ALD), as a thin film coating method, offer in particular?Söderlund: ALD offers dense, highly conformal and pinhole-free best-in-class functional layers for dielectrics, passivation, encapsulation and much more. As a gentle and precise layer-by-layer method, ALD is extremely well-suited for deposition of such performance critical layers over large surface areas such as a cassette of wafers.SEMI: Please describe the Atomic Layer Deposition (ALD) coating process. Söderlund: ALD is based on a self-limiting surface reaction controlled thin film deposition. During coating, two or more chemical vapors or gaseous precursors react sequentially on the substrate surface, producing a solid thin film (see schematic below). Most ALD coating systems use a flow-through traveling wave setup, where an inert carrier gas flows through the system and precursors are injected as very short pulses into this carrier flow. The carrier gas flow takes the precursor pulses as sequential waves through the reaction chamber, followed by a pumping line, filtering systems and, eventually, a vacuum pump.SEMI: What are the two leading edge ALD applications?Söderlund: Today’s leading-edge ALD applications are in logic (high-k/metal gate, multiple patterning) and memory (DRAM capacitor, 3D NAND). Within the More-than-Moore (MtM) markets, CIS and MEMS (actuators and sensors, RF) have been early adopters of ALD, and we also see ALD being introduced in GaN Power and RF, as well as photonics.SEMI: Give us one prediction about the opportunities offered by advanced imaging applications.Söderlund: The large diversity of imaging applications will continue to drive growth and innovation. For example, machine vision is expected to transform the imaging landscape. We see this as a big opportunity for advanced thin-film deposition methods such as ALD, provided that the tools are versatile enough to address the diverse manufacturing requirements.SEMI: What are your expectations for SEMI MEMS Imaging Sensors Summit and why do you invite your peers to attend? Söderlund: The summit brings together all key RF stakeholders in the MEMS and imaging sensors industry, and we are looking forward to a great event. It’s a special event for us as we are officially launching a new ALD cluster tool product specifically engineered for the MtM applications – so this brings great excitement that we want to share with the attendees.Dr. Mikko Söderlund is Sales Director for Beneq’s semiconductor business. He has more than 20 years of experience in product development, product management, technical sales and business development across the photonics, OLED, and semiconductor industries. Mikko received his Ph.D. in Micro- and Nanotechnology from the Helsinki University of Technology. Serena Brischetto is a marketing and communications manager at SEMI Europe.

Automotive original equipment manufacturers (OEMs) and their direct suppliers of parts and systems share a vision: Next-generation vehicles will be more electric, autonomous and connected. At a market size of more than $1 trillion, automotive is steadily becoming a high-tech market as cars morph into advanced technology platforms with partially or fully autonomous features. Call them semiconductors on wheels. Big players such as Google and many carmakers are investing heavily in chip advances to help drive increases in silicon content in automobiles.At SEMICON Europa, Pierrick Boulay, Solid State Lighting and Lighting Systems analyst at Yole Développement, will provide a market update on autonomous automobile trends including the state of sensors, radars, cameras and LiDARs as the industry works to increase the level of autonomy and electrification.Autonomous vehicle design can only thrive with the development of an industry standard for chip and device traceability across the supply chain. The importance of chip traceability to the automotive industry is reflected in its central role in driving a chip traceability standard.According to Heidi Hoffman, senior director of technology communities marketing at SEMI, “chip traceability is one of the next big things for the technology industry. The benefits are enormous, and the upsides – including yield enhancements, counterfeiting safeguards, and support for new applications – are plentiful. But the implementation challenges of chip traceability are also big and will require considerable effort to overcome. The biggest hurdle of all? We need to transcend industry fears by demonstrating that we can secure IP when it is shared across the hardware supply chain.” The Importance of Standards, Data Collection and Collaboration Across the Supply ChainThe automotive industry has long embraced tracing the sources of defects. Now, as the automotive and semiconductor supply chains increasingly overlap, traceability has taken on greater importance in the semiconductor industry. SEMI committees, task forces and events such as the Smart Transportation Forum at SEMICON Europa are ideal platforms for collaborating to develop new standards and best practices for the automotive industry.Earlier this year, German luxury automobile maker Audi AG became the first automotive original equipment manufacturer (OEM) to join SEMI as member, strengthening alignment across automotive supply-chain segments. At SEMICON Europa, the SMART Transportation Forum and Pavilion, staged by the SEMI Global Automotive Advisory Council (GAAC) and bolstered by the Electronic System Design Alliance, a SEMI Strategic Association Partner, will gather key stakeholders across the automotive value chain, from design and semiconductor equipment to materials and carmakers, to explore innovation opportunities in automotive electronics. SEMI Global Automotive Advisory Council (GAAC) “If the industry wants to reach the goal of zero defects, a new collaborative approach is necessary,” observed Antoine Amade, senior regional director EMEA at Entegris. At SEMICON Europa, Amade will present new ways to collaborate in reducing chip defectivity and meet other challenges in the automotive industry.More than half of semiconductor failures on the automotive assembly line today (so-called 0km failures) are traced to semiconductor fab defectivity. “The increasing semiconductor content in automobiles – driven by growth in ADAS, electrification and autonomy – has put a growing focus on the quality and reliability of these devices and their implications for consumer safety and satisfaction,” said Oreste Donzella, senior vice president and CMO at KLA.The smart manufacturing (Industry 4.0) revolution is already spurring higher performance and great efficiencies throughout the supply chain and will also be crucial to driving innovation in automotive. Smart manufacturing makes possible significant improvements in factory key performance indicators (KPI) for cycle time, on-time delivery, overall equipment effectiveness, cost and product quality.“These KPI gains are key to meeting quality levels the automotive industry must reach to support the deployment of autonomous driving vehicles,” said John R. Behnke, general manager of Final Phase Systems at INFICON. In his talk at SEMICON Europa, Behnke will provide an overview of existing, in-progress, and future smart manufacturing solutions for the semiconductor industry and their impact on the automotive supply chain. The SMART Transportation Forum, 13 November, 2019 (9:30-15:30 at ICM Munich, room 14c) at SEMICON Europa is the premier platform for key stakeholders to connect, collaborate and innovate across the automotive value chain. Automotive and semiconductor industry experts will offer insights into trends in design, semiconductor equipment and materials, and automotive innovation and the roadmap to 2030. The SMART Transportation Forum will also showcase innovations in imaging, sensing, artificial intelligence (AI), smart manufacturing and L5 mobility.Other SEMICON Europa highlights: Advanced Packaging Conference: Packaging and Test Challenges Towards High Reliability (12-13 November 2019) 23rd Fab Management Forum: Game Changers for Semiconductor Operations(11-12 November 2019) Strategic Materials Conference: Strategic Materials Enabling Industry Roadmaps(12-13 November 2019) SEMICON Europa registration is open for visitors and exhibitors. For more details, please visit the SEMICON Europa website and connect with SEMI Europe on Twitter or LinkedIn @SEMIEurope (use #SEMICONEuropa).Learn more about the SEMI chip traceability standard – SEMI T23 - Specification for Single Device Traceability for the Supply Chain – and SEMI Technology Communities.Serena Brischetto is a marketing and communications manager at SEMI Europe.

Despite market saturation and stagnation saddling many business sectors, MEMS remains a shining star in the semiconductor industry. Opportunities in automotive, consumer electronics, mobile, medical are rising. What is supporting this industry growth? Who are the big players on the horizon?SEMI spoke with Dimitrios Damianos, Technology Market Analyst, Photonics, Sensing and Display division at Yole Développement, about MEMS market dynamics and future trends. Damianos shared his views ahead of his presentation at SEMI MEMS Imaging Sensors Summit, 25-27 September, 2019, at the WTC in Grenoble, France. Join us at the event to meet experts from Yole and many other key industry influencers. Registration is open.SEMI: MEMS and sensors is one of the healthiest industries not only in Europe but globally. Despite a global economic slowdown, the MEMS and sensors is still growing. What is fueling this growth?Damianos: The value of the global MEMS and sensor market will almost double from $48 billion in 2018 to $93 billion in 2024. In 2018 the MEMS and sensor market represented more than 10% of the total IC market, as more and more MEMS devices and sensors, such as MEMS, image sensors, and RF filters, are integrated in end products in consumer and automotive. In particular, the value of the MEMS-only market reached $11.6 billion in 2018, with consumer applications accounting for more than 60% of the total market. From 2019 to 2024 the MEMS market will grow 8.3% annually in value driven by pressure (for TPMS), RF (for V2X 5G communications), inertial (for ADAS) and future MEMS (such as pMUT for ultrasonic fingerprint) (Source: Status of the MEMS Industry report, Yole Développement, 2019). SEMI: How are MEMS shaping the semiconductor industry today? Damianos: MEMS have a make-smarter enabling capability. They are providing context for new applications and services in transportation, mobility, health, and security. Large companies such as Alibaba and Google are considering MEMS as a critical element in their business solution domains covering the upcoming smart home, smart campus, smart city and smart industry applications. MEMS have key features that correspond to these companies’ criteria for accuracy, small size (without performance degradation), low power and always on (e.g. microphones). Furthermore, with the advent of sensor fusion and edge computing, more sensor data can be processed, maximizing the qualitative and useful information about us and our surroundings. This has a huge impact in all markets, especially consumer.SEMI: MEMS foundries performed well thanks to the boom in industrial and medical applications. Who are the big players right now?Damianos: During 2018, all foundries saw their revenue increase. STMicroelectronics, Teledyne Dalsa, Silex, IMT, Micralyne and Philips Innovation Service are important MEMS foundry players that offer services for various MEMS devices used in medical and industrial markets, among others. On one hand, medical applications were driven mostly by microfluidics, flowmeters, pressure and inertial MEMS. On the other hand, industrial applications were driven by inkjet heads, microbolometers and pressure MEMS. The market prospect, however, is huge for RF MEMS and oscillators that will be used in next-generation 5G infrastructure. SEMI: What is the current status of MEMS for automotive applications? What are the related market drivers? Damianos: In automotive applications, accelerometers and pressure sensors still account for the lion’s share in units. Pressure sensors will grow at more than 8% with Tire Pressure Monitoring System (TPMS) implemented in Chinese vehicles in the near future. After 2019 and 2020, with the new Chinese standard, GB 2614, TPMS will become compulsory: 100% of all new vehicles will have TPMS. Also, automotive MEMS could grow quicker than the corresponding car market (currently at approximately 3%). The reason is a higher number of many different MEMS devices that are being integrated in cars, such as MEMS inertial measurement units (IMUs), TPMS, environmental MEMS for gas and particle monitoring in-cabin and microphones for hands-free voice commands.SEMI: After years of decline, the inkjet heads industry is growing again. What other segments are benefiting from MEMS technology applications? Can you name two examples?Damianos: RF MEMS (BAW filters) is also benefiting from applications in smartphones and will continue to benefit with the arrival of 5G. 5G means additional high frequency sub-6 GHz bands that can only be addressed by BAW filters. Moreover, new infrastructure approach using active antennas will create an expanding market for BAW.Another segment is inertial sensors. Inertial MEMS already have a high potential in wellness and fitness wearables and are gaining support for medical wearable applications to monitor patient activity, with the aim to prevent seizure in cases of epilepsy and other mental disorders. Compared to other types of sensors, MEMS is the golden technology for inertial sensors integrated into medical wearables. They are used for rehabilitation systems, activity trackers and assistance living/fall detection. Specifically, the IMU market will continue to grow for consumer and automotive applications as their price and form factor continue to shrink and they replace traditional standalone MEMS accelerometers and gyroscopes. However, the inertial sensor market will mostly grow for smartphone applications (mostly 6DOF, with 9DOF volumes being comparatively low).SEMI: Give us one prediction about the opportunities offered by the MEMS technology. Damianos: Sensor fusion is becoming more and more relevant since billions of MEMS sensors are made every year. The upcoming 5G revolution will make connectivity easier than ever, creating exponentially more data. To make these data meaningful, data processing is mandatory. Big data is an industry born of recent advancements in AI and machine learning, built upon and fueled by a wealth of new data from ever-expanding sensor applications. An upcoming trend is edge computing, with sensors and MEMS driving a new age of technology. Sensors are digitizing the human experience, and as the real and virtual worlds move closer together, it will be sensors that bind them, enabling new experiences for users everywhere. Running AI at the edge, coupled with sensor fusion, will open new applications for MEMS in audio, motion, olfactometry, and imaging. We also expect that new MEMS devices (microspeakers, ultrasonic fingerprint, pMUT) and piezoelectric MEMS technology could rejuvenate the MEMS market. SEMI: What are your expectations for SEMI MEMS Imaging Sensors Summit and why would you invite your peers to attend? Damianos: SEMI is organizing another very successful event, gathering experts from the Imaging and MEMS industries. We are at a turning point of innovation, with many technological advancements in AI, IoT, AR/VR, biometrics, and other areas where Imaging and MEMS technologies are paramount. Yole is excited to hear the thoughts of many high-profile experts on existing activities and future prospects within their organizations. If you are too, then it is an event that you shouldn’t miss!Dimitrios Damianos, Ph.D. is a Technology and Market Analyst in the Photonics, Sensing and Display division at Yole Développement (Yole). Damianos is a member of a Yole team that produces technology and market reports on the imaging industry including photonics and sensors. Damianos holds a MSc degree in Photonics from the University of Patras (Greece). After his research on theoretical and experimental quantum optics and laser light generation, Dimitrios pursued a Ph.D. in optical and electrical characterization of dielectric materials on silicon with applications in photovoltaics and image sensors, as well as SOI for microelectronics at Grenoble’s university (France). He has also authored and co-authored several scientific papers in international peer-reviewed journals. Learn more! Join the webinar on 5th September 2019. Registration is open! Serena Brischetto is a marketing and communications manager at SEMI Europe.

SEMI spoke with Thomas Fries, founder and CEO of FRT GmbH, about how hybrid metrology is shaping multi-sensor metrology tools to enhance measurement precision as the industry moves away from a single-sensor approach.Fries offered his views ahead of the SEMI MEMS Imaging Sensors Summit, 25 to 27 September 2019 in Grenoble, France. Join us at the event to meet experts from FRT Metrology and many other MEMS, imaging and sensors companies. Registration is open. SEMI: Metrology in front-end used to be straightforward. But then, as the number of tasks to be implemented increased, we moved to a multi-sensors approach. What drove this transition?Fries: I believe it´s more about software than about sensors. But of course the basis is the hardware. So, most metrology tools were designed around a specific sensor, e.g. a white light interferometer.A rigid frame, wafer fixtures, scanning tables etc. were then added to develop a complete system. In manufacturing more machinery was added, like handling systems, cleanroom equipment and more sensors, mainly for additive functions such as reading IDs or measuring temperature. The center was still the one and only sensor, being pimped more and more by some hardware features and a lot of software.SEMI: How are sensors and software shaping the way metrology is applied today?Fries: Today a huge number of optical sensors are available to provide various measurement options. But sometimes there are only very slight differences from one sensor to the other. A tiny variation may determine whether we solve a problem or end up fishing in troubled waters.And of course using different machines with those sensors requires high budgets for capital investment, used floor space, measuring time, etc. A multi-sensor platform solves all these problems. But again, it is the software that makes the real difference.SEMI: What lead to those advancements in metrology? What problems did they set out to solve?Fries: Metrology has been evolving ever since the measurement standards were established. The first challenge was to create a flexible mechanical platform that was also reliable and stable. All components were designed to be integrated into one system, mechanically, electrically and of course in the software.This level of integration requires not only an appropriate user interface, but also data formats and evaluation algorithms that leverage multi-sensor hardware. Today every metrology tool in the fab is justified by the application, not by specific sensors or specs. Of course the application leads to a set of specs, but the solution for the metrology task is realized within the software.New developments in metrology combine expertise in system design, physical knowledge in metrology and materials, mechanical engineering and also mathematical and software skills.The last step was the implementation of hybrid metrology functionality into a multi-sensor system that opens totally new doors in metrology. Before multi-sensors development, quite a few hitches could not be properly solved. SEMI: This is especially true when we consider applications in advanced packaging and MEMS manufacturing. What is in your opinion the main challenge?Fries: Specifically, in MEMS and advanced packaging we face multiple metrology challenges, as various processes run in one step and conditions on the wafer may vary quite often. In this case, a high degree of flexibility, up to the option to upgrade the metrology tool at any time or place, is a priceless advantage. Besides, cost effects for footprint, throughput and investment play a key role.A central task for nearly every customer application is to combine global measurements (complete wafer) and local measurements (per die) within one recipe. This is a perfect case for a multi-sensor platform. Measuring step heights and film thickness in one take is also an everyday routine. Combining those characteristics to measure hidden structures (hybrid metrology) is unique.SEMI: How will hybrid metrology enhance measurement precision and where do you expect the multi-sensor approach to be more applicable?Fries: The first advantage is the ability to measure properties that you cannot access directly. On top of that, all the previously mentioned features such as facing multiple metrology tasks, the combination of complete wafer and per die measurement are playing key roles. The precision of specific measuring tasks can be optimized by calibrating sensors against each other or combining results to get rid of noise or artefacts.MEMS and advanced packaging are natural playgrounds for hybrid metrology. But already today we see applications in high volume manufacturing in the 300mm fabs. As structures on wafers shrink, wafers are getting thinner and the whole process is becoming more and more complex. The classic one-sensor metrology tool is running out of gas. SEMI: What are your expectations regarding the summit in Grenoble, and for the future of the MEMS Sensors technology?Fries: FRT has always been very strong in MEMS and sensors and we have attended and exhibited at the SEMI MEMS Imaging Sensors Summit from the very beginning. The summit is always a very good meeting point for the community, and a perfect training session that gives participants extended updates in all fields. And of course, it grows our network and gives us the opportunity to show our latest products and applications.If you really want to know how the future of MEMS and sensors will look like, join the summit and don´t miss the chance to pass by the exhibition to meet FRT and many other industry leaders.Dr. Thomas Fries lives with his family close to Cologne. He is engaged in a variety of activities: as technical advisor to various ministries, supervisory board of PlanOptik AG, board and advisory board of IVAM, board member of COPT.NRW e. V., just to name a few. FRT supports many social projects as well as kindergartens and schools. Motorcycles and cars are still a great passion alongside his family.Serena Brischetto is senior marketing and communications manager at SEMI Europe.