MEMS

SEMI spoke with Dr. Mikko Söderlund, sales director for Beneq’s semiconductor business, about trends in Atomic Layer Deposition (ALD) applications. Söderlund shared his views ahead of his presentation at SEMI MEMS Imaging Sensors Summit, 25-27 September, 2019, at the WTC in Grenoble, France. Join us at the event to meet Beneq and other key industry influencers. Registration is open.SEMI: The Backside Illuminated (BSI) CMOS Image Sensors (CIS) market continues to experience steady growth. Which applications are currently driving market growth?Söderlund: BSI CMOS Image Sensor market continues to be driven by mobile, security, automotive and Internet of Things (IoT) applications – so there seems to be plenty of opportunities for BSI CIS market to grow further.SEMI: What is critical for advanced thin-film deposition methods to extract best electrical performance?Söderlund: It is critical to control the material properties of the deposited layer (such as charge density, resistivity or barrier property) and of course, film uniformity and conformality. Furthermore, controlling material interfaces is also important, especially for sensitive III-V materials. {% video_player "embed_player" overrideable=False, type='scriptV4', hide_playlist=True, viral_sharing=False, embed_button=False, width='350', height='197', player_id='12721134435', style='margin: 0px auto; display: block; float: right; margin-left: auto; margin-right: auto; width: 350px;' %} Coatings and material features based on existing standard techniques can be very expensive, or not feasible at all. What does Atomic Layer Deposition (ALD), as a thin film coating method, offer in particular?Söderlund: ALD offers dense, highly conformal and pinhole-free best-in-class functional layers for dielectrics, passivation, encapsulation and much more. As a gentle and precise layer-by-layer method, ALD is extremely well-suited for deposition of such performance critical layers over large surface areas such as a cassette of wafers.SEMI: Please describe the Atomic Layer Deposition (ALD) coating process. Söderlund: ALD is based on a self-limiting surface reaction controlled thin film deposition. During coating, two or more chemical vapors or gaseous precursors react sequentially on the substrate surface, producing a solid thin film (see schematic below). Most ALD coating systems use a flow-through traveling wave setup, where an inert carrier gas flows through the system and precursors are injected as very short pulses into this carrier flow. The carrier gas flow takes the precursor pulses as sequential waves through the reaction chamber, followed by a pumping line, filtering systems and, eventually, a vacuum pump.SEMI: What are the two leading edge ALD applications?Söderlund: Today’s leading-edge ALD applications are in logic (high-k/metal gate, multiple patterning) and memory (DRAM capacitor, 3D NAND). Within the More-than-Moore (MtM) markets, CIS and MEMS (actuators and sensors, RF) have been early adopters of ALD, and we also see ALD being introduced in GaN Power and RF, as well as photonics.SEMI: Give us one prediction about the opportunities offered by advanced imaging applications.Söderlund: The large diversity of imaging applications will continue to drive growth and innovation. For example, machine vision is expected to transform the imaging landscape. We see this as a big opportunity for advanced thin-film deposition methods such as ALD, provided that the tools are versatile enough to address the diverse manufacturing requirements.SEMI: What are your expectations for SEMI MEMS Imaging Sensors Summit and why do you invite your peers to attend? Söderlund: The summit brings together all key RF stakeholders in the MEMS and imaging sensors industry, and we are looking forward to a great event. It’s a special event for us as we are officially launching a new ALD cluster tool product specifically engineered for the MtM applications – so this brings great excitement that we want to share with the attendees.Dr. Mikko Söderlund is Sales Director for Beneq’s semiconductor business. He has more than 20 years of experience in product development, product management, technical sales and business development across the photonics, OLED, and semiconductor industries. Mikko received his Ph.D. in Micro- and Nanotechnology from the Helsinki University of Technology. Serena Brischetto is a marketing and communications manager at SEMI Europe.

The BioMEMS market is becoming increasingly diverse, encompassing gas and pressure sensors, ultrasound, specialized biomedical sensors, and other types of MEMS and microfluidic chips used for drug delivery and analytical applications. The BioMEMS market is also growing steadily: Research firm Yole Développement predicts that BioMEMS will grow at 14.9% CAGR from 2017-2023, reaching US$6.9B by 2023.1 As a high-value market, BioMEMS is worth pursuing as long as you can manage the complexities of manufacturing, including a sometimes-fragmented supply chain. Fortunately, the MEMS manufacturing ecosystem is evolving to accommodate the needs of companies that are in the process of commercializing BioMEMS-enabled products. Understanding the ecosystem’s shifting dynamics will help BioMEMS to flourish in this promising while often-challenging market segment.Unique Product, Unique ProcessIn the world of semiconductor manufacturing, it is routine for a fab to manufacture hundreds of different device designs using just a handful of process nodes. Semiconductor foundries share their design rules with customers, who then develop the mask set accordingly, literally adapting their designs to fit the rules for manufacturing on one of the foundries’ process nodes. In stark contrast, most MEMS devices cannot conform to the level of standardized manufacturing processes that work so well for semiconductors. Rather, MEMS challenges us to develop individualized processes for each device. It’s one product, one process.New BioMEMS designs generally emerge from either corporate R D or academia, two groups that approach specialized MEMS foundries such as ours when they’re entering pilot or low-volume production. Today successful commercialization depends on open, accurate communication and close collaboration. MEMS foundries must work side-by-side with designers to ensure that designs are based on real-world manufacturing process technologies. This highly customized manufacturing model makes it very difficult to support future demand for the groundswell of diverse BioMEMS devices that are in development. If we want to handle this upward trajectory of BioMEMS, we’ll need to adapt.Change the ModelWhile most existing MEMS foundries currently support a wide variety of devices types, I predict that market forces will cause our foundries to move toward specialization. Some companies will specialize in what they already do best, e.g., inertial sensors for the automotive industry. Others might choose to develop their foundry business around a purpose-built facility, which, for example, only manufactures microfluidics or magnetic devices. Larger enterprises might opt to build captive foundries that are designed to serve their specific needs. Get Creative: Combine, CollaborateSatisfying the thriving market for BioMEMS will require creativity. One idea: combine different disciplines of the manufacturing process at the same foundry. For example, we could have a biochemistry fab and a MEMS fab under the same roof, or we could have a MEMS fab and a packaging facility in one building. While these approaches may not yet exist outside of academia, necessity may drive them to fruition.It will also require heightened strategic collaboration, a process that has already begun. To support both large volumes and greater diversity of devices, some MEMS foundries are building cooperative relationships with former competitors. Think of it as a restructuring of the supply chain.Embracing the special challenges of BioMEMS manufacturing is worth our investment in time and resources. We need to step back, individually and collectively, to understand where each of the existing MEMS foundries fits into the new supply chain so we can leverage our strengths. We can start by forging stronger alliances for tech transfer. Once we more freely share information as we engage in joint product development — involving technology teams who are more connected and less guarded — we will expedite tech transfer and manufacturability.While we are unlikely to achieve the same level of standardization that has enabled the semiconductor industry to reach its great heights, as long as we evolve to meet demand, we will grow together and prosper.To learn more about this topic, meet with Jessica Gomez at the upcoming SEMI-MSIG MEMS Sensors Executive Congress (October 22-24, 2019 in Coronado, Calif.) or email her: [email protected][1] “BioMEMS Emerging Non-Invasive Biosensors: Microsystems for Life Sciences Healthcare 2018 Report,” Yole Développement, https://yole-i-micronews-com.osu.eu-west-2.outscale.com/uploads/2018/08/Sample-BioMEMS-Non-Invasive-Sensors-Microsystems-for-Life-Sciences-Healthcare-2018-.pdf As founder and CEO of Rogue Valley Microdevices, Jessica Gomez has created a world-class precision MEMS foundry and wafer fab in the heart of Southern Oregon. Integral to her role as CEO, Ms. Gomez practices a business philosophy of offering custom design, best-in-class process technology and R D expertise to customers, to help them achieve the highest quality and reliability in their products.In 2018, Ms. Gomez was selected for the prestigious SEMI Board of Industry Leaders. SEMI also recognized her in its first Spotlight on SEMI Women, which honors accomplished women in the global microelectronics industry.Prior to founding Rogue Valley Microdevices in 2003, Ms. Gomez honed her experience in semiconductor processing and production management through positions at Standard Microsystems Corporation, Integrated Micromachines and Xponent Photonics.For more information, visit: https://roguevalleymicrodevices.com/Rogue Valley Microdevices is a longtime member and supporter of SEMI-MEMS Sensors Industry Group, which connects the MEMS and sensors supply network, allowing members to address common industry challenges and explore new markets.

Stefano Zanella, Head of Automotive, Industrial and Location Businesses, TDK InvenSense will present at next month’s SEMICON Taiwan (September 18-20, 2019 in Taipei City, Taiwan). SEMI Taiwan’s Emmy Yi spoke with Stefano for a preview of his talk.SEMI: What macro market trends are driving automotive manufacturers to increase the variety and volume of MEMS sensors in cars?Zanella: The car world is changing. Consumers increasingly view car ownership as less desirable, yet the number of miles traveled and of hours spent in a car are rising steadily. At the same time, cars are changing profoundly, and the pace of change is rapid. To thrive in this new world, automakers are becoming transportation enablers and providers.Many vehicles today autonomously interact with humans and the world around them, operate with less or no human control, and are powered by electric batteries. MEMS sensors – which mimic and augment the five human senses – are front and center in these advancements.Unlike other types of sensors – such as cameras, radar and GNSS/GPSS – MEMS gyroscopes are functional in every environment. Gyroscopes, as well as accelerometers, can supplement those other sensors when they are not available and boost the accuracy of their outputs when they are available. Both camera stabilization and dead reckoning when GNSS is unavailable are good examples of the latter. Other prevalent sensors include MEMS microphones, used to capture voice commands, ultrasonic sensors, which can be leveraged for parking and gesture recognition, and fingerprint sensors, which can improve car security.SEMI: How can automakers stay competitive in this changing landscape?Zanella: Automakers can future-proof their relevance in the transportation market in several ways. By embracing consumer migration toward ride-sharing over car ownership, many are transforming from manufacturers to mobility providers. Carmakers that invest in ride-sharing and other modes of transportation (e.g., scooters) can sustain their profitability, even if the number of vehicles sold eventually shrinks or simply doesn’t grow as much as anticipated.Automakers will need to pursue new avenues of product differentiation. Traditionally, automakers have kept performance and aesthetics to themselves by owning the engine and the body design of the car, leaving nearly everything else to suppliers. Autonomous driving and electrification, however, are pushing automakers to own the battery pack and the autonomous driving software stack.While we are just beginning to see standardization in battery packs, automakers are likely to own the autonomous driving stack for many years to come. Automakers that offer cars with highly functional and efficient batteries and driving stacks stand to gain market share.Automotive infotainment systems will become increasingly crucial as autonomous driving turns everyone into a passenger. Audio subsystem providers such as Harman Kardon, Bose, and Bang Olufsen, for example, jockeyed for attention at the most recent Geneva Motor Show, demonstrating sophisticated surround-sound systems that rival premium-quality home audio setups.With more and more consumers using voice interfaces to interact with devices in the home, drivers are less willing to accept spotty accuracy in the car. Hence, automakers are using more higher-performing MEMS microphones to accurately capture voice commands. This will come as a relief to those of us who routinely yell at our steering wheels while using voice command to try to call home. Demand for higher quality infotainment systems has prompted some automotive OEMs to own the entire infotainment system and work directly with sensor and chipmakers, a level of intimacy that gives automakers a chance to tune sensor and chip development to their own needs. This tighter relationship also positions device suppliers to forge more direct links with drivers.SEMI: Which MEMS sensors are particularly important to tomorrow’s automobiles and why?Zanella: For many years the automotive industry has been integrating more electronics into cars to improve safety, advance the driver and passenger experience, and, more recently, power the car. As vehicles rely less on human control, automakers must replace the senses of the driver with something else. That something else is a bunch of sensors, microphones, cameras, radar and LIDAR to replace vision and hearing.Since MEMS sensors such as accelerometers, gyroscopes and pressure sensors are much more robust than other types of sensors to operate in snow, rain and darkness and other imperfect environments, automakers use them to ensure that the vehicle never gets lost when other sensors and/or the GPS/GNSS signal become unavailable in tunnels or urban canyons. Gyros help determine direction, accelerometers velocity and distance driven, and pressure sensors height, such as when taking a fork on a multi-level highway. At the same time, fingerprint sensors, ultrasonic parking sensors, and temperature sensors are improving convenience, safety and security for the car’s occupants. Automakers increasingly use inertial and environmental sensors, MEMS microphones, fingerprint sensors, and vision/imaging sensors to augment or replace the five human senses on which car drivers have relied for over 100 years. Source: TDK InvenSense SEMI: To what degree can MEMS sensors enable automotive security?Zanella: MEMS sensors are used widely to enhance security today. Some of their mechanisms are easy to understand while some are unexpected. For instance, ultrasonic fingerprint sensors can authenticate the driver of a vehicle to prevent car theft or something less onerous, like a teenage driver taking the car out without permission.Accelerometers and gyroscopes can prevent a new type of spoof on keyless entry systems. Imagine that you are very close to your vehicle. Your car senses the remote control in your pocket and automatically opens the doors when you pull the handle. Now suppose that your car is parked on the street, not far from your house. You leave the remote control home, and the car doesn’t sense the proximity of the remote control. Great! No one can enter your car, unless ... a thief has a big signal amplifier that makes your car think that the keyless entry device is next to the car. In this case, what can an automaker do? Add an accelerometer that restricts the keyless device from broadcasting the entry signal unless you are walking to the car with the device on your person.SEMI: What would you like SEMICON Taiwan attendees to take away from your presentation?Zanella: I would like them to embrace the transformations afoot in the automotive market as well as their associated design challenges since, by overcoming these hurdles, they can offer significant societal benefits such as safer and cleaner transportation. At the same time, these transformations mean significant opportunities for semiconductor industry revenue growth. And while design-to-delivery cycles in automotive are longer than in consumer and mobile, the automotive market supports higher-value devices as well as the chance to fold dozens of MEMS sensors into a single model.To paraphrase Lord Kelvin: If you can’t sense it, you can’t manage it. As suppliers of many key technologies that make intelligent transportation possible, the MEMS sensors industry is in an excellent position to help automakers manage the many challenges ahead.Stefano Zanella, Ph.D., is Head of Automotive, Industrial and Location Businesses at TDK InvenSense, where he brings MEMS sensors (including accelerometers, gyroscopes and microphones) and location solutions to the automotive and industrial markets. Zanella holds an MS and a Ph.D. in Electrical Engineering from the University of Padova, Padova, Italy as well as MBAs from both the UC Berkeley Haas School of Business and from Columbia University.He will present MEMS Sensors Enabling the Smart Car Revolution on Wednesday, September 18, 2019, at SEMICON Taiwan at 1F 4F, Taipei Nangang Exhibition Center, Taipei City, Taiwan. Register today and save 20% to learn how MEMS sensors are transforming the human experience with cars.Connect with Stefano Zanella at SEMICON Taiwan or via LinkedIn. You can also get more information on TDK’s automotive solutions and application guides online.Interested in engaging with the MEMS sensors supply chain? SEMI MEMS Sensors Industry Group is a technology community that enables professionals in the MEMS and sensors industry to innovate, address common challenges and accelerate business results.Emmy Yi is a marketing specialist at SEMI Taiwan.

Every day it seems like a new portable voice-first device is coming to market. From smart speakers small enough to fit in your pocket to tiny wireless earbuds and voice-activated TV remote controls, we are using voice increasingly to play music, select TV shows, turn on the lights or interact with our smart thermostat. While the popularity of voice-first interfaces has spawned massive diversity in device type, as long as these devices are portable, they have one thing in common: They’re battery-powered, and that could be a problem for consumers who are tired of frequently recharging or replacing batteries. Change the Architecture, Reduce the PowerThe issue lies in the traditional hardware architectures of today’s voice-first devices, which are notoriously inefficient when it comes to power consumption. Such devices rely on a “digitize-first” model of processing voice data in which the heaviest power-consumers, like the analog-to-digital converter (ADC) and the digital signal processor (DSP), do all the heavy lifting up front, right at the start of the audio signal chain. They continuously digitize and analyze 100% of the ambient sound data as they search for a wake word, even if speech is not present and the only sound is noise. Because voice is spoken randomly and sporadically, that continuous digitization of sound wastes up to 90% of battery power.To tackle the battery drain in portable voice-first devices, we need look no further than the human brain. Our brain processes sound very efficiently. Imagine that you are outside your house having a conversation with your neighbor. You are able to focus on what your neighbor is saying because your brain can differentiate between sounds that it should send to the deeper brain for speech processing and sounds that it shouldn’t bother processing further (e.g., dog barks, sirens or car traffic). The brain spends minimal energy up front to decide whether it should spend additional energy on processing down the line. In other words, it saves the most power-intensive processing only for the important sounds.We can mimic the brain’s approach to signal processing by enabling a new “analyze-first” architecture for voice-first devices. This analyze-first approach requires ultra-low-power analog processing technology that can differentiate voice from noise before the sound data is digitized. This keeps the higher-power capabilities in a voice-first system, such as the wake-word engine, in a low-power mode when just noise is present. This approach only wakes up the higher-power chips in the system, e.g., the DSP or ADC, when it detects speech. Like our brain, a voice-first system uses an analyze-first architecture to conserve energy most of the time, saving the heavy lifting, i.e., the wake-word listening, for times when speech is present. The analyze-first architectural approach to always-on listening analyzes the analog microphone prior to digitization, saving considerable power in portable voice-first devices that run on battery. This architectural shift to analyze-first is well worth the investment because it reduces the system’s power consumption in a battery-powered voice-first device by up to 10x. That’s the difference between a portable smart speaker that runs for a month on battery instead of a week or smart earbuds that last for a whole day instead of a few hours on a single charge. Longer battery life in portable voice-first devices generates more good will among consumers, creating another key differentiator for manufacturers engaged in the ultra-competitive race for more users.For more information on the analyze-first architectural approach to voice-first devices, please view our video.Tom Doyle is CEO and founder of Aspinity. He brings over 30 years of experience in operational excellence and executive leadership in analog and mixed-signal semiconductor technology to Aspinity. Prior to Aspinity, Tom was group director of Cadence Design Systems’ analog and mixed-signal IC business unit, where he managed the deployment of the company’s technology to the world’s foremost semiconductor companies. Previously, Tom was founder and president of the analog/mixed-signal software firm, Paragon IC solutions, where he was responsible for all operational facets of the company including sales and marketing, global partners/distributors, and engineering teams in the US and Asia. Tom holds a B.S. in Electrical Engineering from West Virginia University and an MBA from California State University, Long Beach. For more information, visit www.aspinity.com. Aspinity is a member of SEMI-MEMS Sensors Industry Group, which connects the MEMS and sensors supply network, allowing members to address common industry challenges and explore new markets.

SEMI spoke with Thomas Fries, founder and CEO of FRT GmbH, about how hybrid metrology is shaping multi-sensor metrology tools to enhance measurement precision as the industry moves away from a single-sensor approach.Fries offered his views ahead of the SEMI MEMS Imaging Sensors Summit, 25 to 27 September 2019 in Grenoble, France. Join us at the event to meet experts from FRT Metrology and many other MEMS, imaging and sensors companies. Registration is open. SEMI: Metrology in front-end used to be straightforward. But then, as the number of tasks to be implemented increased, we moved to a multi-sensors approach. What drove this transition?Fries: I believe it´s more about software than about sensors. But of course the basis is the hardware. So, most metrology tools were designed around a specific sensor, e.g. a white light interferometer.A rigid frame, wafer fixtures, scanning tables etc. were then added to develop a complete system. In manufacturing more machinery was added, like handling systems, cleanroom equipment and more sensors, mainly for additive functions such as reading IDs or measuring temperature. The center was still the one and only sensor, being pimped more and more by some hardware features and a lot of software.SEMI: How are sensors and software shaping the way metrology is applied today?Fries: Today a huge number of optical sensors are available to provide various measurement options. But sometimes there are only very slight differences from one sensor to the other. A tiny variation may determine whether we solve a problem or end up fishing in troubled waters.And of course using different machines with those sensors requires high budgets for capital investment, used floor space, measuring time, etc. A multi-sensor platform solves all these problems. But again, it is the software that makes the real difference.SEMI: What lead to those advancements in metrology? What problems did they set out to solve?Fries: Metrology has been evolving ever since the measurement standards were established. The first challenge was to create a flexible mechanical platform that was also reliable and stable. All components were designed to be integrated into one system, mechanically, electrically and of course in the software.This level of integration requires not only an appropriate user interface, but also data formats and evaluation algorithms that leverage multi-sensor hardware. Today every metrology tool in the fab is justified by the application, not by specific sensors or specs. Of course the application leads to a set of specs, but the solution for the metrology task is realized within the software.New developments in metrology combine expertise in system design, physical knowledge in metrology and materials, mechanical engineering and also mathematical and software skills.The last step was the implementation of hybrid metrology functionality into a multi-sensor system that opens totally new doors in metrology. Before multi-sensors development, quite a few hitches could not be properly solved. SEMI: This is especially true when we consider applications in advanced packaging and MEMS manufacturing. What is in your opinion the main challenge?Fries: Specifically, in MEMS and advanced packaging we face multiple metrology challenges, as various processes run in one step and conditions on the wafer may vary quite often. In this case, a high degree of flexibility, up to the option to upgrade the metrology tool at any time or place, is a priceless advantage. Besides, cost effects for footprint, throughput and investment play a key role.A central task for nearly every customer application is to combine global measurements (complete wafer) and local measurements (per die) within one recipe. This is a perfect case for a multi-sensor platform. Measuring step heights and film thickness in one take is also an everyday routine. Combining those characteristics to measure hidden structures (hybrid metrology) is unique.SEMI: How will hybrid metrology enhance measurement precision and where do you expect the multi-sensor approach to be more applicable?Fries: The first advantage is the ability to measure properties that you cannot access directly. On top of that, all the previously mentioned features such as facing multiple metrology tasks, the combination of complete wafer and per die measurement are playing key roles. The precision of specific measuring tasks can be optimized by calibrating sensors against each other or combining results to get rid of noise or artefacts.MEMS and advanced packaging are natural playgrounds for hybrid metrology. But already today we see applications in high volume manufacturing in the 300mm fabs. As structures on wafers shrink, wafers are getting thinner and the whole process is becoming more and more complex. The classic one-sensor metrology tool is running out of gas. SEMI: What are your expectations regarding the summit in Grenoble, and for the future of the MEMS Sensors technology?Fries: FRT has always been very strong in MEMS and sensors and we have attended and exhibited at the SEMI MEMS Imaging Sensors Summit from the very beginning. The summit is always a very good meeting point for the community, and a perfect training session that gives participants extended updates in all fields. And of course, it grows our network and gives us the opportunity to show our latest products and applications.If you really want to know how the future of MEMS and sensors will look like, join the summit and don´t miss the chance to pass by the exhibition to meet FRT and many other industry leaders.Dr. Thomas Fries lives with his family close to Cologne. He is engaged in a variety of activities: as technical advisor to various ministries, supervisory board of PlanOptik AG, board and advisory board of IVAM, board member of COPT.NRW e. V., just to name a few. FRT supports many social projects as well as kindergartens and schools. Motorcycles and cars are still a great passion alongside his family.Serena Brischetto is senior marketing and communications manager at SEMI Europe.

According to market research and strategy consulting firm Yole Développement (Yole), the total market size of MEMS, sensors and actuators will double from $48 billion in 2018 to $93 billion in 2024.[i] The consumer market will continue to drive volume, with applications such as smartphones making up for in volume what they lack in average selling price (ASP). Stronger demand in automotive, biomedical/health, industrial, and voice-first applications (such as smart speakers) will support this upward trajectory. With so much growth ahead of us, how will the design and manufacture of MEMS keep pace with industry demand for higher levels of innovation and integration, lower cost and lower power, smaller footprints, and faster design cycles — all while meeting acceptable price points?We turned to a handful of MEMS manufacturing experts from SEMI-MSIG who will join us at SEMICON West 2019, July 9-11 at the Moscone Center in San Francisco, to explore the complexities of keeping pace with market demand for MEMS over the next decade.Address the Design GapMentor GM, ICDS Division Greg Lebsack and SoftMEMS President Mary Ann Maher see tremendous progress in the manufacturing supply chain for MEMS. At the same time, they acknowledge the significant gap that still exists in design capability for creating the billions of interconnected sensors required for future applications. Greg and Mary Ann will dive into the standards, ecosystem requirements and collaborative design solutions that will allow the micro-sensors industry to meet demand for next-generation wearables, Internet of Things (IoT) products and medical devices.Get Collaborative with Greg and Mary Ann: Addressing the Design Gap to Enable Next Generation Sensor-Based Products, SEMICON West, TechTALKS South, Thursday, July 11, 2019, 10:35-11:00 a.m. Register today.Get to a Really Big NumberFrom thousands of sensors and actuators in a single airplane to hundreds in a single car or a piece of factory equipment to the twenty-plus that ship in each of the hundreds of millions of the world’s smartphones, we aren’t even close to reaching the saturation point for these intelligent devices. SPTS Technologies EVP GM David Butler isn’t living on the Spaceship Enterprise (or the Millenium Falcon, come to think of it) when he says that we are going to get to a trillion sensors. It is going to happen. The questions are: how and when?Connect with David: Enabling the Age of a Trillion Sensors, SEMICON West, TechTALKS South, Thursday, July 11, 2019, 11:00-11:25 a.m. Register today.Shift to Automotive-GradeDemand for optical sensing technologies such as LIDAR is shifting sensor manufacturing requirements from consumer- to automotive-grade, with its enhanced lifetimes, temperature cycling and higher performance specifications. To meet demand, manufacturers are turning to wafer-level processing, since it complies with the hermetic sealing and dew-point control required for the more rigorous automotive-grade applications. EV Group Business Development Director Thomas Uhrmann, Ph.D., will provide an overview of the steps for manufacturing optical elements, including integration with CMOS circuitry, as he offers a window into the future of automotive packaging for sensors.Tune in with Thomas: Future Manufacturing Requirements for Automotive and Photonics Sensing, SEMICON West, TechTALKS South, Thursday, July 11, 2019, 11:25-11:50 a.m. Register today. Measure Twice, Cut OnceFaster time-to-market, improved device yield, and greater productivity in high-volume manufacturing are increasingly critical requirements for MEMS manufacturers. When a single manufacturing error can cost hundreds of thousands if not a million or more dollars — as well as months of development time — designers can save both time and cost by employing an integrated approach to MEMS design. Lam Research Sr. Director of Strategic Marketing David Haynes will explain how simulation, verification and process modeling can address MEMS-specific engineering challenges such as multi-physics interactions, process variations, MEMS + IC integration, and MEMS + package interaction. Using the right tools before committing to actual fabrication can make or break a project.Get Conceptual (and Practical) with David: Enabling Better MEMS from Concept to High-Volume Production, SEMICON West, TechTALKS South, Thursday, July 11, 2019, 11:50 a.m.-12:15 p.m. Register today.Navigate a Dynamic Foundry LandscapeWe’re still living in a one product-one process world when it comes to MEMS manufacturing. This makes bringing a new device to market both time-consuming and expensive. These challenges aside, the functional capabilities of MEMS, combined with small-footprint and low-power options, have made MEMS increasingly popular. How are market dynamics in MEMS manufacturing evolving to accommodate both demand for high-volume, lower-cost products such as MEMS microphones as well as high-value, lower-volume products such as biomedical devices, IoT products and industrial sensors? Rogue Valley Microdevices Founder CEO Jessica Gomez will explain how foundry consolidation through acquisition, collaboration with other ecosystem players, and specialization in vertical markets such as biomedical or optical are some of the approaches that are transforming the MEMS foundry landscape.Join the Evolution with Jessica: Consolidation, Collaboration, Specialization: How Will MEMS Fabs Manage Changing Dynamics, TechTALKS Stage South, Thursday, July 11, 2019, 12:15-12:40 p.m. Register today.i“Status of the MEMS Industry report,” Yole Développement (Yole), 2019 Edition.Maria Vetrano is a public relations consultant at SEMI.

Why Is Smart Parking a Hot Topic? Poorly managed parking resources have a substantial negative impact on cities — one that has been well-documented. According to industry studies, poorly managed parking: Increases Traffic Congestion: 30% of traffic is caused by ongoing circling for parking. Increases Pollution: In Westwood, California, cruising for parking burned 47,000 gallons of gas and generated 730 tons of carbon dioxide in one year. Frustrates Drivers: Urban drivers spend an average of 20 minutes per trip looking for parking. Stifles Economic Opportunities: Traffic congestion cost Americans $124 billion in 2013, and this is predicted to rise to $186 billion by 2030. These problems are getting worse. As a result of growing urban populations, cities account for more than 80% of carbon emissions globally. Unplanned or inadequately managed urban expansion leads to rapid sprawl, pollution and environmental degradation. Due to the lack of parking-space availability, for example, Japan is ranked among the most expensive countries for paid parking. If left unaddressed, poor parking management will continue to plague cities, both large and small. Fortunately, Smart City Internet of Things (IoT) initiatives are helping cities to address their parking issues. IoT to the RescueThere are three key drivers of Smart City IoT initiatives. Cities want to: Improve the overall quality of life and mobility in urban environments Leverage technology to augment and improve existing infrastructure and services that citizens rely on every day Foster both economic and environmental improvements The availability of high-accuracy vehicle detection sensors coupled with affordable, low-power connectivity has enabled a new generation of Smart Parking technology. However, choosing the right Smart Parking solution is essential.High-accuracy vehicle detection sensors can provide valuable data to city planners and parking managers. This information includes: Parking availability Traffic flow Parking occupancy rate and historical data Turnover For parking management to effect change, city traffic managers, parking managers and urban planners need a holistic view of parking availability and usage patterns, and users need real-time information about available parking spaces.Sensors, cameras and communication networks form the basic infrastructure for Smart Parking. To deliver on the promise of IoT and to help cities improve the overall quality of life for residents and visitors, cities need a complete smart parking solution that provides: Accurate real-time vehicle detection and location of available parking spaces – significantly reduces the amount of time spent cruising for parking spaces, giving drivers the precise location of available spaces Connectivity from the sensor to the cloud – facilitates real-time parking data that city planners, parking enforcement and traffic managers can use to reduce traffic congestion Parking applications for cities, parking-lot owners and drivers — enables navigation to available parking and supports mobile payment, streamlining the parking process. Parking applications can also direct traffic enforcement personnel to parking violations as they occur, helping to alleviate traffic bottlenecks, such as double parking in loading zones. Such applications also improve the efficiency of other city services such as public transportation and garbage collection. Complete Smart Parking Solution – Sensor to Cloud (Source: PNI Sensor) To learn how cities are using Smart Parking sensors to improve the services they offer to residents and visitors, come see PNI at SEMI’s 2019 FLEX Japan MEMS Sensors Forum (May 22-23, Toyko, Japan). PNI President and CEO Becky Oh and PNI’s partner, Macnica Networks, will share Smart Parking use cases from innovative cities, corporate campuses and universities (Smart Parking presentation, May 22 from 16:55-17:25). Register for the conference today. For more information about PNI Sensor, visit the PNI Sensor website. Becky Oh is the president and CEO of PNI Sensor. Throughout her 20 years with the company, Ms. Oh has held a range of senior-level positions, from operations to technical business development. She received an M.S. degree in Electrical Engineering from Cornell University and a B.S. in Electrical Engineering and Computer Science from MIT. Ms. Oh holds multiple patents in the area of devices with multi-sensing and reporting capabilities.

Air pollution is one of the grand challenges facing the entire planet — from the wealthiest nations to the least developed. The World Health Organization reports that nine out of 10 people breathe air containing high levels of pollutants, and that polluted air takes over seven million lives annually through stroke, heart disease and respiratory ailments.As a result, the world is thirsty for reliable, high-performing chemical and environmental sensors that can provide previously unavailable real-time awareness of environmental conditions. On one level, this seems like a relatively simple step, given that smartphones are already equipped with miniaturized sensing technologies that can monitor our living environment and activities.While highly desirable, embedding air pollution sensors in common mobile and wearable devices has not been feasible previously because the necessary trade-offs between high performance and miniaturization have made it impossible.This situation drove a CEA-Leti team to develop a novel generation of fully integrated optical chemical sensors that leverage MEMS technologies. The team successfully merged multiple functionalities on the same chip, using integrated optics and photonics, fluidics, acoustics and electromechanical transduction. How did the team overcome significant technical obstacles to design a proof-of-concept device that senses multiple environmental pollutants — housed in a minimal hardware footprint?Advancing Chemical Sensor Capabilities with Silicon Featuring high selectivity, real-time performance, and fully reversible capabilities, optical chemical sensors are perfect candidates for industrial, environmental and biomedical applications. Consequently, in recent years, worldwide R D initiatives have invested substantial effort to improve them.R D programs have focused particularly on the mid-infrared (Mid-IR) wavelength range (2.5 - 12 µm) — also known as the molecule fingerprint region, which provides a unique combination of fundamental absorption order-of-magnitude bands and unambiguous identification of specific chemicals. A multitude of molecules generate strong and distinct absorption lines in the Mid-IR, providing a foundation for accurate spectroscopic detection. Traditionally, however, these sensors have required large and expensive lenses for infrared (IR) light, making them too big and costly for resource-constrained wearables and mobile devices.Fortunately, recent advances in integrated silicon photonics and quantum cascade laser (QCL) technologies have spurred investigation of new chemical sensor architectures. Richard Soref, a research professor at the University of Massachusetts Boston’s department of engineering, introduced the extension of Near-IR technology into the longer-wave Mid-IR infrared region in 2006. Soref’s concept showed that highly sensitive and selective gas sensors could be fabricated on planar substrates at low cost by co-integrating silicon MEMS, group IV photonics, and specifically designed III-V hetero-structures.While this approach showed promise, it preceded the widespread availability of most mobile devices and wearables. Foreseeing today’s proliferation of those devices, CEA-Leti developed the different building blocks required to implement these concepts in real devices.A New Concept of Integrated OpticsLeveraging these interesting findings, the institute developed a new combination of integrated optics and multiple sensor functions on a single chip: QCL sources, a photo-acoustic (PA) cell, and a mid-IR photonic integrated circuit (PIC) combiner. Their integration on a planar substrate (Figure 1) helped to achieve higher performance, new capabilities, and higher reliability at lower cost, all in a smaller package (less than a 1 cm3 or smaller than a 1-cent coin) with reduced weight and power consumption (less than 100 mJ per measurement). Figure 1: Fully integrated optical sensor (Courtesy: CEA Leti) This configuration represents a multi-gas-detection enabler. The PIC replaces costly, fragile discrete optics while the PA detector uses a MEMS microphone to replace bulky multi-pass cells.PA spectroscopy is among the most sensitive techniques available for monitoring chemical emissions or detecting gas traces. It relies on excitation of the chemical with a pulsed light source emitting at the absorption wavelengths of such molecules. The relaxation process creates local periodic variations of the temperature, resulting in stationary pressure waves, which high-performance microphones can detect.This new generation of devices, fully fabricated on silicon, shows performance comparable with state-of-the-art systems, with the huge bonus of small size and power efficiency that work well for mobile and wearable electronics. By supporting integration onto common technological platforms, such as on-chip photoacoustic sensors, researchers have successfully realized these miniaturized and cost-effective Mid-IR photonic devices in silicon. Mobile device and wearables manufacturers can now take advantage of manufacturable integrated devices for applications that are highly sensitive to size, performance and cost. Adding gas sensing to mobile devices and wearables is now very feasible.For more information on chemical sensing at CEA-Leti, please visit or contact: http://www.leti-cea.com/cea-tech/leti/englishCEA-Leti is an active member of SEMI-MEMS Sensors Industry Group. The technology research institute, along with Fraunhofer and imec, recently joined SEMI’s family as a Strategic Association Partner under a memorandum of understanding (MOU). Under this agreement, CEA-Leti will work with SEMI to advance technology roadmaps, industry standards and cutting-edge technologies including Internet of Things (IoT), artificial intelligence (AI) and machine learning that enable new capabilities across healthcare, automotive and other electronics manufacturing ecosystems. Sergio Nicoletti has more than 20 years of experience in micro and nanofabrication, including magnetic, superconducting and chemical sensing devices and technologies. Having joined CEA-Leti in 2006 as project manager for optical sensing devices used in chemical detection, Nicoletti is currently business development manager at the institute.Previous positions include research and project management at CNR-IMM (Bologna, Italy) and at Hitachi Global Storage Technologies. Nicoletti was also a visiting scientist at HGST (San Jose, Calif.), where he worked on magnetic recording-head devices.Nicoletti holds more than 20 patents and has more than 70 publications in peer-reviewed journals. In 2016, he was appointed coordinator of the European H2020 project MIRPHAB and is director of the project’s pilot line.Nicoletti received his Ph.D. in physics, with a focus on HTc superconducting devices, from Université Joseph Fourier (Grenoble, France). References“Photoacoustic cell on silicon for mid-infrared QCL-based spectroscopic analysis,” JG Coutard, A Glière, JM Fedeli, O Lartigue, J Skubich, G Aoust, A Teulle, T Strahl, S Nicoletti, M Carras, L Duraffourg. Proceedings Volume 10931, MOEMS and Miniaturized Systems XVIII; 109310V (2019) https://doi.org/10.1117/12.2506514“Miniaturization of mid-IR sensors on Si: challenges and perspectives,” S Nicoletti, JM Fédéli, M Fournier, P Labeye, P Barritault, A Marchant, A Glière, A Teulle, J Coutard, L Duraffourg - Silicon Proceedings Volume 10923, Silicon Photonics XIV; 109230H (2019) https://doi.org/10.1117/12.2506759

New MEMS-based products are constantly emerging, fueled by the Internet of Things (IoT), autonomous driving, smart manufacturing and healthcare applications. The MEMS pressure sensor market is no exception to this trend1. Its growth has been driven mainly by automotive applications such as tire pressure management system (TPMS) regulations in China, fuel and ignition systems, thermal systems, oil-pressure monitoring, and indoor and outdoor navigation systems. Easy to customize and integrate, miniature, sensitive, accurate and low-power MEMS devices are especially well-suited to the accuracy, power consumption, sensitivity and miniaturization that pressure sensors require.Yet MEMS design also presents some specialized challenges, such as a strong coupling between fabrication technology and design. Complex physical structures that exhibit non-linear behavior, custom packaging requirements, and a final product that requires integration with surrounding CMOS circuitry are just a few examples. What’s more, there is a lack of standardized processes and process validation in MEMS design ecosystems. Pressure Sensor (Courtesy: X-FAB) As with other products based on MEMS technology, designers must increasingly customize pressure sensors for higher performance – sensitivity and linearity, in this case – while decreasing their package size. Designers can accomplish the task by studying sensor performance and manufacturability using computer models prior to fabrication. This can ensure that the sensor meets its required specifications while simultaneously reducing manufacturing cycles and cost.The Power of CollaborationThis is where strong collaboration among EDA providers, MEMS technologists and designers delivers tangible benefits. EDA providers and MEMS foundries can collectively help MEMS designers to incorporate foundry process constraints into their designs.In the semiconductor industry, first-pass successful silicon relies on standardized manufacturing processes, thorough technology characterization, accurate model generation, established simulation and verification, and extensive reuse of proven design blocks. In the MEMS world, where processes and products are developed concurrently, and processes change with every product, is it possible to adopt standardized processes, design methodologies, and tools that enable efficient reuse of existing technology and design knowledge? The challenge lies in maintaining the flexibility to optimize products for a diverse array of requirements. The ideal design platform should ease sharing of technology and design data between the foundry and its customers, enabling two-way collaborative development and allowing foundry technologists to easily perform a feasibility assessment of a customer’s project. This approach offers important benefits, allowing designers to explore and evaluate the suitability of a foundry’s process technology in their unique application. It also supports accurate prediction of device performance prior to fabrication and reduces costly build-and-test cycles. Combining standardized manufacturing processes, MEMS process design kits (PDKs), and a proven design flow are the starting point for development of manufacturing-ready designs.A Real-Life Example using Pressure SensorsAn EDA company, Coventor (a Lam Research company), along with MEMS foundry partner X-FAB, collaborated to develop a PDK that would ensure that manufacturing constraints are automatically considered early in their design process. The design flow is based upon an X-FAB fabrication platform that supports multiple process options for the manufacturing of absolute and relative MEMS pressure sensors. The PDK is a “golden container” for all the process and material characteristics of the silicon membrane and substrate, glass, passivation layers, and piezoresistive components. It enforces material properties and guarantees their correct implementation during the simulation. It also includes a component library containing ready-to-use, 3D parameterized devices (such as membranes and resistors), all pre-designed with foundry-supported materials to support their respective design rules. The components are readily partitioned for optimized meshing and simulation, saving design and simulation time. Figure 1: The elements and design flow of the PDK designed by Coventor and X-FAB. (Courtesy: Coventor)Designers can use components from the library to create a custom design — which might include different membrane shapes and sizes, and resistors of varying shape, size and position — to simulate the impact of different technology variants (such as resistor doping profiles, membrane and substrate thickness, glass material properties, and passivation schemes). This allows them to anticipate the effect of these design changes on sensor sensitivity for varying pressure and temperature regimes.Extensive validation of the pressure sensor design platform is currently underway. So far, the simulations have exhibited very good correlation to actual device measurements across a range of pressure and temperature conditions, including predictions of non-linear behavior for various pressure sensor designs. At the same time, the simulation accounts for mechanical membrane properties and piezoresistivity. With this type of design platform, a foundry can provide guidelines to help customers select both the fab technology and design features that lead to an optimal design solution. Figure 2: Simulation results depicting mechanical displacement in a pressure sensor design (Courtesy: X-FAB) Let’s Face the Next Challenges…A complete design platform for MEMS must eventually include not only MEMS device design, but system integration functions, such as the application-specific integrated circuit (ASIC) design and packaging/assembly of the product. In addition to the design verification that the PDK provides, additional partnerships among foundries, integrated device manufacturers (IDMs), research centers, equipment suppliers, and EDA vendors will help to define requirements and solutions that address every level of design and production. These might include tasks such as describing standardized material properties and process specifications, creating accurate foundry-proven design models, and defining requirements for system-level simulation. In the future, PDK simulations might even include up to tape-out and physical verification. To learn more about this collaborative PDK development work, please click here for the whitepaper.Christine Dufour, MEMS PDK Program Manager, CoventorChristine Dufour is the MEMS PDK program manager at Coventor. She has more than 20 years of experience in the semiconductor industry, leading process design kit development for BiCMOS and CMOS processes at several major semiconductor companies. Ms. Dufour has also worked as a product manager in the RF design environment area. In addition to her extensive experience in MEMS PDK development, she is an expert in all aspects of MEMS design flow and design tool development. Ms. Dufour received an engineering degree at Technological University of Compiegne.For more information on Coventor, a Lam Research Company, visit: https://www.coventor.com/ Viraja Sharma, Development Engineer, MEMS Simulation Design, X-FABViraja Sharma is a development engineer for MEMS Simulation Design at X-FAB. Her work involves the design and simulation of MEMS inertial and pressure sensors. Prior to her tenure at X-FAB, Ms. Sharma performed similar duties for other semiconductor companies. She received her Master of Science degree in Micro and Nano Systems from TU Chemnitz, where she studied MEMS and micro technologies.For more information on X-FAB, visit: https://www.xfab.comCoventor and X-FAB are members of SEMI-MEMS Sensors Industry Group that connects the MEMS and sensors supply network, enabling members to address common industry challenges and explore new markets. 1 Market research firm Yole Développement predicts that MEMS pressure sensors alone will become a $2 billion market by 2023. See: https://yole-i-micronews-com.osu.eu-west 2.outscale.com/uploads/2019/01/YD18018_MEMS_Pressure_Sensor_Market_Yole_Developpement_2018_Sample.pdf

Creating a custom Internet of Things (IoT) IC is challenging because it involves multiple design domains (digital, analog and RF). Creating a sensor-based IC that combines electronics that use the traditional CMOS IC design flow with a MEMS sensor on the same silicon die, however, can seem impossible. Couple the co-design and verification challenges with a lack of traditional process design kit (PDK) support for MEMS, and you have a tough road to travel to get your IoT designs to market.What can we do to make the sensor-based IoT design community successful?Understanding the ChallengesThe sensor-based IoT IC typically features a MEMS sensor (and optional actuator) that interact with the real world. Analog and digital circuitry processes the signals and sends them to a CPU. The CPU provides the “smarts” to process the data from the sensor and then sends processed data via a radio to the Internet; alternatively, the CPU could activate the actuator. A typical sensor-based IoT IC (Source: Mentor: A Siemens Business) Based on the complexity of the system, designers face many co-design challenges: Analog design requirements imposed by MEMS: MEMS devices often require high voltages and multiple power supplies; they emit small signals that need amplification and conditioning; and they are sensitive to the environment and require calibration. Design flow interactions: Parasitics from MEMS devices might affect circuits and vice versa. Circuit designers need MEMS models for impedance and timing. Integration: MEMS devices operate at different timescales than circuits, which adds a layer of complexity. Compounding the problem is a lack of MEMS PDKs and methods to tie together ICs and MEMS PDKs for integration and cross-verification. After conquering the co-design challenges, the design team has to address mixed-domain simulation challenges that include: Simulating the system: This requires verification of MEMS, digital, analog and RF circuitry with embedded software that runs on the CPU. Timescales: These vary widely, from a single deflection of the MEMS transducer in femtoseconds to a seconds-long simulation of the embedded software performing a measurement and transmitting data. Simulation time: Simulation of a behavioral digital design is extremely fast. However, the system simulation requires stand-in models that incorporate the behavior of the analog and MEMS block to simulate in an acceptable amount of time. The challenge of timescales for co-simulation. (Source: Mentor: A Siemens Business) MEMS is the KeyThe reality is that it’s the MEMS device that adds extra complexity to the sensor-based IC design and verification flow. To amplify the problem, the MEMS manufacturing process is not nearly as mature as the standardized IC process. For example, the standardized IC process includes ready-made PDKs that include everything designers need to move through design and verification flows. Foundries often provide soft and hard IP to quickly build-out design, and EDA tools provide high levels of automation enabled by abstraction and a standardized IC flow. How will MEMS-based design evolve?MEMS-based design must catch up to the standardized IC process. The first step is providing MEMS PDKs that include: Multi-physics domain design rules and material properties Packaging information Wafer and bonding information Fabrication information We must also tackle issues associated with these PDKs, including: Ownership, distribution and maintenance of the PDKs Consensus on the contents of the PDKs Merging of CMOS and MEMS PDKs The industry needs to move toward standardized MEMS manufacturing processes with available PDKs. Companies must provide IP and recommend structured design methods for co-design and verification of ICs that incorporate MEMS. How can EDA help with these flows?The EDA ContributionEDA companies must work with teams in the MEMS IC co-design space, collaborating with MEMS fabricators to help enable PDKs. By incorporating PDK support within their own tools, EDA companies can provide an integrated custom IC flow that allows teams to design and verify MEMS-based ICs. For details about this flow, click here to download the Mentor whitepaper: Fusing CMOS IC and MEMS Design for IoT Edge Devices.Greg Lebsack brings 25 years of executive and technical management experience — along with a proven track record of building strong teams and delivering predictable results — to his role as general manager of the ICDS division of Mentor, a Siemens Business. Lebsack joined Mentor in 2015 after that company acquired Tanner EDA, where he was president. Prior to Tanner EDA, he held management and technical positions in a number of different industries and companies, including Sprint, General Electric and McKinsey Co. Greg holds a bachelor’s degree in business administration from Northern Arizona University.Greg Lebsack recently presented on the topic of Integrated Co-design of MEMS/IC at the MEMS Sensors Technical congress, a technical conference organized by the MEMS Sensors Industry Group.