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BIOGRAPHYNasser Peyghambarian, PhD, is an Emeritus professor of Optical Sciences and Materials Science and Engineering at the University of Arizona. He is currently the Technical Director of the...

BIOGRAPHYOver 33 years of experience at leading semiconductor companies (TSMC, Applied Materials, Global Foundries), with expertise in all aspects of management, from advanced 3DIC R&D to...

Megasonic Removal of Flux Entrained in Narrow Gaps in Packaging StructuresABSTRACTIn electronic packaging, Solder Paste Reflow process is routinely used to attach capacitors on a chip to copper pads...

BIOGRAPHYMike Glavin is Program Director of Workforce Development at the SEMI Foundation, where he leads global, employer-driven strategies to strengthen the semiconductor talent pipeline. He...

Dummy Gate Poly Wet Etch Studies in GAA Nanosheet FlowABSTRACTDummy gate polysilicon wet etch clean studies were conducted in the advanced nanosheet based gate all around (GAA) process flow. The...

An Innovative Low-Azole Metal Hard Mask Etchant with an Environmentally Sustainable Cu/Co Integration SchemeABSTRACTIn advanced BEOL manufacturing at the Sub-14 nm node, copper interconnects are...

Improved Cu Recess Control via Surfactant-Modulated Electrochemical Kinetics in Post-CMP CleaningABSTRACTHybrid Cu bonding has become crucial in fine-pitch 3D semiconductor integration for achieving...

Controlling the Molybdenum Dissolution and Oxidation During Post-CMP CleaningABSTRACTMolybdenum (Mo) is rapidly emerging as a potential replacement for tungsten (W) in advanced semiconductor...

Use of Silicon-Based Additives and Their Mechanistic Role in Enhancing the Selectivity of Wet Etching Process on Sige over Si/SioABSTRACTSelective etching is a critical enabler for nascent advanced...

Thermal Vacuum Analysis and Identification of Contaminant Outgassing from Polymer SealsABSTRACTOrganic outgassing from polymeric materials, particularly elastomer seals and o-rings used in...