Olivier Corvez

The work of the SEMI Environment, Health and Safety (EHS) COVID-19 working group to address industry EHS issues and share best practices has morphed as rapidly as COVID-19 itself as the vaccine rollout continues, inspiring new hope for a return to normal. The group has evolved from mounting crisis responses to urgent issues such as the shortage of masks and sanitization wipes and sprays to helping companies prepare for their employees’ return to the workplace and developing on-site health-screening procedures for employees and visitors to help ensure their safety. Hot SEMI EHS COVID-19 working group topics have included the following as the team continues to meet every other week to stay abreast of COVID-19 developments and their industry impacts. Vaccinations SEMI members have been monitoring the progress of U.S. states and counties in delivering vaccines. So far, no essential workers in the electronics industry have been eligible to be vaccinated. To help gauge the availability of vaccines to essential industry workers, some companies have hired external consultants to monitor the phase-in. The SEMI EHS COVID-19 working group will collect and centralize the information to help members plan for their employees’ return to the workplace. Policy Enforcement At manufacturing sites, some employees reportedly are becoming complacent in following masking and distancing policies, prompting reminder communications from top management for workers to comply until the pandemic is brought to heel. The higher-ups are also encouraging staff to get vaccinated once they are eligible, with some member companies offering workers time off or other incentives for their employees and families to get vaccinated. Contact Tracing Despite the intense focus on contact tracing since the initial COVID-19 outbreak last year and early efforts to track people movement using smartphone applications or wearables, no tracking technology has emerged as the standard for helping to curb the virus’s spread. SEMI members have been testing various technologies ranging from Bluetooth to wearables with wide-band radio waves to track employees while on site. Tracing by wearables has proven inaccurate. Left with no better alternative, the vast majority of SEMI members are performing time-consuming manual contact tracing. OSHA Compliance While OSHA has picked up the pace in issuing new regulations related COVID-19, pandemic-related site inspections have lagged, some SEMI working group members report. In California, CAL/OSHA recently passed a COVID-19 Preparedness Plan that defines the responsibility of employers in preventing workplace outbreaks, offering PPE to workers and conducting frequent testing. The California plan mirrors the CDC recommendations implemented at the onset of the pandemic. To join the SEMI EHS COVID-19 working group, contact our EHS team at [email protected]. Olivier Corvez is senior manager of Environment, Health, Safety and Sustainability at SEMI.

Back in March 2020, at the onset of the spread of COVID-19 in the U.S., SEMI quickly formed an Environment, Health and Safety (EHS) COVID-19 working group made up of EHS professionals who suddenly saw a critical need to share their experiences, validate untested policies, and collaborate on establishing best practices in response to an extraordinary public health crisis. The group, which today numbers 20 member companies, meets regularly to discuss an array of topics that have grown beyond their pressing need to react to a crisis earlier to a longer, more measured view of risk management as coronavirus cases continue to climb worldwide. While themes vary from one meeting to another, the recurring agenda remains the same to address the following topics: Phase approach – How to bring staff back on site Social distancing – How to manage people traffic flow on site Contact tracing – Track exposure to ensure workplace safety Space allocation – Changes to offices, cubicles and conference rooms HVAC systems – Optimizing workplace air flow and improving filtration systems Clean rooms – PPE and distancing protocols Training – Communications approaches to expanding awareness in order to reduce risk of spreading the virus Travel policies – Domestic and international travel guidelines Vaccines – Policies for vaccinating and monitoring personnel Site inspections – Preparing for an eventual increase in inspections from OSHA representatives In April, the SEMI EHS team issued a survey to assess the pandemic preparedness of member companies. Designed by the COVID-19 working group, the survey found that, despite having a pandemic plan in place, many member companies faced a shortage of PPE and sanitization equipment, their most significant challenge at the time. Members also pointed to operational challenges posed by the pandemic and raised questions about how to establish sound policies appropriate for their operations and geographic locations. Today, the SEMI EHS COVID-19 working group is well-established collaborative forum on public guidelines that members see as unclear as they continue to chart their own pandemic policies. With the first tranche of vaccines recently starting to ship in the U.S., the group has turned its attention to vaccine distribution and how companies will encourage employees to be vaccinated. For more information about the SEMI EHS COVID-19 working group or to join the group, please contact the SEMI EHS team at [email protected]. Olivier Corvez is senior manager of Environment, Health, Safety and Sustainability at SEMI.

The semiconductor industry must do far more to educate the electronics supply chain on the subtle differences among various fluoropolymers, 30 SEMI member companies learned in an October 13 webinar organized by SEMI to help maintain a unified voice on the critical importance of per- and polyfluoroalkyl substances (PFAS) in semiconductor manufacturing. At the same time, producers and customers of the substances used in chipmaking should work more closely together to steer clear of adopting policies that could limit the availability of safe fluoropolymers and the semiconductor industry’s ability to use them in the future.The insights were offered by representatives from the Performance Fluoropolymer Partnership – a group within the Washington, D.C.-based American Chemistry Council – on per- and poly-fluorinated substances including fluoropolymers. The Council is an industry trade association representing American chemical companies. Following are other key takeaways from the webinar. Fluorinated polymers and non-polymers are commonly found in components used in semiconductor manufacturing such as fittings, valves, tubes, O-rings, wafer carriers, filtration media, high purity air filters, greases and lubricants. The substances are ideal for use in corrosive chemicals, high temperatures and other harsh environments and are found in a variety of electro-technical components such as potentiometers, wiring, printed circuit boards and Lithium-ion batteries. Fluoropolymers are a diverse family of plastics also widespread in modern life, with applications ranging from food packaging and non-stick coatings on kitchen pans to rechargeable batteries for electric vehicles. The term PFAS (per- and poly-fluoroalkyl substances) covers more than 4,700 chemicals with diverse physical, chemical, environmental and biological properties and impacts. There are also significant differences among their chemical compositions. A careful appraisal of their risks and impacts should take into account any potentially hazardous properties, toxicity levels, their prevalence in the industry, and whether substitutes are readily available. Growing pressure from regulators worldwide threatens future access to fluorinated chemicals, increasing the importance of raising awareness on how to distinguish groups of chemicals and encouraging a measured approach towards eliminating only chemicals carrying the greatest risk. Fluoropolymer producers and opponents of the chemicals must look past their divergent interests to work together to voice common concerns to regulators. Various SEMI working groups respond to public consultations when opportunities to present the semiconductor industry’s position arise. Individual group members communicate both among each other regarding new regulatory developments and also with external constituents through SEMI about the importance of chemicals to chip manufacturing. As with other sectors, the semiconductor industry continuously seeks to “green” its manufacturing processes. SEMI believes the commitment of the supply chain to these efforts is crucial to protecting the industry’s interests and driving innovation.Olivier Corvez is senior manager of Environment, Health, Safety and Sustainability at SEMI.

Olivier Corvez, senior manager of Environment, Health, Safety and Sustainability at SEMI, sat down (virtually) with Todd Patterson, vice president of global EHS for Entegris Global Operations, to discuss how Entegris has responded to the global pandemic.Corvez manages and Patterson participates in the COVID-19 EHS Task Force currently meeting weekly to discuss industry response and share best practices. SEMI: Was Entegris prepared for the COVID-19 pandemic? How did the company respond?Patterson: Entegris has a strong risk management framework and a risk assessment team of senior leaders who meet at least once a quarter. This focus gives us early visibility into events that could destabilize our organization or threaten our operations. Such a framework helps ensure we have the information necessary to act as soon as possible when the need arises. However, our business continuity plans for a pandemic of this scale were far less than with other more commonly occurring catastrophic events such as earthquakes or hurricanes. The COVID-19 crisis was clearly unprecedented and as such, the necessary systems and procedures were not in place with the depth and detail needed. Our strong governance structure made it possible for us to hold steady even as the pandemic caused increasing uncertainty and disruption around the world. For example, despite major supply chain shutdowns across many industries, to date, our supply chain and manufacturing operations have only been modestly impacted by COVID-19. Our supply chain team was assessing daily the areas of risk with our suppliers and taking appropriate action as well as preemptive steps to ensure our critical supply lines remained open.Our sales team engaged in regular communications with our customers providing them updates about our Business Continuity Plans and our actions to mitigate the risk to any of their deliveries. In addition, we maintained current information about the continuity of our supply chain on the company’s intranet for the global sales team to access as they engaged with customers. Also, a proactive communication plan was implemented immediately to send weekly video messages from senior executives directly to employees’ emails. It was an effective way to communicate with our global teams, to keep them informed about the status of the company’s operations and maintain a common sense of purpose at a time when many colleagues worked from home. In these weekly messages, we also focused significant attention on the health and safety protocols established to protect our manufacturing and lab employees from the virus.Among the health and safety protocols we implemented immediately as the virus moved across different regions were those related to facility screenings, work-from-home policies, social distancing, self-quarantine requirements, contact tracing, increased disinfecting, and travel restrictions. With approximately 5,300 employees worldwide, we had teams in every region ready to implement these comprehensive protocols. We believe we were among the first companies to implement work-from-home policies and travel restrictions.Temperature screening stations at Entegris facilities in Jangan, Korea (left) and Kulim, Malaysia (right). In addition, our CEO led a COVID-19 Steering Committee comprised of senior executives and managers from operations, human resources and communications. The committee met several times a week during March and April to evaluate and formulate responses to the issues that emerged as the virus spread from region to region. The committee’s work created a strong partnership among senior executives and divisional and functional leaders, and the initial guidelines developed by the committee have formed the backbone of a global playbook to limit the spread of the virus to our other sites around the world.Recently, the committee has changed its focus to more strategic issues such as creating a framework for transitioning remote workers back into our office locations. Meanwhile, local leadership teams at each of our global sites have been empowered to address ongoing tactical issues consistent with our thoroughly documented health and safety protocols.Looking to the future, we are using our experience in responding to COVID-19 to develop a more comprehensive pandemic response plan. We have project teams working on better ways to: measure temperatures of personnel entering our sites facilitate social distancing in the workplace redesign common use areas to reduce the number of high touch points disinfect all spaces thoroughly and regularly, and manage emergency pandemic supplies. SEMI: From the SEMI EHS survey, we noted that all members had a Business Continuity Plan. How effective has it been for deploying resources and adapting quickly and minimizing the crisis? Why or why not? Patterson: Because we have operations in China, Entegris experienced the impact of the virus immediately. We quickly formed two task force teams for our two primary facilities in the region. These teams developed the means for communicating key information to employees and started working on prevention plans to protect employees and comply with local requirements for when operations resumed. They met the challenges head on and found quick solutions. An example was finding an effective way of communicating to the employees for each location. Group chats were established through social media. It was this work that led to their success in getting approvals from local authorities to resume operations. Those plans have laid the groundwork on which our other sites around the world could build their response plans.The effective management of our global supply chain also stands out as a key success of the company’s Business Continuity Plan. Entegris has a highly complex supply chain with approximately 6,500 suppliers and a $850 million annual spend, and we ship work-in-progress and finished goods from over 90 sites globally.As I mentioned earlier, despite the virus crippling supply chains across many industries, Entegris experienced very little disruption to its supply chain. The supply chain team was able to accomplish this despite a 90% reduction in global freight capacity. A key factor in keeping goods flowing to our factories was the intensive work the team had done earlier to develop an in-depth understanding of the company’s top suppliers and to mitigate sourcing risks. They had established alternate sources, balanced the sources geographically, and placed inventory across our supply chain to buffer risk.The team also had integrated statistical modeling into reporting tools, which made it possible to reset safety stocks and logistics lead times quickly as conditions changed. And a supply chain digitalization provided one aligned and integrated view via dashboards, giving the company the ability to respond rapidly and to communicate in real time with our suppliers. We essentially had a virtual war room where we monitored the daily impact of the spread of the virus and could address bottlenecks and other issues immediately.SEMI: What lessons have been learned, so far? How do you see changes in your company’s operations in the future?Patterson: Institutionalizing what we’ve learned has already begun. Whether the measures implemented during the pandemic are temporary or become permanent is still to be determined. Regardless, the learnings need to be documented and available as a playbook for if – or when – the next pandemic occurs.Entegris is already working on a more comprehensive pandemic plan that will be based on five levels of preparedness. Level 0 will cover annual training requirements and management of emergency inventory of pandemic supplies. Level 1 will include early recognition of an outbreak, and then Levels 2-4 will include requirements for when specific response measures are implemented. Entegris also has formed the “New Normal” task force, which consists of leaders representing a number of disciplines directing the project teams previously mentioned to create a more comprehensive pandemic response plan. One of the project teams is working on improving the facility screening process that performs temperature measurement for personnel entering Entegris sites. The team is looking at the best technology to scan body temperature. As to whether this technology is employed only while COVID-19 is still active or becomes a permanent way of doing business, this is still being discussed.SEMI: EHS is involved in both providing technical support to protect individuals but also in making organizational changes to favorize social distancing. Could you explain some of the successes and challenges while tackling these two fronts?Patterson: Very early in the pandemic, Entegris established a work-from-home policy for non-essential employees. This significantly reduced the number of personnel and the potential for contact at the Entegris locations. Significant facility changes also were required. These included the design of facility screening booths and modifications to common gathering areas such as canteens, meeting rooms, prayer rooms, and smoking points. Physical markings were used to designate 2 meters distancing, and the seating in canteens and meeting rooms was reduced and staggered to minimize the risk of exposure to the virus. Entegris also has a project team focused on developing design solutions for offices and workstations when space makes it difficult to maintain 2 meters social distancing. These changes turned out to be essential for some sites in meeting mandates by local authorities. Our sites in Hangzhou, China and Kulim, Malaysia both were allowed to resume partial operations after demonstrating to government authorities the effectiveness of the preventative measures put in place. One particular challenge we are facing is the range of personal differences and awareness levels within the workforce – including those that don’t understand the importance of the new guidelines. We are working closely in advising supervisory staff to be aware of the need for employees to follow all health and safety protocols we have put in place, including social distancing. That preventative measure is the most difficult to make part of our new behavior – it is unnatural and inconsistent with our human nature, but it is critical to preventing the further spread of the virus.SEMI: How do you envision the progressive steps in deescalating to bring back “normal” operations? Patterson: I don’t know whether Entegris will ever go back to the old “normal.” As previously mentioned, we are working on the “New Normal.” Our focus now is on bringing our work-from-home employees back to the workplace without adding risk of exposure to the virus. We are still exploring options, but we expect to do it in a phased approach so that we can adequately assess the preventive measures that are in place and determine whether adjustments need to be made to any of our health and safety protocols.We are starting to see a variety of different frameworks emerge for evaluating repopulation timing and procedures. We will assess them on an office-by-office, or site-by-site basis, utilizing consistent criteria to define the potential for exposure to the virus. This also applies to our field service workforce. However, I have not yet seen any governmental guidance that offers a recommended framework for returning employees to the workplace. I think this represents an opportunity for SEMI EHS and the Standards groups to work to establish that framework for our industry.SEMI: Anything else you would like to share that you have observed throughout this crisis?We have not discussed the challenges faced in procuring and acquiring pandemic supplies. Almost immediately after the outbreak occurred in Wuhan, it became increasingly difficult to find supplies. Even when confirmation was provided by suppliers and delivery dates confirmed, the majority of the dates were pushed out or canceled. We found that what worked best was to have purchasing teams at the local site work with their local contacts on obtaining smaller quantities while a corporate point person was also managing larger orders. In preparation for any future pandemics, Entegris will be maintaining an emergency inventory for masks, sanitizer, thermometers, and disinfectants.For 18 months, Todd Patterson has held the position of VP Global EHS for Entegris Global Operations. His experience with emergency management and BCP has become invaluable in the past three months. He is grateful to his global response teams around the world for coming together to support the Entegris team in this unprecedented situation. Todd is an active participant on the SEMI EHS COVID-19 response teams led by Olivier Corvez at SEMI. Olivier Corvez is senior manager of Environment, Health, Safety and Sustainability at SEMI.

A recent survey by a SEMI Environment, Health and Safety working group found that all responding companies had Business Continuity Plans (BCP) in place prior to the COVID-19 outbreak, nearly half had already developed pandemic playbooks and, as a whole, have mounted robust, effective responses to the pandemic.The Business Continuity Plans of the 19 respondents to the survey, designed to speed crisis response and mitigate business impacts, included countermeasures for any threat to company operations including IT, production, finance, public communications and, of course, health and safety.Nine businesses, or 48 percent, had previously established plans for responding to epidemics and pandemics cited the World Health Organization (WHO) among the most reputable authorities for advice on how to prepare for a virus outbreak. Asian companies significantly outnumbered businesses in the U.S. or Europe in having a pandemic plan in place.The SEMI working group launched the survey shortly after it was formed in early March to gather insights into how SEMI member companies are protecting their employees while adapting facilities and manufacturing schedules to sustain production. The working group, which has grown to include 20 members that convene weekly for virtual meetings, consists of companies spanning the global semiconductor supply chain. The survey also found the following: As of late March, 95 percent of companies had implemented a mandatory work-from-home policy for job functions that could be performed remotely. One company reported that adherence to the policy was voluntary but strongly encouraged. At the time of the survey, 90 percent of companies had not considered using electronic tracking devices for employees at risk of cross-contamination. Taiwan has deployed the technology effectively to track confirmed COVID-19 cases and their travel histories. Nearly 75 percent of respondents conduct temperature screening for employees, 84 test visitors and contractors, and about 75 percent use no-touch infra-red thermometers as their preferred testing method. In instances where an employee, family member or close contact is ill but not a confirmed COVID-19 case, 42% of companies instruct the employee to stay home until he or she and family members are both symptom-free for at least 72 hours. For 30% of companies, the employee is invited to stay home for at least 14 days until the worker and family members are symptom-free. Fifty-eight percent of companies offer limited field service engineer (FSE) support to customers based on the circumstances. At 21% of companies, FSEs and equipment installers are working without restrictions if government and customer policies allow. Three companies suspended service activities. Sixty-three percent of respondents allow only critical visitors to enter their facilities after they’ve completed a health questionnaire and their temperature has been checked, while 21 percent prohibit visitors from entering their sites. More than half of the companies maintain production with social distancing protections in effect. For more information about the survey or to join the EHS Working Group, please contact Olivier Corvez at [email protected]. To learn more about best practices from SEMI member companies, visit our COVID-19 Resource page.Olivier Corvez is senior manager of Environment, Health, Safety and Sustainability at SEMI.

The U.S. Toxic Substances Control Act (TSCA) requires the Environmental Protection Agency (EPA) to cost-share risk assessment fees for 20 chemicals designated as high priority across all U.S. manufacturers (including importers) that produce or import at least one of the chemicals including Formaldehyde, Di-ethylhexyl phthalate (DEHP) and Dibutyl phthalate (DBP). Providers of the substances must self-declare as manufacturers or importers under a 5-year look-back requirement.The SEMI EPA TSCA working group formed to assess the potential impact of the self-declaration requirement has uncovered two points of primary concern: 1. Of the 20 substances, about 10 are commonly found in electro-technical components such as capacitors, resistors, transformers and power supplies.2. Companies that import articles (e.g., components and parts) containing any level of these substances, even unintended residue from a production process upstream in their supply chain of imported articles, must self-identify. Manufacturers and importers that self-identify will be required to share the $1.4 million risk-assessment cost per substance. Small business concerns qualify for an 80 percent discount, with larger businesses covering the balance.The EPA has identified a preliminary list of companies that provide each chemical. The number of companies on the lists ranges from two to 525.On January 27, 2020, the EPA opened a 60-day period for organizations to submit comments to the EPA and self-identify as a manufacturer (or importer). SEMI plans to submit comments prior to the March 27 deadline, in part to request an extension.More information is available by visiting the Federal Register or contacting Olivier Corvez. This EPA webpage contains a February webinar transcript that is also a helpful resource.Olivier Corvez is senior manager of Environment, Health, Safety and Sustainability at SEMI.

The recent World Economic Forum event in Davos ranked the unfolding climate crisis among the top three risks companies and governments must address in order to prevent irreversible environmental damage. With the stakes that high, it is becoming critical for organizations of all sizes to take into account climate change risks and opportunities as they develop their strategic and business continuity plans.Two fundamentally different schools of thought have emerged on how to address climate change. On one side, NGOs and climate activists such as Greta Thunberg are pressuring governments to abruptly divert away from fossil fuels, a shift that experts say would exact a deep economic impact. On the other side is the camp that believes capitalism will run its course and ultimately guide public and private entities to find climate change solutions.For their part, organizations are responding to rising pressure from shareholders and stakeholders to disclose their emissions mitigation strategies. The accuracy and completeness of environmental disclosures ranges widely. Some businesses adopt a conservative approach and limit the volume of information made public, while others announce aggressive targets for reducing emissions from their operations and supply chains.Formed 18 years ago, the Carbon Disclosure Project (CDP) has motivated companies (and now cities) to disclose their greenhouse gas (GHG) emissions. In 2019, more than 525 institutional investors representing $96 trillion in assets backed the CDP, whose annual CDP questionnaire is often recognized as the most “comprehensive collection of self-reported environmental data in the world.”As the list of signatory investors supporting the CDP has grown over the years, so has the number of companies responding to the annual CDP questionnaire – from 228 companies in 2003 to over 8,400 in 2019. Company scores are based on 14 disclosure areas such as C-suite level sign-off on the questionnaire content, producing GHG emission data verified by a third party, or publicizing their completed questionnaire on the CDP website. Among all respondents, 179 companies (2%) scored the highest in leadership by demonstrating the strongest commitments to reducing greenhouse gases emissions from their operations and supply chain.Among these 179 companies – referred to as the A-list companies – 10 are SEMI members headquartered in Japan, Taiwan, Korea and France. SEMI applauds these members for ranking among the most progressive companies in disclosing greenhouse gas emissions, an achievement that requires considerable work but puts them in a position of strength in conveying to customers, investors and other stakeholders their commitment to climate resiliency.Olivier Corvez is senior manager of Environment, Health, Safety and Sustainability at SEMI.

Environment, Health and Safety (EHS) has steadily evolved to become a key element within SEMI’s Advocacy and Standards activities. On November 29th, 2018, nearly 60 members representing equipment, materials and device manufacturers gathered at SEMI’s Milpitas headquarters for our first EHS Summit. The main agenda for the day was related to discussing the new “EHS 2.0” strategy – and priorities – to better align with the current landscape facing members in various parts of the world. “SEMI will not compromise our commitment to EHS,” said SEMI president and CEO Ajit Manocha in is kickoff speech at the Summit, calling on members to rise to the challenge. “We also understand the importance of EHS for our industry. SEMI EHS staff is here to facilitate a program that achieves the highest priorities of our members – but we need you, our members, to be clear on your priorities.” SEMI’s EHS program has had many successes globally, including a strong suite of safety standards, since it launched in the 1980’s. Since then, exponential growth of EHS regulatory requirements worldwide has intensified pressure on members to become more transparent on environmental and social issues. The pressure to disclose on EHS performances has become more visible and challenging for members to manage across the entire supply chain. During facilitated breakout sessions, members were invited to share their views on various industry issues. Some of the most pressing raised related to changes in the REACH European Regulations, or implications from the Stockholm Convention that will affect what products or hazardous chemicals can be used. Some of the topics identified throughout the day included: Circular economy/green/sustainability Global RoHS and REACH regulations Used equipment machine safety Current and future prohibited substances tracking such as Perfluorooctanoic acid (PFOA) After the summit’s success, SEMI is now planning three EHS summits in 2019 and other events to further address the various issues facing members. To receive invitations and stay abreast of SEMI’s EHS activities, please join our EHS interest list by clicking here. Olivier Corvez is senior manager of Environment, Health, Safety and Sustainability at SEMI.