sensors

With edge AI emerging as a clear driver of smart manufacturing, SEMI hosted a two-day workshop detailing the future of this technology. The workshop, Smarter Sensors, Smarter Fabs: AI at the Edge in Semiconductor Manufacturing, was held in-person from March 18-19 in Milpitas, California. It convened industry professionals to explore how AI-driven sensors and edge intelligence are fostering scalable and resilient solutions for the next generation of semiconductor manufacturing. The workshop took place across four sessions, with each highlighting a unique edge-AI implementation area – including process control, yield enhancement, tool coordination, and predictive maintenance – and featured keynotes from leaders at Lam Research and KUKA. Didn’t get a chance to attend in person? View this workshop on demand. Session 1 - Smart Sensors and Edge Intelligence for Advanced Process Control​The semiconductor industry has always been defined by precision. However, as device architectures shrink to angstrom-scale dimensions, and as wafers become thinner and more fragile, traditional process control tools are reaching their limits. Sampled, low-frequency, univariate monitoring systems were built for an era where deviations were visible, failures were catchable later, and a handful of sensors per tool were enough to keep yield in check. Session 1 explored the latest sensor technologies, discussing how data collection at the point of production, with AI embedded directly into the tool, is becoming paramount for success. Advanced in-situ sensors were brought up as an example of this in practice. Although these sensors are generating richer signals than in the past, reaching lower latency requires AI models deployed at the edge.In addition, AI is extending into the physical world through robots that can handle various tasks autonomously. These robots are enabled by digital twins that provide simulation environments for training and validation before they ever see the fab floor. The common thread across Session 1 was the growing need for data and knowledge integration in fabs. Smart sensors must be built into AI systems, and those systems must be scalable across tools without sacrificing speed or reliability. Finally, the insights they generate must flow back into maintenance optimization and equipment health monitoring to promote a continuous cycle of learning. Session 2 - Yield Enhancement Through Edge-Driven Defect Detection and Classification​ Session 2 focused on how edge AI models, process sensors, and image data can identify yield-impacting defects earlier in the manufacturing process. As semiconductor devices lean into 3D architectures, the complexity and volume of data have outpaced the capabilities of traditional monitoring tools. Today's fabs are required to evaluate terabytes of inspection images per hour, as well as tool sensor traces that require analysis across dozens of parameters simultaneously. Each speaker approached this challenge from a different angle, yet the solutions fit together into a coherent architecture. One introduced Gaussian Process Regression, a model for assessing both predictions and uncertainties, as a statistically rigorous, data-efficient method for learning "golden trajectory" baselines for tool sensor signals. This generates actionable scores and maintenance guidance beyond standard anomaly alerts. Another speaker demonstrated the ability of deep learning models to triage multi-gigabit-per-second image streams in milliseconds. AI-based defect classification was shown to compress root cause analysis timelines from days to hours, with demonstrated gains of a 0.3% die yield recovery and 0.5–1% yield exposure prevention. Predictive metrology for RF filter frequency also assessed device performance using upstream process data, with less than 0.02% error.Lastly, a software-defined automation framework built on open standards and vendor-neutral architecture demonstrated effective workload consolidation onto a single edge platform. It was shown to be scalable across fabs without replacing legacy infrastructure.These presentations stressed the importance of measurement and action in real-time at the tool level. Gathering information as early as possible, using AI to triage and classify, and feeding insights back into process control and maintenance workflows, allows for a continuous cycle of improvement.Session 3 - Autonomous Work in Process Movement: Robots, Sensors, and Edge AI Coordination​The "lights out" factory is shifting from an aspiration to a concrete, engineering roadmap. To fully realize this, each presentation in Session 3 highlighted the importance of supplementing human-dependent workflows with AI systems that can act in real-time. This shift will require a mix of deep reinforcement learning and AI-based perception approaches. Currently, deep reinforcement learning is training agents to discover new routing strategies that optimize yield, equipment effectiveness, cycle time, and queue-time compliance – including joint front and back-end-of-line coordination for advanced packaging. AI-based perception is also on its way to replacing manual, pre-shipment inspection checklists, demonstrating inspection time reduction by as much as 78%. To enable these improvements, presenters suggested private 5G as the foundational connectivity infrastructure. Currently, private 5G is helping eliminate dead zones and bandwidth issues that are preventing real-time machine data and connected robotics from reaching their full potential.Based on these presentations, the prevailing formula is to integrate intelligence at every level. This includes precise in-situ sensing to eliminate manual setup and measurement, edge AI models that act on data immediately, platforms that coordinate across tools without humans, and lastly, a reliable connectivity infrastructure.Session 4 - Predictive Maintenance at the Edge: From Vibration to VisionSemiconductor fabs have long operated in a state of crisis management. Fab managers spend between 40% and 70% of their time firefighting unexpected equipment failures, rather than executing planned maintenance strategies. Unplanned downtime in semiconductor manufacturing can cost up to $1 million per hour, yet the maintenance industry has been slow to move beyond reactive repairs. Fab managers need faster ways to determine issues and act on that knowledge before wafers are lost. Session 4 outlined a framework for how this transformation will happen. At the foundation, smarter sensors (vibration, acoustic, thermal, spectral, and vision) are generating the high-fidelity, multi-modal data streams that make predictive models possible. In addition, "ultra edge" AI accelerators are enabling machine learning inference to happen directly inside MEMS sensors and on-device hardware without cloud dependency. Fabs require low-latency, data-sovereign, real-time decisions that the cloud is unable to support, and the path forward requires an integrated chain of sensing, edge inference, health scoring, and maintenance scheduling. This session also made the case that irrelevant correlations and confounding variables make purely statistical AI unreliable for root cause analysis, and that causal AI models are required to give fabs actionable information. It concluded that cybersecurity concerns, soaring cloud infrastructure costs (datacenter GPU prices reaching $25,000–$50,000 each in 2025–2026), and latency requirements have made distributed, machine-local intelligence the only viable path to achieving autonomous fabs. SummaryThis workshop highlighted how edge AI, smart sensors, and advanced connectivity are transforming semiconductor manufacturing by enabling real-time process control, faster defect detection, and more autonomous operations. Across sessions, experts emphasized that integrating AI directly at the source of data is essential for improving yield, reducing downtime, and building scalable, resilient “smart fabs.”Learn more by registering for this workshop on demand, or view the recap videos on LinkedIn. Day 1 recap Day 2 recap The SEMI Manufacturing Coalitions include Smart Manufacturing, Fab Owners Alliance (FOA), MEMS and Sensors Industry Group (MSIG), Advanced Packaging Heterogeneous Integration (APHI) and Semiconductor Components, Instruments, and Subsystems (SCIS).Anshu Bahadur leads the Smart Manufacturing Initiative, Karim Somani leads the Fab Owners Alliance (FOA), and Paul Carey leads the MEMS and Sensors Industry Group (MSIG), all of which are part of the Technology Coalitions at SEMI.

The artificial intelligence revolution has a dirty little secret: for all its "brain" power, AI and autonomy are hopeless without the hardware that connects them to the physical world. Today’s semiconductor-related blockbuster tech topics like autonomous humanoid robots, Edge AI, self-driving cars, and lights-out fabs all depend on a variety of sensing modalities and enabling technologies (from MEMS to photonic and others). The 2026 MEMS Sensors Executive Congress (MSEC) gathered industry leaders to discuss how sensors continue to evolve from simple sensing components to the essential “eyes and ears” of a global, AI-driven transformation.The Sensor Industry is ShiftingMarcellino Gemelli of Bosch Sensortec took a retrospective approach during the Leadership Roundtable starting with the statement “to understand where we are going, we have to look at where we’ve been.” While logic and memory chips scaled rapidly, sensors faced a different reality:Commoditization: Rapid price erosion in high-volume markets like mobile.The "One Process, One Product" Curse: Unlike standard CMOS, every new MEMS device historically required a unique manufacturing flow which results in high development costs.Hard to fill MEMS Fabs: Geometries are shrinking resulting in more devices per waferPackaging: A challenge because it directly impacts device performanceSensor Fusion: Integrating sensor components with ASICs and MCUs to create smart sensorsAccording to Maximize Market Research, the global sensor market is predicted to have an 8.7% CAGR from 2024 through 2030. There is a fundamental realization about sensors: the next stage of autonomous manufacturing and intelligent systems cannot exist without high-fidelity, real-time sensor data from the edge. This was a common theme throughout MSEC. Data presented at MSEC by Pierre-Marie Visse of Yole Group shows the global MEMS market is projected to grow more slowly with a 3.7% CAGR over the same time frame, with higher growth predicted for automotive, industrial, and medical applications.The Leadership Roundtable, featuring executives from Bosch, Infineon, STMicroelectronics, and Rogue Valley Microdevices, highlighted the strategic roadmaps that will define the next decade, echoed by others during other technical presentations:The Edge of Perception: AI is pushing sensing technologies to process data within the sensor itself and not in the cloud, reducing latency and power consumption while improving privacy.Autonomous Manufacturing: Leaders like John Behnke (INFICON) and Edvard Kälvesten (Silex) mapped out the path toward “Autonomous Fabs,” where sensors allow tools to communicate and self-optimize with minimal human intervention.Emerging Modalities: Beyond traditional motion and pressure sensing, MSEC spotlighted the rise of Quantum sensors for resilient navigation and Photonics combined with MEMS for ultra-precise inertial sensing.From “Parts” to “Interfaces”A recurring theme throughout the congress was the death of the "sensor as a part" mentality. In his keynote, Kurt Busch (Syntiant) argued that sensors plus AI models are becoming the default interface layer for products.“The next-generation interface is not a screen. It is the physical world, captured by sensors, interpreted by models, and delivered through natural interactions,” said Busch.This shift is visible in the rapid adoption of Edge AI integration, the development of humanoid robots, autonomous drones and vehicles, and AI enabled smart glasses—rewriting what the human machine interface looks like.Conclusion: Sensorizing the FutureWe are no longer just building devices; we are building an “industrial AI operating system” that connects the digital and physical world. This all starts with sensors. By 2030, the most valuable AI won't just be the one with the biggest brain, it will be the one with the best senses.If you are a leader in the field of MEMS Sensors, let your voice move the industry needle by becoming a SEMI and MEMS Sensors Industry Group (MSIG) member company and getting involved with MSIG. MSIG will be hosting the MEMS Sensors Technical Congress (MSTC) on September 16-17 at SEMI HQ in Milpitas, CA. Engineers and technical executives will dive deep into new technology and processes that advance the sensor industry. To learn more or to be a part of the fascinating world of MEMS Sensors visit the SEMI MSIG website.Paul Carey is Director, MSIG at SEMI. Rafael Tudela is Senior Technical Marketing Manager at SEMI.

The semiconductor industry is hitting a structural inflection point: explosive AI‑driven demand, rapidly rising manufacturing complexity, and stringent sustainability expectations are converging at once. In this context, edge AI deployed directly on tools, sensors, and local controllers, is shifting from experimental to essential, particularly in fabs where milliseconds matter. SEMI’s timely workshop, Smarter Sensors, Smarter Fabs: AI at the Edge in Semiconductor Manufacturing, taking place March 18–19, 2026 in Milpitas, CA, will address this important topic.From sparse sensing to dense instrumentationTwo decades ago, most process tools relied on dozens of sensors per chamber. Today, leading etch, deposition, CMP, and lithography systems routinely integrate hundreds of sensing channels spanning pressure, flow, RF power, optical endpoint, vibration, and chemistry. At 3 nm and 2 nm, process windows are so tight that yield hinges on multivariate understanding of chamber conditions and tool state rather than a few independent alarms. Sensor proliferation has turned fabs into rich data environments—but also exposed the limits of traditional, centrally managed control.Why edge AI is displacing cloud‑only controlConventional architectures push heavy analytics to centralized servers or the cloud, with supervisory systems periodically updating recipes, setpoints, or dispatch rules. Across manufacturing, measured cloud round‑trip times commonly range from 800 to 2,400 ms, whereas edge systems co-located with equipment can respond in 15–45 ms, roughly 50–160× faster. For safety‑ and yield‑critical loops in semiconductor manufacturing, that latency gap is often unacceptable.At the same time, new generations of low‑power neural processing units (NPUs) and edge accelerators deliver tens of trillions of operations per second (TOPS) at single‑digit watt budgets, making always‑on inference viable inside tools, cameras, and controllers. The result is a decisive move toward edge‑native architectures: models execute where data is produced, while cloud resources are reserved for retraining and fleet‑wide learning.Edge AI on the line: control, inspection, and maintenanceIn process control, edge AI is enabling a shift from univariate threshold checks to multivariate models that understand the joint dynamics of sensor streams. Platforms today embed deep‑learning and statistical models directly at or near the tool, performing real‑time endpoint prediction and anomaly detection from high‑dimensional time series. Similar approaches are emerging in lithography and CMP, where local inference helps keep focus, overlay, and removal rate within spec before wafers drift out of control.Inspection and logistics are undergoing a similar transformation. Vision systems with embedded NPUs classify defects at line speed, often above 100 parts per minute, eliminating the need to ship large image volumes to a central cluster. Robots and autonomous mobile robots (AMRs) use local intelligence for short‑horizon planning and collision avoidance, while higher‑level systems focus on global scheduling and optimization.Predictive maintenance is one of the most mature applications: vibration, acoustic, temperature, and pressure data are analyzed locally to detect anomaly signatures hours or days before conventional thresholds trip. Reported benefits include reductions in unplanned downtime, longer component life, and lower maintenance costs when these models are integrated into manufacturing execution systems (MES) and maintenance workflows.Digital twins and agentic AI on top of edge dataDigital twins build on this sensing and edge‑analytics foundation. By maintaining virtual, live‑updated models of tools, lines, and entire fabs, they enable scenario testing, debottlenecking, and root‑cause analysis without putting WIP at risk. Vendors and early adopters report that such twins can shorten process‑node ramps and facility bring‑up by enabling thousands of “what‑if” experiments before physical changes are made.​Agentic AI is now emerging as the orchestration layer above these twins. In semiconductor case studies, agents connected to MES, advanced process control (APC), and planning systems have delivered double‑digit improvements in throughput, cycle time, and tool utilization by autonomously adjusting routing, batch sizes, and scheduling in response to live fab conditions. Other agents mine unstructured engineering notes and fault reports to accelerate root‑cause analysis, turning hard‑won lessons into repeatable, codified behavior.Sustainability as a first‑class requirementSustainability pressures are reinforcing this stack. Semiconductor manufacturing is energy‑ and resource‑intensive, and regulators and customers alike are demanding more transparency and improvement. Edge‑connected monitoring of energy, utilities, and emissions has already helped some fabs cut energy‑related costs by around 20 percent through tighter control of HVAC, process gases, and idle modes. Research initiatives such as imec’s Sustainable Semiconductor Technologies and Systems (SSTS) program are using virtual fab methods and detailed life‑cycle assessment to guide process and equipment choices for lower environmental impact.Strategic takeaways and where to learn moreThe trajectory is clear: fabs that combine dense sensing, edge AI, digital twins, and agentic AI are building toward continuously learning, self‑optimizing operations. Architectures will need to be edge‑first rather than cloud‑only. Simply adding sensors without local intelligence will not deliver competitive advantage, and environmental KPIs are likely to be optimized with the same rigor as yield and cycle time.For practitioners who want to translate these trends into roadmaps, the Smarter Sensors, Smarter Fabs: AI at the Edge in Semiconductor Manufacturing” workshop (March 18–19, 2026, Milpitas, CA) spearheaded by the SEMI Manufacturing Coalitions* will bring together experts in sensing, edge architectures, digital twins, and agentic AI to share concrete deployments and architectures tailored to semiconductor fabs.*The SEMI Manufacturing Coalitions include Smart Manufacturing, Fab Owners Alliance (FOA) MEMS and Sensors Industry Group (MSIG), Advanced Packaging Heterogenous Integration (APHI) and Semiconductor Components, Instruments, and Subsystems (SCIS). Anshu Bahadur is Senior Program Manager, Technology Communities at SEMI. Mark da Silva is Senior Director, Manufacturing Coalitions at SEMI.

The sensor revolution is shaping the future of connectivity, with innovation in MEMS and imaging technologies paving the way for a smarter and more integrated world.As the world becomes increasingly interconnected, MEMS and imaging sensor technologies are driving transformative changes across industries, shaping the future of connectivity, intelligence, and sustainability. Powered by advances in miniaturization, AI integration, and sustainable design, MEMS and imaging technologies are enabling groundbreaking applications—from autonomous vehicles to wearable health devices—while addressing urgent global challenges like climate change and energy efficiency. At the MEMS Imaging Sensors Summit 2024, Laith Altimime, President of SEMI Europe, emphasized the pivotal role of MEMS and imaging technologies. Setting the stage for discussions on technological breakthroughs and market trends, Altimime remarked, “Sensors are at the heart of the next wave of innovation, enabling unprecedented levels of intelligence that are transforming industries and fostering a smarter, more sustainable, and seamlessly connected future.”Laith Altimime, President, SEMI EuropeStefan Finkbeiner, CEO of Bosch Sensortec, underscored in his opening keynote how advanced sensor technologies are enabling life-changing use cases. “Sensors are all around us, though we don’t always notice them,” emphasizing sensors’ ubiquitous role in smartphones, wearables, and hearables. Finkbeiner highlighted miniaturization as a key challenge, noting that even as sensors continue to shrink, they are increasingly integrated with edge AI to enable efficient, local decision-making.Stefan Finkbeiner, CEO, Bosch SensortecSimone Ferri, APMS Group Vice-President and MEMS Sub-Group General Manager at STMicroelectronics, highlighted the pivotal role of sensors as a bridge between the physical and digital world, noting “the most sophisticated machine is the human – so it is best to emulate human capabilities to enable the next generation of devices to accurately measure the parameters of your body.” Ferri stressed the importance of sustainability, advocating for smart, transformative, and precise sensors that provide meaningful data with optimal efficiency. By aligning technological innovation with environmental responsibility, Simone Ferri demonstrated how sensorization can enhance lives while enabling a net-zero transition across industries.Simone Ferri, APMS Group Vice-President and MEMS Sub-Group General Manager, STMicroelectronicsMEMS Growth Fueled by Piezo Materials and ElectrificationJean-Christophe Eloy, CEO and President of Yole Group, grounded the discussion in market data, forecasting a 5% CAGR for the MEMS market, which is set to exceed $20 billion by 2029. He highlighted key trends such as the increasing sophistication of automotive sensors—more cameras, higher resolution—and the impact of electrification. On the technology front, Eloy noted a “strong shift towards piezoelectric (piezo) MEMS,” driven by advancement in new materials like Lead Zirconate Titanate (PZT), Aluminum Nitride (AIN), and Scandium-doped Aluminum Nitride (ScAIN).Jean-Christophe Eloy, CEO and President, Yole GroupAlissa Fitzgerald, CEO of A.M. Fitzgerald Associates explored the expanding roles of MEMS technology in new domains, such as fiber optics for data centers. “Photonics is in the news,” she remarked, highlighting its potential to deliver 40% power savings compared to copper technologies. “MEMS manufacturing is set to evolve by 2030 and beyond,” said Fitzgerald, emphasizing the continued innovation in traditional wafer-based processes through the adoption of advanced thin-film materials like piezoelectrics and GaN. Furthermore, Fitzgerald discussed emerging manufacturing techniques such as 3D-printed MEMS and biodegradable materials to enable low-cost, sustainable sensors.Alissa Fitzgerald, CEO of A.M. Fitzgerald AssociatesAdding to the conversation on manufacturing, Jessica Gomez, CEO of Rogue Valley Microdevices, shared her perspective on how 300mm-capable MEMS foundries could “change the game,” improving production efficiency and lowering costs. Gomez also outlined the unique challenges of MEMS manufacturing, including the need for custom processes and the high-mix, low-volume nature of production.Advancing Smart Mobility Through Interoperable NetworksSmart mobility gained significant traction as Patrice Ancel, In-Vehicle Technologies Leader at BMW, tackled the intricacies of in-vehicle networking. Ancel shed light on the complexities of today’s vehicles, which contain 20,000 components and over 100 electronic control units (ECUs) from multiple suppliers. His message was clear: “Interoperability is key for us; without interoperability, none of this will happen.” Ancel’s call for collaboration resonated throughout the summit, highlighting the critical role of teamwork in driving innovation and progress within the automotive industry.Patrice Ancel, In-Vehicle Technologies Leader, BMWA Vision for the Future: Sustainability, Collaboration, and InnovationThe MEMS Imaging Sensors Summit demonstrated how collaboration, sustainability, and innovation are driving the sensor industry forward. From addressing market trends to tackling manufacturing challenges, the discussions revealed a shared commitment to creating a smarter, more connected world.On behalf of SEMI, the SEMI Europe team would like to thank the industry leaders whose expertise and enthusiasm made this summit a resounding success. SEMI ContactAna Bernardo, Manager of Technology ProgramsEmail: [email protected] Mobile: +49 175 4129 764Sitong He, Communications Manager Email: [email protected]: +49 151 5546 2638

With increasing demand for personalized smart devices, the MEMS and sensor market is undergoing rapid transformation. MEMS sensors are the backbone of smart wearable devices, seamlessly integrating multiple functions to monitor and simplify our day-to-day activities. As applications in healthcare, environmental tracking, and AR/VR expand, the need for ultra-compact, energy-efficient, and intelligent sensors is more critical than ever.In an exclusive conversation with SEMI, Stefan Finkbeiner, CEO of Bosch Sensortec, shared his perspective on the dynamic landscape of MEMS sensor technology. From Bosch’s evolution to a solutions provider with a focus on sustainability and market-driven innovations, Finkbeiner offered a deep dive into how Bosch Sensortec is positioning itself at the forefront of the industry. “We have to think in terms of the end application and determine what the right hardware and software configuration should be in order to provide solutions with the greatest benefit and flexibility.”Further insights into the future of MEMS and sensor technology will be shared by Finkbeiner during his keynote at the SEMI MEMS Imaging Sensors Summit on November 14, 2024, in Munich, Germany. Registration is still open.SEMI: Welcome, Stefan, and thank you for sharing your insights on advanced sensor technologies. Let’s start with a personal question: What motivates and inspires you about working in sensor technology?Finkbeiner: Sensor technology is very diverse and has significant impacts on consumers. We take pride in prioritizing consumers’ needs and benefits. True to the Bosch motto, “Invented for life,” we are committed to making life better, easier and healthier. This is demonstrated in our sensing solutions, which provide valuable data for fitness tracking in smartwatches, enhance the audio experience in hearables, and enable real-time monitoring of air quality to help individuals make informed decisions for a healthier environment. I am fascinated by technology advancements that are enabling the scaling of sensors—and the processing power and intelligence packed into these increasingly compact devices. For instance, our latest acceleration sensors for hearables are the smallest in the world and are nearly invisible at just 1.2 x 0.8 x 0.55 mm³.We leverage innovative wafer level chip scale packaging (WLCSP) to achieve this reduced form factor. These compact, feature-rich, high-performance accelerometers are easier to integrate in the latest generation consumer products where size and functionality are critical requirements.SEMI: How has Bosch Sensortec’s approach evolved over the years and what is the company’s primary focus today? Finkbeiner: We began our success story a few years ago as a hardware supplier, with one of our first applications being the 'Portrait-Landscape' function in smartphones. Over time, we’ve evolved into one of the leading providers of MEMS sensors.Today, we no longer see ourselves purely as a sensor manufacturer, but as a technology solutions provider. Our focus has shifted to think in terms of the end application and determine what the right hardware and software configuration should be to provide solutions with the greatest benefit and flexibility.Achieving this requires significant software and artificial intelligence (AI) development. In essence, we are optimizing software through self-learning models. Hardware remains essential for optimizing power consumption, with most sensors integrating a controller alongside the ASIC to enable seamless software integration.This unique software and hardware configuration unlocks exciting possibilities and broadens our market reach. We see significant growth in head-mounted devices, and we are actively working on related acoustics solutions.SEMI: Looking ahead, what trends do you anticipate will have the most significant impact on the MEMS sensors market?Finkbeiner: We see several trends that will significantly impact the MEMS sensor market. First, there is growing demand for personal health monitoring in consumer and mobile electronics. Wearable devices, in particular, are becoming essential tools for individuals to track their health and fitness status. This trend requires MEMS sensors to become even more accurate, with solutions that include sophisticated software algorithms to ensure reliability, accuracy, and reproducibility. As a result, AI and machine learning (ML) technologies will play a crucial role in enhancing sensor performance.A second important trend is the continued miniaturization of MEMS sensors. To meet customer demands, sensors must integrate more functionality, including edge-processing capabilities. For example, what once may have been a simple accelerometer with a step-counting algorithm is now evolving into a 6-axis Inertial Measurement Unit (IMU) with an integrated microcontroller and advanced AI/ML software. A great example of this is in True Wireless Stereo (TWS) earphones, where the IMU not only tracks steps but also enables complex tasks like dead reckoning and supports 3D audio—all within the tight constraints of a small TWS earbud housing. Low power consumption, as always, is a critical factor for these mobile devices to meet CE (Conformité Européenne) standards.Finally, we believe that smart glasses, augmented reality (AR) and virtual reality (VR) devices are poised to become the “next big thing.” These devices require advanced image projection optics that offer excellent optical quality, low weight, and ease of use to ensure consumer adoption. We believe our MEMS-based LBS (Laser Beam Scanning) solution is ideal for these applications. Additionally, the successful adoption of smart glasses hinges on high-performance MEMS sensors that are compact, accurate, and power-efficient—critical requirements for all-day wearability and functionality.These trends underscore the need for MEMS technology to evolve, integrating greater functionality, precision, and efficiency to meet the demands of next-generation consumer devices.SEMI: What are some of the biggest challenges facing the MEMS sensors industry today, and how can companies overcome them?Finkbeiner: One key challenge is that the smartphone market—arguably the most attractive market for a variety of MEMS and MOEMS sensors—has become more or less saturated. To stay competitive, MEMS companies must innovate existing products while also developing new, differentiated sensors and actuators for next-generation mobile products.SEMI: How is Bosch Sensortec supporting sustainability initiatives?Finkbeiner: We are helping to mitigate climate change with our low carbon footprint solutions.Up to 20% of annual global carbon emissions are caused by forest fires. This is equivalent to carbon dioxide emitted by all the vehicles driven worldwide. Our sensors can detect forest fires before they develop into wildfires by measuring various gases such as carbon monoxide and hydrogen. In parallel, we are working with our production partners to reduce our carbon footprint over the coming years, while also replacing or minimizing the use of environmentally hazardous chemicals, such as PFAS.SEMI: What are you most excited about for the MEMS Imaging Sensors Summit, and how do you think it will impact the European semiconductor industry?Finkbeiner: The European semiconductor industry has deep expertise in MEMS and sensor technologies, positioning it to make a significant impact in markets such as consumer health, optical sensing, and AR displays. By continuing to focus on sustainable solutions, we can drive even greater impact for the broader industry and secure Europe’s leadership in these growth sectors.I look forward to collaborating with industry peers at the Summit to define next steps needed to advance Europe’s leadership. The MEMS Summit is an invaluable opportunity to collaborate and drive progress, and I warmly invite my colleagues to join us in shaping the future of the European semiconductor industry.Dr. Stefan Finkbeiner Dr. Stefan Finkbeiner has been CEO and General Manager at Bosch Sensortec GmbH since 2012. He was born in 1966 in Freudenstadt, Germany. Stefan Finkbeiner held various senior positions at Bosch including Director of Sensor Marketing, Director of Corporate Research in microsystems technology, and Vice President of Sensor Engineering. He looks back on almost 30 years in semiconductor industry working in different positions related to sensor research, development, manufacturing, and marketing. Due to his wide experience in semiconductor and sensor industry, Stefan Finkbeiner is a recognized guest in panel discussions and as keynote speaker. SEMI ContactSitong He / Communications Manager, SEMI EuropeEmail: [email protected]: +49 151 5546 2638

With the rapid proliferation of electronics applications with more powerful embedded intelligence, demand for smarter, more efficient sensors is increasing to help devices connect to the world around them. As the semiconductor industry drives the future of connected technologies and sustainable solutions, it faces challenges in energy consumption, resource management, and ensuring data security.SEMI spoke with Simone Ferri, Vice President and General Manager at STMicroelectronics (ST), about current trends and challenges in the Micro-electromechanical Systems (MEMS) and imaging sensors market and how ST is driving innovation in this rapidly evolving industry. Ferri shared insights ahead of his keynote presentation at the SEMI MEMS Imaging Sensors Summit on November 14, 2024, in Munich. Registration is open.SEMI: Welcome, Simone, and thank you for sharing your perspective on the dynamics and trends for today’s MEMS and imaging sensors. To start, how would you describe the current market dynamics for these technologies, and what key factors are influencing these dynamics? Ferri: Right now, the MEMS and imaging sensors market is primarily driven by applications such as automotive electronics, consumer medical devices, AI-powered devices, and intelligent wake-up systems.According to Omdia, the MEMS market is projected to reach approximately $11 billion by 2027, with a CAGR of 2.8% from 2022 and 2027. Currently, automotive applications account for 50% of this market, with industrial at 15% and consumer at 35%. Notably, the automotive sector is the fastest growing, with a 5.4% CAGR, driven by the increasing use of inertial measurement units (IMUs) and microphones.In addition, Yole Group estimates that the imaging market, including optical sensing, will grow at a 4.7% CAGR between 2023 and 2029. Although mobile phone applications remain the primary driver of Complementary Metal-Oxide-Semiconductor (CMOS) image sensors (CIS) volumes, other sectors, including consumer electronics, automotive, and security imaging, are also contributing to the growth.Long-term forecasts for smartphone sales have been trending downwards, but mobile phones still remain a major driver of applications, innovation, and overall volume in the imaging market. Notably, the automotive imaging sector is one of the fastest growing markets and is expected to drive additional demand for CIS.Factors that influence the current market include global economic conditions, regulatory changes, geopolitical factors, technological innovations, and the emergence of new applications and use cases.SEMI: Can you elaborate on the growth strategies that STMicroelectronics is adopting to stay competitive in the MEMS and imaging sensors market? Ferri: ST has played a pivotal role in both the MEMS and imaging sensors markets for over two decades with its proprietary silicon technologies. We fully leverage our Integrated Device Manufacturer (IDM) business model, which allows us to support our customers through integrated capabilities for both design and manufacturing.To remain competitive, we are exploring new markets for MEMS sensors, particularly in digital healthcare with biosensors, where wearable devices are expected to exceed 500 million units per year by 2027.We’re focusing on the growing demand for automotive sensors such as accelerometers, Inertial Measurement Units (IMU), and pressure sensors, particularly with the rise of electric vehicles. We are enhancing the integration and synergy between automotive and personal devices. For example, we are combining high-g and low-g accelerometers within a single IMU, enabling accurate fall and crash detection, along with precise orientation and wake-up functionality.AI is another one of our priorities. In today's digitalized world, AI enables real-time, contextual understanding and the ability to make decisions that optimize and reduce the power consumption of the final device. Sensors are no longer merely for data collection. Thanks to AI, sensors can interact with their environment and significantly contribute to innovation and sustainability.We are also prioritizing low power consumption. Our MEMS technology operates in low-power mode with almost negligible energy use, activating only when necessary, without waking up the system to understand its environment or to be reconfigured.In addition, we’ve seen optical sensing continue to grow year over year. Optical sensing now offers features such as 3D capture, low-power and low-footprint computer vision, Near InfraRed (NIR) and even Short Wavelength InfraRed (SWIR).We are accelerating and leveraging our IDM model and broadband semiconductor supplier positioning to propose wider system offerings based on the array of sensors and microprocessors that ST develops. As the world shifts toward widespread use of sensors and data collection, the demand for secure sensing technologies is growing, extending beyond mobile and PC applications to spatial computing and AR/VR environments. For example, if we are talking about recognizing specific persons in an AR environment, we don't want the data related to these persons to be sent to the cloud before a decision is made about whether they are supposed to be there or not, as such information can be intercepted. We want all the data to be managed at sensor level and only a warning of rejection or acceptance to be transferred outside our secure sensor. SEMI: What are some of the latest technological innovations in MEMS and imaging sensors that are shaping the industry? Ferri: In MEMS, we're seeing significant advancements in three key areas:- In-sensor AI is integrating technologies in the sensors such as machine learning core (MLC), adaptive self-configuration (ASC), and intelligent sensor processing units (ISPU).- Open sensors are designed to interface seamlessly with other sensors, allowing third parties to benefit from on-sensor processing innovations, while building an ecosystem to create joint value with customers.- Accurate sensors are providing high-precision data, enabling better decision-making and smoother, more natural user interactions. These sensors also reduce factory calibration time and resources, leading to overall lower energy consumption. Because of their accuracy, onboard MLC, and ASC, the sensors can also reconfigure themselves without interaction with the processor, thus guaranteeing the proper accuracy at lower power consumption, at any time, under any condition.In the imaging sensor market, key trends include:- Higher Pixel performance is leading to improved signal-to-noise ratio (SNR), low light performance, better quantum efficiency (QE) and lower noise performance. Despite post processing, pixel performance remains the key factor as SNR performance must remain high while the pixel shrink roadmap advances.- Embedded Intelligence is providing local processing for local decision making, enhanced security, advanced image sensor processing (ISP) for improved image quality, and fusing sensor functions to deliver a better user-experience.- "Always on" capabilities are supporting mass sensorization and deployment of optical sensing solutions everywhere through specific low-power design techniques, process development, and overall system architecture optimization.SEMI: Looking toward the future, what trends do you anticipate will have the most significant impact on the MEMS and imaging sensors market? Ferri: Some macrotrends for sensors include:Electrification: Certain consumer and industrial applications are now being adopted in the automotive sector, especially with the rise of electric vehicles creating new opportunities for innovation and for new players to enter the market. As example, the predictive maintenance that has been developed for industrial electric motors is ported 1:1 to electric vehicles.AI: Regarding data transmission, distributed architecture will push AI towards edge computing, increasingly supported by advancements in 6G and foldable technologies. Additionally, as AI becomes more integrated, the maintenance and security for AI will require more attention.Smart home, buildings, and cities: As cities grow, the demand for smart homes and buildings rises, requiring more sensors to manage energy, security, and urban infrastructure efficiently. Over 55% of the global population and 70% of the EU population reside in cities. Urban areas generate more than 80% of the world’s GDP, and by 2030, it's anticipated that 68% of the global population will be urban dwellers, pointing to the growing need for smart cities.Aging population and digital health: The integration of biosensors with MEMS technology will be crucial for addressing the needs of an aging population.Overall, the use of image sensors for environmental sensing is steadily increasing. This is a major focus for ST, particularly in 3D sensing. New use cases, such as presence detection, are enhancing security and reducing power consumption due to efficient data processing. Additionally, the average number of cameras in smartphones, automobiles, and even in devices like robots and vacuum cleaners, continues to grow.SEMI: What has STMicroelectronics been working on, and what are your plans for the upcoming years? Ferri: To date, we have shipped over 23 billion MEMS sensors. Still, we remain committed to continuously improving our products and enhancing our MEMS technology in terms of affordability, miniaturization, performance, and novelty. We are striving to set the stage for a future defined by innovation and excellence with:Evolution of our current product portfolio by investing in lower power consumption, lower supply voltage, and additional and more sophisticated in-sensor AI for an effective distributed AI conceptNew sensors for presence detection, like infrared (IR) sensors, and health-focused sensors such as biosensors.MEMS sensors are also becoming increasingly accurate, open towards different ecosystems of technologies, and so intelligent that they can self-configure and reduce power consumption thanks to optimal data processing. These attributes allow us to provide meaningful and sustainable solutions across sectors such as automotive, industrial, infrastructure, and personal electronics, enabling us to improve energy efficiency, reduce waste, and support sustainable practices for a greener planet.For the past 10 years, ST has focused on depth sensing across multiple use cases. Today, ST is the number one in the world for time-of-flight solutions through our ST FlightSense product family. More recently, we launched our global shutter image sensors family, ST BrightSense, to address markets like personal electronics, automotive, industrial, communications equipment, and computers and peripherals.More specifically on the automotive side, we have the portfolio, customers, and customer program awards to lead the driver and occupancy monitoring market. We continue to secure design wins from our growing customer base while we expand our product portfolio and broaden our customer and application footprints.SEMI: What are some of the biggest challenges facing the MEMS and imaging sensors industry today, and how is ST addressing them? Ferri: The MEMS and imaging sensors industry faces several challenges, but with strategic planning and innovative solutions, companies can overcome these obstacles by focusing on the following:Integration: With our biosensors, we are doing more with less space. For example, in a standard accelerometer, we integrate an analog front end for electrocardiogram (ECG) analysis, enhancing functionality without increasing the device footprint.Performance enhancement: Ensuring high performance and reliability in various environmental conditions is crucial, especially in automotive and healthcare applications. To meet these demands, we deploy comprehensive testing protocols to ensure our sensors meet performance and reliability standards.Power efficiency: Reducing power consumption is vital, particularly for battery-operated devices like smartphones and IoT devices. We are developing low-power architectures to address this need.Data security: With the growing use of imaging sensors in surveillance and personal devices, data security and privacy have become paramount. Our solutions include encryption for data transmission and storage, as well as robust access control mechanisms to prevent unauthorized access to sensor data.Additionally, supply chain issues remain a significant challenge today. We believe our strategy and capacity as an IDM, combined with our strong innovation capabilities, give us a competitive edge in supply chain management.SEMI: What are you most looking forward to at the MEMS Imaging Sensors Summit, and what does it mean for the European semiconductor industry? Ferri: I look forward to the Summit as a valuable opportunity to connect with industry peers, share insights, and explore new collaborations. I encourage my peers to attend, as it’s a unique platform to collectively shape the future of our industry and sustain Europe’s leadership in semiconductor innovation. About Simone FerriSimone Ferri is Vice President of APMS Group and General Manager for MEMS sub-group at STMicroelectronics. Ferri began his career in STMicroelectronics in 1999 as an R D engineer before becoming a digital designer for the company’s audio division, leading into product management after 5 years. In 2014, ST entrusted Ferri with MEMS consumer sensors followed by global MEMS-sensor related Marketing and Application activities across all markets and segments, leading into his current role. Ferri graduated with a degree in microelectronics from Politecnico di Milano (Polytechnic of Milan), where he also completed his MBA. Sitong He is Marketing and Communications Manager at SEMI Europe.

The MEMS & Imaging Sensors Summit in September in Grenoble, France made clear that the technologies are playing a growing role in powering the global semiconductor industry’s projected expansion to the landmark $1 trillion in revenue by 2023.

System level electromagnetic (EM) simulation is becoming increasingly important in supporting the design of smart cities, next-generation transportation and global communications systems. CEMWorks' develops tools for electromagnetic field simulation that overcomes limitations in today’s solvers.

System level electromagnetic (EM) simulation is becoming an increasingly important technology needed to support the design of next-generation smart cities and transportation as well as global communications systems. CEMWorks is on the cutting edge of EM in-house simulation research.

Dr. Sondra Hellstrom of Bosch speaks to Tim Brosnihan of SEMI MEMS & Sensors Industry Group (MSIG) to preview her presentation on decarbonization at MEMS & Sensors Technical Congress (MSTC), May 23-24 at MIT in Cambridge Massachusetts.