MEMS

Inertial sensors have continued to underpin the success of wearables in increasingly important ways. Propelled by evolutionary advancements in inertial sensors, wearables have strayed from their humble beginnings in simple activity and wellness, which defined the user experience over the past decade. What started with the simple act of telling people their daily step count has morphed to provide deeper insights into swim stroke and run cadence, all the way to mapping out a person’s off-piste ski route. Layered on top of this foundation of inertial sensors, we’ve fused optical, temperature and other sensor technology to provide clinical-grade healthcare snapshots available previously only by visiting the doctor’s office.Inertial sensors today are again leading the way in improving health and wellness. Instead of humans, however, this time the patients are machines. In fact, the health of critical assets – whether factory-based equipment, windmills, train bogies or aircraft – has been assessed through sophisticated analysis of their vibration signatures for many years. The sensors used for these applications have depended on piezoelectric technology because their vibration amplitude signals are very small and difficult to detect and because of the importance of understanding their spectral content over a wide bandwidth. When it comes to noise and bandwidth, bulk piezoceramics have had a major advantage over electrostatic MEMS technology – until recently.Using bulky expensive piezoelectric sensors for condition-based monitoring has been akin to going to the doctor’s office to have an MRI. The equipment required (sensors, receivers) is expensive and requires highly trained specialists to operate the machine and to interpret the information. For this reason, only mission-critical assets are instrumented. For nearly all other equipment, we tend to use inefficient schedule-based maintenance approaches to cover the gap of not having continuous data. Condition-based monitoring leverages real-time sensing of critical machine parameters to reduce system downtime and improve efficiency. Evolving machine healthMEMS started to democratize machine health several years ago, when suppliers began switching from piezoelectrics to capacitive MEMS. While the performance was still not on par with piezoelectric sensors, MEMS technology could already capture a wide array of faults. One example, the ADXL001, started making its way into Integrated Electronics Piezo-Electric (IEPE) and 4-20 mA sensors, which form the backbone of the vibration monitoring market. Although the bandwidth and noise of the sensor did not allow for very early detection and prescriptive monitoring, it did allow the tracking of faults as they progressed and became more imminent.Other digital accelerometers started finding their way into new wireless prototype systems with the goal to simplify and increase deployment to a greater population of assets. The thinking was that self-contained digital wireless sensor nodes could be deployed more economically and quickly, and that these digital sensors would bring the power of computing to the edge node.Unfortunately, even the lowest-noise MEMS products did not have the bandwidth needed to diagnose and predict faults early enough to influence how and when machines are maintained most economically. Instead, such devices were used to detect imminent failure to prevent irreparable harm. As we all know, however, the earlier the doctor spots a problem, the better the probable outcome. That’s because early detection increases the likelihood that the doctor will have access to the full spectrum of treatment options available to fix the problem.Inertial MEMS is blazing a new frontier with the introduction of next-generation capacitive MEMS such as the ADXL100x portfolio. Offering ultra-low noise density and high-frequency response, these newer capacitive MEMS devices fit the bill. With 3dB bandwidths up to 25 kHz and flat response curves within 0.4dB all the way to 10kHz, these accelerometers demonstrate compelling enabling characteristics such as better DC performance, improved robustness, lifetime stability, linearity, and of course, cost, making capacitive MEMS a better choice than piezoelectrics.With high-bandwidth capacitive MEMS much easier to use and deploy – as well as more affordable – the market is starting to respond. Condition monitoring equipment and instrumentation is becoming more accessible to a larger base of manufacturers. In turn, a wealth of data is being created and mined to develop better and timelier predictive and prescriptive maintenance approaches that rely heavily on machine learning and artificial intelligence (AI).It’s worth paying attention to the sizable condition-based monitoring market. Estimated at $3.5 billion and growing, condition-based monitoring reduces downtime and increases equipment utilization in quantifiable ways. And it’s not just manufacturers who stand to benefit. More sustainable and efficient industrial processes, safer trains that crisscross continents at ever increasing speeds, autonomous cars and trucks that know what’s happening under the hood as well as on the road, and modern infrastructure to support our evolving lives show us that condition-based monitoring has something for everyone.Learn more about Analog Devices’ condition-based monitoring signal-chain options that help customers on the journey from sensor to solution. View ADI’s whole portfolio of condition-based monitoring solutions online or download Next-Generation Condition-Based Monitoring brochure.Tzeno Galchev is product marketing manager in the Inertial Sensor Technology Group at Analog Devices Inc. He oversees the strategic marketing and product definition of the inertial sensor component portfolio. He received B.S. degrees in both Electrical and Computer Engineering in 2004, and M.S. and Ph.D. degrees in Electrical Engineering in 2006 and 2010 respectively from the University of Michigan, Ann Arbor. He has over 30 publications in the area of MEMS, holds multiple patents, and is a frequent lecturer and speaker on topics related to MEMS, energy harvesting and sensors.Analog Devices is a longtime member of MEMS Sensors Industry Group (MSIG), a SEMI technology community that enables the MEMS and sensor industry to address common challenges, innovate and accelerate business results.

The COVID-19 pandemic (caused by SARS-CoV-2) has disrupted lives around the world more than any other catastrophic event in living memory. Those of us fortunate enough to work from home are cheering on the people who care for our health, transport our packages, work in grocery stores and pharmacies, clean public streets and buildings, and keep utilities up and running — as well as everyone else on the front lines of battling this pandemic. Working from home also gives us time to reflect and ask: How does the world return to normal and how can we help?Crises like the COVID-19 pandemic accelerate social and technology trends because the need for new solutions grows urgent. Looking at epidemiological models can reduce complex disease progression to a series of simple numbers, the most important of which is R nought (R0) value. R0 is simply how many other people a sick person infects. If each sick person infects less than one person, R0 1, the spread of disease will end. But if each sick person infects more than one other person, the disease spreads and may become a pandemic. According to the journal Emerging Infections Diseases, SARS-CoV-2 has an R0 of 5.7, making it far more infectious than the influenza pandemic of 1918.Given the severity of the current pandemic, society has taken huge efforts to reduce R0: mask-wearing, social distancing, avoiding face touching, frequent handwashing and quarantines are all ways to reduce R0.Scientists and engineers are working hard to develop new solutions and evaluate existing technologies that could have a big impact on R0. One of these is the mass deployment of touchless technologies. We’re now aware that every time we touch a surface, we potentially spread disease. I have personally started using touchless Apple Pay at retail checkouts whenever possible and even seek out and remember which stores have enabled Apple Pay. Each time I need to touch an elevator button, security keypad or walk signal button at an intersection, I contort my arms to touch them with an elbow.Since I’m in the electronics industry, I find myself considering which devices have the greatest potential for reducing the number of touchpoints in our daily lives. Motion and ultrasound sensors are definitely promising, but the mainstream adoption of the voice interface makes it the most interesting and scalable touchless technology.New voice technologies are more reliable and secure than ever. The success of cloud-based voice assistants such as Amazon Alexa, Apple Siri and Ok Google has familiarized consumers with the ease and convenience of voice, but these high-powered AI assistants generally require high power and a reliable internet connection. The next wave of voice technology will be much lower in power, fast, private and require no internet connection. This edge-powered voice interface will not play music or tell you the weather, but it will perform many other useful and simple functions, such as operating an elevator, opening a door or changing the volume on your TV. One great example of this local voice command is the Simple Human trash can that can open and close in response to your voice. Opening and closing a garbage may be simple, but a voice-activated model enhances convenience and safety with total privacy.The requirements for deploying voice technology to support more touchless applications include: Low power — to run for months or years between battery changes Robust and reliable— to last over a decade indoors or out Locally processed data — to ensure security and privacy without an internet connection Consumer adoption of touchless and voice technologies has been growing for years, but the COVID-19 crisis highlights the critical benefit of these technologies in reducing the spread of disease. Making high touchpoints voice-powered would eliminate a disease vector and reduce R0 during pandemics as well as during normal cold and flu seasons. Any technology that helps reduce R0 should be deployed as quickly as possible to give us one more way to thwart the virus that is changing life as we know it.As the only supplier of piezoelectric MEMS microphones – which are natively immune to environmental contaminants such as water, humidity, salt, dust, dirt and oil — Vesper is uniquely able to provide outdoor-hardened microphones that are durable enough to support voice-interfaces in hot, wet, dusty or dirty conditions. In fact, we’ve earned the highest waterproof rating for any MEMS microphone – IP57 – which makes me hope that one day soon I’ll use just my voice to tell a crosswalk signal that I need to cross the street.Vesper has also developed a proprietary technology called ZeroPower Listening, which makes it possible to embed always-listening voice interfaces in battery-powered devices with battery life measured in months or years. And that’s just the beginning of how we’ll use voice interfaces in high-touch applications. From voice-controlled parking kiosks and elevator buttons to the treadmill at the gym, the less we touch hard surfaces, the safer we’ll be from picking up SARS-CoV-2, influenza viruses or other pathogens as we go about our daily lives.Learn how Vesper’s low-power and rugged MEMS microphone technology can help designers create seamless voice interfaces for a wide range of indoor and outdoor applications at Smart Home, Smart Office, IoT and Automotive/Industrial.Matt Crowley is CEO of Vesper Technologies, developer of the world’s first piezoelectric MEMS microphone. With five rapid product rollouts in just five years and tens of millions of units shipping to tier one clients across the globe, Matt has grown Vesper from a research-oriented startup to a bonafide commercial business.Under his leadership, Vesper has earned an impressive collection of awards including a 2019 Best of Sensors Award, Innovation Award nods at CES 2018 and 2019, and two Annual Creativity in Electronics (ACE) Awards.Before Vesper, Matt held leadership positions at piezoelectric MEMS pioneer Sand 9, the Boston University Office of Technology Development, and Mars Co strategy consulting, where he advised Fortune 500 companies on operational and strategic issues.Matt received an interdisciplinary degree in Physics and the Philosophy of Science from Princeton University. He is proficient in Japanese, having lived in Japan.Vesper is a member of MEMS Sensors Industry Group (MSIG), a SEMI technology community, that enables the MEMS and sensor industry to address common challenges, innovate and accelerate business results.

As the world confronts the health crisis of a generation in the form of the fast-spreading coronavirus, the microelectronics industry remains firmly in the spotlight. Aware of the central role they play in the fight against the COVID-19 pandemic, a growing number of companies are joining efforts to combat the virus by developing technologies for coronavirus detection, contact tracing and predicting its spread.SkyWater Technology, a U.S.-based foundry and prestigious member of SEMI-Fab Owners Alliance, is on the front lines in supplying an essential microfluidic MEMS component used in COVID-19 testing and research to identify mutations of the virus. This component is instrumental for the sequencing kit in the DNBSEQ-T7 system, an ultra-high-throughput sequencing system manufactured by MGI, a subsidiary of global genomics leader BGI Group.SEMI had the pleasure to catch up with Thomas Sonderman, president of SkyWater Technology, to talk about the company’s valuable contribution to the detection of COVID-19. He also gave us a peek into its business continuity plan and the safety measures it is taking to resiliently run a 24/7 chip-making operation amid these unprecedented times.SEMI: Tell us about SkyWater's contribution to the detection of COVID-19 and your partnership with MGI?Sonderman: SkyWater has been working with genomics sequencing leader MGI for several years to supply a critical component used in MGI's DNBSEQ-T7, an ultra-high-throughput sequencing system. The component we supply to MGI is a microfluidic MEMS device that uses microscopic channels to help perform very small-scale chemical reactions in the genetic sequencing platform. MGI's DNBSEQ-T7 identifies and monitors possible mutations of viruses, which is important for epidemiologists when tracking how viral illnesses such as COVID-19 spread through human populations.MGI’s sequencing system is used in parallel with its sister company BGI Genomics’ RT-PCR test kit, which is typically used more broadly as an initial screening agent due to its ability to return virus detection results within a matter of hours. Sequencing with the DNBSEQ-T7 can be used to confirm results of the RT-PCR tests that have indicated positive for the presence of the virus and then to perform a full DNA sequence of these positive specimens, which can help track mutations in the virus.DNBSEQ-T7 is important in the fight against COVID-19 as it tracks how the virus changes and enables scientists to look at its genetic sequence like a fingerprint at a crime scene. Their focus is on finding sudden changes in the sequence over time — a mutation. When they analyze available genomes from infected patients in several countries, they can see if inevitable virus mutations are causing associated illnesses that may have different incubation periods, contagiousness or deadliness – all critical dynamics that must be tracked by public health officials during an outbreak such as this.SEMI: What was the path that brought your company to the forefront of this testing?Sonderman: MGI’s DNBSEQ-T7 sequencing system and BGI’s RT-PCR rapid testing kit were among the first officially approved products by the National Medical Products Administration (NMPA – essentially China’s version of the FDA) – to fight the outbreak. MGI’s manufacturing plant, based in Wuhan, was able to fast-track its response, producing and delivering test kits very quickly to many hospitals and disease control centers in Wuhan and other cities in China.As concerns continue to rise about COVID-19 and we strive to flatten the curve, the pressure is on to enable even faster, more accessible testing. On March 27th, BGI’s RT-PCR virus detection test received FDA Emergency Use Authorization (EUA) for use in the U.S. The test works in just three hours. MGI’s DNBSEQ™ T7 sequencers are being used in China and other countries now and will be available in the U.S. starting in Q3. Products from BGI/MGI and affiliates are currently being distributed to more than 70 countries and regions worldwide to assist the global efforts in fighting the pandemic.SkyWater is certified to the ISO 13485 Quality Standard for Medical Devices to support the design, development and fabrication of DNA sequencing and other biochip applications in a wide range of emerging biomedical market segments. This allows us to provide this type of cutting-edge technology solution that is making an important contribution to coronavirus detection.SEMI: Given the challenges COVID-19 has placed on workforce and supply chain, what steps are being taken by your company to mitigate disruptions? Sonderman: SkyWater has been identified as Essential Critical Infrastructure per the U.S. Dept. of Homeland Security in several categories including Healthcare/Public Health Sector, Defense Industrial Base Sector, Information Technology Sector, and Critical Manufacturing Sector. To maintain continuity of operations, we contacted our close market partners as we need their support to continue supply of their starting and manufacturing support materials necessary for us to maintain operations. We asked these organizations to make every reasonable effort to fulfill our order requirements while also following recommended protective measures and are actively monitoring these relationships for possible developments that could be disruptive. By means of their partnership with us, these suppliers, too, are a part of the Essential Critical Infrastructure. Currently, there has been no change in wafer operations or fab utilization during this time of COVID-19.In addition to our sustained operations, our fab expansion is well underway as construction continues. The over 60,000-square-foot facility expansion adds clean room area and infrastructure to support the Department of Defense’s investment in SkyWater to broaden our production capabilities for Strategic Rad-Hard electronics and other complementary technologies. A fab technician in SkyWater’s SkyTech Center, an expansion of its operations to enhance advanced processing capabilities at its U.S.-based and U.S.-owned manufacturing facility. SEMI: What advice would you give to other companies seeking to keep their operations running amid COVID-19?Sonderman: First and foremost, creating a Pandemic Response Team (PRT) was critical for us in planning how to operate and communicate during this crisis. Our PRT updates our leadership team multiple times per week to enact procedures and ensure alignment throughout the organization. We follow CDC alerts and other local, state, and federal government guidelines on how to deal with home and work environments while communicating with all company stakeholders. This is important in providing reassurance of the company’s continued business and details on any potential change in operations.Increasing the frequency of communication with the organization’s supply chain to anticipate any disruptions in service is vital. Also, keeping in contact with customers is imperative to take the pulse of their continued operations during COVID-19. We recommend being flexible and pursuing new paradigms in getting business accomplished, such as telecommuting. In addition, if a company is deemed an essential business, we suggest drafting a letter in advance for employees should they need to prove why they are in transit (to and from work) if transportation becomes severely limited and monitored.Communicating with employees on how operations are changing is crucial. Ensure there is an intranet site that employees can access remotely via laptops or mobile devices that allows for ongoing updates and a way to communicate to all employees as things continue to evolve.We also put several safety measures in place, including: A screening process was set up to take the temperature of everyone entering the building. Site access is restricted for vendors, contractors, customers and other visitors as a default policy. Employee travel is restricted. All employees who can do their jobs from home can stay home. For essential on-site workers, we allow flexible schedules so people can move shifts if needed. Shifts have been staggered so people are not congested at lockers, gowning areas and other places. Physical distancing is required everywhere inside and outside the building. Video conferencing is being used even for participants inside the building. The number of people allowed in conference rooms is limited to comply with physical distancing; some chairs were removed and maximum occupancy signs were posted. Hand-sanitizing stations have been set up. We are providing employees access to masks, gloves and cleaning wipes. Safety measures are posted around the building and cleaning frequency of hard surfaces has been ramped significantly. These safety measures are among several other modifications we’ve made to daily operating procedures. SEMI: Please share some examples of how the SEMI Fab Owners Alliance (FOA) has helped support your business?Sonderman: Our Pandemic Response Team has leveraged the FOA recently by participating in its webinars on COVID-19 to ensure we are using industry best practices. We also use FOA surveys to provide and request information pertaining to COVID-19 practices.We have implemented building entrance protocols (i.e. temperature scanning, restricting access for non-employees) and expanded building cleaning procedures, including increasing the cleaning frequency of specific high-touch items. We have adjusted shift start times to minimize the number of personnel in the change room at the same time and we store each fab worker’s hood in the sleeve of the suit. These last two items resulted from a conversation with another FOA member.Outside of the pandemic, we have leveraged the FOA by participating in its industry-wide maintenance best practices and learning group that meets monthly on maintenance needs, issues and concerns within the industry. This allows us to learn from each other within the semiconductor industry. We have also leveraged this group in sourcing parts and/or parts sharing on tools no longer supported by OEMs.We greatly value the type of cross-organizational sharing and learning the FOA facilitates. It has been beneficial in a number of ways over the years. At this time, the FOA is especially useful when best practices are crucial to enable us and our peers to minimize disruptions, operate with the utmost safety, and quickly adapt to this new environment.SkyWater is a member of the SEMI Fab Owners Alliance, an international group of semiconductor and MEMS fab managers and industry suppliers that meets regularly to solve common non-competitive manufacturing issues and improve their business results. Nishita Rao is a product marketing manager at SEMI.

On Saturday, March, 21, 2020 the U.S. Food and Drug Administration (FDA) gave emergency authorization to Cepheid, a California company, to sell a new test for rapid detection of the pandemic coronavirus SARS-CoV-2, which causes COVID-19. Cepheid’s Xpert® Xpress SARS-CoV-2 test gives healthcare workers results in just 45 minutes, with less than a minute of hands-on time for sample preparation.Cepheid, founded by Kurt Petersen, M. Allen Northrup and five others in 1996, is well known in the MEMS community for commercializing microfluidic chip-based polymerase chain reaction (PCR) analysis machines. This is not the first time Cepheid has responded quickly to a biological threat; after the 2001 terrorist attacks in the USA, Cepheid was the first to provide rapid anthrax detection capabilities to the U.S. Postal Service, and it still does today.At the heart of all COVID-19 test protocols (see the WHO protocol and U.S. CDC protocol) is the real-time reverse transcription polymerase chain reaction (RT-PCR) analysis technique. In a very simplified description, PCR uses thermal cycling to amplify the DNA present in a patient’s swab sample, and then using fluorescence optical detection, searches for the virus’s specific DNA. The test requires knowing the virus’s genome in the first place; the crucial work to sequence the full genome of SARS-CoV-2 was first published by Chinese scientists for public use on January 10, 2020.While traditional PCR machines take many hours to thermal cycle and reach a result, MEMS-based PCR systems can work much faster. Featuring scale heaters and reaction chambers that have a tiny thermal mass, they create a significantly faster heat-cool cycle, enabling a rapid result in minutes.The first MEMS silicon PCR chip, developed by Northrup et. al. at Lawrence Livermore National Laboratory and licensed to Cepheid (left) and the Cepheid test cartridge today (right). (Source: Northrup MA, Ching MT, White RM, Watson RT, “DNA amplification in a microfabricated reaction chamber,” Transducers 1993, Yokohama, Japan. pp. 924–926.) Research on MEMS-based PCR systems has continued steadily since the early 1990s. Today, researchers have been focusing on developing highly integrated, low-cost systems specifically for point-of-care use. One example of recent research: a team at Korea’s ETRI and Genesystem have developed a prototype low-cost, handheld PCR system having a polyimide chamber and microheater and an integrated CMOS detector for optical readout of results (figure below). Cross-section schematic of the chamber, heating module and integrated optical detector in a portable PCR prototype (left) and integrated test cartridge (right). (Source: DS Lee, OR Choi, and YJ Seo, “A Handheld and Battery-Powered Realtime Microfluidic PCR Amplification Device,” Transducers 2019, Berlin, Germany pp. 1063-1065.) Korea’s quick recruitment of its biotech companies and creation of novel drive-through testing sites helped it to successfully pinpoint its COVID-19 outbreak and to implement control measures. Let’s hope the Cepheid test can be similarly effective.Based on successive epidemics of SARS, MERS and now COVID-19, rapid PCR test machines, enabled by MEMS technology, are becoming essential medical tools in the fight against viral outbreaks. As continued development lowers the cost of such critical equipment, let’s hope we may soon have a PCR machine in every doctor’s office.Alissa M. Fitzgerald, Ph.D., founded A.M. Fitzgerald Associates, LLC (“AMFitzgerald”), a MEMS and sensors solutions company based in Burlingame, CA, in 2003. She has over 25 years of engineering experience in MEMS design, fabrication and product development.Prior to founding AMFitzgerald, Fitzgerald worked at the Jet Propulsion Laboratory, Orbital Sciences Corporation, Sigpro, and Sensant Corporation, now part of Siemens. She received her bachelor’s and master’s degrees from MIT and her doctorate from Stanford University, in Aeronautics and Astronautics. Fitzgerald has numerous journal publications and holds eight patents. She served on the Governing Council of MEMS Industry Group from 2008-2014 and was inducted into the MIG Hall of Fame in 2013. Fitzgerald serves on the Board of Directors of both Rigetti Computing and the Transducer Research Foundation.AMFitzgerald is a longtime member of MEMS Sensors Industry Group (MSIG), a SEMI Strategic Association Partner. For more information on AMFitzgerald, please visit: https://www.amfitzgerald.com.Interested in learning more about this topic? Read Alissa M. Fitzgerald and Farzad Khademolhosseini’s article in EE Times, MEMS in the Fight Against Covid-19.

Today’s mobile devices are smaller, more power-efficient, and have more capability than we could have imagined just a decade ago. Offering ever-increasing levels of user functionality, mobile devices are now ubiquitous, and are rapidly becoming the primary mechanisms through which we interact with the digital world, our physical environment, and one another. An unintended side effect of our dependence on the current crop of mobile devices is that they are driving us to distraction.A major industry dynamic will shake things up for the better. Sensors are getting smaller and more efficient, and they’re offering attractive new functionality, giving us the ability to monitor our air and water quality, assess potential toxins in our food sources, and analyze personal health conditions, to name a few use cases. At the same time, the realization of flexible hybrid electronics (FHE) through new materials and production processes, better integration with other electronic components, more efficient energy production and consumption, and pervasive wireless connectivity are fueling the next generation of devices and experiences. What can we expect from tomorrow’s mobile devices — and how can we manage them, instead of having them manage us?SEMI’s Nishita Rao caught up with Mike Wiemer, Ph.D., VP of Engineering, CTO and co-founder, Mojo Vision, to preview his February 25 keynote, The Art of the Possible, at FLEX|MEMS Sensors Technical Congress (MSTC) 2020, February 24-27 at the DoubleTree by Hilton in San Jose, California.Join us at FLEX|MSTC to meet Mike and other industry influencers advancing innovation in FHE and MEMS sensors. Register now to connect with him at FLEX|MSTC or visit him on LinkedIn.SEMI: Mojo Vision has conducted its own research on human interaction with mobile devices. Why is this important?Wiemer: Our mobile devices have given us access to the information we need and want, improving many aspects of our lives. But our devices have also influenced our relationships and attention to our environment in negative ways. We believe that the next mobile computing platform must improve this situation. Instead of pulling us away from the moment, our devices need to embrace more human-centric engagement while still letting us access information that improves our quality of life. Mojo Vision has worked to understand this problem through our own studies and research so we can better develop an approach to address it. SEMI: How are key technical trends driving size, efficiency and capability advancements in mobile devices?Wiemer: Tiny low-power sensors are enabling ever-smaller feature-rich mobile devices that run longer on a battery charge. Smartwatches are a good example. Just a few years ago, smartwatches were not that much more than small screens on our wrists. Today, we have GPS, EKG/health monitoring, and cellular wireless interfaces all inside the same form factor.As this trend continues, we at Mojo Vision predict that our devices will continue to shrink and become even more personal: They’ll be more continuously worn and matched to our own needs and behaviors. This trend towards invisible personal devices is something we’re trying to accomplish with our solutions at Mojo Vision.SEMI: What is Mojo Vision’s concept of “Invisible Computing?” Wiemer: Our vision of Invisible Computing is based on the idea that our wearable devices should be invisible to those around us, encouraging more human interactions. These wearables should be invisible and unobtrusive to users themselves. Our Mojo Lens, which contains a full display and sensors housed inside a contact lens platform, exemplifies this vision. Using proprietary microelectronics and the world’s densest microdisplay to layer digital images and information seamlessly, Mojo Lens is redefining augmented reality. Our mobile devices today continue to increase the quantity and magnitude of interruptions. We think that shouldn’t happen. As a socially invisible device that delivers contextual, relevant content, the Mojo Lens lets us go about our daily lives, naturally interacting with other people while simultaneously enjoying the benefits of augmented reality. We think Invisible Computing can change our relationship with our devices, as well as seemingly give us superpowers. For more information, download the Mojo Vision report, Device Distraction: Understanding the Problem, Re-Thinking the Solution.SEMI: Can you tell us more about Mojo Lens?Wiemer: At its foundation, Mojo Lens is a nanoLED display, radio and sensor platform, integrated using flex technologies, and placed on your eye to provide important information. Mojo Lens can elevate or suppress this information to decrease reliance on your other devices.Unlike your smartwatch or smartphone, which react to you in a binary manner because they don’t have enough information to make autonomous decisions, Mojo Lens understands the context of your experience. That’s because it’s based on our Invisible Computing platform, which can understand your activity. Mojo Lens recognizes if you’re engaged in a conversation, driving or having a coffee, and it reacts with information accordingly.Mojo Lens could act like a real-time interpreter, for example. When someone speaks to me in a language I don’t understand, I should see “subtitles.” Or if I’m having a conversation with someone, Mojo Lens wouldn’t interrupt me with a notification at that moment. For the 92% of Americans who are interrupted by their devices during conversations every day, this prioritization can boost productivity. More importantly, it can improve the quality of our connections with the people around us.Mojo Vision’s microLED platform offers a world-record pixel pitch of over 14,000ppi and pixel density of over 200Mppi², making it the smallest, densest display for dynamic — or moving — content. SEMI: What would you like FLEX|MSTC attendees to take away from your presentation?Wiemer: It feels like the speed at which people are defining important problems and tackling them is increasing every year. And there are so many important problems to solve: space travel, autonomous driving, electric vehicles, alternative energy, quantum computing, lifespan extension, increased food production, brain-computer interfaces, AR/VR. All these problems seem impossible and “crazy,” until some group of people comes along to put a framework in place that can address them. Interestingly, these frameworks aren’t necessarily new. Rather, they build upon existing technologies and capabilities.MEMS sensors and FHE are good examples. From smart textiles, flexible displays and biological sensors to miniature radars, MEMS sensors and FHE technologies are essential building blocks. Many of the big problems we can imagine today will be solved by stacking today’s MEMs and FHE technologies in imaginative new ways. So what do we do next? I’d like to encourage FLEX|MSTC attendees to first define the problem to solve and then define the technology — rather than starting with the technology solution. Mike Weimer is a serial entrepreneur and proven science and technology leader in complex systems development and integration. Before co-founding Mojo Vision as CTO, Weimer co-founded and served as president at Solar Junction, a high-efficiency solar cell company (acquired) where he and his team set two world records for the highest-efficiency solar cells ever made by humans.After Solar Junction, Wiemer joined New Enterprise Associates (NEA) as an Entrepreneur in Residence where he sourced new investments and helped portfolio companies to develop their business and funding strategies. He is a board director at Stratio Corporation and an advisor at Stanford’s StartX Accelerator. He holds a B.S., M.S., and Ph.D. in Electrical Engineering from Stanford University.For more information, visit Mojo Vision.Interested in engaging with the MEMS sensors supply chain? MEMS Sensors Industry Group is a SEMI technology community that enables professionals in the MEMS and sensors industry to accelerate business results by addressing common challenges and opportunities.Nishita Rao is marketing manager for technology communities at SEMI.

The microelectronics industry is entering the era of Cloud Engineering Simulation to slash the costs and risks of new technology development and speed time-to-market in spaces like semiconductors, MEMS sensors, RF front ends, biomedical and driverless cars. In the run-up to SEMICON Europa, 12-15 November, 2019, in Munich, Germany, SEMI spoke with Ian Campbell, CEO of OnScale, about the new paradigm of Cloud Engineering Simulation. Campbell shared his views ahead of the SMART Design Forum, 14 November, 2019, 14:30 to 17:00, in Hall B1, TechARENA 1 at SEMICON Europa. Registration is open. Join the forum to meet experts from OnScale and other key industry influencers. Attendance is free of charge for all SEMICON Europa visitors.SEMI: How did your adventure with OnScale start?Campbell: I’m an engineer. When I was still in high school, I took a night class at Nashville Tech to learn AutoCAD R14, and I’ve been designing and engineering things ever since. I was introduced to Desktop Simulation in my bachelors of mechanical engineering program and used many types of simulation tools for massive design studies at the Aerospace Systems Design Lab at Georgia Tech. I’m a simulation junkie.I started my first Silicon Valley high-tech company, NextInput, in 2012 with Dr. Ryan Diestelhorst (now VP of Strategy at OnScale), to commercialize new ForceTouch and 3D Touch technologies based on our patented MEMS force sensors. At NextInput, we bought hundreds of thousands of dollars of engineering software, but were always frustrated by slow, inaccurate engineering simulation results. We dreamed about running massive simulations on Cloud Supercomputers and creating true Digital Prototypes that could replace costly, time-consuming, and risky physical prototypes.When I got the chance to join the team that became OnScale in 2017, I jumped at the opportunity. At OnScale, we took engineering simulation solvers that had been developed for the U.S. military to run on U.S. Department of Defense and DARPA supercomputers and built a cloud supercomputer platform on Amazon Web Services to run the solvers. The net-net is the world’s first on-demand, infinitely scalable Cloud Engineering Simulation platform. Now, we routinely run massive multi-billion degree of freedom simulations for Fortune 100 companies, including many from the semiconductor and MEMS industries. Since our business model is to charge per core-hour for simulations, the incredible capability we built is cost-effective and available to small startups as well. SEMI: How is the semiconductor design ecosystem evolving? How is Cloud Engineering Simulation applied to semiconductor and design industries?Campbell: The entire industry is experiencing a massive acceleration in product launch cycles and increased competition. New markets like IoT and 5G are reducing semi/MEMS product cycles from years to months. That, in turn, puts enormous pressure on semiconductor and MEMS designers. Missing a key product introduction like a flagship smartphone launch can literally make or break a company.A reliance on traditional engineering methods – schematic capture and layout of a chip, taping out (physically prototyping the chip), performing engineering validation on an e-bench, qualifying the chip (or not qualifying it and going back to the drawing board), and finally launching mass production – is no longer sustainable from a competitive perspective.Instead, market-leading firms are turning to Cloud Engineering Simulation and Digital Prototypes to explore massive design spaces, find optimum designs that beat the competition in every KPI (size, power, performance), and digitally qualify designs before ever cutting silicon, ensuring that designs are robust over their intended operating environments and performance envelopes. Large thermal analysis of a chip on a circuit board executed quickly on the OnScale Cloud Simulation Platform SEMI: Can you give us an example? Campbell: A great example is thermal analysis. Thermal effects have always had huge impacts on MEMS device performance and, more recently, they are beginning to impact performance of next-gen semiconductors, especially GaN power electronics for electric vehicles (EVs).Conducting a full system-level thermal analysis of something like an EV power management system – a power IC in a package, on a board, in an enclosure, under various loading conditions – has been a challenge from a simulation complexity perspective (degrees of freedom) and from a parametric sweep perspective (running hundreds or thousands of simulations to optimize chip placement, routing, etc.). To run these sets of simulations using legacy desktop simulation would take weeks, perhaps even a month or more. To run these massive simulations in parallel on cloud supercomputers using OnScale takes days or even hours.Our customers routinely run very large simulation studies on OnScale Cloud for thermal simulations, RF filter simulations, MEMS simulations, packaging simulations (what we call Digital Qualification), and many more use cases.SEMI: What’s one of your strategic objectives for 2020? Campbell: For 2020, we’re doubling down on MEMS and semi simulation capabilities. We will be launching additional solver capabilities like EM that will be critical in our strategic markets like 5G. We will also be launching a Cloud API so that engineers can integrate OnScale directly into their existing engineering workflows (e.g. MATLAB or EDA/CAD tools) with just a few Python commands.SEMI: Can you share one prediction for the future of semiconductor design solutions? share?Campbell: I think we will continue to see MEMS and semi designers push the envelope and bring smaller, more performant, more cost-effective solutions to market. I’d like to see more highly cost-effective flexible semi/MEMS designs come to market to enable next-gen IoT and IIoT applications. I’d also like to see more biomedical applications – biomems, microfluidics, and labs on a chip for all sorts of life-enhancing applications.SEMI: What are your expectations regarding the SMART Design Forum at SEMICON Europa 2019 in Munich? Campbell: I’m looking forward to getting back to my roots in MEMS/semi design and chatting with other designers about the future of engineering and the future of semi! Ian Campbell is a twice venture-backed Silicon Valley CEO and expert in MEMS sensors, semiconductor technology, and engineering software. Most recently, Ian co-founded OnScale, a Cloud Engineering Simulation startup backed by Intel Capital and Google’s Gradient Ventures. OnScale is revolutionizing engineering by combining world-class multiphysics solvers with Cloud supercomputers, machine learning, and artificial intelligence. Prior to co-founding OnScale, Campbell served as founder and CEO of NextInput, where he led the startup through multiple rounds of funding – totaling $12 million and an additional $4 million in research contracts with government and industry partners – and built a world-class team of engineers and scientists who developed 3D Touch and ForceTouch technologies for smartphones, wearables, industrial, and automotive interface applications. He also secured the first major smartphone OEM design wins in Asia. Campbell earned his B.S. in mechanical engineering from Middle Tennessee State University, and his MSAE in aerospace engineering and MBA from Georgia Institute of Technology.Serena Brischetto is senior manager, marketing and communications, at SEMI Europe.

Most of today’s blockbuster MEMS products – from pressure sensors and resonators to accelerometers and microphones – originated from academic research, a trend that Alissa M. Fitzgerald, Founder Managing Member, A.M. Fitzgerald Associates, expects to continue. While many of these potentially game-changing new technologies will require many more years of intensive development and up to $100 million in investment to reach full commercialization, Fitzgerald sees their potential for generating new waves of activity and opportunity in the MEMS and sensors industry.SEMI’s Maria Vetrano caught up with Fitzgerald to preview her October 23 presentation, Emerging MEMS Sensors Technologies to Watch as We Enter a New Decade, at MEMS Sensors Executive Congress, October 22-24, 2019, at the Coronado Island Marriott Resort Spa in Coronado, California.Join us at MEMS Sensors Executive Congress (MSEC) to meet Alissa Fitzgerald and other industry influencers driving innovation in the MEMS and sensors industry. Register now to connect with her at MSEC or visit her on LinkedIn.SEMI: What are your top three emerging MEMS and sensors technologies with the greatest promise?Fitzgerald: Let’s start by defining emerging. In researching this topic for MSEC, I reviewed a year’s worth of academic papers to search for compelling technologies that will emerge five to 10 years from now. While these applications are not yet commercially ready, they bear a distinct presence in academic literature, and some have even reached the proof-of-concept phase. They all have the potential to advance user functionality derived from MEMS and sensors in very meaningful ways.Next-Generation MicromirrorsI’ve noticed renewed interest in micromirrors, driven by interest in LiDAR for autonomous vehicles, in fiberoptic networking, and in VR/AR glasses and headsets as well.Newer generations of micromirrors will use piezoelectric films to enhance optical performance. Piezoelectric actuation can pivot the mirror to a much larger angle than older-generation electrostatically actuated micromirrors. This is important for wider-angle scanning for LiDAR – as well as for other applications – as it enables the creation of a larger picture image.Piezoelectric films can also be used to change the shape of the mirror surface to enable a variable-focus mirror. This is useful on two fronts: It supports depth-of-field adjustments and it alleviates the need for extreme precision in packaging of optical devices, improving both cost and yield.Event-driven sensors/zero-power/ultra-low power sensorsSensors that draw no power, or that draw just small amounts, by activating only upon a triggering stimulus, are enormously exciting. Their extremely low power consumption addresses one of the most significant obstacles to creating large-area sensor networks: the problem of too-frequent battery changes.In addition, while most sensor nodes today broadcast a large stream of data back to the mother ship by radio, these event-driven or zero-power sensors consume only a small amount of power because they activate the radio only to transmit essential data.Resolving the power-consumption problem with sensors will allow deployment of large-area sensor networks in remote or inaccessible locations, highly useful for applications such as monitoring infrastructure.Bacterial sensorsSensors that can detect the presence of bacteria, as well as the type, have widespread applicability beyond medical uses. They would be particularly useful in food-safety applications as they can identify particular strains of bacteria, such as E. coli, before the beef leaves the processing plant or the spinach ships from the warehouse. This could offer dramatic improvements in food safety over the Centers for Disease Control (CDC) and U.S. Food and Drug Administration’s (FDA’s) food safety program, which only flags foodborne illness when a cluster of people are seriously ill.Researchers are also designing bacterial sensors for rapid point-of-care (POC) diagnostics to detect, for example, sepsis early, potentially saving lives.SEMI: You’ve said that some future MEMS and sensors will use alternatives to silicon. When might we see MEMS and sensors printed on paper or other flexible materials – and for which applications are they suited?Fitzgerald: We’re seeing an enormous amount of development of sensors made on paper, plastics and even textiles, materials that are readily available, inexpensive and flexible.What’s gating our progress right now is manufacturing infrastructure. At present, researchers are using inkjet printers, 3D printers, etc. to manufacture prototype sensors, but in most cases, they would need to move to roll-to-roll printing to scale up. I think that we’re looking at a decade before we see these sensor technologies reach the mass market.When they do arrive, we’ll see sensors that we can easily affix to any kind of carton, wrapper or packaging used with food or other disposable items. Traceability and status of perishable items in particular will allow consumers to track food from the farm or factory to the warehouse, store and, finally, to the home.Implementing these kinds of sensors would also help the environment. According to the Natural Resources Defense Council, in the United States alone up to 40 percent of our food is wasted annually, in part because we fear it’s gone bad. If consumers feel assured that their food is safe, they will waste less. And wasting less means that we can grow less food to feed the same number of people. We’ll also reduce the volume of food waste that goes to landfills.SEMI: What can the MEMS industry do to promote the use of more environmentally friendly materials in its products?Fitzgerald: Some of this is already underway. More companies in our industry are adopting Restriction of Hazardous Substances (RoHS) standards to get rid of heavy metals, such as lead, cadmium or other hazardous materials, in their electronics.We could also produce disposable sensors on paper or on biodegradable plastics, which would decompose within a few months, and we could use safer metals, such as gold, magnesium or zinc, to reduce hazardous metals’ contamination in landfills. While it’s not feasible to make all sensors biodegradable, the market for such sensors could be massive.As companies (and individuals), we should also work hard to design electronics that consume less power, because this ultimately translates to fewer disposable batteries in landfills.SEMI: What would you like MSEC attendees to take away from your presentation?Fitzgerald: I’d like to make two main points. First, the trend to use other non-silicon materials to make MEMS and sensors is real and inevitable. It’s a matter of when. Anyone building a gas or chemical sensor on silicon should look at how to do it on paper or plastic because there are great future applications incorporating flexible, disposable sensors in packaging of all types. That’s the low-hanging fruit.Second, to support this technology development trend, we must look seriously at manufacturing infrastructure because we will need completely different sets of equipment, environments and consumable materials to manufacture MEMS and sensors on paper or plastic. Sensor manufacturers could prepare for this future expansion by beginning to collaborate today with companies that already produce paper and plastic goods. Alissa Fitzgerald, Ph.D., founded A.M. Fitzgerald Associates, LLC (AMFitzgerald), a MEMS and sensors solutions company, in 2003. She has over 20 years of engineering experience in MEMS design, fabrication and product development.Prior to founding AMFitzgerald, Fitzgerald worked at the Jet Propulsion Laboratory, Orbital Sciences Corporation, Sigpro, and Sensant Corporation, now part of Siemens. She received her bachelor’s and master’s degrees from MIT and her doctorate from Stanford University, in Aeronautics and Astronautics. Fitzgerald has numerous journal publications and holds eight patents. She served on the Governing Council of MEMS Industry Group from 2008-2014 and was inducted into the MIG Hall of Fame in 2013. Fitzgerald serves on the Board of Directors of both Rigetti Computing and the Transducer Research Foundation.For more information, please visit AMFitzgerald.MEMS Sensors Industry Group (MSIG), the industry association representing the global MEMS and sensors supply chain, hosts the annual MEMS Sensors Executive Congress. To learn how MSIG enables professionals in the MEMS and sensors industry to innovate, address common challenges and accelerate business results, visit us today.Maria Vetrano is a PR consultant for MSIG, a SEMI Strategic Association Partner.

Smart cities of the digital future will employ systems enabled by MEMS and sensors in wide-ranging ways. From wearable sensors that monitor personal health and wellness and environmental sensors that assess air quality to autonomous micro-transit systems that are efficient and environmentally sustainable, MEMS and sensors are critically important to living in smart societies.SEMI’s Nishita Rao spoke with Albert P. Pisano, Professor and Dean at UC San Diego Jacobs School of Engineering ahead of his October 24 closing keynote presentation, MEMS and Systems in the Digital Future, at MEMS Sensors Executive Congress, October 22-24, 2019, at Coronado Island Marriott Resort Spa in Coronado, Calif.Join us at MSEC to meet Albert Pisano and other industry influencers driving MEMS and sensors innovations. Registration is open.SEMI: What are some of the most important large-scale system needs of the digital future – and why is MEMS so important in meeting these needs?Pisano: My vision of the digital future is an optimistic one, in which technology is used to assist people in their pursuit of health and happiness. In that digital future, I expect disruption in several key industries that depend on large-scale systems enabled by MEMS – healthcare, retail, transportation and education.Driving these disruptive forces across all four industries is the demand for more relevant real-time information, collected via inconspicuous technologies. Small in size and weight and low in power consumption, what technology other than MEMS delivers these combined attributes?SEMI: How do you envision MEMS in smart cities? What applications and devices will change the human experience in cities?Pisano: Smart cities, by my definition, are cities in which the four basic industries – healthcare, retail, transportation, and education – are implemented in their disrupted form.Take healthcare, for example. The adoption of MEMS chemical sensors in a wearable format will revolutionize human health monitoring. These sensors will not only improve individual health but also mitigate the spread of disease.In transportation, the coming of semi- or fully autonomous vehicles (as well as the general upgrading of all mass-transit vehicles) will give commuters additional time to pursue their interests while en route. A coming revolution of data connectivity to all vehicles will spur the rise of work, study and entertainment options available to people in transit. MEMS in the communication channels as well as in the vehicles will play an essential role in streaming personal data to travelers.SEMI: Could you help us visualize a disruptive application in one of these industries, say healthcare? Pisano: Healthcare is a particularly compelling area because MEMS offers life-enhancing, even life-saving, functionality that will significantly improve the quality of life of some people. MEMS allows us to design consumable wearable sensors that allow individuals to unobtrusively and non-invasively obtain biochemical data, such as potassium, sodium and sugar levels in the body fluid, as well as metabolic indicators such as lactic acid. Further, MEMS-based devices can perform EKG and EEG functions as well as monitor blood pressure in deep body veins in non-medical settings. This higher level of medical-grade data (not just casual data such as an approximate number of steps taken) will allow departments of public health to identify the early onset of individual disease.SEMI: What new forms of wireless communications will affect MEMS-enabled systems in the digital future?Pisano: Most visions of a digital future include wireless communication, but as the spectrum becomes ever more crowded, and as the need for unregulated, negotiated spectrum access increases, we will experience greater pressure to consider other forms of communication, such as inductive, optical and sonic. MEMS sensors are the only technical alternative to these other forms of communication in that they provide acceptable SWAP (size, weight and power). This will spawn battery-powered solutions with significant operational time. A good example is wireless telemetry of human physiological data from the skin. Only MEMS technology can reduce sensor-consumed power to below one microwatt. At this low level, energy harvest from the skin itself is sufficient to power the sensor!SEMI: How is the UCSD campus a living laboratory for intelligent sensing devices and systems?Pisano: Progressive universities, such as the University of California San Diego, understand that they are microcosms of small cities. They have populations during the day of approximately 65,000 people, a myriad of vehicles and a concentrated group of people.Many functions on campus mirror that of a small city. Lecture halls are similar to movie theatres. Student stores and centers are similar to shopping malls. Student residence halls are similar to apartment houses. Many campuses have medical centers, with their own emergency health services and hospitals. As a microcosm of a small city, it is only natural to think of the university as a wonderful living laboratory that allows us to test out new technologies at scale.Clearly, autonomous transit and wearable sensors have potential for uptake in this community. And that’s just scratching the surface. Package delivery (dinner to a dorm room, perhaps?), parking-spot location assistance, and even location-independent data streaming for classroom lectures are just a few possible examples of applications that we can test in a university environment.SEMI: How can the MEMS and sensors industry help researchers and innovators realize the digital future?Pisano: As a MEMS practitioner for almost 30 years, I fully understand the need to focus at the device level to ensure that the MEMS design meets SWAP and other requirements. But I truly believe that MEMS designers must learn to think more about subsystem and system issues, since the future of MEMS will be won by those who cannot only design the device right, but who can design the right device. By taking a much more market- and system-oriented approach to MEMS design thinking, companies in this industry will realize greater success.Register now to connect with Albert Pisano at MSEC and visit his UCSD page for more information.Albert P. Pisano, Ph.D., began his service as Dean of the Jacobs School of Engineering in 2013. He holds the Walter J. Zable Chair in Engineering and serves on the faculty of the departments of mechanical and aerospace engineering and of electrical and computer engineering. Pisano is an elected member of the National Academy of Engineering for contributions to the design, fabrication, commercialization, and educational aspects of MEMS, and is a Fellow of the ASME.Prior to his appointment at UCSD, Pisano served on the UC Berkeley faculty for 30 years, where he held the FANUC Endowed Chair of Mechanical Systems. Pisano was the senior co-director of the Berkeley Sensor Actuator Center (an NSF Industry-University Cooperative Research Center), director of the Electronics Research Laboratory (UC Berkeley’s largest organized research unit), and faculty head of the Program Office for Operational Excellence, among other leadership positions. From 1997 to 1999, Pisano was a program manager for the MEMS Program at the Defense Advanced Research Projects Agency (DARPA). Pisano held several research positions prior to joining academia.Pisano is a co-inventor listed on more than 36 patents in MEMS and has co-authored more than 400 archival publications. Pisano also is a co-founder of 10 startup companies in the areas of transdermal drug delivery, transvascular drug delivery, sensorized catheters, MEMS manufacturing equipment, MEMS RF devices and MEMS motion sensors. Visit his faculty page to learn more about his research interests.MEMS Sensors Industry Group, a SEMI technology community representing the global MEMS and sensors supply chain, hosts the annual MEMS Sensors Executive Congress. To learn how MSIG enables professionals in the MEMS and sensors industry to innovate, address common challenges and accelerate business results, visit us today.Nishita Rao is marketing manager for technology communities at SEMI.

For many technologies, standards unshackle them from patents and enable their mass production – an idea close to the heart of Wendy Chen, associate vice president of the R D Center at King Yuan Electronics Corp. and vice chair of the SEMI Taiwan Test Committee. More importantly, standards are crucial to a product’s commercial success: Producing it in high volume reduces its price and helps drive widespread adoption.With standards part and parcel to the economies of manufacturing , SEMI has sought consensus over the years among key players in materials, equipment, and other manufacturing segments on the importance of standardization in a push to cut costs.Chen first set herself to work on SEMI standards development in 2010, when 74 percent of 3D IC patents were owned by IBM. At the time, SEMI saw the huge potential in 3D IC and believed the lack of technology standards might hamper the future of the semiconductor industry.Motivated by that conviction, SEMI established the 3DS-IC Standard Committee in the U.S. in July 2010 and the SEMI Taiwan 3DS-IC Standard Committee the following year, and before long the committees were working together to form standards targeting mass production at low cost. The Taiwan committee was co-chaired by Wendy Chen, Dr. Yi-shao Lai (Advanced Semiconductor Engineering), and Dr. Zhi-kun Gu (Industrial Technology Research Institute). The trio spearheaded 3DS-IC standard development efforts in Taiwan.In setting the 3DS-IC standards, SEMI put the needs of the manufacturing sector first, Chen says, to ensure their implementation throughout the supply chain. SEMI saw Taiwan’s development of 3D IC standards, coupled with its manufacturing prowess, as key to securing the region’s place in the global 3D IC market.Wide Range of Industries Prosper With SEMI StandardsOf course the influence of SEMI Standards extends well beyond 3D IC to include protocols for hardware and software communication, traceability, compound semiconductors, facilities, MEMS (micro-electromechanical systems), metrics, silicon wafers, carriers and automation systems. The standards are used in a broad range of manufacturing segments including panel display, photovoltaic, PCB and high brightness LED.As recently as last February, SEMI Taiwan formed a PCBECI (PCB equipment communication interface) equipment networking pilot team to build a solid foundation for smart PCB manufacturing in the region. The team combined the SECS (SEMI equipment communication standard) and GEM (generic equipment model) interfaces to create the PCBECI protocol.Security Standards Vital in Smart ManufacturingWith smart manufacturing’s aim to drive new efficiencies comes growing security concerns in the global microelectronics industry. Improving communication within a manufacturing facility, and between that facility and trusted suppliers or partners, is central to the success of smart manufacturing. To improve communications, the conduits for the flow of information must first be secure. SEMI Taiwan is answering this critical need by creating a task force to promote information security standards – an effort that will give Taiwan a powerful voice in the development of global standards.For Taiwan, SEMI Standards is the backbone of a thriving semiconductor manufacturing industry. As many as 25 SEMI Standards are cited in a purchase order for a piece of semiconductor processing equipment, and standards helped propel Taiwan’s rise as global semiconductor manufacturing power. The region has produced a staggering 2.2 billion wafers and 1.8 trillion IC devices.Taiwan on Track to Become World’s Largest Equipment MarketTaiwan’s semiconductor industry continues to gather strength. According to the SEMI 2019 Mid-Year Total Equipment Forecast, Taiwan will dethrone Korea as the largest equipment market and lead the world with 21.1 percent growth this year.Since Wendy Chen started her work on standards in 2010, SEMI has published about 200 protocols. As part of the SEMI Taiwan Test Committee, she joined the celebration for another milestone – the publication of the 1,000th SEMI International Standard in July. The corks of the champagne bottles popped nearly a half century after SEMI began developing standards to accelerate innovation and help power what today is the $2 trillion global electronics industry.And with Taiwan’s rise to the top of equipment market, it has good reason to cheer too. Emmy Yi is a marketing specialist at SEMI Taiwan.

John Smee, VP Engineering, Qualcomm Technologies Inc., will share insights on 5G – which is evolving to enable more reliable connectivity with higher performance in and beyond the era of Internet of Things (IoT) – in his keynote at MEMS Sensors Executive Congress, October 22-24, 2019, in Coronado, Calif.SEMI’s Maria Vetrano caught up with John to give MSEC attendees a preview of his talk.SEMI: Why should MEMS and sensors suppliers stand up and take note of the evolution in 5G, particularly 5G NR?Smee: 5G is the unifying fabric that will connect virtually everything around us. 5G New Radio (NR) is the global standard for a unified, more capable 5G wireless air interface. It will deliver significantly faster and more responsive mobile broadband experiences to users. It will also extend mobile technology to connect and redefine a multitude of new industries, including the IoT.As tens of millions of MEMS and sensors are the core components providing intelligence and interactivity to IoT devices, suppliers need to understand the capabilities and efficiencies that 5G will bring to connect the wide range of MEMS and sensors.We should also recognize that we are at the beginning of the 5G era, and 5G technologies will continue to evolve and expand in the coming years to connect new types of devices in increasingly efficient ways.SEMI: What’s special about the upcoming release of 5G NR, 3GPP Rel-16?Smee: While the first 5G NR release, 3GPP Rel-15, focused primarily on enhanced mobile broadband (eMBB), it also established a solid technology foundation for continued evolution in Rel-16 and beyond.With Rel-16, we are seeing 5G NR’s expansion beyond eMBB to address new tiers of IoT services such as industrial IoT (e.g., automation) with ultra-reliable, low-latency communication (URLLC) and cellular vehicle-to-everything (C-V2X) for more advanced use cases, such as autonomous driving. MEMS and sensors are critically important to both types of use cases as they collect the raw information of the physical world, and 5G is the connectivity of these sensors to the network. This makes the technologies inextricably linked.MEMS and sensors are equally integral to the development of more efficient low-complexity massive IoT devices (MIoT) with in-band 5G NR deployments of enhanced machine-type communication (eMTC)/narrowband Internet of Things (NB-IoT) and the use of the new 5G Core Network. In practical terms, devices that enable smart city use cases – such as smart utility monitoring, connected parking meters, and smart street lighting solutions that support 3GPP Rel-16 – are MIoT devices that will delight city administrators and dwellers with their improved coverage and efficiency. SEMI: In addition to low-complexity MIoT devices, what other markets will benefit most from the evolution in 5G NR?Smee: We continue to enhance 5G NR to support the high-performance IoT, including URLLC.URLLC is one of the many new 5G capabilities that wasn’t possible with the previous generation of cellular technologies, such as LTE. Because it delivers services at very high reliability (i.e., 99.9999%) and ultra-low latency (i.e., sub-1ms), URLLC literally opens up new use cases that that only wired communication could serve in the past. Industrial IoT applications that require a mix of high reliability and low latency, such as robotic arm command and control, are foremost among these new URLLC use cases.Another example of IoT taking advantage of URLLC is smart grid, where faults in the electricity distribution network require immediate protection and control to ensure safety and avoid equipment damage.SEMI: How is Qualcomm building on the eMTC/NB-IoT for low-power wide-area IoT (LPWA) – and how will this influence IoT connectivity?Smee: We continue to evolve eMTC/NB-IoT beyond its initial 3GPP release in Rel-13, making these foundational LPWA IoT technologies more capable and efficient as they become the basis for 5G massive IoT.The most significant updates to eMTC/NB-IoT include multi-cast and positioning support in Rel-14 and improved spectral/power efficiencies in Rel-15. Multi-cast can help service providers to deliver firmware updates over the air with greater efficiency, which speeds deployment of new features. Positioning can create new values, which can inform end users where their assets/packages are located, potentially safeguarding assets in transit. Improving spectral/power efficiencies offers more power-efficient transmissions, which takes less toll on battery-operated devices.With Rel-16, we have further optimized eMTC/NB-IoT, which is supported by the new 5G Core Network and is also deployable in 5G spectrum in-band with other 5G NR services.The evolutionary path ahead for eMTC/NB-IoT enables support for an even wider range of 5G massive IoT devices. New enhancements in the pipeline, such as grant-free uplink and multi-hop mesh, will boost efficiency and coverage area that much more.SEMI: Where do mobile broadband devices such as ultra-high-definition (UHD) security cameras fall within Qualcomm’s realization of 5G-NR?Smee: Mobile broadband is at the core of 5G NR. We see it both powering the new generation of 5G smartphones and expanding beyond traditional devices (including always-connected PCs and tablets) to address the needs of high-performance IoT devices such as UHD security cameras.It’s actually an important part of our vision for 5G to have an industrial network that requires all types of 5G connectivity for devices spanning eMBB (e.g., cameras, laptops), URLLC (e.g., machines) and MIoT (e.g., sensors).SEMI: What can the MEMS and sensors industry do to prepare for the 5G wave?Smee: Because 5G can evolve to deliver even better performance and efficiency for connecting sensors in the 5G world, we will see even more widespread adoption of MEMS and sensors into larger numbers of connected applications. MEMS and sensors suppliers, therefore, need to get ready for the 5G wave by preparing to support 5G connectivity in their devices, which will ultimately help to realize the 5G vision of connecting virtually everything in the world around us.John Smee, Ph.D., is vice president of engineering at Qualcomm Technologies Inc., where he is the 5G R D lead responsible for overseeing all 5G research projects, including end-end systems design and advanced RF/HW/SW prototype implementations in Qualcomm’s wireless research and development group. He joined Qualcomm in 2000, holds over 100 U.S. Patents, and has been involved in the design, innovation, and productization of wireless communications systems such as 5G NR, 4G LTE, 3G CDMA, and IEEE 802.11. He also leads Qualcomm’s companywide academic collaboration program across technologies including wireless, semiconductor, multimedia, security and machine learning. John was chosen to participate in the National Academy of Engineering Frontiers of Engineering program and received his Ph.D. in electrical engineering from Princeton University and also holds an M.A. from Princeton and an M.Sc. and B.Sc. from Queen’s University.Smee will present Evolving 5G NR to Connect the Internet of Things on Wednesday, October 23, 2019, at MEMS Sensors Executive Congress, Coronado Island Marriott Resort Spa in Coronado, Calif.Register today to learn how 5G NR will transform the user experience with MEMS- and sensors-enabled devices in IoT, automation and beyond.Interested in engaging with the MEMS and sensors supply chain? MEMS Sensors Industry Group is a SEMI technology community that enables the MEMS and sensors industry to innovate, address common challenges and accelerate business results.Maria Vetrano is a public relations consultant for SEMI.