MEMS

Have you ever wondered if you could “feel” what it’s like to revisit your favorite vacation spot while sitting on a couch in your living room? How about walk through a restaurant overlooking the water’s edge as you enjoy a savory dish, while still sitting on that couch?If you follow trends in consumer electronics, you probably imagined a virtual reality (VR) headset that uses a visual interface to simulate the ambiance of the restaurant as you use a voice interface to scroll through the restaurant’s menu. While the tech world has made great progress in evolving the visual and voice interfaces of VR, immersive virtual food-tasting also requires a digital interface that supports a sense of smell and taste. In fact, the National University of Singapore is conducting research on the topic (see the video), and Project Nourished claims to enable “eating and drinking in a whole new way – by hacking vision, gustation, olfaction, audition and touch – with or without caloric intake” – through VR.We’ve already come a long way in our quest to replicate human senses such as touch, vision (via biometric authentication) and voice to build user interfaces to interact with the digital devices around us. In fact, every invention that permanently changed the consumer electronics landscape in the last few decades has in turn brought to life one of these user interfaces (UI). For example, smartphones proliferated touch, video games such as Nintendo Wii and Sony Xbox brought gesture, and most recently, smart speakers and VR headsets have increased the adaptation of voice and vision.Complexities of UI DesignUI design is a complicated task that builds upon years of research in neuroscience, cognitive thinking and engineering. It must also account for individuality because users interact differently with their digital devices. Some, like me, use their left hand predominantly when interacting with a gaming console. Some have a heavy accent, which can make speech recognition difficult, while those with a hearing disability may prefer touch over voice as a user interface. Application, context and proximity of the device to the user also affect UI. For example, a user interacting with a smartphone at home has the option to touch or speak to the device whereas voice is the safest means to communicate with a car’s infotainment system while driving.Consumers often bring their digital devices wherever they go, but still expect a consistent user experience. Therefore, a natural user experience is the key to UI adoption. A multi-sensory approach combining voice, vision and/or touch could prove the most practical solution. For example, if I were to access my account at a bank ATM, I would prefer visual- or touch-interface authentication for security reasons, but I would still want to use a hands-free voice interaction to switch between the different menus on the machine. In this case, a combination of UIs could provide a more natural multi-sensory experience, albeit one that needs a careful design.UI technology development and adoption are largely influenced by the top four players in the consumer electronics industry – Apple, Amazon, Google and Samsung. Apple pioneered the touch interface with the invention of keyboard-less smartphones, and the rest of the industry followed suit. The introduction of Google Glass kickstarted the VR/augmented reality (AR) segment and opened new applications in the gaming and multimedia entertainment segments. While VR headsets work for gaming – and more recently for selling products and experiences – they are large and cumbersome devices that are uncomfortable to wear for extended periods. These are major hurdles for designers to solve. Voice, on the other hand, offers a hands-free user interface that is a more natural and frictionless compared to alternative UIs.A voice UI needs nothing but a voice command to interact with digital devices. However, it comes with its own complexity of varying user speech characteristics such as accent or volume. More importantly, the need to suppress various background noises for efficient use of voice UIs is critical. While edge computing and/or cloud-based artificial intelligence (AI) are critical technologies to enable battery life and performance of smart home devices, the overarching goal of conversational AI is still far from reality.From a business standpoint, the winner of the race for voice UIs must improve AI capabilities while supporting a strong ecosystem of partners. Amazon, for example, is king of this strategy. The e-commerce giant is building an Alexa Voice Service (AVS) ecosystem by way of its Alexa Fund companies and third-party integrations (partners) to realize its goal of proliferating voice everywhere. These partnerships enable the ecosystem to build end-to-end speech systems that can literally take voice interface products everywhere and promote, among other things, hardware startups that are disrupting the MEMS market with products such as environmentally robust piezoelectric microphones.Energy harvesting near-zero-power always-listening microphones, used in partnership with the AVS ecosystem, are enabling voice UI products to expand into battery-operated applications such as hands-free TV remotes, smart garbage cans, Bluetooth speakers, headsets, hardware appliances and automobiles. A good example of a unique voice UI launched at CES 2019: Housewares designer simplehuman’s voice-activated smart garbage can uses Vesper microphones and AVS. Watch the video.While the future might bring additional digital interfaces, along with multisensory experiences using vision, gesture and touch, voice UI is at the forefront of current technological innovation. Soon, Alexa might help cook dinner without intervention, even turning off the stove when food is burning through the use of a scent-detection sensor integrated with a microphone array. Voice UI continues to astound us with its possibilities, and we’re excited for the journey ahead.With more than 12 years of experience working in speech and voice applications for wireless devices, Udaynag Pisipati is a senior field applications engineer at Vesper. He holds a master’s degree in electrical engineering from University of Missouri and an MBA from Santa Clara University. A firm believer in speech as a natural user interface for human-machine interaction, Pisipati’s areas of interest include everything related to speech processing, including microphones/speakers, signal processing and machine learning.Vesper is a member of MEMS Sensors Industry Group (MSIG), SEMI technology community.

The 3D optical sensing market is once again surging – and it’s all thanks to Apple. What will we see in the next wave of end products enhanced by this technology, how will other market segments approach – and eventually use – 3D optical sensing, and which suppliers stand to gain the most from this very vital technology?Although 3D sensing, facial recognition and optical authentication systems have become only recently hot topics in the consumer electronics market, these mechanisms first made their appearance nearly a decade ago in November 2010. Following that debut, Microsoft soon launched the Kinect system in its Xbox 360 gaming console, marking a milestone as significant as Nintendo’s launch of its Nintendo Wii remote controller in 2010, which catapulted MEMS motion sensors into the high-volume consumer market.The Kinect system used a triangulation-based camera that Israeli developer PrimeSense Ltd. created and then licensed to Microsoft; Apple liked the technology so much that it acquired PrimeSense in 2013. The first version of Kinect applied the Structured Light (SL) method, a depth-sensing principle featuring an infrared (IR) laser projecting dots onto the scene, with a monochrome CMOS sensor measuring the differences in the acquired pattern. The second version of Kinect used the Time-of-Flight (ToF) principle.Kinect for Xbox360 was not only a successful consumer product; it also sparked a new market, thanks to the relatively low cost of the 3D sensing solution. By using the same hardware for Xbox 360 as in its first version of Kinect, Microsoft allowed developers to design their pet projects in the Kinect environment. Adding hand gestures controls to a PC, creating a user-controlled virtual dynamic light (see Kimchi and Chips’ demo), and developing an inexpensive hologram generator (see “Princess Leia” video from the MIT Media Lab) are just a few examples of ecosystem developers and DIYers applying their creativity to Kinect.Apple Goes 3D with Face ID3D optical sensing has expanded from gaming consoles to the smartphone. In 2017 Apple presented its Face ID camera system for the iPhone X, which they launched to celebrate the 10-year anniversary of the iPhone. Face ID is the result of a longer term strategy for Apple, the byproduct of several company acquisitions to expand know-how in 3D sensing and augmented reality (AR)/virtual reality (VR). Between 2015 and 2018, Apple acquired the camera-module maker LinX (2015), the AR startup Vrvana and the imaging sensor firm InVisage Tech (both in 2017), and AR glasses’ designer Akonia Holographics (2018).For a company that has always innovated on its own terms, Apple’s idiosyncratic approach called for deployment of the Structured Light method combined with a ToF device. The result is an amalgamation that utilizes the best features of the two mechanisms, even if the combination is one that is expensive. Apple’s addition of a near-infrared illuminator to its ToF device enhances the system’s effectiveness under most light conditions while also improving the reliability of Face ID; the overall outcome is a more satisfying user experience. The ToF component, which STMicrolectronics supplies, makes use of so-called single-photon avalanche diode (SPAD) receivers that can work with any target material and color, although a higher target illumination is required to obtain good accuracy.The other core components of the Face ID system are the Vertical Cavity Surface Emitting Laser (VCSEL, from Lumentum) and a dot projector (from ams/Heptagon), assembled together in an optical package. Apple’s expensive but reliable approach explains the company’s inclusion of the Face ID system in its latest smartphone and tablet offerings – across the iPhone Xs, Xs Pro and Xr as well as in the latest iPad Pro models. Apple’s Face ID uses facial recognition for authentication on a range of iPhone and iPad Pro models. Image courtesy of Apple. Chinese Phone Makers Get into the GameMeanwhile, other mobile handset manufacturers are rumored to be working on Face ID-like systems or have already presented similar solutions, albeit through a variety of approaches. Some have chosen to use standard ToF devices while others have adopted an SL tactic. In many of these designs, which happen to target Android systems, OEMs generally include a fingerprint sensor as a fallback biometric option to their own nascent 3D facial recognition systems. The fingerprint sensor operates in either standalone mode or integrates into the display.Chinese handset maker Oppo, for instance, uses the SL method on its Find X model with algorithms coming from Megvii. Oppo claims its equivalent of Apple Face ID is faster. I have heard that Vivo has been working on a ToF camera since mid-2018, which it claims provides greater accuracy and security in end-applications such as secure payments and unlocking the phone.Chinese technology giant Huawei’s first 3D facial sensor appeared in its Mate 20 Pro flagship mobile phone. Aside from providing facial biometrics, the front-facing 3D sensor doubles as a 3D scanner, enabling users to digitize live objects that they can then manipulate in 3D AR applications. While still a novelty, the application highlights the use of 3D light sensors beyond that of biometrics. Xiaomi’s Mi Explorer Edition smartphone features a complex SL 3D module to enable 3D facial scanning although it looks like a clone of the Apple solution.Overall, the importance of facial recognition is no longer a matter of dispute, given that Apple’s rivals are now developing counterpart offerings of their own. Leaked code from the next revision of the Android operating system (revision Q), now under development by Google, has confirmed as much. Big and Getting BiggerIHS Markit forecasts that global revenue for ToF sensors in the 3D optical sensing market will surpass $500 million in 2019, up from $370 million last year. We also predict that the ToF market will grow in the coming years, spurred by combo solutions integrated with other light sensors in the same package. This will lead to a cheaper bill of materials (BOM) compared to the BOM for the SL method.At the same time, IHS Markit forecasts that the total market potential for light sensors will be worth much more, reaching $1.5 billion by year 2022. That’s because after a solid start with gaming consoles, 3D sensing has matured and consolidated in the massive smartphone arena.A segment of 3D Sensing’s future growth will come from other use cases and applications that are emerging outside consumer electronics and mobile. These include people-counting and -tracking in consumer and industrial applications, landing-aid and obstacle-avoidance functions in drones, and car-trunk (boot) opening with foot gestures, as well as gesture recognition and passenger detection in automotive. IHS Markit predicts steady growth for ToF and other light sensors. All told, the ToF approach appears to have a greater chance than the SL method in gaining a larger market share, leading to a cheaper and smaller BOM along with reduced integration costs in system assembly and calibration.Sometime this year, Apple and other handset OEMs may include a ToF-based 3D camera on the back of the iPhone to support more immersive gaming experiences and new AR/VR applications. This will further boost the 3D sensing market.To be sure, other mature technologies are available as valid alternatives to optical 3D sensing, including ultrasonic, mmWave and radar. These alternative technologies may gain part of the total market now commanded by 3D sensing, in use cases such as obstacle-avoidance or in-cabin presence detection.To learn about 3D Optical Sensing and Light Sensors from IHS Markit, go to: https://technology.ihs.com/606483/light-sensors-for-consumer-mobile-report-2018Manuel Tagliavini, a principal research analyst at IHS Markit, covers MEMS and sensors technology.Manuel Tagliavini joined IHS Markit in 2017. His key areas of focus are MEMS and sensors for mobile and consumer technologies. He is responsible for the tracking of sensors in handsets, tablets, laptops, and sports and fitness products.Prior to IHS Markit, he spent over 10 years with STMicroelectronics, working in various roles including product engineering, program management, and marketing and business development in the company's MEMS division.Tagliavini earned an Executive Master of Business Administration at SDA Bocconi School of Management and a Master of Science in Electronic Engineering from the University of Parma, both in Italy.Stay tuned with the technological advances and market trends in the MEMS Sensors ecosystem. Join MEMS Sensors Industry Group (MSIG), the SEMI technology community that connects the MEMS and sensors supply network in established and emerging markets, allowing members to grow and prosper.

At the SEMI FLEX 2019 and MEMS Sensors Technical Congress (MSTC) (MSTC) February 18-21 in Monterey, California, I had the pleasure of meeting many old friends and colleagues as well as making some great new acquaintances. With MEMS and sensors still a relatively young industry, I am delighted that our community is thriving. We continue to see double-digit growth rates, there is plenty of innovation, and the technology generates massive amounts of data that gets everyone excited about artificial intelligence, deep and machine learning, and blockchain. Those are all the buzzwords that any tech startup needs for funding these days.While it is hard to single out any one presentation at conferences, I was particularly struck by Nadia Shakoor’s keynote address, “Driving Advances in Crop Breeding and Smart Farm Management.” From Nadia I learned that the world’s largest agriculture sensing platform was a mere 45 minutes south of where I live in Phoenix, Arizona. This is a major embarrassment to admit as I have lived here for almost 30 years, have been involved in MEMS and sensors for a decade, and have a particular passion for the use of sensors in agriculture and food to improve crop yields and food quality, and to reduce food waste. This humongous sensor was hiding in plain sight right under my nose!After Nadia’s keynote, I just had to speak to her at the break. Nadia is the senior research scientist and project director for TERRA-REF at the Danforth Plant Science Center based in St. Louis, Missouri. Nadia’s work employs field-level crop phenomics, the biological study of the set of physical and biochemical traits belonging to a given organism (phenomes). Phenomes are fascinating because they change in response to genetic mutation and environmental influences. The Danforth Plant Science Center and its partners are involved in many phenotyping projects using autonomous vehicles, drones, field scanners, satellite imaging and more.After the FLEX MSTC event, I emailed Nadia to ask if I could visit the field scanner and her partner team at the University of Arizona in Maricopa, Arizona. She kindly introduced me to Maria Newcomb, a plant research scientist at the site, who gave me a good look at this mother of all field scanners: the Transportation Energy Resources from Renewable Agriculture Phenotyping Reference Platform (TERRA-REF). TERRA-REF aims to transform plant breeding by using remote sensing to quantify plant traits such as plant architecture, carbon uptake, tissue chemistry, water use and other features to predict the yield potential and stress resistance of 400+ diverse sorghum lines. The TERRA-REF Field Scanner at the University of Arizona Maricopa Agricultural Center. It’s the largest field crop analytics robot in the world, one that’s critical to the crop research underway at the Donald Danforth Plant Science Center in St. Louis, Missouri. Source: Steve Whalley TERRA-REF’s Lemnatec Field Scanalyzer is the largest field crop analytics robot in the world. This high-throughput phenotyping field-scanning robot has a 30-ton steel gantry that autonomously moves along two 200-meter steel rails that have recently been extended another 170 meters. It continuously images the crops growing below it by using a diverse array of cameras and sensors to observe the field at a dense-collection frequency with high resolution. These sensors include RGB stereo; thermal, chlorophyll fluorescence imaging system; hyperspectral cameras; a 3D laser scanner; and environmental monitors.Plant breeding is currently limited by the speed at which phenotypes can be measured, and the information that can be extracted from these measurements. Current instruments used to quantify plant traits do not scale to the thousands or tens of thousands of individual plants that need to be evaluated in a breeding program. The TERRA-REF field scanner system, on the other hand, uses sensors to scan over one acre of plants, collecting thousands of daily measurements throughout the growing season, and these are used to determine plant phenotypes and inform breeding decisions. TERRA-REF’s advanced sensor technologies include: Hyperspectral (250nm-2500nm) Thermal Infrared 2D and Stereo RGB PSII chlorophyll fluorescence 3D laser Environmental sensors The TERRA-REF field scanner platform features a massive sensor-rich scanner head. Source: Steve Whalley The humongous TERRA-REF field-scanner was certainly a sight to behold, looming like a cargo-ship container crane in the vast flat plains of the Arizona desert landscape. I’ve only scratched the surface of what this enormous sensor platform can accomplish so if you are a MEMS/sensor company interested in agriculture and food production, I encourage you to get more information at terraref.org and pay a visit next time you are in the area.Steve Whalley, CEO, Strategic World Ventures, is a strategic consultant to SEMI-MEMS Sensors Industry Group (MSIG). He also consults with established and emerging semiconductor, MEMS and sensors companies.

When developing industry forecasts, market analysts gather data from hundreds of companies to provide actionable insights on established technologies and to identify near-term business opportunities. As a developer of new MEMS and sensor technologies for a range of commercial applications, clients often ask us, “What’s going to be hot?” Gauging the promise of emerging technologies that are five to 10 years from commercialization requires taking a different tack.History tells us that most of today’s blockbuster MEMS products were born as academic research projects. Years of hard work by entrepreneurs, funded by millions of dollars, have turned proof-of-concept research into new commercial products. To identify up-and-coming technologies, we gather information straight from the source: academic conferences and articles.Chirp Microsystems is a good proof point of our research methodology: In my 2012 report on emerging technologies, I highlighted research from UC Berkeley and UC Davis on “In-Air Ultrasonic Rangefinding and Angle Estimation Using an Array of AlN Micromachined Transducers.” Soon after publication, the authors incorporated Chirp Microsystems to commercialize their technology for gesture- and fingerprint-recognition applications.After five years of development work, Chirp’s products are entering the marketplace. In February 2018, the global supplier TDK InvenSense acquired Chirp, underscoring the company’s commercial potential. At October’s SEMI-MSIG MEMS Sensors Executive Congress in Napa, Calif., Chirp’s CEO, Dr. Michelle Kiang, held attendees rapt as she described her company’s journey from startup to wholly owned subsidiary.There’s a methodThis year, I reviewed over 100 papers from top researchers presenting noteworthy technologies at the Hilton Head Workshop on Solid-State Sensors, Actuators and Microsystems. My criteria for selection were: commercial relevance; offers a solution to a known or anticipated problem; and technology game-changers. The following caught my eye: Event-driven sensors: Cleverly designed silicon MEMS that consume no power while standing by. A triggering mechanical or thermal event closes a contact within the sensor to activate its circuitry and telemetry. These sensors leverage existing fabrication methods, so they could become commercial products within five years for event monitoring and security applications. (UT Dallas, Northeastern University). Figure: 5-bit accelerometer having zero standby power. The device is open circuit until a threshold acceleration closes a mechanical contact. Source: University of Texas at Dallas. Thin film piezoelectric resonators: Advances in PZT deposition methods and process integration with CMOS were used to create monolithic acoustic waveguides for RF filtering in 5G applications. This new filter design, using existing scalable processes, is ripe for commercialization. (Purdue University, Texas Instruments) Intra-body communications: MEMS ultrasound transceivers, made from aluminum nitride, can send data directly through flesh at Mbit/s data rate. With trends toward networks of multiple implanted or wearable medical devices, this innovation would enable medically safe, secure, intra-body wireless communication. This early-stage work still needs in vivo validation and would likely require 10 or more years for development and regulatory approval. (Northeastern University) Screen- and 3D-printed sensors: One example of many exciting innovations using screen- and 3D-printing are potentiometric nitrate soil sensors. Low-cost and biodegradable, these sensors could be spread over huge areas to monitor a farm’s soil quality. Table-top and hobbyist tools are currently used to make screen- and 3D-printed devices, so new manufacturing equipment and infrastructure must be developed before commercial production could occur. (Purdue University) Biodegradable batteries: A paper-based battery that can deliver 0.5 uW of power, ingeniously using bacterial metabolism as the electrolyte. These batteries dissolve in water and could one day be used to power temporary medical implants or biodegradable sensors. This exciting proof-of-concept prototype will require significant process development and new manufacturing infrastructure for commercialization. (SUNY Binghamton) Figure: Paper-based battery dissolves in 60 minutes after immersion in water. Source: SUNY Binghamton To read more about these technologies, please download my presentation from SEMI-MSIG’s MEMS Sensors TechXpot at SEMICON West 2018.Alissa M. Fitzgerald, Ph.D., is the founder and managing member of A.M. Fitzgerald Associates, LLC, a MEMS and sensors development company in Burlingame, CA. She has over 20 years of engineering experience in MEMS design, fabrication and product development and now advises clients on the entire cycle of product development, from business and IP strategy to manufacturing operations. She is a frequent speaker at industry conferences and currently serves as a director of the Transducer Research Foundation, sponsor of the Hilton Head Workshop. She received her bachelor’s and master’s degrees from MIT and her doctorate from Stanford University in Aeronautics and Astronautics.For more information, visit: www.amfitzgerald.com

SEMI-MEMS Sensors Industry Group (MSIG) welcomed a global group of industry executives to its 14th annual MEMS Sensors Executive Congress (MSEC), October 29-30, 2018 in Napa, Calif. MEMS and sensors represent a robust sector of the electronic industry. Analyst firm Yole Développement expects the global market for MEMS and sensors to double in the next five years, reaching $100B by 2023, spurred by growth of autonomous mobility products such as Internet of Things (IoT) devices, autonomous cars, fitness and healthcare wearables, and agricultural sensors.“From drones that navigate any terrain in all lighting conditions, robo-taxis that ‘smell’ cigarette smoke, and sensors that monitor animal welfare and food safety, MSEC speakers shared inventive use cases representing new opportunities for MEMS and sensors suppliers,” said Carmelo Sansone, director, MEMS Sensors Industry Group. “Our keynote speakers spurred attendees to collaborate for the greater good. MITRE Corp. cybersecurity expert Cynthia Wright exhorted attendees to proactively address cybersecurity. DARPA Microsystems Technology Office (MTO) program manager Ron Polcawich invited participation in a rapid innovation and production concept that could dramatically speed design cycles for new MEMS. They exemplify the cross-pollination among commercial industry, government and academia that will continue to advance MEMS and sensors.”Getting serious about cybersecurityMITRE cybersecurity expert Cynthia Wright opened MSEC 2018 with a keynote on cybersecurity, alerting attendees to a topic that few in the industry have explored in-depth — but to which they need to pay attention.“Billions of connected mobile devices democratize knowledge, diversity and boost economies, and accelerate innovation by connecting humans to one another and to our environments,” said Wright. “At the same time, they easily create huge networks that carry operationally and personally sensitive data.”Because MEMS and sensors are deeply embedded into this vast array of connected devices, industry needs to get involved now or risk potentially grave consequences, claimed Wright. “From the destruction of critical infrastructure, cyberattacks on life-critical medical devices such as insulin pumps and heart monitors, and intrusions on autonomous vehicle safety systems, MEMS and sensors suppliers have a responsibility to help improve cybersecurity of connected devices,” she added.Allaying the potential fears of a roomful of suppliers envisioning complete redesigns of their products, Wright said that not every device requires the same level of security, and suppliers can make a difference with even “minor tweaks.” Wright suggested encryption at the edge and process authentication. She also gave MSEC attendees a list of design precepts: Build it in. Don’t bolt it on — Design your device with security in mind instead of retrofitting it after-the-fact to realize the most elegant design. Beware of shadow IT — You can’t protect what you don’t know about. Consider physical asset security; software/sensor-guided decision-making; personal or operational data collection; and key process control. Realize your points of vulnerability — because MEMS and sensors are susceptible to spoofing. Learn from cyberattacks of the past — even if they have not been tied directly to MEMS/sensors. Understand IoT software — Realizing that IoT software acts on what the hardware tells it, pay attention to altered sensor data that can lead to altered system performance. When asked about the role of US government regulation on the security of connected devices, Wright acknowledged that Europe has more restrictive cybersecurity guidelines than the US.“At the same time, it does not make sense to have two different approaches to cybersecurity of devices. US suppliers who implement more security measures can sell to both markets and to other parts of the world.”If she could leave MSEC attendees with a closing thought, it might be that companies “don’t need to put a firewall on a toaster.”“Not every chip has to be secure-foundry secure, but it would be nice if even 10% could hit that mark,” added Wright.Rapid Innovation through CollaborationIC designers typically enjoy three to four design cycles in a calendar year, leading to swift advancement of electronics over subsequent years.Designers in the MEMS community, however, generally have access to one design cycle or less per year, and typical time-to-market is four years for a new product. That slow fabrication pace has hindered deployment of innovative MEMS designs — and it’s something that MSEC closing keynote speaker, Ron Polcawich, program manager, DARPA MTO, would like to change.Polcawich’s vision of government collaboration with industry and academia spawned the investigational Rapid Innovation through Production MEMS (RIPM) Workshop, which Polcawich and his team held in May 2018. During his keynote, Polcawich shared lessons learned from the workshop while inviting MSEC attendees to get involved.Before RIPM can become a program, Polcawich knows it will require definition. What would a program concept look like? What is the best way to articulate the potential benefits to the MEMS community, and what additional inputs would be needed?“This is a daunting challenge from a program planning perspective,” said Polcawich. “In developing RIPM, we realized that we needed representatives from the entire MEMS ecosystem – integrated device manufacturers, or IDMs, equipment suppliers, foundries, and materials’ providers — to literally come to the table to tackle a common goal. Given the potential for the MEMS industry at large to benefit from rapid innovation and production, we hoped that competitors would realize that leveraging established MEMS processes could deliver significant benefits over the historically entrenched approach: one product, one process.”Polcawich believes that MEMS suppliers might relinquish the one product, one process paradigm if they knew that their IP were secure.“While technical challenges to realizing RIPM abound, we knew that we could tap the MEMS industry’s vast knowledge base to address them,” he said. “IP protection is an equally complex issue, and one that may bear a range of approaches. One model could ensure that each IDM owns their IP while the foundry owns the process technology, which it licenses to other companies through process development kits. In addition to speeding innovation, it also provides new revenue sources for the industry.”Polcawich sees RIPM as a win-win for both commercial industry and for the DoD. Speeding design-to-deployment of new MEMS devices could open new and larger markets to MEMS suppliers. It could also support greater product-line diversification and new revenue streams for foundries and other ecosystem members. The DoD could tap new MEMS devices for strategically important applications like tactical radios, unmanned aircraft systems such as drones, and image autofocus for cameras. Polcawich encouraged SEMI-MSIG members to get involved by emailing his group: [email protected] Hall of Fame MembersThree new industry leaders joined the SEMI-MSIG Hall of Fame, first established in 2011 as a means of honoring those who have made a substantial contribution to SEMI-MSIG. Selected by members of the Governing Council, 2018 Hall of Fame inductees include: Michelle Bourke, strategic marketing director, Customer Support Business Group, Lam Research Eric Pabo, business development manager, MEMS, EV Group Yoshio Sekiguchi, senior strategic advisor, TDK InvenSense Technology Showcase WinnerMSEC recognizes the latest advancements in applications enabled by MEMS and sensors — including those demonstrated by entrepreneurs competing in the Technology Showcase. Selected by a committee of industry experts, five finalists did their best to impress attendees with their technical approach and go-to-market strategies. The 2018 Technology Showcase winner, Alertgy, presented a biosensor-based wristband device that provides non-invasive, real-time blood glucose monitoring for people with type 2 diabetes, which affects more than 20 million Americans and hundreds of millions more worldwide. MSEC 2018 Sponsors MSEC 2019 Location and DatesMSEC 2019 will take place October 22-24, 2019, at the Coronado Island Marriott Resort Spa in Coronado, Calif., just minutes from downtown San Diego.For more information on MSEC 2019 and other SEMI-MSIG events and programs, please follow @MEMSgroup on Twitter, visit MSIG at SEMI and subscribe to SEMI’s weekly newsletter, SEMI Global Update.Maria Vetrano is a public relations consultant at SEMI.

DARPA’s Vision of Cross-CollaborationRon Polcawich, program manager, DARPA Microsystems Technology Office, will give the closing keynote at MEMS Sensors Executive Congress on October 29-30, 2018 in Napa, Calif. SEMI’s Nishita Rao spoke with Polcawich about the MEMS workshop on rapid innovation that he held earlier this year and his interest in continuing that conversation with a broad audience of MEMS and sensors suppliers attending MEMS Sensors Executive Congress. SEMI: What is your vision for the Rapid Innovation through Production MEMS (RIPM) concept and why does the MEMS and sensors industry need it?Polcawich: The goal behind our RIPM concept is to advance the state of MEMS device technology by creating enhanced access to mature process flows for utilization by military, academic and commercial MEMS designers.Compare MEMS to IC development and you will see much more rapid innovation in ICs. In many cases, IC designers can get through four design cycles in a calendar year because the process technologies are so mature.In contrast, it can take three to four years to develop the process flow for a MEMS device. I believe that we can do better. With so much process-flow development in MEMS having taken place over the past 15 years, we now have plenty of commercial designs out there. How do we capitalize on these existing production process flows so we can rapidly innovate to avoid those painfully long production cycles?With this question in mind, we launched a campaign to solicit feedback from small, medium and large foundries, integrated device manufacturers (IDMs), systems designers and integrators, and academic stakeholders. Our effort culminated in a May workshop where we were able to bring many of the same groups to the table. During one intensive day, we discussed challenges to the RIPM concept and what we would need to make it work.SEMI: What were some of your areas of focus?Polcawich: We covered a range of topics, from improving access to sophisticated packaging technology, such as advanced interposer technologies, to IP entanglement and the role of process design kits (PDKs).SEMI: In an industry historically defined by competition over collaboration, how do you hope to convince MEMS supply-chain members to work together?Polcawich: We see benefits from the proposed RIPM concept across the board. Foundries would benefit from outputting higher volumes of devices as well as charging for more sophisticated PDKs and process flows — which would comprise a new source of revenue for them.From our discussions at the workshop and throughout the summer, we understand that certain technology sectors are going to be more willing to engage with the community than others. Notional examples that we highlighted at the workshop include the possibility of manufacturing high-performance inertial sensors, oscillators and pressure sensors within the same process flow. The challenge to the community is having the MEMS designers work within a locked-down process flow and not requesting different material layers, gaps and critical feature dimensions for each device type, which is very common within our industry. We asked everyone the question, “If there were broader access to production process flows, would faster technology transition and innovation cycles enable a more rapid time-to-market for a wider range of products?”SEMI: What would you like MEMS Sensors Executive Congress attendees to take away from your presentation?Polcawich: We welcome additional feedback on the RIPM concept to help shape any potential program ideas. Furthermore, we would like assistance in identifying tipping-point technologies on each sector’s/foundry’s/IDM’s technology roadmap. We could use that information to determine mutual investment opportunities that could shift the roadmap timelines to the left, enabling more rapid production and commercialization timelines. Dr. Ronald Polcawich joined DARPA as a Program Manager in the Microsystems Technology Office (MTO) in August 2017. His research interests include advanced materials processing, micromechanics for small-scale robotics, device designs, and miniaturized position, navigation, and timing (PNT) systems. Read more.Polcawich will present Rapid Innovation with Production MEMS Workshop Outbrief on Tuesday, October 30 at MEMS Sensors Executive Congress in Napa Valley, Calif.Register today to connect with Ron and learn about DARPA’s rapid innovation in MEMS concept.Nishita Rao is a marketing manager at SEMI.

Nicolas Sauvage, senior director of Ecosystem at TDK InvenSense, will present at the fast-approaching MEMS Sensors Executive Congress on October 29-30, 2018 in Napa, Calif. SEMI’s Nishita Rao spoke with Sauvage to offer MSEC attendees advance insights on Sauvage’s feature presentation.SEMI: What is “autonomy value” and why is it important?Sauvage: How do you increase the perceived value of an electronic device? If it’s an autonomous car, its value is closely tied to the autonomy level — i.e., the independence — that it offers people. Higher autonomy value for a self-driving car, for example, means that even a blind person could use it. It’s been almost two years since Waymo demonstrated this, and here’s the video that shows it.Countless other sensor-based electronic products have their own “autonomy value.” Imagine the need to get medicine to people during a humanitarian health crisis. Drones could be your best option because they can deliver to inaccessible or remote locations. Unlike older drones, which require active piloting by a person, a drone with higher autonomy value could deliver medicine to Doctors Without Borders without ongoing human intervention.This drone could navigate objects, such as trees and birds, and would have excellent location-awareness. It could fly through any landscape in bright sunlight or during the night. To increase the drone’s autonomy value, you would need better sensors, including those sensors that can enable sensing in sunny conditions or in pitch-black night, as well as better machine learning.SEMI: In this example, what types of sensors would the drone manufacturer need?Sauvage: The manufacturer would need a “surrounding-sensing” solution that includes ultrasonic and pressure sensors as well as image sensors. Start with high-quality image sensors combined with ultrasonic range-finding sensors — high-accuracy devices that function in all lighting conditions and can detect objects of any color. Add motion sensors and a pressure sensor, which would capture the height of the drone to make known the drone’s location in space. The drone would need this combination of sensors, plus smart sensor fusion, because GPS alone cannot avoid obstacles: its signal can be sporadic in certain parts of the world or in certain terrain, making it unreliable.A key attribute of all these sensors would be low power consumption since the drone would run on battery.SEMI: To what extent might autonomy value cause manufacturers to consider multi-vendor solutions?Sauvage: I would like to see it inspire the MEMS and sensors ecosystem to work together, to arrive at multi-vendor solutions that will benefit humanity through greater autonomy value. Whether we’re looking at autonomous cars, drones, robotics or other applications, there are cases where we need to prioritize safety and security over industry competition. SEMI: Where are we today in terms of achieving true autonomy value – and where are we going?Sauvage: The sky is the limit, literally. Machine learning and surrounding-sensing solutions applied to cars, drones and robots will increase autonomy value to the point where we can justifiably call it artificial intelligence.SEMI: What would you like MEMS Sensors Executive Congress attendees to take away from your presentation?Sauvage: I hope that attendees will recognize the value of ecosystem solutions in increasing autonomy value. Together we can expand the variety of sensor types that address novel use-cases and jobs-to-be-done. Instead of waiting for customers to ask for ecosystem-level solutions, we need to articulate a complete MEMS and sensors supply-chain ecosystem if we want the Internet of Things (IoT) and Industrial IoT (IIoT) to grow more quickly. As senior director of Ecosystem, Nicholas Sauvage is responsible for all strategic relationships, including Google and Qualcomm, and other HW/SW/System companies. He is also responsible for strategic and market-driven goal-setting of our SensorStudio developer program, and driving select partnerships with SoC sensor hub platforms. Prior to joining InvenSense, Nicolas was part of NXP Software management team, responsible for worldwide sales, as well as for P L and product management of their OEM Business Line. Nicolas is an alumnus of Institut supérieur d’électronique et du numérique, London Business School and INSEAD. Register today to connect with Nicolas Sauvage at the event. You can also connect with him on LinkedIn.Nishita Rao is a marketing manager at SEMI.

You’re super busy. We know - it’s hard to take time away from work. So an industry conference must offer compelling value to justify your time. Whether you are brand new to MEMS Sensors Executive Congress (MSEC) or a veteran of the event, you’re sure to find a unique convergence of networking, learning, and fun in a single venue. This year’s theme is “Sensor Systems Enabling Autonomous Mobility” and we’re gearing up to make this event bigger and better than ever.Taking place on October 28-30, 2018 in Napa, Calif., this event is the most relevant, timely and authentic event of the year. Don’t just take our word for it. Look at what last year’s attendees said about MSEC.Here are the top three reasons we think MSEC is a must-see.Elevate Your NetworkWhere else but MSEC can you spend 2 days with industry executives from a broad spectrum of industries including automotive, communications, consumer goods, environmental, industrial, Internet of Things and biomedical. At this event, you’ll get many opportunities to mix and mingle with influential leaders who drive their company’s technology roadmaps and industry growth. Who knows, at a breakout session, you may find yourself sitting next to your future employer/employee, business lead for a new project or mentor.Stay Sharp with Powerful ContentThere's a wide range of sessions on the agenda with insightful topics such as the analysis of megatrends, production work flows and privacy challenges in the MEMS sensors business. You will get an inside view into what’s possible in this industry, so you can shape innovative solutions and drive early adoption. This is your chance to examine the enabling role of MEMS and sensors in diverse intelligent applications and gain actionable insights to advance your business.Encounter Emerging ApplicationsDiscovering unique applications for your business is necessary to thrive as technology changes at an unprecedented pace to drive rapid development of new products and applications. Our Technology Showcase session will feature 5 finalists who will be displaying a compelling and diverse set of demos. You’ll get the chance to interact with the newest MEMS/sensors-enabled applications and cast your vote for the winner. You will witness firsthand the edge of innovation in your field that will remind you why you love doing what you do.Jump ahead of the pack and register today!Nishita Rao is a marketing manager at SEMI.

ULVAC Technologies’ David Mount is working with The CIA. Is he the Jack Reacher of the MEMS and sensors industry, jetting around the world to secret meetings, you wonder? While David isn’t quite the super-spy that you might have imagined, he is doing some fascinating work on behalf of ULVAC Technologies, the world leader in vacuum technology.ULVAC has been collaborating with The Culinary Institute of America (CIA) on Menus of Change, “a ground-breaking initiative from The Culinary Institute of America and Harvard T.H. Chan School of Public Health that works to realize a long-term, practical vision integrating optimal nutrition and public health, environmental stewardship and restoration, and social responsibility concerns within the food service industry and the culinary profession.”ULVAC also partners with Menus of Change (MOC) University Research Collaborative, a group of elite universities and food-service executives working together to “accelerate efforts to move Americans toward healthier, more sustainable, plant-forward diets.” MEMS Sensors Industry Group’s Nishita Rao caught up with David, a featured speaker at MEMS Sensors Executive Congress on October 29-30, 2018, in Napa, Calif. to give MSEC attendees a preview of David’s talk. SEMI: How did ULVAC get involved with The CIA on Menus of Change?Mount: People in the MEMS sensors industry may not know that ULVAC started as an equipment supplier to the food industry. In 1952 ULVAC began supplying freeze-drying equipment – which relies on vacuum technology — to food companies tasked with providing long-lasting foods and beverages for the U.S. military under the Marshall Plan. Think instant soup, ramen noodles and Tang. While ULVAC’s technology portfolio is now very broad — spanning deposition equipment for the semiconductor industry, vacuum brazing for automotive, and even vacuum freeze-drying of vaccines that can be shipped dry but combined with distilled water for administration — the company has kept a hand in food technology. ULVAC’s vacuum cooling equipment rapidly and safely cools foods, dramatically increasing shelf life.The CIA is at the forefront of innovation in food technology, so we worked with them to test a vacuum cooling system that can also be used in the kitchen or in the field. In the Central Valley of California, for example, it can be 104ºF in the fields where lettuce is picked; our vacuum cooling system can cool that lettuce down to 47ºF in minutes.The CIA is also developing prepared foods for industrial settings such as university cafeterias and airlines. A prepared chicken dish, for example, might be cooked at 350ºF and then cooled to refrigeration temperatures. The potential problem is that bacteria can grow when you cool that food for storage. Some of The CIA test kitchens in California are using ULVAC’s vacuum cooling system to quickly and safely cool prepared foods.Vacuum-cooling is just one stage in food production, of course. Sensors are also widely used in food production and safety.SEMI: How do The CIA test kitchens use sensors?Mount: Nearly all aspects of production, processing and management in agricultural and food systems involve measurement of product and resource attributes. Sensors are a natural fit here as they can provide inspection capabilities that are accurate, fast and consistent. I plan to dive into some specific examples of the ways that The CIA and the MOC Research Collaborative are employing sensors to increase the safety of food and agricultural production.SEMI: What would you like MSEC attendees to take away from your presentation?Mount: I love knowing that the work that we do in this industry can benefit humanity. Applying our various technologies to food and agricultural production is just one way to do that. I encourage MSEC attendees to explore those markets that improve human quality of life – as well as the life and health of our planet and its other inhabitants. ULVAC Technologies senior advisor David Mount is a 35-year veteran of the vacuum and thin film equipment industry. He tried to retire from ULVAC but they would not let him go! David consults with ULVAC on strategic projects such as the company’s collaboration with the CIA.He will present Sensors in Food and Agriculture on Tuesday, October 30 at the MEMS Sensors Executive Congress.Register today to learn more about how sensors are transforming the food industry.Nishita Rao is a marketing manager at SEMI.

Cynthia Wright, a retired military officer with over 25 years of experience in national security and cyber strategy and policy, now Principal Cyber Security Engineer at The MITRE Corporation, will give the opening keynote at the upcoming MEMS Sensors Executive Congress, October 29-30, 2018 in Napa, Calif. SEMI’s Maria Vetrano interviewed Wright to give MSEC attendees an advance look at Wright’s highly anticipated presentation.SEMI: MEMS and sensors suppliers provide intelligent sensing and actuation to hundreds of billions of autonomous mobility devices – but historically, our community has not been at the forefront of cybersecurity. Why is now a good time for us to get involved?Wright: From wearables, smartphones, refrigerators and agriculture to medical devices and military hardware, autonomous mobility devices pervade our lives. At the same time, Internet of Things (IoT) botnet attacks like Mirai — and other demonstrated cyberattacks on home devices, vehicles and infrastructure — highlight the increasingly urgent need to address cybersecurity and privacy in MEMS/sensors-enabled devices.As building-block players in autonomous devices, MEMS and sensors suppliers have several good reasons to get involved.The number of IoT cyber security bills before state and federal legislatures suggest that regulation is coming, and it is in everyone’s best interest to prepare. While original equipment manufacturers (OEMs) would generally be held liable in cases of component malfunction or data breach, if insecurity stems from a microelectromechanical component, OEMs would most likely choose component suppliers with secure products.Beyond legislation and competitive advantage, we must consider that people’s well-being, even lives, could be at stake. Imagine what could happen if someone hacks into an insulin pump, the accelerometer on a train, or the LIDAR of an autonomous car. Intrusions of this sort could prove catastrophic.SEMI: Where do you perceive the biggest potential threats to consumers, industry, government?Wright: In good military fashion, I would say that it depends. If a person is a consumer of medical implants, that’s a big threat. On the government side, we could be talking about networked devices involved in military situational awareness. In industry, it could be sensors governing critical manufacturing or safety processes.I am not saying that every sensor must be secure. In every sector, there are areas of greater or lesser vulnerability, depending on context. SEMI: What is security or privacy by design?Wright: Addressing security flaws is cheaper and more easily accomplished at the design stage and not after the vulnerabilities are discovered. At MITRE, we practice systems- and design-oriented thinking as we consult with people doing development. We help them to develop security standards and approaches that are broadly applicable, rather than focusing on a specific product.For example, MITRE looks at the ways that a person might hack into a car to steal location and life history data — or alter its functions — to facilitate general standards and approaches that will help manufacturers better ensure the privacy and security of autonomous vehicles. Hackers have demonstrated that they can interfere with vehicle transmissions and brakes. Ignition, steering and other critical systems are theoretically accessible through the same types of attacks. To what degree can MEMS/sensors suppliers help automotive manufacturers ensure the privacy and security of autonomous cars, and the safety of their drivers? SEMI: What would you like MSEC attendees to take away from your presentation?Wright: MEMS/sensors suppliers are on the leading edge of computing and should take some responsibility for considering cybersecurity and privacy, for the safety of their customers and their own competitive advantage. Recognize which devices should be secure and act accordingly. Get involved at the design stage. The market for secure microelectronics is only going to grow, and this will benefit suppliers who take secure design seriously.Cynthia Wright will present Cyber Security and Privacy in the Age of Autonomous Sensing on Monday, October 29 at MEMS Sensors Executive Congress in Napa, Calif.Register today to connect with her at the event. Maria Vetrano is a public relations consultant at SEMI.