MECARO Co., Ltd.

Mecaro Co Ltd  has been manufacturing the Heater block mainly,Chemical source for Semiconductor Industry and SUSCEPTOR for LCD industry. Heater Block is the device which heats up the wafer in the Semiconductor manufacturing process or the glass of the LCD manufacturing process. It is to optimizing the best processing environment for purge gas system and wafer chucking. Heater Block is used at the process under 500 degree and is being most widely used for CVD, PVD and Asher due to its superior thermal conductivity and easy surface coating. Precursor(Chemical source) which is used in Thin-film Deposition. Mecaro produces the Chemical Source for Thin-film Deposition is usually use for CVD, ALD, Sol-gel. Divided into Low-end products for mass production such as BPSG, TEOS, SOG and High-end products which consists the core of Memory such as Ru, Co, STO, BST etc. Main producing precursors are ZM40, Cp-Zr , TiCl4 etc.