Lam Research

What’s next for smarter, more connected electronics manufacturing - Part 2The fast-maturing infrastructure now enabling applications for big data and artificial intelligence means disruptive change not just at individual companies but also in data connections among companies across the microelectronics manufacturing value chain. SEMI checked in with some leading players on the changes they see coming in the next several years for this article series. The trade group is expanding its programming on smart manufacturing to address these industry-wide developments at SEMICON West, July 10-12 in San Francisco.“The ramp of EUV, and the smaller geometries and smaller process margins, will drive an exponential increase in the amount of metrology data to manage,” says Neal Callan, ASML vice president, Silicon Valley. Callan notes that moving to multibeam e-beam inspection will increase data volume from megabytes per second to gigabytes per second and from thousands of data points to millions of data points. “The process is so tight and the margin so small that stochastic variation, or noise, becomes more dominant – at least it’s noise until we can learn to understand and control it. And understanding and controlling this variation will be key to delivering 5nm patterning,” he says.Single-beam e-beam inspection is already driving large increases in data as engineers extend the slow technology to broad, high-speed defect metrology applications by more intelligently instructing the system where to look for problems. Callan says ASML is now using the scanner data on wafer focus, alignment and leveling. The company is also using the computational lithography model from the design to identify the smallest process windows in the pattern that are most likely to see problems. The model then quantifies the number and significance of those instances.“The collection of all this diverse data means that tools will need to be plug-and-play so all tool data is instantly available to all systems and software,” says Doug Suerich, PEER Group product evangelist. “We need tools that can be discovered automatically by the network so it can start slurping up data immediately. The adoption of the Interface A (EDA) standard is accelerating and fabs are starting to ask for it. The proliferation of sensors also needs to self-discover. If you are going to add thousands of new sensors into a facility, you can’t afford a time-consuming integration process.”“We are now seeing that engineers are greedy for more data – if they can get the data, it’s becoming a need-to-have,” adds Tom Ho, BISTel America president. “Getting more data from more sensors, from the sensors on the tool that are not being fully utilized, and from untapped data sources like vibration is another big coming opportunity.” Process complexity drives demand for feed-forward between silos with computational models ASML co-optimizes its scanner process with etch and reticle process steps. Source: ASML In addition to the drive for trace-back of data, the increasing complexity of interrelated processes is also driving demand for feed-forward of data. “Feed-forward is becoming more important,” notes Ho. He points to the example of 3D NAND features, now getting so deep that identifying the layer being measured is a challenge unless the signal at the step before can be recognized. “We need partnerships with our peers to understand how to take advantage of the sensors they use, integrate them with our data, and then feed-forward corrections to the other systems,” concurs Callan. “To drive the best CD uniformity and overlay, we need to co-optimize litho and etch,” agrees Henk Niesing, ASML director of product management. He notes that the company is working with etcher makers to measure the overlay and CD, decompose the finger prints, and then use models to steer automated control that best adjusts both the scanner and the etcher. ASML is also working with Zeiss on co-optimization between the scanner and the reticle to make even higher-order corrections by locally modifying the reticle.These higher-order corrections, applied on each exposed field, drive the need for even more data, and at higher speed but without higher cost, notes Jan Mulkens, ASML senior fellow. These corrections increase demand for computational metrology, which combines various metrology sources with physics and deep learning models trained on real data to predict and control process results in real time. “We’re working on computational metrology to ideally use all the knobs we have in the fab,” he says. So far this effort has largely involved linking data between two companies. More consistent data formats would enable data exchange to be extended to more companies. “The software versions also need to be managed for upgrades so they still match after one party updates the system on its tool,” notes Niesing. Speakers on these issues of smart manufacturing and data handling at SEMICON West include Active Layer Parametrics, Applied Materials, Applied Research Photonics, ASML, Cimetrix, Coventor, ECI Technologies, Edwards Vacuum, Final Phase Systems, GE Digital, Infineon, Jabil, Lam Research, Osaro, Otosense, PEER Group, Rockwell Automation, Rudolph Technologies, Schneider Electric, Seagate, Seimens, Stanford University, TEL, TIBCO Software. See semiconwest.org.What’s next for smarter, more connected electronics manufacturing - Part 1What’s next for smarter, more connected electronics manufacturing - Part 3Paul Doe, SEMI

What’s next for smarter, more connected electronics manufacturing - Part 1The fast-maturing infrastructure now enabling applications for big data and artificial intelligence means disruptive change not just at individual companies but also in data connections among companies across the microelectronics manufacturing value chain. SEMI expands its smart manufacturing program with a Smart Manufacturing Pavilion with displays and three full days of talks to address these industry-wide developments at SEMICON West, July 10-12 in San Francisco.Autonomous autos’ demand for zero-defect systems and 100 percent traceability back to the manufacturing data for each die is driving a push to traceability across the chip sector. “Far more chips are being used by the automotive sector, and its very different requirements are driving demand for traceability,” says Tom Ho, president of BISTel America. “Our chipmaker customers are looking for traceability solutions and the trend is the same in backend packaging and assembly – automotive applications are driving the sector to traceability.”Traceability is also driven by the growth of systems in a package as fabless chipmakers look to connect back to the packaging companies’ fault analysis labs and die interconnect history to diagnose and fix the cases where known-good die are failing in the system, adds Mike Plisinski, CEO of Rudolph Technologies. Plisinski adds that makers of consumer products like phones that can also see harsh conditions are demanding higher quality and traceability as well. The electronic manufacturing services (EMS) sector also must establish an architecture for traceability to collect critical manufacturing-related data and to interface with OSATs and semiconductor fabs. The reason is that EMS companies are adding traditional OSAT processes such as assembly of products with bare die and complex optics modules requiring clean rooms. “A unified sand-to-smart-phone smart manufacturing roadmap should be established,” says Dan Gamota, vice president of Engineering and Technology Services at Jabil. “We need to identify protocols for manufacturing data communications that can be adopted across the supply chain.”To enable smart manufacturing, vendors need to collaborate on getting their production equipment to interoperate and support factory analytics and data management systems. Source: SEMI One big challenge, of course, is how to format this diverse data so it can be linked and used by various supply chain stakeholders. “Smart data needs to be contextual and it needs data standards across the supply chain so it’s easy to link from the front end to the back end, follow common lot IDs front and back end, and have a way to map streaming data from sensors to a discrete lot ID,” notes Ho. New approaches to metrology, analysis and test that increasingly exploit machine learning on simulations will also be needed to help predict which die and connections that test well now may fail in the future as conditions change.Another issue is how to securely share the needed data across companies without jeopardizing IP. “On the equipment side we collect data across customers on how the tool is running to improve the equipment,” notes Neal Callan, ASML VP Silicon Valley. “Next we need to integrate performance and reliability data that today is not as well shared.”The other big hurdle is how to pay for data sharing. “The challenge is that the final manufacturers reap the benefit of traceability, but since they expect their suppliers to deliver good die, they don’t want to pay more for it,” notes Plisinski. He suggests that over the next two to three years, traceability and predictive fault prevention will become the norm as the automotive sector is compelled to invest in it to assure safety. Meanwhile, fabless companies will face so much complexity in integrating different die from different suppliers in SiP that they will no longer be able to afford to simply use the cheapest supplier, potentially driving a fundamental shift in relations and division of labor among fabless chipmakers, OSATs and fabs. Standards extend across supply chainSEMI member committees are collaborating to build the infrastructure to enable these developments. Standards committees are updating standards for higher bandwidth data exchange and extending semiconductor-like vertical and two-way horizontal equipment communication standards to flow shops to enable assembly players to optimize and trace back results across players. The SMT/PCBA community is integrating its smart manufacturing work into SEMI standards, and the SEMI A1 standard was a key reference document in the development of the Japan Robotics Association’s Equipment Link Protocol.Speakers addressing these issues at SEMICON West include Active Layer Parametrics, Applied Materials, Applied Research Photonics, ASML, Bosch Rexroth, Cimetrix, Coventor, ECI Technologies, Edwards Vacuum, Final Phase Systems, GE Digital, Infineon, Jabil, Lam Research, Osaro, Otosense, PEER Group, Qualcomm, Rockwell Automation, Rudolph Technologies, Schneider Electric, Seagate, Siemens, Stanford University, TEL, TIBCO Software. See semiconwest.org.What’s next for smarter, more connected electronics manufacturing - Part 2What’s next for smarter, more connected electronics manufacturing - Part 3Paula Doe, SEMI

The fast-growing automotive semiconductor market means big change for the IC supply chain. Beyond the obvious demands for reliability and traceability, the sector is moving towards simpler and lower-cost solutions while facing the daunting challenge of automating driving in a complex world. The need for simpler and cheaper automotive intelligence will likely drive acquisitions to build complete platform solutions that are easier to integrate. This demand has already spawned a market for pre-configured test cars to save developers time and money, and is driving LiDAR (Light Detection And RADAR) towards lower-cost, solid state solutions. “The growth of the automotive electronics market provides a great opportunity for the IC supply chain to differentiate on specialty processes and quality for the high-volume automotive business with its long design cycles,” says Scott Jones, principal, strategy, at KPMG, who will speak in the automotive program at SEMICON West. “This differentiation is a chance to reduce chip suppliers’ dependence on scaling volume for the mobile phone world with its short-cycle volatility of winning and losing sockets.” He notes that increasing demand for automotive ICs is also reinvigorating the eight-inch supply chain and spurring opportunity for specialty products such as compound semiconductor devices for power efficiency. Supplying the automotive market also means addressing automotive reliability requirements, which can be 10 times more stringent than for consumer devices. At the same time, the industry must sustain fast-paced development cycles required for the volume and diversity of low-cost IoT devices, manage the segmented supply chain for both those markets, and still spread development costs. Another big challenge for the supply chain will be to automate testing and update vast amounts of embedded software in these automotive devices. “The more complete solution a company can put together, the more the automakers will gravitate to it. They want simplicity,” Jones suggests. Smaller players will need to differentiate with IP and acquire other IP provider to build a broader platform, or be acquired and folded into an all-in-one solution.AutonomouStuff helps accelerate and simplify development of autonomous driving solutionsAutonomouStuff is helping to speed development of these platforms. The company has grown from a sensor distributor into a supplier in the emerging niche of vehicles preconfigured with key interfaces for sensors and controls. These interfaces can then be customized by integrating different components for developers to test their applications. AutonomouStuff offers developers a lineup of vehicle models pre-configured with the interfaces needed to add desired chips, sensors and software to develop their autonomous vehicle systems. Source: AutonomouStuff.“Whether they’re major chipmakers or AI software startups, they don’t have a year to build their own vehicle platforms themselves for developing autonomous vehicle systems,” says Wolfgang Juchmann, VP sales and business development at AutonomouStuff. Juchmann, a SEMICON West speaker, will bring a demonstration vehicle to the show. “In four to six weeks we can prepare a custom test car with selected sensors, enabling users to start testing their computer platforms and software. It’s faster and more cost-effective for us to supply the car with the needed interfaces.” He notes that developers are using some 300 AutonomouStuff vehicles in the field. AutonomouStuff customers are starting to transition from testing on a single car or two to testing on mini-fleets with 50 to 100 vehicles. Beyond sensors and pre-configured vehicles, the next step will be to add more data intelligence services to help with capabilities like tagging the data for training, Juchmann says. AutonomouStuff already offers hardware to support Baidu’s Apollo open-source software stack and data set. The company was recently acquired by the Swedish holding company Hexagon to help support expansion.CMOS silicon LiDAR nears automotive qualificationInnovations in the hyper-competitive LiDAR market, where burgeoning demand is driving the race to develop various types of solid-state devices, may also help reduce the cost of autonomous vehicles. Among the roughly 40 LiDAR suppliers, at least one – Quanergy – is taking advantage of 45nm and 32nm foundry CMOS volume production. The company uses voltage through the semiconductor stack to change the refractive index, controlling the phases of optical beams and the resulting interference patterns of light exiting the chip to quickly steer the laser beam without the need for moving parts, much like the phased array radar its team developed earlier. Solid state LiDAR image with object recognition software. Source: QuanergySo far, most of the small LiDAR units have shipped to the security, industrial automation, drone, robots and 3D mapping markets. However, Quanergy CEO Louay Eldada, another SEMICON speaker, says the company is also winning automotive designs and expects automotive shipments to take off early next year, once automotive certification testing is completed. “We can get design wins because standard CMOS production at TSMC makes us a known entity,” says Eldada. To prevent component misalignment, the company produces its own specialized packaging to secure the laser, phase control ASIC, optical phased-array emitter, detector array, and receiver readout ASIC at its plant in Silicon Valley or the facility of its automotive partner Sensata. Through its software business, Quanergy offers an artificial intelligence (AI) perception program for object recognition and LiDAR tracking. The solution uses the people-tracker software the company acquired from Raytheon.SEMICON West this year expands to three full days of automotive electronics programming and features a Smart Transportation Pavilion. Other companies with experts who will speak as part of the program include XPT/NIO, Infineon, McKinsey, Voyage, GM Cruise, Bosch, Deepen AI, Airbus A3, Nvidia, Excelfore, Byton, Macronix, SK Hynix, SAP, Xilinx, Achronics, California Fuel Cell Partnership, Velodyne, Lam Research, KLA-Tencor, SCREEN, Rockwell, Versum Materials, TechSearch International, Entegris, ASE, Amazon, Continental and Wind River. www.semiconwest.orgPaul Doe, SEMI

Self-driving cars have been all the rage in both the trade and popular press in recent years. I prefer the term “autonomous vehicles,” which more broadly captures the possibilities, encompassing not only small passenger vehicles but mass transit and industrial vehicles as well. Depending on who’s talking, we will all be riding in fully autonomous vehicles in five to 25 years.The five-year estimates come from startups eager to raise venture capital while the 25-year estimates stem from Tier 1 automotive suppliers who tend to be more conservative in outlook. Regardless of the timeframe, a multitude of investors – national governments, venture capitalists and companies – are dedicating significant capital and effort to make autonomous vehicles a reality.I must admit that I did not fully grasp the enthusiasm for self-driving cars until last year. First, I’ve always enjoyed driving, unless I’m in stop-and-go traffic, so I couldn’t imagine relinquishing the task. Second, I’ve deliberately arranged my life to spend minimal time in my car. However, traffic has become much heavier in my metropolitan area (Boston), and I know that many people in cities around the world face longer commutes and waste more time in gridlock.What is the solution to this problem that is only getting worse? I had an epiphany while walking through Shinigawa Station in Tokyo, one of the busiest train stations in the world. Dense streams of people crisscrossed the station on their individual paths, managing to avoid collisions without the aid of traffic controls. Evidently, humans have an innate collision-avoidance ability that makes traffic controls for pedestrian crowds unnecessary. If autonomous vehicles could achieve the same excellence in collision-avoidance, we could potentially reduce or eliminate traffic controls for vehicular traffic, providing a huge gain in transportation efficiency and relief from gridlock.Sensors as core building blocksNew and improved sensors, many based on micro-electromechanical systems (MEMS) technology, are key to achieving this vision. While MEMS inertial sensors (such as accelerometers and gyros) are already integral to the core safety systems in conventional vehicles, they are also essential to improved self-navigation in autonomous vehicles.The challenge for MEMS suppliers is to deliver inertial sensors that meet the requirements for self-navigation systems, which are different and more demanding than for safety systems.Pinpointing a vehicle’s position requires “dead reckoning” based on inertial sensor signals as a supplement to GPS input. Undesirable drift in the inertial sensor signals due to mechanical quadrature, temperature sensitivity and noise can quickly add up to a large error in position that may result in a collision. To meet the more rigorous requirements for autonomous vehicles, suppliers must design MEMS inertial sensors that are substantially more precise and resistant to drift. This requires design software that is both extremely accurate and fast, as well as increasingly precise and reliable manufacturing capabilities.Other MEMS-based devices, such as micromirrors and micro ultrasound transducers (MUTs), are also promising options for implementing vision and range-finding systems in autonomous vehicles. These sensing systems are needed for building electronic versions of the human collision-avoidance abilities that I witnessed in Shinigawa Station – and it is these systems that autonomous vehicles must emulate.When will self-driving cars become a reality? Aside from the provocative question that got you to read this far, I don’t have a definitive answer. It will undoubtedly occur in phases, ranging from the driver-augmentation systems available in today’s cars to the full autonomy and ubiquity that will allow reduction of traffic controls in 20 years or more. It is clear that the ultimate goals for autonomous vehicles are highly worthwhile, and that achieving those goals will require better-performing and more diverse MEMS sensors. Stephen (Steve) Breit, Ph.D. is Senior Director, MEMS Business, at Coventor, a Lam Research Company. Steve has been responsible for overseeing development and delivery of Coventor’s industry-leading software tools for MEMS design automation since joining Coventor in 2000. Steve holds numerous patents on software systems and methods for MEMS design automation and virtual fabrication. He holds a Ph.D. in Ocean Engineering from MIT and a B.S. in Naval Architecture and Marine Engineering from Webb Institute.For more information, visit: https://www.coventor.com