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Sapphire is a precious gemstone, consisting of aluminum oxide (α-Al2O3) with occasional traces of other elements such as iron, titanium, chromium, vanadium or magnesium. While sapphire stones found in nature mostly go to jewelry applications, the lab-grown sapphire – produced in a scale of up to several hundred tons per year – is widely used by the electronic industry. Now one can hardly find a branch of technology where this crystal is not used.Sapphires are mainly applied in infrared optical components, high-durability windows, wristwatch crystals, and the very thin electronic wafers used as the insulating substrates of solid-state electronics. High thermal conductivity, low reactivity, and appropriate unit cell size make sapphire an ideal material for a wide range of such electronic substrates for manufacturing of components such as LEDs and CMOS chips.SEMI spoke with Ivan Orlov, CEO of Scientific Visual, after his presentation at SEMI Strategic Materials Conference at SEMICON Europa, 12-15 November, 2019 in Munich, Germany, to learn more about the future of sapphire.SEMI: Why is sapphire an ideal material for a wide range of electronic substrates? Orlov: Sapphire undoubted advantages are its chemical inertness and ability to withstand high temperature, radiation and mechanical loads. In addition, it exhibits low dielectric loss and very good electrical insulation that makes sapphire a good candidate for substrates for LEDs and laser diodes or wafers for epitaxial growth. However, the most important advantage is that sapphire crystal lattice does very well matching semiconductor materials deposited to its surface, in particular nitrides of group III elements. To plainly benefit from these features, the grown sapphire must have as few macro- and micro-defects as possible, as substrate defects are inherited by semiconductors layers grown on the substrate surface. Hence the importance to detect defects in the raw sapphire material. This is the area where our team at Scientific Visual contributes. SEMI: Flaws are usually identified only after costly wafering and polishing steps, because rough surface of raw crystals prevents detection of the defects. What can be done to prevent defects?Orlov: Today, major players are investing in growing larger crystals without mastering in depth the growth process. Let’s face it, the semiconductor substrate industry, which is primarily based in Asia, is using empirical research methods. The raw sapphire boules are still inspected manually, and this qualitative assessment is exploited in two folds. The first step is to further process the boule. Furnace operators then adjust the growing parameters depending on the results of the manual inspection.Due to the lack of visibility into internal crystal defects, the crystal growth and its downstream processing remain an art rather than a science. The primary reasons are the difficulty to measure, locate and quantify precisely the defects in the full crystal volume. Scientific Visual equipment enables defects in raw boules to be fully quantified and categorized. With such objective measurements and knowing the full set of growth parameters, the Process Engineering (PE) team can, with the assistance of deep learning algorithms, considerably improve the growing process. Our quality control tools give Process Engineering team the “eyes” to see complete defect distribution in raw crystals, enabling it to make minor modifications in the growth process to improve yields, reduce costs and shorten the time to market for products.SEMI: What lead to those advancements and what problems did your team set out to solve? Orlov: Breakthroughs in immersion tomography, machine vision and parallel computing drove advancements in automated quality control technology. Previously crystal inspection accuracy was limited by the acuity of the operator’s eye and subjective bias. Light distortion and the diffusion of crystals made it impossible to accurately identify internal defects.Scientific Visual equipment give operators an undistorted 3D view of all defects in a crystal boule or ingot. However, only deep learning technology can correlate a hundred thousand growth data points to identify a final defect pattern.Defect pattern in non-processed item cored from EFG sapphire plate. Well visible is a typical wavy pattern of surface layers and sandwich structure in the volume. Color code marks sapphire defect density: from deep blue (non-defective material) to deep red (highest defectiveness.) SEMI: What challenges are addressed by your approach? Orlov: Increasing the yield of semiconductor substrates like Sapphire, Gallium Nitride and Silicon Carbide is paramount to reducing the price of wafers while increasing their quality. The upstream growth and downstream wafering processes are not deterministic. So far, most of the producers can only determine the quality during the late stages of the process. This condition creates huge constraints for teams in charge of production and processing. Automated Quality Control (QC) at the early stage of the production chain relieves all the unknowns, ultimately reduce the cost of material.SEMI: And what are the main opportunities?Orlov: There are massive opportunities to increase the yield and to ease the full processing chain from growth to the wafering process. Objective Quality Control (OQC) paves the way to industry-wide standards that categorize crystal quality at each step of growth to enable full certification of the defectiveness of the material and facilitate its trade and exchange.SEMI: What’s one of your predictions for the future of new materials?Orlov: The explosion of e-mobility and electric vehicles and the development of other green technologies will drive rising demand for low-defect sapphire, silicon carbide and gallium nitride substrates thanks to the streamlining of the full processing chain. Manual quality control will soon give way to full automation as quality control in sapphire and other raw crystals production is the only missing link in a fully automated semiconductor production chain. I believe that in five years, automated raw crystal inspection will become standard in the industry. Our mission is to empower every crystal grower to achieve this important milestone.Dr. Ivan Orlov obtained a Ph.D. in Crystallography from the Federal University of Technology in Switzerland EPFL and an MSc in Solid-State Physics in Moscow, Russia. Ivan co-founded Scientific Visual in 2010 to answer the challenge of the synthetic crystals industry struggling with high defect yield. Prior to this he worked in a company specialized in diamond optics. He has more than 10 years of experience in R D with focus on optical materials, industrial crystals and non-destructive quality control technologies. Dr. Orlov was a SEMI Task Force member for sapphire standard development in China and collaborates with ISO committee in Switzerland to establish industry-wide sapphire quality standards.Serena Brischetto is senior marketing and communications manager at SEMI Europe.
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The microelectronics industry is entering the era of Cloud Engineering Simulation to slash the costs and risks of new technology development and speed time-to-market in spaces like semiconductors, MEMS sensors, RF front ends, biomedical and driverless cars. In the run-up to SEMICON Europa, 12-15 November, 2019, in Munich, Germany, SEMI spoke with Ian Campbell, CEO of OnScale, about the new paradigm of Cloud Engineering Simulation. Campbell shared his views ahead of the SMART Design Forum, 14 November, 2019, 14:30 to 17:00, in Hall B1, TechARENA 1 at SEMICON Europa. Registration is open. Join the forum to meet experts from OnScale and other key industry influencers. Attendance is free of charge for all SEMICON Europa visitors.SEMI: How did your adventure with OnScale start?Campbell: I’m an engineer. When I was still in high school, I took a night class at Nashville Tech to learn AutoCAD R14, and I’ve been designing and engineering things ever since. I was introduced to Desktop Simulation in my bachelors of mechanical engineering program and used many types of simulation tools for massive design studies at the Aerospace Systems Design Lab at Georgia Tech. I’m a simulation junkie.I started my first Silicon Valley high-tech company, NextInput, in 2012 with Dr. Ryan Diestelhorst (now VP of Strategy at OnScale), to commercialize new ForceTouch and 3D Touch technologies based on our patented MEMS force sensors. At NextInput, we bought hundreds of thousands of dollars of engineering software, but were always frustrated by slow, inaccurate engineering simulation results. We dreamed about running massive simulations on Cloud Supercomputers and creating true Digital Prototypes that could replace costly, time-consuming, and risky physical prototypes.When I got the chance to join the team that became OnScale in 2017, I jumped at the opportunity. At OnScale, we took engineering simulation solvers that had been developed for the U.S. military to run on U.S. Department of Defense and DARPA supercomputers and built a cloud supercomputer platform on Amazon Web Services to run the solvers. The net-net is the world’s first on-demand, infinitely scalable Cloud Engineering Simulation platform. Now, we routinely run massive multi-billion degree of freedom simulations for Fortune 100 companies, including many from the semiconductor and MEMS industries. Since our business model is to charge per core-hour for simulations, the incredible capability we built is cost-effective and available to small startups as well. SEMI: How is the semiconductor design ecosystem evolving? How is Cloud Engineering Simulation applied to semiconductor and design industries?Campbell: The entire industry is experiencing a massive acceleration in product launch cycles and increased competition. New markets like IoT and 5G are reducing semi/MEMS product cycles from years to months. That, in turn, puts enormous pressure on semiconductor and MEMS designers. Missing a key product introduction like a flagship smartphone launch can literally make or break a company.A reliance on traditional engineering methods – schematic capture and layout of a chip, taping out (physically prototyping the chip), performing engineering validation on an e-bench, qualifying the chip (or not qualifying it and going back to the drawing board), and finally launching mass production – is no longer sustainable from a competitive perspective.Instead, market-leading firms are turning to Cloud Engineering Simulation and Digital Prototypes to explore massive design spaces, find optimum designs that beat the competition in every KPI (size, power, performance), and digitally qualify designs before ever cutting silicon, ensuring that designs are robust over their intended operating environments and performance envelopes. Large thermal analysis of a chip on a circuit board executed quickly on the OnScale Cloud Simulation Platform SEMI: Can you give us an example? Campbell: A great example is thermal analysis. Thermal effects have always had huge impacts on MEMS device performance and, more recently, they are beginning to impact performance of next-gen semiconductors, especially GaN power electronics for electric vehicles (EVs).Conducting a full system-level thermal analysis of something like an EV power management system – a power IC in a package, on a board, in an enclosure, under various loading conditions – has been a challenge from a simulation complexity perspective (degrees of freedom) and from a parametric sweep perspective (running hundreds or thousands of simulations to optimize chip placement, routing, etc.). To run these sets of simulations using legacy desktop simulation would take weeks, perhaps even a month or more. To run these massive simulations in parallel on cloud supercomputers using OnScale takes days or even hours.Our customers routinely run very large simulation studies on OnScale Cloud for thermal simulations, RF filter simulations, MEMS simulations, packaging simulations (what we call Digital Qualification), and many more use cases.SEMI: What’s one of your strategic objectives for 2020? Campbell: For 2020, we’re doubling down on MEMS and semi simulation capabilities. We will be launching additional solver capabilities like EM that will be critical in our strategic markets like 5G. We will also be launching a Cloud API so that engineers can integrate OnScale directly into their existing engineering workflows (e.g. MATLAB or EDA/CAD tools) with just a few Python commands.SEMI: Can you share one prediction for the future of semiconductor design solutions? share?Campbell: I think we will continue to see MEMS and semi designers push the envelope and bring smaller, more performant, more cost-effective solutions to market. I’d like to see more highly cost-effective flexible semi/MEMS designs come to market to enable next-gen IoT and IIoT applications. I’d also like to see more biomedical applications – biomems, microfluidics, and labs on a chip for all sorts of life-enhancing applications.SEMI: What are your expectations regarding the SMART Design Forum at SEMICON Europa 2019 in Munich? Campbell: I’m looking forward to getting back to my roots in MEMS/semi design and chatting with other designers about the future of engineering and the future of semi! Ian Campbell is a twice venture-backed Silicon Valley CEO and expert in MEMS sensors, semiconductor technology, and engineering software. Most recently, Ian co-founded OnScale, a Cloud Engineering Simulation startup backed by Intel Capital and Google’s Gradient Ventures. OnScale is revolutionizing engineering by combining world-class multiphysics solvers with Cloud supercomputers, machine learning, and artificial intelligence. Prior to co-founding OnScale, Campbell served as founder and CEO of NextInput, where he led the startup through multiple rounds of funding – totaling $12 million and an additional $4 million in research contracts with government and industry partners – and built a world-class team of engineers and scientists who developed 3D Touch and ForceTouch technologies for smartphones, wearables, industrial, and automotive interface applications. He also secured the first major smartphone OEM design wins in Asia. Campbell earned his B.S. in mechanical engineering from Middle Tennessee State University, and his MSAE in aerospace engineering and MBA from Georgia Institute of Technology.Serena Brischetto is senior manager, marketing and communications, at SEMI Europe.
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The ESG MarketElectronic Gases represents the largest percentage of the spend on chemicals and materials by semiconductor producers. Taken altogether, the spend on Electronic Gases was almost $6 billion worldwide in 2018. Recent critical shortages of key gases have impacted the industry tremendously and, in some cases, has also limited output. The Electronic Specialty Gas (ESG) market, while a small segment of the global gas market, is one of the most complex and least understood market segments of the electronic chemicals and materials landscape. Linx Consulting estimates that the ESG market totaled nearly $3.4 billion in 2018, up from roughly $3.1 billion in 2017 with a growth rate of 10 percent last year. Growth was driven by rising demand and the increasing use of higher-value products in applications such as etch and specialized deposition. ESGs are used in the manufacture of electronic devices that are subsequently assembled in systems and in a variety of processes such as film deposition, film etching, substrate doping and chamber cleaning. The devices – semiconductors, LEDs, and displays – are processed on larger substrates, and then separated before assembly.Key differentiators for ESGs are not only the technical complexity of the gases and mixtures supplied, but the purity and consistency demands placed on the gas supply. Product purity and consistency, often at the limits of analytical capability, must go hand in hand with rigorous application of statistical process control in manufacturing and absolute delivery reliability. ESGs include fluorocarbons, hydrocarbons, deposition precursors, dopants, corrosives (halides/hydrates) and rare gas mixtures.The key end-use markets for ESGs include semiconductor wafer fabrication, flat panel display (FPD) manufacture, compound semiconductors / LEDs production and Photovoltaics cell manufacture, as illustrated below in Figure 1. Figure 1 - ESG Market by End-Use Applications Source: Linx Consulting The semiconductor industry is the largest user of ESGs and has the most diverse ESG requirements in terms of products, package sizes and purity requirements. The semiconductor industry uses all the different specialty gases produced. Purities are typically 4N and above and the packages can range from small cylinders to tonner/Y packages to tube trailers. The ESG market is global, with key demand centers in China, Europe, Japan, Korea, Southeast Asia, Taiwan and the United States. The Flat Panel Display (FPD) community is the second largest user group for ESGs. However, the breadth of ESG products used in FPD fabs is much more limited than in the semiconductor industry. Key product applications include silicon sources, dopants, oxidation and nitridation sources, chamber cleans, and etchants. ESG use has grown with the development of the FPD industry across both TFT-LCD segment and AMOLED segment, with many large end users in Korea, China, Taiwan, and Japan. Korea and China boast large ESG supply infrastructures geared towards serving the FPD industry. Early on, these countries targeted the development of the FPD industry and the associated value chain, so there has been large-scale development of required ESG products such as NF3 and silicon precursors. When we review the markets in aggregate, coupled with the geographic intensity of the electronics industry in Asia, it is unsurprising that a vast majority of the ESG market would be in Asia, as illustrated in Figure 2, below.Figure 2 - ESG Market by Key RegionSource: Linx Consulting Key ApplicationsThe applications for ESGs can be readily tied to major thin film fab processes that are commonly used in the microelectronics industry. The processes include dielectric and metal etch, dielectric deposition, metal deposition such as titanium or tungsten, deposition of non-silicon materials such as hard masks etc., dopants for thermal diffusion methods and ion implantation, reactor chamber cleaning; as well as some other specialty applications. This is illustrated in Figure 3 below. Figure 3 - Applications for ESGsSource: Linx Consulting Clearly there is a close tie-in for ESGs into thin film deposition (CVD and chamber cleaning) and etch processing. In the future, the industry will increase its use of ESGs with novel deposition and etch processes. New applications may include lower temperature deposition, high deposition rate processes, flowable CVD films for high aspect ratio structures, and high selectivity deep etching with greater uniformity. All these processes improve device performance and will rely on ESGs and rare gases as enablers. Outlook for ESGsOverall, we believe that the ESG market will grow at a compound rate of about 6 percent over the next five years. Currently the largest six suppliers – Versum Materials, SK Materials, MTG/TNS, Air Liquide, Linde/Praxair, and KDK – control about half of the overall market, with about 50 suppliers accounting for the other half of the market. We anticipate that as the industry continues to grow, we will continue to see changes in the supplier base with both continuing consolidation and new regional suppliers emerging as unique technologies and value-added capabilities enter the market.For More InformationThis article is based on insights and analysis from Linx Consulting’s Electronic Specialty Gas report. The annual report is considered the leading industry source for comprehensive information about demand for specialty gases used in the electronics industry. We track more than 60 different ESG products used across the global semiconductor, flat panel display, solar and compound semiconductor industries.For more information, please contact [email protected], or Mike Corbett at +1 973 698 2331, Mark Thirsk at +617 273 8837, or Andy Tuan + 886 952 111222, or visit Linx Consulting.Interested in engaging with the electronic materials supply chain? The Electronic Materials Group (EMG) is a SEMI technology community representing SEMI member companies that provide substrates, polymers, metals, organic and inorganic materials, chemicals, and gases developed for electronics manufacturing. Linx Consulting has been a longtime member and supporter of the SEMI Electronic Materials Group.Mike Corbett is managing partner and Andy Tuan is managing director, Asia, at Linx Consulting.
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The semiconductor industry is in the final throes of its most recent cyclical downturn, but clear demand drivers on the horizon, such as 5G and autonomous driving, have created a decidedly upbeat mood at SEMI’s Strategic Materials Conference, held this week in San Jose, California. Increased connectivity in daily lives will not only dramatically boost semiconductor volumes, but the physical challenges of improving chip performance have positioned materials as the key enabling technology of the fourth industrial revolution – creating opportunities for suppliers to capture significant value. Most speakers were quick to underscore the importance of materials innovation. According to Dave Anderson, president of SEMI Americas, “We are entering the era of the material scientist,” and the role of materials in semiconductor manufacturing “has never been more important.” Carlos Diaz, senior director, corporate research at foundry major TSMC, said that the future “belongs to new materials and processes,” while Bertrand Loy, president and CEO, Entegris, told attendees the world is on the brink of the fourth industrial revolution, where technology will be fusing “physical, digital, and biological worlds and transforming our collective lives.” Len Jelinek, senior director/semiconductor manufacturing, IHS Markit, noted that 2019 has been a challenging year for semiconductor revenue – expectations are for a 12.5% decline YOY – but said he is not forecasting “doom and gloom” because of positive consumer demand trends beyond 2019. These include the rollout of 5G networks, internet of things (IoT), artificial intelligence (AI), and autonomous vehicles. Jelinek emphasized the foundational impact of 5G in particular. “Don’t think of 5G’s impact only in terms of handsets. It’s an enabling technology that will have broad-based impact” and will be key to creating a sustainable recovery in semiconductor demand in the second half of 2020. The current semiconductor downturn – the industry’s 10th – was initiated by an imbalance in memory supply and demand, and the lack of resolution of trade issues between China and the US is threatening to amplify volatility. Smartphones, the number-one application for semiconductors, are currently challenged by extended replacement cycles, and total handset shipments are set for its second year of decline. “We, as consumers, are waiting for revolutionary features such as 5G speeds, biometrics, foldable handsets and AI capabilities,” Jelinek says. Recent iterations have been merely evolutionary, and premium handset costs have escalated, he adds. Automotive electronics, which account for about 10% of global semiconductor demand, will eke out slight growth in 2019, Jelinek says. “Long-term semi component revenue growth within the Auto segment will focus on increasing content within cars supporting advanced safety features.” During his session, Duncan Meldrum, chief economist and founder of Hilltop Economics, addressed recent threats of a recession. “Underlying economic fundamentals are strong, but we are at that point in the business cycle where it doesn’t take much to knock the economy into recession,” he says. “I am telling people to have a contingency plan in place.” Nevertheless, Meldrum laid out reasons for optimism. Most economies have plenty of jobs, and consumers have been confident despite negative headlines. “For the average person, a tariff trade war gets to be noise. If they don’t see immediate impact, they tend to eventually discount all the headline noise. The same goes for Washington politics or Brexit.” There are no serious signs of inflation pressures in the US or other major economies, he adds. Beyond the cycleLonger-term, explosive growth in connected devices will create a runway for semiconductor volume growth. According to SEMI, over 30 billion devices are currently connected and another 200 million are added daily. By 2020, the number of connected devices will reach 1 trillion. “The growth profile for industry will be very strong and a multiplicity of drivers will bring more stability to this industry,” Loy adds. “But before this future becomes a reality we have a lot of work to do.” Current chips need to be faster and cheaper. “Physical scaling is not going to get us there, we’ve hit those limits,” Loy adds. “We have to look at new architectures and materials.” Loy called on the materials sector to need to “up our game” and spend more on R D. “Customers want us to make our products in very tight process window and ship to control. They want extreme purity for everything. It’s a long list of to-dos and it’s going to cost us a lot,” he adds. Among the needed innovations are photoresist hard masks to hand high aspect ratio, new etch chemistries for better rates and higher selectivity, and new cleaning chemistries for high aspect ratio geometry with high selectivity.Loy also identified contamination control as a key challenge for material suppliers. “When you think about purity and contaminants, you need to think about size, concentration levels, and classes. To optimize yields and lower wafer defectivity, our customers expect materials to be very pure and exhibit low variability.” The payoff for customers is large; a 1% yield improvement can mean $150 million in annual net profit for a leading-edge logic fab, Loy says. For a 3D NAND fab, that figure can be around $110 million per year. But these requirements are getting exponentially tighter. From 28 to 7 nm, the metal impurity concentration limit became 1,000 times lower, Loy notes. Contamination control is even more vital when the potential impacts of latent defects – which are difficult to detect in a fab and during electrical testing – are considered, particularly in emerging applications like autonomous driving, Loy says. “The cost of yield loss is expensive, but failure in a critical optical sensor of a car could be significantly greater, in terms of recalls or even human loss of life.” To meet tightening purity requirements, Loy recommends throwing out traditional thinking about contamination control. “In the past, we could get away with simple filtrations,” he says. “That’s no longer going to work. We need to collectively, up and down the supply chain, migrate to better filtration and purification and also rethink chemical delivery systems and packaging solutions to preserve the integrity of our products.”Metrology will also be key, but analytical capability is lagging. “We all like to believe that we cannot control what we cannot see, but that is exactly what we have to do.” The need for innovation is also being felt at the wafer level. Kevin Light, director, Applications Technology Americas at Siltronic Corp., said that as semiconductor markets become more diversified, silicon suppliers must recognize the distinct challenges each segment faces. Better wafer properties are required for next-generation chips, he adds. “Excessive wafer geometry can cause errors during lithography, especially when printing even smaller linewidths,” he says. The end result can be defocus and placement errors. When dealing with “More than Moore” architectures, wafer requirements are driven by other factors than defects. “More than Moore applications do not benefit from scaling, but instead drive capabilities of separate silicon parameters,” Light says. “In some cases you need high doping, in others the doping needs to be precise.” Czochralski crystal growth is suitable for high dopant levels, but the concentrations vary at the top and bottom of the ingot. Float Zone crystals avoid oxygen incorporation and provide consistent doping. These variations make Czochralski process suitable for PowerMOS, and Float Zone appropriate for IGBT. Compound semiconductor layers, such as GaN-on-Si, offer potential advantages owing to higher switching speeds and critical breakdown fields, he adds. “Silicon wafer requirements are diversifying as the devices themselves find increasing use outside of traditional logic,” Light adds. “Moore’s law is alive and next-gen computing will continue to push the limits of flatness and cleanliness. Meanwhile, demands of energy efficiency, electrification, IoT, and 5G drive wafer requirements other than scaling, including extremely high doped or ultra-low oxygen growing techniques, high lifetimes, and substrates engineered for compounds semiconductors.” Driverless futureAutonomous driving was a frequent discussion topic at SMC. Although IHS Markit does not see it really rolling out until past 2025, the disruption to the auto industry’s status quo is very much being felt now. Dragos Maciuca, executive technical director, Palo Alto Research and Innovation Center at Ford Motor Company, says cars of the future will be autonomous, connected, electrified, and shared. “The biggest transformation will be the shift from mechanical hardware to software,” he says. “Currently [a car] is a mechanical thing that has some electronics. Going forward, it will be a software-driven system that happens to control some mechanical elements.” The transition is already way under way, so much so that autonomous technology developed for the automotive industry is already being spun off into other sectors, such as mining and agriculture, and the auto industry’s competitive landscape is already seeing changes. OEMs and carmakers are entering the market from the traditional auto industry side, while companies such as Google are participating from the software side. “Others, like Uber and Lyft, are coming in from the business plan point of view to eliminate drivers and improve margins,” Maciuca adds. Autonomous driving will require numerous innovations, many of which will require new electronic materials and production processes. “We need weight savings, space savings, and advanced architecture,” Maciuca says. “We also need customization to print circuits as the vehicle comes down the line.” The tech community is proving up to the task. For LIDAR, there were just two technologies available a few years ago, he adds. The impact on chipmakers is also already being felt. “The automotive industry used to buy older chips,” Maciuca says. “Now we are moving to a stage where we need the very first chips at the most advanced node. And we are using them for safety-critical operations. If an AI chip that is supposed to detect a human fails, the consequences can be very severe.”Rebecca Coons is a senior editor at Chemical Week. Republished with permission from Chemical Week.The SEMI Electronic Materials Group (SEMI EMG) is the backbone of the Strategic Materials Conference. EMG is a technology community representing SEMI member companies that provide substrates, polymers, metals, organic and inorganic materials, chemicals, and gases that are developed or in use for the manufacturing of electronics. The group is open to SEMI Members involved in materials manufacture, distribution, and services throughout the microelectronics industry. For more details, please visit the website.
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In 2000, the average car sported 30 to 50 semiconductors. By 2025, the number of chips and sensors in an automobile will soar to an eye-popping 70,000 as it comes uber-connected and immeasurably smarter, powered by machine learning, artificial intelligence (AI), Internet of Things (IoT), visual sensing, high-precision mapping and other advanced capabilities.Today, the proliferation of semiconductors in cars is remaking the automotive industry as four major forces – electrification, connectivity, autonomous driving and diverse mobility – take hold, according to the consultancy firm McKinsey in its report Automotive Revolution – Perspective towards 2030 report. The chip industry saw auto-related sales jump from US$7 billion in 1995 to US$30 billion in 2015, a trajectory that has steepened over the past two years as major chip suppliers have rolled out products for precision mapping, navigation, in-car entertainment, and communications. With semiconductors fast becoming a major aspect of automotive design, traditional automakers are quickly moving to build strong partnerships with the semiconductor sector.Audi, a leading German car brand, took a big step to just that when it became the first automotive OEM to join SEMI as a member in June 2019 and strengthen the automaker’s ties to the semiconductor industry. With a massive market potential to tap, are Taiwan's auto electronics firms well-positioned to work even more closely with first-tier car brands like Audi?At the Smart Transportation Forum on September 18 at SEMICON Taiwan, Andre Blum, project manager at AUDI AG, will join Ian Chan, CTO of Cyntec, to offer insights into how automakers can team up with Taiwanese auto electronics companies. TechOrange, a Taiwanese tech news online media, spoke Blum ahead of the event about Audi's smart car efforts and the carmaker’s work to integrate new technologies into its automotive designs as it forms new partnerships with the semiconductor industry.Blum joined Audi in 2004 and since 2016 has led manifold projects within the group driving Audi’s work with semiconductor companies (Progressive Semiconductor Program). He has seen the automotive industry rapidly accelerate the integration of high technology in vehicles, an area where Audi excels. “The industry is changing how it works and new partners are joining the ecosystems," Blum said.Audi Wants to be the Next Apple in the Car SectorAudi's business developments in recent years echo Apple's early push to integrate the Internet and a panoply of applications into mobile phones. The difference now is Audi is working to integrate a wide range of smart applications into its automobiles for – ala Apple – the best user experience.For example, Audi has recently launched cars designed with Traffic Jam Pilot, Parking Pilot, and Garage Pilot three smart driver-assisting systems. With Traffic Jam Pilot, drivers no longer need to be on standby when stuck in the traffic. Instead, they can kill time with an infotainment system. While out shopping or making other stops, Parking Pilot helps drivers find a parking spot and park automatically. Garage Pilot provides a more comfortable parking-at-home experience – the driver waits maneuvers the car into the garage using handheld remote control. Audi stepped up its efforts in 2019 and revealed its latest concept car at the Shanghai Auto Show. Dubbed Audi AI:ME, the vehicle is equipped with a dizzying array of high tech: level-four self-driving technology, technology that allows the driver to control features with eye movements, LED units in headlights and taillights that change brightness accordingly at night and in bad weather, and VR goggles for onboard infotainment. Innovation and Tech Both Key to the New Driving ExperienceAutomotive technology is rapidly advancing in areas such as electric vehicles, autonomous driving and smart auto electronics. Cars of the future must have more computing power and connectivity to deliver a great user experience that includes high battery efficiency to extend the duration between recharges, in-car entertainment, and intelligent voice assistants – all capabilities made possible by semiconductors.Unburdened by the tasks of driving, passengers will enjoy a more intimate relationship with their vehicles. "The in-car entertainment system will allow passengers to have a teleconference or enjoy a movie in a theater-like setting,” Blum said. Switch on the self-driving system and you can drive through the night from Munich to Hamburg, covering a distance of 800 kilometers in the comfort of a home-like environment. The trip is even possible on one charge, meeting high energy-saving standards.These capabilities are technologically feasible now, but government regulations and policies still need to catch up. In the meantime, Blum says that Audi is focusing on creating a top-notch experience for car users today."The minute you step into a car, all the features, including the seat, radio channels, and the entertainment system will have already been adjusted to your liking and seamlessly connected to your mobile or other hand-held devices," he said.What does the Future Hold for Taiwan in the Next Blue Ocean Market?Semiconductors are the heart of these features, and Blum believes Taiwan is uniquely positioned to drive advances in automotive chips. Taiwan is home to semiconductor powerhouses TSMC and ASE as well as auto electronics companies, and its sophisticated mobile phone supply chain has endowed it with deep experience in integrating semiconductors with electronic modules – advantages that give Taiwan a head start in the automotive semiconductor market.Audi, too, is in a strong position to thrive in the new age of automotive electronics as it looks to its membership with SEMI to collaborate with companies across the microelectronics supply chain.“With rapid advances in automotive electronics technology, semiconductors now play a critical role in innovation and product differentiation,” said Dr. Klaus Buettner, executive vice president of Development Electrics/Electronics, CarIT, Audi.“To fulfill the promise of sustainable, connected-to-everything, highly automated mobility up to autonomous driving, we need to also align automotive requirements across the entire semiconductor value chain,” he said. “With its global platform, SEMI is the right association to bring together supply chain stakeholders for the close collaboration critical to driving technology innovation.”Emmy Yi is a marketing specialist at SEMI Taiwan.
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SEMI spoke with Dr. Mikko Söderlund, sales director for Beneq’s semiconductor business, about trends in Atomic Layer Deposition (ALD) applications. Söderlund shared his views ahead of his presentation at SEMI MEMS Imaging Sensors Summit, 25-27 September, 2019, at the WTC in Grenoble, France. Join us at the event to meet Beneq and other key industry influencers. Registration is open.SEMI: The Backside Illuminated (BSI) CMOS Image Sensors (CIS) market continues to experience steady growth. Which applications are currently driving market growth?Söderlund: BSI CMOS Image Sensor market continues to be driven by mobile, security, automotive and Internet of Things (IoT) applications – so there seems to be plenty of opportunities for BSI CIS market to grow further.SEMI: What is critical for advanced thin-film deposition methods to extract best electrical performance?Söderlund: It is critical to control the material properties of the deposited layer (such as charge density, resistivity or barrier property) and of course, film uniformity and conformality. Furthermore, controlling material interfaces is also important, especially for sensitive III-V materials. {% video_player "embed_player" overrideable=False, type='scriptV4', hide_playlist=True, viral_sharing=False, embed_button=False, width='350', height='197', player_id='12721134435', style='margin: 0px auto; display: block; float: right; margin-left: auto; margin-right: auto; width: 350px;' %} Coatings and material features based on existing standard techniques can be very expensive, or not feasible at all. What does Atomic Layer Deposition (ALD), as a thin film coating method, offer in particular?Söderlund: ALD offers dense, highly conformal and pinhole-free best-in-class functional layers for dielectrics, passivation, encapsulation and much more. As a gentle and precise layer-by-layer method, ALD is extremely well-suited for deposition of such performance critical layers over large surface areas such as a cassette of wafers.SEMI: Please describe the Atomic Layer Deposition (ALD) coating process. Söderlund: ALD is based on a self-limiting surface reaction controlled thin film deposition. During coating, two or more chemical vapors or gaseous precursors react sequentially on the substrate surface, producing a solid thin film (see schematic below). Most ALD coating systems use a flow-through traveling wave setup, where an inert carrier gas flows through the system and precursors are injected as very short pulses into this carrier flow. The carrier gas flow takes the precursor pulses as sequential waves through the reaction chamber, followed by a pumping line, filtering systems and, eventually, a vacuum pump.SEMI: What are the two leading edge ALD applications?Söderlund: Today’s leading-edge ALD applications are in logic (high-k/metal gate, multiple patterning) and memory (DRAM capacitor, 3D NAND). Within the More-than-Moore (MtM) markets, CIS and MEMS (actuators and sensors, RF) have been early adopters of ALD, and we also see ALD being introduced in GaN Power and RF, as well as photonics.SEMI: Give us one prediction about the opportunities offered by advanced imaging applications.Söderlund: The large diversity of imaging applications will continue to drive growth and innovation. For example, machine vision is expected to transform the imaging landscape. We see this as a big opportunity for advanced thin-film deposition methods such as ALD, provided that the tools are versatile enough to address the diverse manufacturing requirements.SEMI: What are your expectations for SEMI MEMS Imaging Sensors Summit and why do you invite your peers to attend? Söderlund: The summit brings together all key RF stakeholders in the MEMS and imaging sensors industry, and we are looking forward to a great event. It’s a special event for us as we are officially launching a new ALD cluster tool product specifically engineered for the MtM applications – so this brings great excitement that we want to share with the attendees.Dr. Mikko Söderlund is Sales Director for Beneq’s semiconductor business. He has more than 20 years of experience in product development, product management, technical sales and business development across the photonics, OLED, and semiconductor industries. Mikko received his Ph.D. in Micro- and Nanotechnology from the Helsinki University of Technology. Serena Brischetto is a marketing and communications manager at SEMI Europe.
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Automotive original equipment manufacturers (OEMs) and their direct suppliers of parts and systems share a vision: Next-generation vehicles will be more electric, autonomous and connected. At a market size of more than $1 trillion, automotive is steadily becoming a high-tech market as cars morph into advanced technology platforms with partially or fully autonomous features. Call them semiconductors on wheels. Big players such as Google and many carmakers are investing heavily in chip advances to help drive increases in silicon content in automobiles.At SEMICON Europa, Pierrick Boulay, Solid State Lighting and Lighting Systems analyst at Yole Développement, will provide a market update on autonomous automobile trends including the state of sensors, radars, cameras and LiDARs as the industry works to increase the level of autonomy and electrification.Autonomous vehicle design can only thrive with the development of an industry standard for chip and device traceability across the supply chain. The importance of chip traceability to the automotive industry is reflected in its central role in driving a chip traceability standard.According to Heidi Hoffman, senior director of technology communities marketing at SEMI, “chip traceability is one of the next big things for the technology industry. The benefits are enormous, and the upsides – including yield enhancements, counterfeiting safeguards, and support for new applications – are plentiful. But the implementation challenges of chip traceability are also big and will require considerable effort to overcome. The biggest hurdle of all? We need to transcend industry fears by demonstrating that we can secure IP when it is shared across the hardware supply chain.” The Importance of Standards, Data Collection and Collaboration Across the Supply ChainThe automotive industry has long embraced tracing the sources of defects. Now, as the automotive and semiconductor supply chains increasingly overlap, traceability has taken on greater importance in the semiconductor industry. SEMI committees, task forces and events such as the Smart Transportation Forum at SEMICON Europa are ideal platforms for collaborating to develop new standards and best practices for the automotive industry.Earlier this year, German luxury automobile maker Audi AG became the first automotive original equipment manufacturer (OEM) to join SEMI as member, strengthening alignment across automotive supply-chain segments. At SEMICON Europa, the SMART Transportation Forum and Pavilion, staged by the SEMI Global Automotive Advisory Council (GAAC) and bolstered by the Electronic System Design Alliance, a SEMI Strategic Association Partner, will gather key stakeholders across the automotive value chain, from design and semiconductor equipment to materials and carmakers, to explore innovation opportunities in automotive electronics. SEMI Global Automotive Advisory Council (GAAC) “If the industry wants to reach the goal of zero defects, a new collaborative approach is necessary,” observed Antoine Amade, senior regional director EMEA at Entegris. At SEMICON Europa, Amade will present new ways to collaborate in reducing chip defectivity and meet other challenges in the automotive industry.More than half of semiconductor failures on the automotive assembly line today (so-called 0km failures) are traced to semiconductor fab defectivity. “The increasing semiconductor content in automobiles – driven by growth in ADAS, electrification and autonomy – has put a growing focus on the quality and reliability of these devices and their implications for consumer safety and satisfaction,” said Oreste Donzella, senior vice president and CMO at KLA.The smart manufacturing (Industry 4.0) revolution is already spurring higher performance and great efficiencies throughout the supply chain and will also be crucial to driving innovation in automotive. Smart manufacturing makes possible significant improvements in factory key performance indicators (KPI) for cycle time, on-time delivery, overall equipment effectiveness, cost and product quality.“These KPI gains are key to meeting quality levels the automotive industry must reach to support the deployment of autonomous driving vehicles,” said John R. Behnke, general manager of Final Phase Systems at INFICON. In his talk at SEMICON Europa, Behnke will provide an overview of existing, in-progress, and future smart manufacturing solutions for the semiconductor industry and their impact on the automotive supply chain. The SMART Transportation Forum, 13 November, 2019 (9:30-15:30 at ICM Munich, room 14c) at SEMICON Europa is the premier platform for key stakeholders to connect, collaborate and innovate across the automotive value chain. Automotive and semiconductor industry experts will offer insights into trends in design, semiconductor equipment and materials, and automotive innovation and the roadmap to 2030. The SMART Transportation Forum will also showcase innovations in imaging, sensing, artificial intelligence (AI), smart manufacturing and L5 mobility.Other SEMICON Europa highlights: Advanced Packaging Conference: Packaging and Test Challenges Towards High Reliability (12-13 November 2019) 23rd Fab Management Forum: Game Changers for Semiconductor Operations(11-12 November 2019) Strategic Materials Conference: Strategic Materials Enabling Industry Roadmaps(12-13 November 2019) SEMICON Europa registration is open for visitors and exhibitors. For more details, please visit the SEMICON Europa website and connect with SEMI Europe on Twitter or LinkedIn @SEMIEurope (use #SEMICONEuropa).Learn more about the SEMI chip traceability standard – SEMI T23 - Specification for Single Device Traceability for the Supply Chain – and SEMI Technology Communities.Serena Brischetto is a marketing and communications manager at SEMI Europe.
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This article is the fifth and final in a series highlighting the vital importance of SEMI Standards to commemorate the publication of the 1000th SEMI Standard in July 2019. Find the entire series here.As we define industry standards for managing data in the fab and beyond, we are creating a virtuous circle. More data create better processes. Better processes generate more good data, and more good data lead to better processes. It becomes a cycle of continuous improvement, and we are only just beginning to realize its potential. To dive deeper we interviewed Alan Weber, vice president, New Product Innovations at Cimetrix, and an active member of SEMI Standards Information and Control Committee (IC C).“Industry standards are critical in allowing us to collect information across the fab and use it in increasingly sophisticated control algorithms for the equipment,” said Weber. “The last few years have been about analysis applications that leverage big data in the fab. What started at the lot level is now applied at the wafer level, and for a process like lithography, it’s down to the shot or die level. We’re now collecting enough data variables at individual process and recipe steps to model for predictive maintenance and virtual metrology.”The migration from using data as rearview mirror for identifying and addressing fab issues to using data to head off issues preemptively represents a paradigm shift with immense advantages. This is the starting point for realizing a virtuous data circle.The benefits of a virtuous data circle are simple and compelling: higher yields, faster time to market, more revenue and greater profitability. Our optimism, however, is tempered by major obstacles to this promising future.Multilingual ManufacturingWeber points out that the electronics industry is becoming a multilingual standards world with more than 1,000 fab equipment vendors and several layers of protocols that present the challenge of seamlessly handling multiple protocols. His IC C Committee is out to tackle this challenge.“While SEMI Standards efforts first began in the front end, our standards program now encompasses the back end with test and packaging as well as other device areas including MEMS, sensors and displays,” said James Amano, senior director, International Standards and EHS, SEMI. “We’re going to see data connectivity from the front end to the back end to the final assembly of multi-chip products and that needs standards,” Weber explained. “We’ll need more connected equipment throughout the global, multi-site manufacturing process if we are to support the full traceability requirements of the most demanding markets such as automotive.”The industry will benefit from greater collaboration. Weber predicts that companies will team to create integrated supply chains within broader industry supply chains.Getting the Right People at the Right Time“As we lead the development cycle of a standard from concept to realization, one of the most important jobs of our standards task forces and committees is to coordinate competing companies and build an industry consensus,” Amano said. “This is the case for data in particular, where we rely on industry professionals like Weber and his colleagues, who are working to bring people together to collaborate on developing standards for connectivity and data sharing. It is that critical human element that allows SEMI to sustain our commitment to introducing standards that move the industry forward.”Will Companies Share Data If It Is Secure? Weber contends that when it comes to securing and sharing the data, the biggest challenge is to change the industry’s information-sharing culture.“Finance and defense are already finding ways to deal with data security,” said Weber. “While we will always have problems that require technology fixes, like dealing with new types of computer viruses, I am confident that we will be able to create standards that enable the free, secure flow of information. The key to making progress and better leveraging data is to get companies to see the potential of sharing data while investing in the standards.”SEMI recently launched a project to optimize data sharing across two critical process steps – lithography and plasma etch – to accelerate the adoption of data-driven AI methodologies. The results will help to establish data transfer and management standards crucial to the trusted exchange of trade secrets, IP and other sensitive information. Tools and materials from several SEMI members will be used for the project at Cornell University’s NanoScale Science Technology Facility (CNF). SEMI members are invited to join the project review team. Contact Pushkar Apte at SEMI ([email protected]) for more information on the initiative.Advantages Are Too Great to IgnoreTraditional cultural obstacles aside, the advantages of creating virtuous data circles are simply too great to ignore. Now that it’s accepted wisdom for fabs, factories and supply chains to continuously leverage interconnected data to get smarter, the time has come to extend those advantages throughout the full manufacturing process. Without these data circles, we’ll slow the development of new technologies and applications.We can only speculate where the lines of sharing data are drawn and will be redrawn in the future. But, without doubt, technology innovations such as AI will spawn new information business models that vertically and horizontally integrate companies in ways previously unimaginable. Data standards will underpin this structural transformation.Use your voice to affect standardization in and around the microelectronics industry. Learn about SEMI International Standards – and become part of the solution. Heidi Hoffman is senior director of technology communities marketing at SEMI. Hoffman and her team shine a spotlight on the work of the more than 20 technology communities under the SEMI electronics manufacturing supply chain collaboration platform. Actively engaging community members in marketing programs that showcase their unique value, Hoffman’s team helps companies to grow and prosper through the power of connection, collaboration and innovation.
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This article is the fourth in a series highlighting the vital importance of SEMI Standards to commemorate the publication of the 1000th SEMI Standard in July 2019. Find the entire series here.Computer prices have plunged over the years even as desktop and laptop PC performance has skyrocketed thanks to the semiconductor industry, giving users much more bang for their buck. The chip industry stands in a stark contrast to healthcare and education with their exponentially rising costs.What distinguishes the semiconductor industry from healthcare and education in the capacity to deliver so much for so much less over time? After all, even in other parts of the technology sector that are heavily regulated, such as cable television, we have not witnessed the same price decreases as in microelectronics.Some pundits claim that the difference among sectors is tied to their degree of regulation. Does greater regulation somehow degrade product value? The reality is far more nuanced. But one thing is clear: Smart self-regulation (i.e. standards) in the semiconductor industry has contributed mightily to its success.The recipe for success has been simple. Standards have been rocket fuel for competition, which in turn has sparked innovation, driving down device prices while boosting performance. Computer prices fell dramatically between 1997-2015 while the cost of cable TV and internet services rose. Myth of unregulated competitionA semiconductor fab might actually be the most regulated place on earth. Fabs hew to a much higher standard of air quality and cleanliness than even uber-sterile hospital operating rooms. Manufacturing processes are voluntarily regulated not to millimeters, but to nanometers. While some standards are proprietary with limited reach, others span the supply chain. Regulation has worked so well in this sector that the semiconductor industry isn’t moving toward less standardization. It’s moving toward more. Secret is smart standards The gap between regulation and self-regulation is more like a chasm. We typically view regulation as a series of top-down directives that more often focus on the interests of the producer than the consumer. Healthcare regulation, for example, may improve quality of care, but it’s often insurers, big pharma and hospitals that benefit most from regulation, rather than consumers.The semiconductor industry, on the other hand, uses self-regulation to improve business operations and make better products for consumers. Falling prices and rising performance are natural byproducts.Semiconductor industry self-regulation is an ecosystem-wide effort, where input isn’t just top-down, but also bottom-up or even side-to-side. The first SEMI Standard, which specified wafer sizes, exemplifies this approach.The SEMI Standards Committee formed in 1973 to address silicon wafer dimensional specifications. At the time, wafer specifications proliferated. Numbering more than 2,000, the various specifications led to major inefficiencies just when the industry was just getting underway. Wafer suppliers banded together under SEMI to solve this problem and rapidly developed consensus specifications for 2- and 3-inch wafers. By the mid-1970s, over 80% of wafers conformed to these new standards.Standardized wafer sizes freed equipment companies to focus on innovations that reduced cost and increased performance. It also allowed manufacturers to focus on product differentiation without having to worry about device fabrication process and cost. Since that first SEMI Standard made possible the modern semiconductor equipment industry, original equipment manufacturers (OEMs) have competed to deliver amazing innovations. For example, lithography systems routinely use light to design chips with feature sizes smaller than the wavelength of light.SEMI’s 1000th standard on energetic materials demonstrates how smart standards are also pragmatic. This standard is not about banning materials or assigning blame when things go awry. It is about creating practical guidelines that companies will follow, enabling them to realize greater innovation. Guidelines that reduce accidents and risks will spur more, not less, energetic materials’ exploration. Industry suppliers will be the big winners.The 1st to the 1000th SEMI standard all represent examples of cooperation making more sense than competition.Standards for the real worldCreating a business-friendly standard that still gets the job done is a process. As SEMI Standards Task Force and Committee members, materials, equipment and manufacturing companies take part in defining best practice guidelines that support safe and practical use of materials and equipment. Task force and committee members assign particular responsibilities and associated costs to the most logical segments of the supply chain. They also develop information-sharing practices around competitive process recipes and purity standards.Andy McIntyre, CIH, a member of the energetic materials task force and an executive vice president and managing principal at BSI EHS Services and Solutions, summarized what makes SEMI standards smart.“SEMI standards are pragmatic,” said McIntyre. “They take into account the need for implementation in a real-world business environment. They embrace an engineering approach to problem-solving to create practical solutions, and they define specifications and performance goals in ways that allow engineers — in collaboration with EHS professionals — to identify practical solutions for reducing risk in R D, pilot line and manufacturing operations.“SEMI standards employ a holistic process that considers all the important points of view throughout the supply chain, from materials selection, installation, use, recycling and/or disposal,” said McIntyre. “The breadth of SEMI EHS Guidelines, for example, is also very comprehensive as the SEMI EHS Committee and task forces work to ensure that standards keep pace with dynamic technology developments. Energetic materials is a prime example where the industry recognized the need for a new safety guideline to document safe usage of pyrophoric, water-reactive and unstable reactive materials, which have become increasingly important in semiconductor and advanced materials R D and manufacturing.”This is the real secret to the success of the semiconductor industry. Smart self-regulation allows industry players to cooperate in the development and implementation of standards that are pragmatic, comprehensive and dynamic. Participants in SEMI Standards have a voice in the semiconductor industry because they are the voice of the semiconductor industry.While innovation in semiconductors may not always keep pace with Moore’s Law, we can depend on one truth: As long as collaboration and cooperation are the rule and not the exception, we will continue to advance technology in amazing and unprecedented ways. You, me and all other consumers will continue to reap the rewards of innovation. Use your voice to affect standardization in and around the semiconductor industry. Learn about SEMI Standards – and become part of the solution.Heidi Hoffman is senior director of technology communities marketing at SEMI. Hoffman and her team shine a spotlight on the work of the more than 20 technology communities under the SEMI electronics manufacturing supply chain collaboration platform. Actively engaging community members in marketing programs that showcase their unique value, Hoffman’s team helps companies to grow and prosper through the power of connection, collaboration and innovation.
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This article is the third in a series highlighting the vital importance of SEMI Standards to commemorate the publication of the 1000th SEMI Standard in July 2019. Find the entire series here.SEMI Standards are the bedrock of the modern microelectronics industry. Without standards for wafer dimensions – which SEMI Standards first defined through a collaborative process involving semiconductor manufacturers and wafer suppliers in 1972 – the semiconductor equipment industry as we know it would not exist today. The late Robert Noyce of Intel noted in this 1992 video “being good at producing semiconductors will mean we have better, more consistent, better controlled equipment than we have in the past. Standards are going to play a vital role in that. Standards saves money and time for everyone.” Noyce also called standards a bellwether to surges of innovation in critical process technology. This is still true today as, for example, important standards-setting activity is afoot in panel-level packaging, electron microscopy and energetic materials. Will a surge of innovation follow?Panel-level packaging: a chicken-egg scenarioFrom advanced materials to more efficient production tools, one hallmark of the microelectronics industry is our fearless exploration of new technologies that will spawn change across the industry by improving performance and reducing cost. Advanced packaging techniques, such as panel-level packaging (PLP) – which moves semiconductor packaging to a larger-panel format – is one of those critical catalysts. Citing PLP’s potential to shrink costs by improving efficiency and economies of scale, research firm Yole Développement predicts a remarkable 63% CAGR for PLP from 2017-2023.[i]It’s no stretch to say that we are close to realizing a burst of innovation in packaging. With a just-published SEMI Standard (SEMI 3D20) specifying panel sizes, equipment companies will find it economically viable to invest more in developing the much-needed production tools that enable PLP. “It is really important to create standards so we come together and work much more efficiently. Creating those fundamentals allows you to be more productive in the long term,” said Christina Chu, ASM Semiconductors, and co-leader of the Panel Level Packaging Task Force, and one of five industry leaders recognized for their outstanding accomplishments in developing SEMI Standards for the electronics and related industries at the recent 1000 SEMI Standards reception during SEMICON West 2019. “This effort came up from the trenches,” said Richard Allen, NIST Quantum Measurement Division, and a co-leader of both SEMI’s 3D Packaging and Integration Committee and its Panel Level Packaging Task Force. “Equipment vendors told us that they wanted to serve the market, but they couldn’t do so without some standards. To respond to their request, our committee surveyed the market and discovered at least 15 different panel sizes in development.”“As no vendor is going to make over a dozen unique tools for the same process, we worked with the manufacturers and tool companies to write a specification that standardizes on two of the most widely accepted sizes,” Allen said. “For the first time, the industry will have a real market for panel-level packaging tools, and that will spur commercialization of new technologies that never would have seen the light of the day without standardization.”Allen pointed out that evolution of standards in microelectronics reflects the dynamism of the microelectronics industry itself. “Given the rate of technology advancement in microelectronics, SEMI Standards committee and task force members know that a newly-published standard is often just a starting point, and change will likely follow,” he said. “The Panel Level Packaging Task Force, for example, is currently determining how to best support this packaging technology, whether through possible enhancements to 3D20 or by creating new PLP standards.”Process automation is key for TEMTransmission electron microscopy (TEM) is another area where industry cooperation will fuel progress.“People throw around the phrase ‘exponential growth,’” said James Amano, senior director, International Standards at SEMI. “It’s usually a gross exaggeration, but not when it comes to TEM data. That’s because demand for more TEM data, which uniquely enables innovations around smaller feature sizes, has exploded. At the same time, TEM data is a bottleneck in the fab. Operators literally use tweezers to carry around electron microscope samples by hand, and that is untenable.” TEM sampling standards are currently being formulated under the SEMI Standards development process. “Applying a model that we have employed successfully time and time again through SEMI Standards, we are gearing up for process automation in TEM,” Amano said. “We’ll start by establishing a grid carrier standard for electron microscopy. Through ongoing standards efforts, we may realize a fully automated TEM process within just a few years. That achievement will enable exponential growth in shrinking design geometries.”Energetic materials gain safety standardAlong with wafer-level packaging and design shrinks, the push for safety in materials’ usage is a hotbed of innovation. This is especially true with energetic materials, the potentially hazardous process chemicals used increasingly in semiconductor manufacturing to spur advances in materials purity, integrity and quality.“When you’re working with energetic materials, if you don’t get it right, you may face serious yield and cost issues, and most important of all, safety risks,” said Paul Trio, senior manager of strategic initiatives at SEMI. “This isn’t a theoretical concern. Real problems occurring in fabs have made an energetic-materials standard a high priority for the industry.”“After years of collaborating with companies across the supply chain to address this significant challenge, we recently published our 1000th SEMI Standard around safe usage of energetic materials,” Trio said. “Now manufacturers can turn to a new standard – which will evolve dynamically in response to industry changes – as they employ energetic materials in their quest to achieve higher yields while controlling costs and managing safety risks.” Whether it’s packaging, design shrinks, materials or other key innovations, standards are essential to progress in microelectronics. From equipment and materials suppliers that provide the most advanced, efficient and safest tools, materials, and processes to device manufacturers that get products to market, all stakeholders in the microelectronics ecosystem benefit from SEMI Standards. Are you curious about the areas of process technology where innovations are likely to occur? Would you like to get involved in standards efforts that could have an impact on your business? Take a look at the activity of SEMI Standards Committees and Task Forces. Because that’s where innovation, pragmatism and a commitment to harness industry resources come together.Use your voice to affect standardization in and around the microelectronics industry. Learn about SEMI Standards – and become part of the solution. Heidi Hoffman is senior director of technology communities marketing at SEMI. Hoffman and her team shine a spotlight on the work of the more than 20 technology communities under the SEMI electronics manufacturing supply chain collaboration platform. Actively engaging community members in marketing programs that showcase their unique value, Hoffman’s team helps companies to grow and prosper through the power of connection, collaboration and innovation. [i] Status of Panel Level Packaging report, Yole Développement, 2018
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