SEMI Standards

At July's SEMI Standards Information & Control North America Technical Committee Chapter Meeting, several ballots passed procedural review and await publication. Among them are the Equipment Data Acquisition (EDA) Standards, which use the Freeze concept to identify a specific set of SEMI Standards.

A lot has happened in fifty years, particularly when it comes to the microelectronics industry. Founded in 1970 by a group of semiconductor industry pioneers who believed that co-opetition — instead of traditional competition—would produce a more vibrant emerging industry, SEMI was born as an industry association.It's fitting during this week’s 50th annual SEMICON West (July 20-23, 2020) — a virtual event for the first time — that SEMI Chief of Staff Bettina Weiss offers her perspectives on the evolution of SEMI from one of the best seats in the house: the 24 years that she has spent helping the association change and grow.Vetrano: You’ve enjoyed a long rich history with SEMI, and now serve as the association’s first chief of staff. What roles have you played at SEMI up to this point?Weiss: I cut my teeth at SEMI by joining SEMI Standards, first serving as standards coordinator at SEMI Europe from ’96-’97. Over the next 11 years, I held a variety of positions at SEMI Standards, culminating with director of international standards from 2003-2008. Given that experience, I have to admit that SEMI Standards are still near and dear to my heart.I moved on to several leadership positions in our former global photovoltaics/solar business through 2014, and toward the end of that stint, I assumed additional responsibilities, becoming vice president of business development. That’s where I dove headfirst into expanding SEMI into emerging regions, including Vietnam, India and Latin America. SEMI goes where members see (or want to better understand) new opportunities, especially in places that had ambitious plans for fabs for microelectronics, including semiconductors and MEMS.In 2018, I became SEMI chief of staff, reporting directly to our president and CEO Ajit Manocha.Vetrano: Now I hardly know where to start! Since I have to decide, what does it mean to be SEMI chief of staff?Weiss: As the first chief of staff, I’ve been able to shape the position, combining the support of critical efforts driven by Ajit with additional project management responsibilities like our Smart Mobility initiative.Working with experienced leaders in our industry, such as the Board of Industry Leaders (BIL), is one of the more rewarding parts of my role at SEMI. The BIL is a group of global executives tasked with advising SEMI on strategic planning, especially when it comes to future-looking initiatives like Smart Mobility, Smart MedTech, Smart Manufacturing, and Smart Data/AI.A lot of the other things I do are meant to support the whole SEMI organization, in partnership with other senior leaders such as Michael Ciesinski, vice president of technology communities, as we create business plans and examine new revenue models that will keep SEMI sustainable and viable for the future. This includes issues as varied as workforce development and diversity and inclusion, and the new digital platforms we use to engage with our members.Vetrano: How does SEMI Smart Mobility initiative exemplify the model of engaging end customers in vertical markets that are important to members?Weiss: When you look at the rapidly increasing number of chips and sensors in and around vehicles, Smart Mobility at its core brings together both the semiconductor/sensor and automotive/mobility supply chains for a more transparent dialogue about needs and wants along the entire supply chain. We are thrilled to count automotive OEMs Volkswagen and Audi as SEMI members. We also work with Tier 1 suppliers such as Continental and many others to promote the open exchange of ideas and foster collaboration among all stakeholders.Smart Mobility is a good example of how SEMI connects two worlds that are now interdependent for the mutual benefit of all players. Automotive companies and component suppliers want to better understand new technology capabilities that enable tomorrow’s infotainment, safety, security and communication protocols. And semiconductor, sensor and component companies see huge upside in supplying the equipment, materials, devices and subsystems that enable the future of mobility. Smart Mobility is a win-win, and the founding concept of our Global Automotive Advisory Council (GAAC).Vetrano: As we look to COVID-19, the single most important event to influence the microelectronics industry — and every other industry — why is SEMI membership more important now than ever?Weiss: Our industry is facing a triple whammy of challenges: a global pandemic, ongoing global trade tensions that impact interdependent supply chains, and a global economic crisis. All these challenges will require our members’ ingenuity, innovation and collective action to overcome them. But inherent in those challenges are tremendous opportunities, and I have no doubt that our members and the entire global electronics ecosystems will find ways to help everyone prosper and advance.COVID-19 has had a huge impact on our members. From the onset of the pandemic, we’ve provided our members with resources including best business practices, insights and data from industry experts to help them respond to a virus that has already changed so many things we took for granted before March. Additionally, SEMI has also advocated with governments around the world on behalf of the industry for essential business status and essential travel to sustain operations. Visit SEMI COVID-19 Resource page for information on industry best practices and much more.Vetrano: Before we look forward, what has changed dramatically in microelectronics since you started at SEMI?Weiss: Through my work with SEMI, I’ve witnessed dynamic, dramatic and sustained change in the microelectronics supply chain. Into the late 1990s, SEMI represented primarily semiconductor equipment and materials suppliers, and we worked with chipmakers – our members’ customers. That’s where a lot of important Standards work happened, for example, and the supplier-device maker relationship was pretty much our world. Over the years, we saw significant change in how companies partner and do business with one another. The digital transformation we’ve been witnessing for the past few years was the impetus for expanding our reach to bring companies in the extended electronics manufacturing and design supply chain together, from sand to system, so to speak. That was also when we invited associations representing flexible hybrid and printed electronics (FlexTech), MEMS and sensors (MSIG), and electronic system design (ESD Alliance) companies to join SEMI and our other technology communities for maximum cross-pollination. That’s because everything needs microelectronic devices and systems. Vetrano: Looking ahead now, what is can the microelectronics industry do to benefit humanity?Weiss: Semiconductors and sensors are often the unsung heroes of progress. Microelectronics can help bring prosperity to the billions of people now struggling on our planet. It can improve access to education for people through e-learning, it can advance agricultural production and streamline the food supply chain to help feed the world’s hungry, it can monitor the quality of the water we drink and the air we breathe, and it can get you in front of a doctor even in the most remote village in India.The beauty of microelectronics is that we are not gated by innovation. As the brilliant visionary Arthur C. Clarke once said, “The only way of discovering the limits of the possible is to venture a little way past them into the impossible.”As an industry association that helps technologists to venture beyond “the limits of the possible,” I invite like-minded technology adventurers to engage with SEMI, starting with registration to this week’s SEMICON West – our first virtual show.As chief of staff, Bettina Weiss reports to SEMI President and CEO Ajit Manocha and manages a broad portfolio of responsibilities. Major focus areas include advancing specific global strategic initiatives such as thought leadership (Think Tanks) and SEMI Smart Transportation vertical application platform, improving organizational efficiency, alignment and financial sustainability, acting as senior liaison to SEMI Board of Industry Leaders, leading strategic partnerships and M A activity, and supporting Manocha in creating a highly effective, agile global association.Maria Vetrano is a PR consultant at SEMI.

In the first part of this double feature, we looked at the automotive industry’s transition toward a mobility ecosystem and the shifting business model perspective from selling vehicles to miles. At the core of these changing dynamics are four trends represented by the acronym ACES: Autonomous, Connected, Electric, and Shared mobility. Each of these trends is largely enabled by microelectronics through computer processors, sensor units, and communication architectures. Part 2 of this series explores the business opportunities at the transition from automotive to mobility, and the specific role SEMI can play as a natural bridge between the two ecosystems.Electronics and Software as Drivers for Automotive InnovationThe ACES trends represent an acceleration of the shift in automotive from the industry’s traditionally strong focus on mechanics and hardware toward electronics and software. This transition to electronics and software as drivers for automotive innovation already started in the 1970s with electronic fuel injection, anti-lock brakes, trip computers, and many other attributes that are now considered standard features. As a result, there are now hardly any automotive systems that are not computer-controlled. A vehicle without power windows and locks, electronic climate control, or MEMS-reliant airbags are basically unimaginable in many markets.As shown in the graphic[1] depicting the electronics share of total vehicle cost, the numbers paint a clear picture of the continued growth of electronics over time, with a 44% share today expected to grow to 50% by 2030. McKinsey Company estimates the automotive software and electrical/electronic (E/E) components markets combined will grow at a 7% CAGR from USD 238 billion in 2020 to US$469 billion by 2030[2].The assumption of continued and sustained growth presents a promising outlook for semiconductor and sensor content in vehicles over the next decade, which is particularly strong in the electrification space. Hybrid electric vehicles (HEVs) already contain $900 worth of semiconductor content, and battery-based electric vehicles (EVs) contain $1,000 worth of semiconductors – much higher than the average of approximately $450 of content in conventional vehicles[2]. Other business opportunities in the mid-term (3-5 years) include software, battery technology, infrastructure (charging stations, other hardware components, etc.), as well as vehicle-to-vehicle (V2V) and vehicle-to-environment (V2X) communication. These technologies also demonstrate how the industry’s business focus is expanding beyond the confinement of an individual vehicle to increasingly contemplating the evolving ecosystem around it, resulting in real mobility solutions. Image credit: Continental AG This creates significant opportunities for a large number of SEMI members in the semiconductors and sensors business by connecting them with new customers and partners in the automotive and mobility supply chains, primarily vehicle manufacturers and Tier 1 suppliers, and together realizing new business in new automotive applications such as: Autonomy, including ADAS (GPUs, LiDAR, radar, camera, accelerometers...) Connectivity (link to outside infrastructure and in-cabin devices, roadside units...) Electrification (power electronics, battery monitoring, H2 detection in fuel-cell...) Sharing (customizable vehicle interior, trackable mobility devices such as scooters...) In-cabin experience (media systems, displays, VR/AR, occupant detection...) Vehicle architecture (flex-ray, automotive ethernet, diagnostics, smart parts...) Safety and security (HW/SW firewall, parts authentication, upgradability...) In these partnerships, the vehicle manufacturers and component suppliers clearly benefit from leveraging semiconductor capabilities including: Device and system reliability/robustness/quality (“Zero Defect”), which creates opportunities for new SEMI Standards (e.g. wafer-to-device/system traceability) New design architectures for added functionality, safety and security New packaging solutions (automotive OEMs are already participating in the Heterogeneous Integration Roadmap, seeking to collaborate with device manufactures and Original Semiconductor Assembly Test (OSAT) companies to reduce costs and differentiate on automotive-grade solutions Sensors and imaging (cameras) SEMI Smart Mobility Initiative – Connecting Mobility and ElectronicsSEMI launched its Smart Mobility Initiative in 2018 based on the mandate of providing “SEMI members with access to new business opportunities and collaborative platforms in the automotive electronics supply chain.” The initiative is currently focused on synchronizing the automotive and microelectronics supply chains for automotive electronics innovation – in particular semiconductor devices, sensors, and related products manufactured for this space and sold to vehicle OEMs and Tier 1s. To facilitate closer dialogue among stakeholders from this combined ecosystem, SEMI formed the Global Automotive Advisory Council (GAAC) which now has five regional chapters and represents dozens of companies. Collectively, GAAC members discuss and act on a wide range of topics, from Silicon Carbide (SiC) standardization to new design architectures and closing the OEM requirement gap.While continuing to build on the strong automotive foundation, SEMI’s Smart Mobility Initiative is now expanding its reach and scope of activities to broader mobility themes, such as infrastructure and battery technology and Smart City, to infuse SEMI member communities and the GAAC with new stakeholders and new ideas. These are exciting times!Please contact Bettina Weiss, Chief of Staff at SEMI, at [email protected] for further information about SEMI’s Smart Mobility Initiative, the Global Automotive Advisory Council, and how SEMI can help your organization navigate electronics in the automotive industry to drive innovation in the mobility space.[1] see graphic, created with data from NXP / Freescale[2] Source: McKinsey Company, 2019Microelectronics Power the Future of Mobility – Part 1: Autonomous, Connected, Electric and SharedBettina Weiss is Chief of Staff and Global Smart Mobility Lead at SEMI. Sven Beiker is Smart Mobility Consultant at SEMI.

Olivier Corvez, senior manager of Environment, Health, Safety and Sustainability at SEMI, sat down (virtually) with Todd Patterson, vice president of global EHS for Entegris Global Operations, to discuss how Entegris has responded to the global pandemic.Corvez manages and Patterson participates in the COVID-19 EHS Task Force currently meeting weekly to discuss industry response and share best practices. SEMI: Was Entegris prepared for the COVID-19 pandemic? How did the company respond?Patterson: Entegris has a strong risk management framework and a risk assessment team of senior leaders who meet at least once a quarter. This focus gives us early visibility into events that could destabilize our organization or threaten our operations. Such a framework helps ensure we have the information necessary to act as soon as possible when the need arises. However, our business continuity plans for a pandemic of this scale were far less than with other more commonly occurring catastrophic events such as earthquakes or hurricanes. The COVID-19 crisis was clearly unprecedented and as such, the necessary systems and procedures were not in place with the depth and detail needed. Our strong governance structure made it possible for us to hold steady even as the pandemic caused increasing uncertainty and disruption around the world. For example, despite major supply chain shutdowns across many industries, to date, our supply chain and manufacturing operations have only been modestly impacted by COVID-19. Our supply chain team was assessing daily the areas of risk with our suppliers and taking appropriate action as well as preemptive steps to ensure our critical supply lines remained open.Our sales team engaged in regular communications with our customers providing them updates about our Business Continuity Plans and our actions to mitigate the risk to any of their deliveries. In addition, we maintained current information about the continuity of our supply chain on the company’s intranet for the global sales team to access as they engaged with customers. Also, a proactive communication plan was implemented immediately to send weekly video messages from senior executives directly to employees’ emails. It was an effective way to communicate with our global teams, to keep them informed about the status of the company’s operations and maintain a common sense of purpose at a time when many colleagues worked from home. In these weekly messages, we also focused significant attention on the health and safety protocols established to protect our manufacturing and lab employees from the virus.Among the health and safety protocols we implemented immediately as the virus moved across different regions were those related to facility screenings, work-from-home policies, social distancing, self-quarantine requirements, contact tracing, increased disinfecting, and travel restrictions. With approximately 5,300 employees worldwide, we had teams in every region ready to implement these comprehensive protocols. We believe we were among the first companies to implement work-from-home policies and travel restrictions.Temperature screening stations at Entegris facilities in Jangan, Korea (left) and Kulim, Malaysia (right). In addition, our CEO led a COVID-19 Steering Committee comprised of senior executives and managers from operations, human resources and communications. The committee met several times a week during March and April to evaluate and formulate responses to the issues that emerged as the virus spread from region to region. The committee’s work created a strong partnership among senior executives and divisional and functional leaders, and the initial guidelines developed by the committee have formed the backbone of a global playbook to limit the spread of the virus to our other sites around the world.Recently, the committee has changed its focus to more strategic issues such as creating a framework for transitioning remote workers back into our office locations. Meanwhile, local leadership teams at each of our global sites have been empowered to address ongoing tactical issues consistent with our thoroughly documented health and safety protocols.Looking to the future, we are using our experience in responding to COVID-19 to develop a more comprehensive pandemic response plan. We have project teams working on better ways to: measure temperatures of personnel entering our sites facilitate social distancing in the workplace redesign common use areas to reduce the number of high touch points disinfect all spaces thoroughly and regularly, and manage emergency pandemic supplies. SEMI: From the SEMI EHS survey, we noted that all members had a Business Continuity Plan. How effective has it been for deploying resources and adapting quickly and minimizing the crisis? Why or why not? Patterson: Because we have operations in China, Entegris experienced the impact of the virus immediately. We quickly formed two task force teams for our two primary facilities in the region. These teams developed the means for communicating key information to employees and started working on prevention plans to protect employees and comply with local requirements for when operations resumed. They met the challenges head on and found quick solutions. An example was finding an effective way of communicating to the employees for each location. Group chats were established through social media. It was this work that led to their success in getting approvals from local authorities to resume operations. Those plans have laid the groundwork on which our other sites around the world could build their response plans.The effective management of our global supply chain also stands out as a key success of the company’s Business Continuity Plan. Entegris has a highly complex supply chain with approximately 6,500 suppliers and a $850 million annual spend, and we ship work-in-progress and finished goods from over 90 sites globally.As I mentioned earlier, despite the virus crippling supply chains across many industries, Entegris experienced very little disruption to its supply chain. The supply chain team was able to accomplish this despite a 90% reduction in global freight capacity. A key factor in keeping goods flowing to our factories was the intensive work the team had done earlier to develop an in-depth understanding of the company’s top suppliers and to mitigate sourcing risks. They had established alternate sources, balanced the sources geographically, and placed inventory across our supply chain to buffer risk.The team also had integrated statistical modeling into reporting tools, which made it possible to reset safety stocks and logistics lead times quickly as conditions changed. And a supply chain digitalization provided one aligned and integrated view via dashboards, giving the company the ability to respond rapidly and to communicate in real time with our suppliers. We essentially had a virtual war room where we monitored the daily impact of the spread of the virus and could address bottlenecks and other issues immediately.SEMI: What lessons have been learned, so far? How do you see changes in your company’s operations in the future?Patterson: Institutionalizing what we’ve learned has already begun. Whether the measures implemented during the pandemic are temporary or become permanent is still to be determined. Regardless, the learnings need to be documented and available as a playbook for if – or when – the next pandemic occurs.Entegris is already working on a more comprehensive pandemic plan that will be based on five levels of preparedness. Level 0 will cover annual training requirements and management of emergency inventory of pandemic supplies. Level 1 will include early recognition of an outbreak, and then Levels 2-4 will include requirements for when specific response measures are implemented. Entegris also has formed the “New Normal” task force, which consists of leaders representing a number of disciplines directing the project teams previously mentioned to create a more comprehensive pandemic response plan. One of the project teams is working on improving the facility screening process that performs temperature measurement for personnel entering Entegris sites. The team is looking at the best technology to scan body temperature. As to whether this technology is employed only while COVID-19 is still active or becomes a permanent way of doing business, this is still being discussed.SEMI: EHS is involved in both providing technical support to protect individuals but also in making organizational changes to favorize social distancing. Could you explain some of the successes and challenges while tackling these two fronts?Patterson: Very early in the pandemic, Entegris established a work-from-home policy for non-essential employees. This significantly reduced the number of personnel and the potential for contact at the Entegris locations. Significant facility changes also were required. These included the design of facility screening booths and modifications to common gathering areas such as canteens, meeting rooms, prayer rooms, and smoking points. Physical markings were used to designate 2 meters distancing, and the seating in canteens and meeting rooms was reduced and staggered to minimize the risk of exposure to the virus. Entegris also has a project team focused on developing design solutions for offices and workstations when space makes it difficult to maintain 2 meters social distancing. These changes turned out to be essential for some sites in meeting mandates by local authorities. Our sites in Hangzhou, China and Kulim, Malaysia both were allowed to resume partial operations after demonstrating to government authorities the effectiveness of the preventative measures put in place. One particular challenge we are facing is the range of personal differences and awareness levels within the workforce – including those that don’t understand the importance of the new guidelines. We are working closely in advising supervisory staff to be aware of the need for employees to follow all health and safety protocols we have put in place, including social distancing. That preventative measure is the most difficult to make part of our new behavior – it is unnatural and inconsistent with our human nature, but it is critical to preventing the further spread of the virus.SEMI: How do you envision the progressive steps in deescalating to bring back “normal” operations? Patterson: I don’t know whether Entegris will ever go back to the old “normal.” As previously mentioned, we are working on the “New Normal.” Our focus now is on bringing our work-from-home employees back to the workplace without adding risk of exposure to the virus. We are still exploring options, but we expect to do it in a phased approach so that we can adequately assess the preventive measures that are in place and determine whether adjustments need to be made to any of our health and safety protocols.We are starting to see a variety of different frameworks emerge for evaluating repopulation timing and procedures. We will assess them on an office-by-office, or site-by-site basis, utilizing consistent criteria to define the potential for exposure to the virus. This also applies to our field service workforce. However, I have not yet seen any governmental guidance that offers a recommended framework for returning employees to the workplace. I think this represents an opportunity for SEMI EHS and the Standards groups to work to establish that framework for our industry.SEMI: Anything else you would like to share that you have observed throughout this crisis?We have not discussed the challenges faced in procuring and acquiring pandemic supplies. Almost immediately after the outbreak occurred in Wuhan, it became increasingly difficult to find supplies. Even when confirmation was provided by suppliers and delivery dates confirmed, the majority of the dates were pushed out or canceled. We found that what worked best was to have purchasing teams at the local site work with their local contacts on obtaining smaller quantities while a corporate point person was also managing larger orders. In preparation for any future pandemics, Entegris will be maintaining an emergency inventory for masks, sanitizer, thermometers, and disinfectants.For 18 months, Todd Patterson has held the position of VP Global EHS for Entegris Global Operations. His experience with emergency management and BCP has become invaluable in the past three months. He is grateful to his global response teams around the world for coming together to support the Entegris team in this unprecedented situation. Todd is an active participant on the SEMI EHS COVID-19 response teams led by Olivier Corvez at SEMI. Olivier Corvez is senior manager of Environment, Health, Safety and Sustainability at SEMI.

This article is the fifth and final in a series highlighting the vital importance of SEMI Standards to commemorate the publication of the 1000th SEMI Standard in July 2019. Find the entire series here.As we define industry standards for managing data in the fab and beyond, we are creating a virtuous circle. More data create better processes. Better processes generate more good data, and more good data lead to better processes. It becomes a cycle of continuous improvement, and we are only just beginning to realize its potential. To dive deeper we interviewed Alan Weber, vice president, New Product Innovations at Cimetrix, and an active member of SEMI Standards Information and Control Committee (IC C).“Industry standards are critical in allowing us to collect information across the fab and use it in increasingly sophisticated control algorithms for the equipment,” said Weber. “The last few years have been about analysis applications that leverage big data in the fab. What started at the lot level is now applied at the wafer level, and for a process like lithography, it’s down to the shot or die level. We’re now collecting enough data variables at individual process and recipe steps to model for predictive maintenance and virtual metrology.”The migration from using data as rearview mirror for identifying and addressing fab issues to using data to head off issues preemptively represents a paradigm shift with immense advantages. This is the starting point for realizing a virtuous data circle.The benefits of a virtuous data circle are simple and compelling: higher yields, faster time to market, more revenue and greater profitability. Our optimism, however, is tempered by major obstacles to this promising future.Multilingual ManufacturingWeber points out that the electronics industry is becoming a multilingual standards world with more than 1,000 fab equipment vendors and several layers of protocols that present the challenge of seamlessly handling multiple protocols. His IC C Committee is out to tackle this challenge.“While SEMI Standards efforts first began in the front end, our standards program now encompasses the back end with test and packaging as well as other device areas including MEMS, sensors and displays,” said James Amano, senior director, International Standards and EHS, SEMI. “We’re going to see data connectivity from the front end to the back end to the final assembly of multi-chip products and that needs standards,” Weber explained. “We’ll need more connected equipment throughout the global, multi-site manufacturing process if we are to support the full traceability requirements of the most demanding markets such as automotive.”The industry will benefit from greater collaboration. Weber predicts that companies will team to create integrated supply chains within broader industry supply chains.Getting the Right People at the Right Time“As we lead the development cycle of a standard from concept to realization, one of the most important jobs of our standards task forces and committees is to coordinate competing companies and build an industry consensus,” Amano said. “This is the case for data in particular, where we rely on industry professionals like Weber and his colleagues, who are working to bring people together to collaborate on developing standards for connectivity and data sharing. It is that critical human element that allows SEMI to sustain our commitment to introducing standards that move the industry forward.”Will Companies Share Data If It Is Secure? Weber contends that when it comes to securing and sharing the data, the biggest challenge is to change the industry’s information-sharing culture.“Finance and defense are already finding ways to deal with data security,” said Weber. “While we will always have problems that require technology fixes, like dealing with new types of computer viruses, I am confident that we will be able to create standards that enable the free, secure flow of information. The key to making progress and better leveraging data is to get companies to see the potential of sharing data while investing in the standards.”SEMI recently launched a project to optimize data sharing across two critical process steps – lithography and plasma etch – to accelerate the adoption of data-driven AI methodologies. The results will help to establish data transfer and management standards crucial to the trusted exchange of trade secrets, IP and other sensitive information. Tools and materials from several SEMI members will be used for the project at Cornell University’s NanoScale Science Technology Facility (CNF). SEMI members are invited to join the project review team. Contact Pushkar Apte at SEMI ([email protected]) for more information on the initiative.Advantages Are Too Great to IgnoreTraditional cultural obstacles aside, the advantages of creating virtuous data circles are simply too great to ignore. Now that it’s accepted wisdom for fabs, factories and supply chains to continuously leverage interconnected data to get smarter, the time has come to extend those advantages throughout the full manufacturing process. Without these data circles, we’ll slow the development of new technologies and applications.We can only speculate where the lines of sharing data are drawn and will be redrawn in the future. But, without doubt, technology innovations such as AI will spawn new information business models that vertically and horizontally integrate companies in ways previously unimaginable. Data standards will underpin this structural transformation.Use your voice to affect standardization in and around the microelectronics industry. Learn about SEMI International Standards – and become part of the solution. Heidi Hoffman is senior director of technology communities marketing at SEMI. Hoffman and her team shine a spotlight on the work of the more than 20 technology communities under the SEMI electronics manufacturing supply chain collaboration platform. Actively engaging community members in marketing programs that showcase their unique value, Hoffman’s team helps companies to grow and prosper through the power of connection, collaboration and innovation.

This article is the fourth in a series highlighting the vital importance of SEMI Standards to commemorate the publication of the 1000th SEMI Standard in July 2019. Find the entire series here.Computer prices have plunged over the years even as desktop and laptop PC performance has skyrocketed thanks to the semiconductor industry, giving users much more bang for their buck. The chip industry stands in a stark contrast to healthcare and education with their exponentially rising costs.What distinguishes the semiconductor industry from healthcare and education in the capacity to deliver so much for so much less over time? After all, even in other parts of the technology sector that are heavily regulated, such as cable television, we have not witnessed the same price decreases as in microelectronics.Some pundits claim that the difference among sectors is tied to their degree of regulation. Does greater regulation somehow degrade product value? The reality is far more nuanced. But one thing is clear: Smart self-regulation (i.e. standards) in the semiconductor industry has contributed mightily to its success.The recipe for success has been simple. Standards have been rocket fuel for competition, which in turn has sparked innovation, driving down device prices while boosting performance. Computer prices fell dramatically between 1997-2015 while the cost of cable TV and internet services rose. Myth of unregulated competitionA semiconductor fab might actually be the most regulated place on earth. Fabs hew to a much higher standard of air quality and cleanliness than even uber-sterile hospital operating rooms. Manufacturing processes are voluntarily regulated not to millimeters, but to nanometers. While some standards are proprietary with limited reach, others span the supply chain. Regulation has worked so well in this sector that the semiconductor industry isn’t moving toward less standardization. It’s moving toward more. Secret is smart standards The gap between regulation and self-regulation is more like a chasm. We typically view regulation as a series of top-down directives that more often focus on the interests of the producer than the consumer. Healthcare regulation, for example, may improve quality of care, but it’s often insurers, big pharma and hospitals that benefit most from regulation, rather than consumers.The semiconductor industry, on the other hand, uses self-regulation to improve business operations and make better products for consumers. Falling prices and rising performance are natural byproducts.Semiconductor industry self-regulation is an ecosystem-wide effort, where input isn’t just top-down, but also bottom-up or even side-to-side. The first SEMI Standard, which specified wafer sizes, exemplifies this approach.The SEMI Standards Committee formed in 1973 to address silicon wafer dimensional specifications. At the time, wafer specifications proliferated. Numbering more than 2,000, the various specifications led to major inefficiencies just when the industry was just getting underway. Wafer suppliers banded together under SEMI to solve this problem and rapidly developed consensus specifications for 2- and 3-inch wafers. By the mid-1970s, over 80% of wafers conformed to these new standards.Standardized wafer sizes freed equipment companies to focus on innovations that reduced cost and increased performance. It also allowed manufacturers to focus on product differentiation without having to worry about device fabrication process and cost. Since that first SEMI Standard made possible the modern semiconductor equipment industry, original equipment manufacturers (OEMs) have competed to deliver amazing innovations. For example, lithography systems routinely use light to design chips with feature sizes smaller than the wavelength of light.SEMI’s 1000th standard on energetic materials demonstrates how smart standards are also pragmatic. This standard is not about banning materials or assigning blame when things go awry. It is about creating practical guidelines that companies will follow, enabling them to realize greater innovation. Guidelines that reduce accidents and risks will spur more, not less, energetic materials’ exploration. Industry suppliers will be the big winners.The 1st to the 1000th SEMI standard all represent examples of cooperation making more sense than competition.Standards for the real worldCreating a business-friendly standard that still gets the job done is a process. As SEMI Standards Task Force and Committee members, materials, equipment and manufacturing companies take part in defining best practice guidelines that support safe and practical use of materials and equipment. Task force and committee members assign particular responsibilities and associated costs to the most logical segments of the supply chain. They also develop information-sharing practices around competitive process recipes and purity standards.Andy McIntyre, CIH, a member of the energetic materials task force and an executive vice president and managing principal at BSI EHS Services and Solutions, summarized what makes SEMI standards smart.“SEMI standards are pragmatic,” said McIntyre. “They take into account the need for implementation in a real-world business environment. They embrace an engineering approach to problem-solving to create practical solutions, and they define specifications and performance goals in ways that allow engineers — in collaboration with EHS professionals — to identify practical solutions for reducing risk in R D, pilot line and manufacturing operations.“SEMI standards employ a holistic process that considers all the important points of view throughout the supply chain, from materials selection, installation, use, recycling and/or disposal,” said McIntyre. “The breadth of SEMI EHS Guidelines, for example, is also very comprehensive as the SEMI EHS Committee and task forces work to ensure that standards keep pace with dynamic technology developments. Energetic materials is a prime example where the industry recognized the need for a new safety guideline to document safe usage of pyrophoric, water-reactive and unstable reactive materials, which have become increasingly important in semiconductor and advanced materials R D and manufacturing.”This is the real secret to the success of the semiconductor industry. Smart self-regulation allows industry players to cooperate in the development and implementation of standards that are pragmatic, comprehensive and dynamic. Participants in SEMI Standards have a voice in the semiconductor industry because they are the voice of the semiconductor industry.While innovation in semiconductors may not always keep pace with Moore’s Law, we can depend on one truth: As long as collaboration and cooperation are the rule and not the exception, we will continue to advance technology in amazing and unprecedented ways. You, me and all other consumers will continue to reap the rewards of innovation. Use your voice to affect standardization in and around the semiconductor industry. Learn about SEMI Standards – and become part of the solution.Heidi Hoffman is senior director of technology communities marketing at SEMI. Hoffman and her team shine a spotlight on the work of the more than 20 technology communities under the SEMI electronics manufacturing supply chain collaboration platform. Actively engaging community members in marketing programs that showcase their unique value, Hoffman’s team helps companies to grow and prosper through the power of connection, collaboration and innovation.

This article is the third in a series highlighting the vital importance of SEMI Standards to commemorate the publication of the 1000th SEMI Standard in July 2019. Find the entire series here.SEMI Standards are the bedrock of the modern microelectronics industry. Without standards for wafer dimensions – which SEMI Standards first defined through a collaborative process involving semiconductor manufacturers and wafer suppliers in 1972 – the semiconductor equipment industry as we know it would not exist today. The late Robert Noyce of Intel noted in this 1992 video “being good at producing semiconductors will mean we have better, more consistent, better controlled equipment than we have in the past. Standards are going to play a vital role in that. Standards saves money and time for everyone.” Noyce also called standards a bellwether to surges of innovation in critical process technology. This is still true today as, for example, important standards-setting activity is afoot in panel-level packaging, electron microscopy and energetic materials. Will a surge of innovation follow?Panel-level packaging: a chicken-egg scenarioFrom advanced materials to more efficient production tools, one hallmark of the microelectronics industry is our fearless exploration of new technologies that will spawn change across the industry by improving performance and reducing cost. Advanced packaging techniques, such as panel-level packaging (PLP) – which moves semiconductor packaging to a larger-panel format – is one of those critical catalysts. Citing PLP’s potential to shrink costs by improving efficiency and economies of scale, research firm Yole Développement predicts a remarkable 63% CAGR for PLP from 2017-2023.[i]It’s no stretch to say that we are close to realizing a burst of innovation in packaging. With a just-published SEMI Standard (SEMI 3D20) specifying panel sizes, equipment companies will find it economically viable to invest more in developing the much-needed production tools that enable PLP. “It is really important to create standards so we come together and work much more efficiently. Creating those fundamentals allows you to be more productive in the long term,” said Christina Chu, ASM Semiconductors, and co-leader of the Panel Level Packaging Task Force, and one of five industry leaders recognized for their outstanding accomplishments in developing SEMI Standards for the electronics and related industries at the recent 1000 SEMI Standards reception during SEMICON West 2019. “This effort came up from the trenches,” said Richard Allen, NIST Quantum Measurement Division, and a co-leader of both SEMI’s 3D Packaging and Integration Committee and its Panel Level Packaging Task Force. “Equipment vendors told us that they wanted to serve the market, but they couldn’t do so without some standards. To respond to their request, our committee surveyed the market and discovered at least 15 different panel sizes in development.”“As no vendor is going to make over a dozen unique tools for the same process, we worked with the manufacturers and tool companies to write a specification that standardizes on two of the most widely accepted sizes,” Allen said. “For the first time, the industry will have a real market for panel-level packaging tools, and that will spur commercialization of new technologies that never would have seen the light of the day without standardization.”Allen pointed out that evolution of standards in microelectronics reflects the dynamism of the microelectronics industry itself. “Given the rate of technology advancement in microelectronics, SEMI Standards committee and task force members know that a newly-published standard is often just a starting point, and change will likely follow,” he said. “The Panel Level Packaging Task Force, for example, is currently determining how to best support this packaging technology, whether through possible enhancements to 3D20 or by creating new PLP standards.”Process automation is key for TEMTransmission electron microscopy (TEM) is another area where industry cooperation will fuel progress.“People throw around the phrase ‘exponential growth,’” said James Amano, senior director, International Standards at SEMI. “It’s usually a gross exaggeration, but not when it comes to TEM data. That’s because demand for more TEM data, which uniquely enables innovations around smaller feature sizes, has exploded. At the same time, TEM data is a bottleneck in the fab. Operators literally use tweezers to carry around electron microscope samples by hand, and that is untenable.” TEM sampling standards are currently being formulated under the SEMI Standards development process. “Applying a model that we have employed successfully time and time again through SEMI Standards, we are gearing up for process automation in TEM,” Amano said. “We’ll start by establishing a grid carrier standard for electron microscopy. Through ongoing standards efforts, we may realize a fully automated TEM process within just a few years. That achievement will enable exponential growth in shrinking design geometries.”Energetic materials gain safety standardAlong with wafer-level packaging and design shrinks, the push for safety in materials’ usage is a hotbed of innovation. This is especially true with energetic materials, the potentially hazardous process chemicals used increasingly in semiconductor manufacturing to spur advances in materials purity, integrity and quality.“When you’re working with energetic materials, if you don’t get it right, you may face serious yield and cost issues, and most important of all, safety risks,” said Paul Trio, senior manager of strategic initiatives at SEMI. “This isn’t a theoretical concern. Real problems occurring in fabs have made an energetic-materials standard a high priority for the industry.”“After years of collaborating with companies across the supply chain to address this significant challenge, we recently published our 1000th SEMI Standard around safe usage of energetic materials,” Trio said. “Now manufacturers can turn to a new standard – which will evolve dynamically in response to industry changes – as they employ energetic materials in their quest to achieve higher yields while controlling costs and managing safety risks.” Whether it’s packaging, design shrinks, materials or other key innovations, standards are essential to progress in microelectronics. From equipment and materials suppliers that provide the most advanced, efficient and safest tools, materials, and processes to device manufacturers that get products to market, all stakeholders in the microelectronics ecosystem benefit from SEMI Standards. Are you curious about the areas of process technology where innovations are likely to occur? Would you like to get involved in standards efforts that could have an impact on your business? Take a look at the activity of SEMI Standards Committees and Task Forces. Because that’s where innovation, pragmatism and a commitment to harness industry resources come together.Use your voice to affect standardization in and around the microelectronics industry. Learn about SEMI Standards – and become part of the solution. Heidi Hoffman is senior director of technology communities marketing at SEMI. Hoffman and her team shine a spotlight on the work of the more than 20 technology communities under the SEMI electronics manufacturing supply chain collaboration platform. Actively engaging community members in marketing programs that showcase their unique value, Hoffman’s team helps companies to grow and prosper through the power of connection, collaboration and innovation. [i] Status of Panel Level Packaging report, Yole Développement, 2018

This article is the second in a series highlighting the vital importance of SEMI Standards to commemorate the publication of the 1000th SEMI Standard in July 2019. Find the entire series here.Chip traceability. It’s one of the next big things for the technology industry. The benefits are enormous, and the upsides — which include enhancing yields by identifying the sources of reliability issues, fighting counterfeiting, and growing the overall technology market by enabling new applications — are plentiful.But the implementation challenges of chip traceability are also big and will require considerable effort to overcome. Perhaps the biggest hurdle of all is that we need to transcend industry fears by demonstrating that we can secure IP when it is shared across the hardware supply chain. What will drive the technology industry to make the necessary investments in traceability? “Automotive will drive traceability,” asserted Doug Suerich, product evangelist at PEER Group and an active participant in the SEMI Standards Traceability Committee. “If I had to guess, the autonomous car in particular will drive a traceability-standard effort.”Where Reliability is CriticalWhen your laptop crashes, it’s annoying. But when a car crashes because of a system failure, the damages can be severe and catastrophic It’s also one that is poised to get exponentially larger as we see ever greater amounts of silicon content in vehicles.Fortunately, everyone can agree on the nature of the solution. The industry needs to create a standard for traceability throughout the supply chain. When lives are at risk, we must find and fix the manufacturing source of any defects that affect reliability. That’s understood. Now it’s the not-so-small matter of figuring out the details.Of course, it’s not just about cars. Manufacturers and users of medical devices and military platforms also put a premium on extended, high levels of reliability. In the technology industry, however, the automotive market represents such enormous growth potential that we view it as integral to future industry success.At a market size of more than $1 trillion, automotive is steadily becoming a high-tech market as cars transform into advanced technology platforms that offer partially or fully autonomous features. Vehicles are fast becoming semiconductors on wheels. With leaders from Google to General Motors investing heavily in chip advances, the automotive industry will demand a supply chain that requires chip and device traceability from all its participants.The SEMI Technology Communities and Standards Committee have made some inroads toward solving the traceability challenge with their development and publication of a SEMI Standard enabling traceable device-level identification (ID) throughout the IC manufacturing, test, and assembly processes to the point of use in the final system. The standard is a meaningful first step but overcoming the challenges of counterfeiting and information sharing remain and will require greater industry collaboration.“It comes down to a safety issue,” said Suerich. “We need the ability to collect data across the supply chain, so we can trace down the source of a reliability issue, analyze the data and take corrective actions around applications for which safety is critical. Automotive, medical and aerospace devices need to keep working over five, 10 or even more years. For the semiconductor industry, that means redefining yield.”Traceability Roadmap“It’s going to be a major challenge to share data throughout the supply chain, not just technologically, but culturally as well,” added Suerich. “It will take a concerted effort, and we’re just in the early stages of figuring out some of the IP protection issues.”While traceability is new ground for the culture of the semiconductor industry, the automotive industry has long embraced tracing the sources of defects. In some cases, automotive suppliers have issued wide-ranging product recalls due to safety concerns. The Takata airbag defect, for example, resulted in tens of millions of recalled airbags. As the automotive and semiconductor supply chains increasingly overlap, SEMI committees and task forces are in an ideal position to model traceability best practices in after those implemented by the automotive industry.“We’re going to need an organization like SEMI to coordinate and organize this,” observed Suerich. “While we’re still in the early phases of figuring this out, the market potential around automotive has attracted a critical mass of powerful companies who want a solution. We need to standardize a way to tag which information can flow up and down the chain, and which is protected. I think we’re looking at more than five years of hard work around new standards.”Semiconductor companies are understandably cautious about sharing data related to their proprietary processes because the value of the intellectual property and need to protect data is simply higher than in many other industries. “Automotive offers the perfect confluence of factors to drive traceability in semiconductors,” Suerich concluded. “There is increasing silicon content as well as lives and big money at stake, and motivated players at leading companies and within government institutions want to see progress.”Use your voice to affect standardization in and around the microelectronics industry. Learn about SEMI International Standards – and become part of the solution. Learn more about SEMI's traceability activities. Heidi Hoffman is senior director of technology communities marketing at SEMI. Hoffman and her team shine a spotlight on the work of the more than 20 technology communities under the SEMI electronics manufacturing supply chain collaboration platform. Actively engaging community members in marketing programs that showcase their unique value, Hoffman’s team helps companies grow and prosper through the power of connection, collaboration and innovation.

This article is the first in a series highlighting the vital importance of SEMI Standards to commemorate the publication of the 1000th SEMI Standard in July 2019. Find the entire series here. More than 40 years after establishing the SEMI International Standards program, SEMI recently announced its 1000th SEMI Standard – a safety guideline for handling energetic materials. Creating a resource for unpredictable changes in materials is the type of challenge the SEMI International Standards program is often called upon to tackle – where the standard is merely the end of the beginning. The semiconductor industry has learned to expertly control its facilities, equipment and components. The next logical step is materials. It’s common knowledge that the industry drives innovation with new process materials and enabling safer material exploration is critical to the industry’s success. Classification Schema The 1000th SEMI Standard provides three classifications of energetic materials and byproducts based on three criteria: Hazardously exothermic (large amount of heat released following a trigger event such as heating or a physical shock) Pyrophoric (self-igniting upon air exposure) Water-reactive (releasing a large amount of energy or flammable gas upon contact with water) Unsafe handling of any of these byproducts can, to put it mildly, result in a bad day for a fab or lab. The leader of the Energetic Materials Task Force and an expert in process and equipment risk assessment at his company Safety Guru, Eric Sklar recounted one of the stranger incidents. A cleaning crew detached a pipe from a piece of equipment associated with a process recipe that used no energetic materials. The team set it in a sink, sprayed some water to begin cleaning it, and the pipe ignited in flames. Remarkably, although the initial materials weren’t energetic, the process created new byproducts that were very much so. Standardizing on Shifting Ground Energetic materials are new ground for standards and that ground is shifting, with much more material innovation to come. The upshot is that it is particularly important that the energetic materials standard is dynamic. By design, all SEMI Standards are malleable – continuously shaped by the demands they aim to meet. The release of this document is nowhere near the end of the work, as the standard will evolve to keep pace with continuing materials innovation. Creating a Robust Materials Supply Chain SEMI Standards create the conditions for a more robust materials supply chain and sustain the needs of business. If the standards safeguards are too burdensome, they will never be adopted. Conversely, without protections, people and equipment are unnecessarily put in harm’s way and innovation slows. SEMI’s Energetic Materials Task Force members realized early on that the industry needed a standard that would be practical to implement and flexible enough to be optimized over time. They understood that collaboration and compromise, while time-consuming, are also essential for standards’ creation. They determined roles and responsibilities across the supply chain, and they struck delicate balances between sharing no information about the intended uses of potentially dangerous materials and sharing everything about proprietary process recipes. The sheer scope of this standard necessitated a multi-year timeline. “The effort began with SEMATECH assembling its members’ views about energetic materials safety,” said Eric Sklar. “It then required years of effort from SEMI to bring the key industry participants together to create pragmatic guidelines that address the challenges around energetic materials in the supply chain.” Only Getting Started Despite all the work, one certainty is that the standard isn’t perfect for the present and can’t reflect future demands. This is why the energetic materials standard is not a static document, but a living process that is in its germinal stages. Key players continue to shape the standard, and that’s fundamental to enabling future materials innovation and ultimately reducing the number of unexpected energetic materials reactions in fabs. The variables in standards development are numerous and ever-changing. Energetic materials only magnifies the need for the broad collaboration that SEMI has facilitated for more than 40 years. While the risks posed by energetic materials are substantial, the criticality for continued innovation is undisputed. Now, with its adoption, the work of adapting and modifying this 1000th SEMI Standard is only about to begin. Use your voice to help drive standardization in and around the semiconductor industry. Learn about SEMI Standards – and become part of the solution. Register to receive Standards Watch, SEMI’s quarterly e-newsletter. Heidi Hoffman is senior director of technology communities marketing at SEMI. Hoffman and her team shine a spotlight on the work of the more than 20 technology communities under the SEMI electronics manufacturing supply chain collaboration platform. Actively engaging community members in marketing programs that showcase their unique value, Hoffman’s team helps companies grow and prosper through the power of connection, collaboration and innovation.

SCIS is a SEMI Technology Community that tackles critical component defectivity for the semiconductor manufacturing industry. The organization develops test methods for measuring defects in these critical components. Originally, this SEMI community was looking at challenges surrounding sub-10nm process nodes, but our constituents – Integrated Device Manufacturers (IDMs), capital equipment OEMs, and (sub)component suppliers – felt that the immediate need was for standards that would apply to process nodes that are already being used for volume semiconductor device manufacturing.IDMs need ways to tell their supply chain how defects attributable to these critical components factor into the overall process-node defect budgets and wafer-contamination limits. Chipmakers and IDMs needed to start with a baseline: How problematic are existing critical components in the overall fab systems and how do these contaminants contribute to defects and how do they affect overall process yields?These questions must be answered for every component in the fab’s process line including the drums that hold the fab chemistries, fluid delivery systems, and components used in the wafer-processing chamber. All of these critical fab-line components come into contact with each manufactured wafer, in one way or another, and each is a suspect with respect to contamination, defects, and yield problems. SCIS develops test methods for these fab-line critical components testing that are used to identify the defects caused by these components and for establishing baselines.SCIS has seven working groups dealing with various critical components. Each is developing various test methods for many critical fab-line components. There are many facets with respect to testing each of these critical components.Take something as simple as a seal, such as an FFKM (perfluoroelastomer, made from polymers) seal. These seals are ubiquitous in fab lines. In harsher environments, such as inside of a processing chamber, these seals are exposed to high temperatures and harsh chemistries. Different FFKM seals will have different characteristics such as thermal resistivity and chemical resistance, depending on customer specifications, and can also vary from one manufacturer to another. In addition, these characteristics can change depending on environmental conditions – or just the passage of time.SCIS looks at defect traits from the perspective of each component in the fab line and decides which of the components’ parameters contribute most to process defects. Initially, the SCIS Seals Valves Group collected a list of seal-related issues or parameters. The working group then cross-checked these parameters against different manufacturing processes used in the fab including ALD (atomic layer deposition) and CVD (chemical vapor deposition). Some processes are harder on seals than others. Then the working group prioritized these various parameters according to their contribution to the overall process defect budget. IDMs provided important input during these steps because they work with these seals on a daily basis. At this point, the SCIS working group had a prioritized list of parameters, vetted by various stakeholders in the semiconductor manufacturing industry. The group then set to develop standardized measurement methods for these critical parameters.Based on this work, the SCIS Seals Valves Group has already published two documents. The first is a standard that specifies methods for testing seal-induced impurities such as ashing (analysis of metals content of the ash) and TOC (total organic content).The second document published by the Seals Valves Group is a guide that documents BKMs (best known methods) for handling seals – from the moment they’re cured in an oven to packaging, shipping, handling in a fab, and installation – to reduce contamination problems during use. For example, some seals are sensitive to light. Some polymer seals degrade when they come into contact with IPA (isopropyl alcohol), which is often used for prepping. A degraded seal can emit contamination particles during processing, which will cause yields to fall. (This latter bit of information came directly from a major IDM, which demonstrates the invaluable role that users of these components can play in the development of testing standards.)The Seals Valves Group’s current work focuses on developing a standard for measuring seal leak rates. This standard will define test methods for evaluating a seal’s ability to maintain pressure under vacuum. Although there are well-established standard for testing seal CSR (compressive stress relaxation) in the aerospace industry, there’s no such standard for the semiconductor industry. So originally, the Seals Valves Group tried to tackle that challenge by developing a similar standard for SEMI’s constituents. However, a more practical and immediate parametric challenge turned out to be seal leakage rates.Installed seals are exposed to high temperatures and harsh chemistries in the semiconductor fabrication process. The Seals Valves Group decided to develop a test method that would determine how well seals perform over time with respect to leakage rates as the seals are exposed to cyclic harsh conditions. The goal is to simulate the working conditions for these seals, as closely as possible and in a repeatable manner.There are, of course, some challenges associated with this work. For example, IDMs and equipment OEMs don’t want to reveal their exact process conditions as they are proprietary. So the Seals Valves Group took a step back and focused on developing a test method based solely on exposure to elevated temperatures.Development of this thermal test requires the design of a standardized test jig to help ensure consistent, repeatable tests, shown in Figure 1. Figure 1: Elastomer seal test jig developed by the SCIS Seals Valves Group.The seal under test, shown in red in Figure 1, sits at the center of the jig. A second seal, shown in green, is used to seal the actual test environment. Two thermocouples in the jig’s top and bottom monitor of the temperature inside of the jig. There are gas and purge lines for controlling the ambient pressures on either side of the seal under test.Figure 2 illustrates how the jig is connected to the gas sources. Figure 2: The Seals Test Jig is connected to helium and nitrogen gas sources and to a calibrated leak (vacuum) line. The seals leak test is based on a helium leak test. Helium is one of the smallest atoms so it will leak through just about any small gap and, with time, permeate through the material as well. In addition, helium is inert, and testing for helium using a mass spectrometer is a well-established technique for leak testing. Helium leak testing can be one thousand to one million times more sensitive than using mechanical, pressure-decay test techniques. The jig’s nitrogen lines serve to purge the test chambers of helium between leak tests.Developing just a test jig is not sufficient. The Seals Valves Group also developed a test sequence for using the jig. There were no existing standard, so the group needed to use its knowledge of the seals’ composition and operating conditions to develop certain test parameters. For example, the group elected to use 200°C as the maximum temperature for the high-temperature portion of the test because FFKM seals start to degrade at 250°C.At this point, the Seals Valves Group has gone through several iterations of a proposed test sequence. There was some initial reluctance to provide detailed inputs, but after a few iterations of the proposed method (and an understanding that this would become an industry standard to hold suppliers accountable), inputs have become more forthcoming.This is an excellent example that demonstrates why it’s so important for SCIS working groups to get chipmakers, IDMs, component vendors, and even feedstock materials vendors to participate in these standardization efforts. Standards are far more useful if they’re based on real-world conditions.Currently, the SCIS Seals Valves Group is working towards finalizing the seals-leak test sequence. The jig has been designed in AutoCAD and a prototype will soon be manufactured. Although the test and jig have been developed with significant industry participation, the validity of the test has yet to be determined. The validity will be verified though Alpha testing before the jig design and test method are incorporated into a standard.However, SEMI is not a test house. It’s a facilitator. The testing will therefore be performed by a neutral third party capable of carrying out the test under fab-like conditions. SEMI’s role is to work with different testing entities such as SUNY Polytechnic Institute in Utica, New York or IMEC in Belgium.SEMI will solicit bids for this work through its SCIS Executive Advisory Committee, which consists of C-level executives from device makers, semiconductor capital equipment OEMs, and major critical component suppliers. This project has leveraged many of the relationships that SEMI has developed over the years and has broken new ground in standards making for SCIS and for SEMI.For those looking to learn more about SCIS or engage in ongoing efforts, please contact Paul Trio, senior manager of Strategic Initiatives at SEMI, at [email protected].