Smart Manufacturing

The march to greater precision, efficiency and safety – the lifeblood of high-technology manufacturing facilities – has taken on a new urgency as emerging applications such artificial intelligence (AI), the Internet of Things (IoT) and Industry 4.0 give new meaning to smart factories. Facing fiercer competition and ever more sophisticated fabrication processes, semiconductor fabs are under intense pressure to keep pace with new technologies as they work to upgrade. Nowhere are the stakes higher than in Taiwan, where high-tech manufacturing contributes mightily to the region’s GDP growth. To help Taiwan fabs confront the challenges and opportunities of designing smarter factories, SEMI and its High-Tech Facility Committee hosted the High-Tech Facility Workshop in June. SEMICON Taiwan 2018 High-Tech Facility Pavilion exhibitors gathered to explore how they can build smarter factories by deploying smart surveillance and disaster prevention technologies along with smart communications systems that better use manufacturing data to drive new safety and product quality efficiencies.During the workshop, SEMI High-Tech Facility Committee representatives shared strides it has made upgrading overseas facilities and developing standards to help establish smart factories in Taiwan.SEMICON Taiwan – 5-7 September at Taipei’s Nangang Exhibition Center – is also an important event for advancing smart manufacturing in Taiwan. Nearly 30 leading global manufacturers will exhibit at the SEMICON Taiwan High-Tech Facility Pavilion. The venue covers operational aspects of semiconductor manufacturing vital to becoming smarter including energy savings, nano-contamination control, facility information modeling, precision instrumentation and control, fire protection, mechatronics, and automation control. The pavilion will also feature a series of theme events offering a comprehensive overview of topics including the latest practices for integrating smart facility capabilities from the perspective of an advanced fab designer.At the TechXPOT stage, High-Tech Facility Pavilion exhibitors will also demonstrate the latest technology breakthroughs and cutting-edge smart factor solutions.The September 6th High-Tech Facility International Forum at SEMICON Taiwan will again gather factory experts and thought leaders from industry and academia to examine “Effective Ways to Make a Facility Smart.“ Experts from industry heavyweights in the fields of wafer foundry, LCD, memory and semiconductor packaging including TSMC, UMC, Innolux, ASE, Micron Taiwan, Winbond and VIS will offer insights into key areas of high-tech facilities including facility electricity, machinery, water management, vaporization and automation systems. On the same day as the forum, the High-Tech Facility Get-Together and High-Tech Facility VIP Dinner will bring together industry elites, academic professionals, and government officials to explore partnership opportunities. SEMI Taiwan and the High-Tech Facility Committee share HTF market trends information, technology updates and standards with SEMI members and exhibitors. Founded in 2013, the High-Tech Facility Committee now has 85 corporate members. Dedicated to accelerating industry collaboration through the integration of Taiwan industrial, government and academic resources, the committee each year holds several group meetings focusing on topics including energy savings, earthquake and fire protection, nano-contamination control, and precision instrumentation and control to advance critical technologies and facilitate standardization. The committee also aims to help the industry become more competitive faster by promoting technology standards that boost productivity and reduce production costs.Please visit www.semi.org and www.semicontaiwan.org for more information about SEMI’s high-tech facility initiatives.Iris Tsou is a marketing specialist at SEMI Taiwan.

Standing-room only keynote speeches. A future awash in data amassed by transformative technologies and applications, with semiconductors at their core. Smart everything: Cars, medicine, manufacturing, workforce, you name it. The sheer numbers impressed as a record lineup of SEMICON West keynote speakers offered a glowing portrait of the future: The semiconductor industry stands on the cusp of a breakout expansion. Standing and seated shoulder-to-shoulder in the packed-to-gills opening keynote, the audience learned, indeed, that the best was yet to come: “This is the best SEMICON West, ever,” observed SEMI CEO Ajit Manocha. Here’s a glimpse of the keynotes by the numbers, starting with the luckiest of all. 7 – The number of keynotes – among the brightest lights in technology – sharing their visions of the future through the lens of breakthrough technologies that are nearly ready to make their indelible mark. Dozens of expert panelists also weighed in at SEMICON West, the annual U.S. flagship microelectronics gathering in San Francisco. 90 – The percentage of all data ever generated has been created in just the past two years as the cloud mushrooms with tweets, texts, emails, Facebook posts, YouTube videos, medical records and all manner of business information, noted Bill Bottoms, president and CEO of Third Millennium Test Solutions. In the years ahead, an almost unimaginable wealth of data will require analysis by artificial intelligence (AI) embedded in semiconductors to enable applications that go well beyond smart. 12-18 – That’s how many months it will take for data volume to double, predicted John Kelly III, IBM’s Senior VP, Cognitive Solutions. And it will double again and again, every 12-18 months. Kelly foresees a scale of growth “that will dwarf previous eras of computing … the number of opportunities is enormous.” Kelly’s four decades in computing gave considerable weight to his point that “in the industry, there has never been a more exciting point in time than today.” First – Technology is being re-born. Using baseball lingo, several speakers noted that we are just in “the first inning,” “the top half of the first inning” or “the beginning of the first inning” to make clear in the most emphatic terms the duration of prosperity that lies ahead for the industry. AI embedded in chips and demand for real-time analysis of AI data will be its fuel. As SEMI Americas president Dave Anderson observed with a smile, “We all know how long baseball games can go.” Third – That’s the current wave of machine learning the world is now experiencing, according to Sandia National Laboratories’ Principal Member Conrad James. Computers are now capable of solving many increasingly complex problems on their own, with no human intervention necessarily required, he said. 1000x – As spectacularly fast as computing power already is today, the industry will need to double that the rate of performance in the years ahead, predicted Applied Materials president and CEO Gary Dickerson. Demand for this herculean processing capacity will spur a “tremendous focus on innovation” among SEMI members, their customers and their customers’ customers. 5 to 15 – The remarkable amount of silicon that power today’s mobile devices will be overshadowed by the chips – equivalent in computing capacity to 5 to 15 cell phones – that will be the engine of self-driving and other features in future automobiles, predicted Pierre Ferragu, New Street Research Managing Partner, during the SEMI Bulls and Bears session. Automobiles with this souped-up computing capacity will sell in the millions worldwide in the years ahead, generating never-before-seen opportunities for the chip industry, he noted. 10,000 – It’s not just cars. Ten thousand is the number of sensors that will be built just into the wings of new Airbus A380-1000 aircraft, AMD CTO Mark Papermaster explained during his keynote. 10 terabits – The staggering amount of Facebook data uploaded daily in to the cloud, Papermaster noted. 1 Trillion – SEMI’s 2020 forecast that the industry will reach $500 billion in revenues by 2020 was eclipsed by one analyst, speaking at the SEMI Market Symposium on the first day of the event, predicted that the industry would top $1 trillion in the foreseeable future. SEMI’s Manocha later added that $1 trillion in industry revenue is possible by 2030, “maybe sooner.” 1 (sexy) coda – Coders are hip and software applications are the apple of the world’s eye. Even the most casual mobile device user knows that software apps makes it whirl. But “hardware is becoming sexy again,” said Applied Materials’ Dickerson, adding that equipment and other semiconductor hardware developed by SEMI members will enable the next great wave of global economic growth. Scott Stevens, SEMI

Powerful winds of change are re-shaping the semiconductor industry as it flexes and re-positions to power a new wave of growth on the back of emerging applications. Today, the industry is thriving, with growth expected to continue through 2019 even as Moore’s Law – the trusty doubling of transistors roughly every two years – begins to pump the brakes. Product mix and production technology are shifting as the dominant smartphone and PC markets, having seen their growth peaks, start to give way to large markets with relatively low semiconductor penetration, such as automotive.What’s more, new potentially ubiquitous technologies and platforms such as AI, blockchain and smart manufacturing are redefining market dynamics and the semiconductor ecosystem that underlies them.Troublingly, the most significant threats to the continued growth of the semiconductor industry are not of its own making. Macroeconomic trends and trade policy disputes loom.These were some of the key takeaways from the SEMI Market Symposium kicking off SEMICON West in San Francisco this week. Following is a deeper look.Semiconductor MarketThe consensus view, reflected in forecasts presented by Clark Tseng of SEMI and Bob Johnson of Gartner, is that the semiconductor industry could top $500 billion in 2019 after reaching $400 billion in 2017. According to Gartner, smartphones and PCs will continue to account for large parts of the market, but will be displaced as major drivers of market growth by the emergence of industrial, automotive and, to a lesser extent, storage, from 2017 to 2022. Johnson noted that while communications and data processing applications drive logic device demand, average sales prices (ASPs) are a bigger contributor to revenue growth than unit growth.Leading-edge processors are a big part of the ASP picture, with equipment costs increasing ~20 percent per node. One challenge is that as Moore’s Law loses steam, leading logic producers are increasingly going their own way with new production technology. The volatile DRAM market – now in a “super cycle,” according to Tseng, and expected to peak in 2019 – has been stoking memory market growth.Initially, supply shortages fueled memory price increases as three of the four leading memory makers invested in flash rather than DRAM capacity. However, memory prices have been more recently been lifted by technology complexity, particularly as DRAM has moved to 3D architectures. The good news is that pricing, at long last, appears to be driven by value.Automotive MarketWith automotive accounting for less than 10 percent of semiconductor demand, there is room for growth. Rudy Burger of Woodside Partners noted that while the end market for automobiles is growing slowly, at 3 percent CAGR, the market size is nearing 100 million units. In market segments such as electric vehicles, the semiconductor content exceeds $1,000 but can be much higher.For example, the BMW i3 sports over $4,000 in semiconductor content. Burger said connectivity, autonomous driving and shared mobility services are also key opportunities for semiconductors to deepen their penetration in automobiles. For instance, the auto market for cameras, is expected to grow from $2 billion in 2017 to $6 billion in 2022.On average, high-end vehicles feature over $1,000 in semiconductor content, whereas low-end vehicles hover in the $400 range, said Anand Srinivasan of Bloomberg. Because the automotive market is segmented by function or subsystem, with different suppliers focusing on different areas, there is little supply concentration. Srinivasan also pointed out that because of significant differences in their objectives, automotive safety and automation systems should be developed separately.BlockchainThe chief benefit of blockchain is the trust it begets among all parties to a digital transaction through four fundamental features, said David Treat of Accenture: The tracking of provenance (knowing who has touched data, and what has happened to it) Tamper evidence (knowing if someone has tried to change the data) Control (which data elements to share with which parties) Security at the data element level While most of the hype over blockchain focuses on tokenized assets and ledgers (bitcoin and other cryptocurrencies), the fundamental application in the semiconductor industry is sharing trusted access to reference data at the data element level. This ability to provide shared trust can reduce costs throughout the supply chain and across enterprises. For example, future blockchain implementations will offer a full ecosystem view to any supply chain participant. While blockchain has typically been deployed through centralized control or platforms, peer consortia, such as SEMI, could help weave the benefits of blockchain through various ecosystems by enabling equipment and material suppliers, device manufacturers, designers and system integrators to share business and technical information securely and, if desired, anonymously.Global and Macroeconomic TrendsThe biggest threats to the continued growth of the semiconductor industry are exogenous. After a decade of steady recovery since the financial crisis, the global economy appears to be heading for a slowdown. Duncan Meldrum of Hilltop Economics made the case that the global economy is at or just past the peak of the business cycle, and semiconductor equipment is past the peak.A key indicator of a looming recessionary is the movement toward an inverted yield curve, in which long-term interest rates fall below short-term rates – a phenomena that could materialize this year or next.The increasingly heated trade climate, marked by high-stakes confrontations between the U.S. and China, threatens complex supply chain arrangements, though mercurial policy statements could do even more harm than stiffer trade tariffs. Underscoring competing interests between the U.S. and China and the unpredictability of their relations, Robert Maire of Semiconductor Advisors pointed out that, in 2019, 60 percent of all semiconductors are expected to be used in China, deepening the dependency of several U.S. semiconductor companies on China.Paul Semenza, for SEMI Industry Research and Statistics

What’s next for smarter, more connected electronics manufacturing - Part 3 The fast-maturing infrastructure now enabling analysis of exponentially larger data volumes brings the microelectronics industry to an inflection point, where the winning companies will be the first to master the use of this data to solve the industry’s emerging challenges. SEMI expands its coverage of these vital issues with a Smart Manufacturing Pavilion and three days of talks SEMICON West, July 10-12 in San Francisco. While deep learning is starting to be applied to image recognition for wafer inspection, it is also being considered for sequential pattern recognition in order to evaluate equipment parameter traces. The next emerging applications will start to use those learned patterns to predict outcomes, and then use those predictions to automate process control. One early application of deep learning is IC process development. “People don’t think of research and development as the first place to automate, but it’s where applying our digitization and simulation has first had impact,” says David Fried, Coventor vice president of Computational Products. He noted that insertion is easier in the lab than in the fab. Technology at 10nm and beyond is now so complex that companies at the leading edge must use process modeling to understand the effect of process variation on their designs. Learning cycles can now be accelerated during development by simulating 10,000 digital wafers instead of running 25 actual wafers during screening, Fried says. Applying structured analysis and machine learning to the data simplifies optimization across the 500 or more interrelated process steps. Coventor has recently introduced a statistical analysis package that aids the design and analysis of process variation experiments by using large volumes of data from its models. Fried says these models are next being used to accelerate the yield ramp in manufacturing. Digital simulation also could speed development of high-mix, lower value products While digital twins are best known for their use in complex, high value products like jet engines, the simulation technology could also enable the electronic manufacturing services (EMS) sector to reduce the time, cost and risk of developing its high mix of products. “The EMS sector’s use of digital twins will be vital for it to smooth the move of CAD/CAM digital design data for so many different products into manufacturing, and to accelerate validation testing of designs and products by doing more of it in the virtual world,” says Dan Gamota, vice president of Engineering and Technical Services at Jabil. Gamota also highlights the push for traceability from the automotive and healthcare markets, where the digital models could be used to quickly assure that the design was built exactly as specified. “In the past year, traceability has evolved from just ‘nice to have’ to ‘how to achieve,’” he adds. “Companies are expecting it, but aren’t willing to accept the cost and risk of doing it alone. We need the community to discuss realistic implementations, identify the most critical elements and bring together the ecosystem partners to build baseline reference architectures for key digital building blocks. The community also needs to assure the reliable flow of data among the electronic manufacturing segments from semiconductor to OSAT to EMS.” Predictive maintenance and virtual metrology applications could mature in next few years While predictive maintenance initially seemed a likely early application of machine learning in factories, it remains a challenge for the electronics sector. “The difficulty is that it’s not clear where to get the most bang for the buck,” says Tom Ho, president of BISTel America, noting that it may make the most sense to track the failure performance of a single expensive part, like an electrostatic chuck, since predicting the failure performance of a whole complex system like an etcher is much harder. “Collecting enough data from all failure types, including especially the rare events, is difficult unless you have a long history of a lot of tools,” adds Doug Suerich, PEER Group product evangelist. “The gain from collecting performance information from many tools across the industry could be big, but many companies still need to overcome concerns around exposing their IP.” Another big opportunity for prediction is virtual metrology – predicting the wafer outcome from the process or sensor data with enough accuracy to replace the physical metrology. “Virtual metrology is improving, and since metrology can be slow and expensive, any reduction could mean a huge potential savings,” says Suerich. “But it is still seen as too scary for many companies. Two to three years from now, companies will expand the practice from lower risk areas into processes that require more confidence in the results.” Moving beyond prediction to automated control needs digital models Once the results are predicted, the model can be used to control or automatically optimize a process and enable the system to learn by itself, usually by reinforcement learning on a digital model. The model can then independently make adjustments to optimize the manufacturing process. “Automated process development is getting close now. Instead of smart guys turning the knobs, deep learning is automating the smart tuning,” says Suerich, suggesting the industry could see widespread adoption in as little as two to three years. This type of machine learning needs a good digital model, and masses of data for learning. One approach uses human experts to build a physics-based model of the clearly understood parts of the process, then turns to deep machine learning to optimize the lesser-understood variables. The alternative, the data-first approach, runs a computer algorithm to suggest the solution purely from data, without human input, and then relies on the human to evaluate the usefulness of the results. Modeling digital twins of wafers could enable automated process control, chamber matching, and fleet matching, says Fried. If every wafer had its own virtual twin with all the upstream metrology and structural information needed to make equipment control decisions, it could feed forward that information to enable the seamless transition from one step in the process to another based on understanding their complex interrelationships. This could potentially improve uniformity across wafers and equipment, and reduce the need for metrology, he argues. Moving metrology sensors into the chamber will also require model-based algorithms to enable dynamic process control in close to real time, says Fried. These algorithms will be needed to acquire, parse, and process the data at high speed, and then to choose how to adjust the controls. “There will be a model behind collecting and interpreting the metrology data,” he notes. “That’s a really rich vein for improvements in process control.” “The end goal is to collect equipment data in real time, analyze it with AI, and send back controls to optimize manufacturing processes,” Jabil’s Gamota says. “This requires a robust architecture for communication between equipment and consistent formats for data collection and analysis. But the cost and complexity of this heavy lifting is too great for any one company to do alone. We need a consensus-based architecture for ingesting, analyzing and acting on the data.” SEMI tests data transfer protocols, benchmarks best practices SEMI is launching a smart data project to identify the various data transfer protocols needed for inter-company communications. The project will feature a proof-of-concept model in a development fab to produce verifiable results so SEMI can better understand how different approaches meet member needs. SEMI’s smart manufacturing technology communities and the Fab Owners Alliance are also benchmarking current smart manufacturing practices in the microelectronics industry to help SEMI members better understand the path forward and potential return on investment. Speakers over all three days at SEMICON West addressing these issues include Active Layer Parametrics, Applied Materials, Applied Research Photonics, ASML, Bosch Rexroth, Cimetrix, Coventor, ECI Technologies, Edwards Vacuum, Final Phase Systems, GE Digital, Infineon, Jabil, Lam Research, Osaro, Otosense, PEER Group, Qualcomm, Rockwell Automation, Rudolph Technologies, Schneider Electric, Seagate, Siemens, Stanford University, TEL, TIBCO Software. See semiconwest.org. What’s next for smarter, more connected electronics manufacturing - Part 1 What’s next for smarter, more connected electronics manufacturing - Part 2 Paula Doe, SEMI

What’s next for smarter, more connected electronics manufacturing - Part 2The fast-maturing infrastructure now enabling applications for big data and artificial intelligence means disruptive change not just at individual companies but also in data connections among companies across the microelectronics manufacturing value chain. SEMI checked in with some leading players on the changes they see coming in the next several years for this article series. The trade group is expanding its programming on smart manufacturing to address these industry-wide developments at SEMICON West, July 10-12 in San Francisco.“The ramp of EUV, and the smaller geometries and smaller process margins, will drive an exponential increase in the amount of metrology data to manage,” says Neal Callan, ASML vice president, Silicon Valley. Callan notes that moving to multibeam e-beam inspection will increase data volume from megabytes per second to gigabytes per second and from thousands of data points to millions of data points. “The process is so tight and the margin so small that stochastic variation, or noise, becomes more dominant – at least it’s noise until we can learn to understand and control it. And understanding and controlling this variation will be key to delivering 5nm patterning,” he says.Single-beam e-beam inspection is already driving large increases in data as engineers extend the slow technology to broad, high-speed defect metrology applications by more intelligently instructing the system where to look for problems. Callan says ASML is now using the scanner data on wafer focus, alignment and leveling. The company is also using the computational lithography model from the design to identify the smallest process windows in the pattern that are most likely to see problems. The model then quantifies the number and significance of those instances.“The collection of all this diverse data means that tools will need to be plug-and-play so all tool data is instantly available to all systems and software,” says Doug Suerich, PEER Group product evangelist. “We need tools that can be discovered automatically by the network so it can start slurping up data immediately. The adoption of the Interface A (EDA) standard is accelerating and fabs are starting to ask for it. The proliferation of sensors also needs to self-discover. If you are going to add thousands of new sensors into a facility, you can’t afford a time-consuming integration process.”“We are now seeing that engineers are greedy for more data – if they can get the data, it’s becoming a need-to-have,” adds Tom Ho, BISTel America president. “Getting more data from more sensors, from the sensors on the tool that are not being fully utilized, and from untapped data sources like vibration is another big coming opportunity.” Process complexity drives demand for feed-forward between silos with computational models ASML co-optimizes its scanner process with etch and reticle process steps. Source: ASML In addition to the drive for trace-back of data, the increasing complexity of interrelated processes is also driving demand for feed-forward of data. “Feed-forward is becoming more important,” notes Ho. He points to the example of 3D NAND features, now getting so deep that identifying the layer being measured is a challenge unless the signal at the step before can be recognized. “We need partnerships with our peers to understand how to take advantage of the sensors they use, integrate them with our data, and then feed-forward corrections to the other systems,” concurs Callan. “To drive the best CD uniformity and overlay, we need to co-optimize litho and etch,” agrees Henk Niesing, ASML director of product management. He notes that the company is working with etcher makers to measure the overlay and CD, decompose the finger prints, and then use models to steer automated control that best adjusts both the scanner and the etcher. ASML is also working with Zeiss on co-optimization between the scanner and the reticle to make even higher-order corrections by locally modifying the reticle.These higher-order corrections, applied on each exposed field, drive the need for even more data, and at higher speed but without higher cost, notes Jan Mulkens, ASML senior fellow. These corrections increase demand for computational metrology, which combines various metrology sources with physics and deep learning models trained on real data to predict and control process results in real time. “We’re working on computational metrology to ideally use all the knobs we have in the fab,” he says. So far this effort has largely involved linking data between two companies. More consistent data formats would enable data exchange to be extended to more companies. “The software versions also need to be managed for upgrades so they still match after one party updates the system on its tool,” notes Niesing. Speakers on these issues of smart manufacturing and data handling at SEMICON West include Active Layer Parametrics, Applied Materials, Applied Research Photonics, ASML, Cimetrix, Coventor, ECI Technologies, Edwards Vacuum, Final Phase Systems, GE Digital, Infineon, Jabil, Lam Research, Osaro, Otosense, PEER Group, Rockwell Automation, Rudolph Technologies, Schneider Electric, Seagate, Seimens, Stanford University, TEL, TIBCO Software. See semiconwest.org.What’s next for smarter, more connected electronics manufacturing - Part 1What’s next for smarter, more connected electronics manufacturing - Part 3Paul Doe, SEMI

Part 2 of this two-part piece examines the potential benefits to be realized by pairing human Subject Matter Experts with smart silicon assistants, and what these new arrangements mean for semiconductor device manufacturing. Part 1 explores best-practice perspectives on collecting and utilizing smart data in industries outside semiconductor manufacturing, one of the important takeaways from the Smart Manufacturing panel discussion at SEMI ASMC 2018. So what does this observation (i.e. the field of medicine, in what seems at first glance a big data environment, is really just clusters and clusters of loose small data connected by the collective neural network of highly trained doctors and their colleagues) mean for semiconductor manufacturing? We think it means we need to apply the same level of intense focus that we already devote to instrumented data collection and analytics in the fab to something more: we need to better capture the vast expertise of our engineering and operational talent in semiconductor manufacturing. We think we need to record what the subject matter experts (SMEs) in the fab see, hear, and think as they investigate yield excursions or machine-down problems. We need to effectively combine product, process, equipment and component subject matter expertise / subject matter experts (SME) with big data analytics to more effectively solve manufacturing problems, be they killer or be they chronic. And we must provide structured methods for incorporating inputs from and active participation of SMEs throughout the data analysis lifecycle, from collection and aggregation, through filtering, feature extraction, analysis and optimization. Some of the challenge will be in just how do we make it easy to gather information from SMEs in real time, while standing in front of equipment in the fab. Internet of Things (Iot) devices are emerging to capture and label images and sounds to enable machine learning algorithms to recognize and help diagnose manufacturing problems based on sight and sound, complementing the instrumented data. But we also need to record the thought processes our human SMEs go through in those investigations – perhaps by the SMEs talking to a smart AI-based conversational assistant who helps make “rounds.” Doing contextual analysis on this added data, combined with the instrumented data, will create the equation Human + Machine = AI (Awesome Insight). Sounds reasonable, right? We think artificial intelligence becomes too artificial if you leave the human out of the equation. AI should be augmented intelligence, where we take the expertise and creativity of the human, and combine it with the rapid computational capabilities of the computer, in order to put problem identification and solutions on steroids. But with the already huge advancements to date in data analytics, cloud, and the emergence of AI, why do improvements in quality, machine utilization, and the implementation of predictive analytics in semiconductor manufacturing seem to be creeping along incrementally, and not appearing as dramatic, step-function improvements? Call it Smart Manufacturing, call it Connected Enterprise, call it Advanced Manufacturing, or Analytics, or Cloud, or the Digital Twin … there are no shortages of terms, philosophies, and technologies available, but why aren’t we seeing their rapid adoption? It could be it’s the downside that comes with needing people. “Good business leaders create a vision, articulate the vision, passionately own the vision, and relentlessly drive it to completion.” Jack Welch. We see from other industries that smart manufacturing conversations originating with the executives of a company thinking to implement smart manufacturing programs lead to vision; however, we also see from other industries, and from our own, that realizing this vision has often been a challenge. Why is that? One reason may be that the people who are personally vested in solutions they implemented in the past, as well as those who follow a pattern of ‘how we’ve always done things’, create, inadvertently or not, persistent internal barriers hindering innovative action. Another may be that engagements with the working engineers and managers charged to be smart manufacturing implementers leads to the pursuit of low-hanging fruit, and cautious investments, that often utilize solutions that ultimately cannot scale and integrate. Not to mention the disadvantage of dealing with the legacy equipment, the legacy networks, the traditional thinking, and the lack of consistency in metrics adding to the confusion. Addressing all these barriers requires an alignment in strategy and execution, along with a plan to support the overall vision, often across the entire enterprise, which is no small matter. And then there are the standards. Having and adhering to standards in control solutions, networks, and data becomes critical in achieving real benefits from smart manufacturing. And data security. One of the other big impediments in the smart manufacturing transformation is data and IP security, another key concern (maybe the most significant) preventing us from moving forward more quickly (e.g. to cloud-based solutions) in our industry. More about that in a follow-up. Achieving synergy across all of manufacturing, from connecting equipment horizontally, through the production system (machines processes), and vertically, through enterprise systems and across production facilities, can only occur if we build standards, security, infrastructure, and human engagement throughout our ecosystem and supply chain. In simple form, the steps to do so include connecting assets, collecting and contextualizing data, and then driving business transformation with actionable insights gained from the data. With impact on every function, and every person, in the enterprise, from equipment operators in the fab through the C-Suite in HQ. Maintenance, Engineering, R D, Operations, Scheduling, IT, Procurement, Finance, HR all contribute, collaborate and benefit. Regardless of the technology, from device level analytics to predictive maintenance and optimization, the people that reside in these disparate groups need to come together with the smart machines to create a common strategy to achieve transformational results. Aligning an enterprise’s goals with its human capital is paramount to success. Therefore, we must challenge our team members and ourselves to work outside our comfort zones, and we need to be forever aware of the need for us to grow with the technology. Smart manufacturing is not necessarily about having fewer people in the fab, but it does suggest having people in the fab, perhaps with different, or upgraded, skill sets, who are even more efficient in their roles as a result of the boost they are getting from Industry 4.0. Fortunately, we now have techniques that let us combine the best, brightest, and latest and greatest analytics with our invaluable SMEs throughout the data analysis lifecycle. We’ll not only be able to deliver higher quality semiconductor manufacturing solutions all in all, but we’ll also be providing methods to more easily distribute, scale, maintain, and continually refine those hard-earned solutions. We expect that subject matter experts will continue to put the “smart” in machine-based smart manufacturing today, and for the foreseeable future. SME contributions are not an option, but, rather, an imperative for ensuring a semiconductor manufacturer’s sustained prosperity, much less its survival. Nancy Greco (IBM Watson), Dave Mayewski (Rockwell Automation), James Moyne (University of Michigan / Applied Materials), and Paul Werbaneth (Intevac, Inc.), along with Julie Jacob (Ernst Young), and Carson Henry (Micron Technology), were members of the SEMI ASMC 2018 panel discussing Industry 4.0 and the Future of Commercial Semiconductor Device Manufacturing. All opinions here are purely our own. Please contact Paul Werbaneth via email at [email protected]. The SEMICON West (July 9-11, 2018, in San Francisco) Smart Manufacturing Pavilion features working production equipment on the floor and three full days of speakers providing insights on building the infrastructure needed to enable AI. Equipment from Bosch Rexroth, Cimetrix, Rudolph Technologies, INFICON, Final Phase Systems, OMRON, DISCO and Edwards Vacuum will showcase cutting-edge smart manufacturing technologies. For information on the SEMI Smart Manufacturing initiative and how to get involved, please click here.

What’s next for smarter, more connected electronics manufacturing - Part 1The fast-maturing infrastructure now enabling applications for big data and artificial intelligence means disruptive change not just at individual companies but also in data connections among companies across the microelectronics manufacturing value chain. SEMI expands its smart manufacturing program with a Smart Manufacturing Pavilion with displays and three full days of talks to address these industry-wide developments at SEMICON West, July 10-12 in San Francisco.Autonomous autos’ demand for zero-defect systems and 100 percent traceability back to the manufacturing data for each die is driving a push to traceability across the chip sector. “Far more chips are being used by the automotive sector, and its very different requirements are driving demand for traceability,” says Tom Ho, president of BISTel America. “Our chipmaker customers are looking for traceability solutions and the trend is the same in backend packaging and assembly – automotive applications are driving the sector to traceability.”Traceability is also driven by the growth of systems in a package as fabless chipmakers look to connect back to the packaging companies’ fault analysis labs and die interconnect history to diagnose and fix the cases where known-good die are failing in the system, adds Mike Plisinski, CEO of Rudolph Technologies. Plisinski adds that makers of consumer products like phones that can also see harsh conditions are demanding higher quality and traceability as well. The electronic manufacturing services (EMS) sector also must establish an architecture for traceability to collect critical manufacturing-related data and to interface with OSATs and semiconductor fabs. The reason is that EMS companies are adding traditional OSAT processes such as assembly of products with bare die and complex optics modules requiring clean rooms. “A unified sand-to-smart-phone smart manufacturing roadmap should be established,” says Dan Gamota, vice president of Engineering and Technology Services at Jabil. “We need to identify protocols for manufacturing data communications that can be adopted across the supply chain.”To enable smart manufacturing, vendors need to collaborate on getting their production equipment to interoperate and support factory analytics and data management systems. Source: SEMI One big challenge, of course, is how to format this diverse data so it can be linked and used by various supply chain stakeholders. “Smart data needs to be contextual and it needs data standards across the supply chain so it’s easy to link from the front end to the back end, follow common lot IDs front and back end, and have a way to map streaming data from sensors to a discrete lot ID,” notes Ho. New approaches to metrology, analysis and test that increasingly exploit machine learning on simulations will also be needed to help predict which die and connections that test well now may fail in the future as conditions change.Another issue is how to securely share the needed data across companies without jeopardizing IP. “On the equipment side we collect data across customers on how the tool is running to improve the equipment,” notes Neal Callan, ASML VP Silicon Valley. “Next we need to integrate performance and reliability data that today is not as well shared.”The other big hurdle is how to pay for data sharing. “The challenge is that the final manufacturers reap the benefit of traceability, but since they expect their suppliers to deliver good die, they don’t want to pay more for it,” notes Plisinski. He suggests that over the next two to three years, traceability and predictive fault prevention will become the norm as the automotive sector is compelled to invest in it to assure safety. Meanwhile, fabless companies will face so much complexity in integrating different die from different suppliers in SiP that they will no longer be able to afford to simply use the cheapest supplier, potentially driving a fundamental shift in relations and division of labor among fabless chipmakers, OSATs and fabs. Standards extend across supply chainSEMI member committees are collaborating to build the infrastructure to enable these developments. Standards committees are updating standards for higher bandwidth data exchange and extending semiconductor-like vertical and two-way horizontal equipment communication standards to flow shops to enable assembly players to optimize and trace back results across players. The SMT/PCBA community is integrating its smart manufacturing work into SEMI standards, and the SEMI A1 standard was a key reference document in the development of the Japan Robotics Association’s Equipment Link Protocol.Speakers addressing these issues at SEMICON West include Active Layer Parametrics, Applied Materials, Applied Research Photonics, ASML, Bosch Rexroth, Cimetrix, Coventor, ECI Technologies, Edwards Vacuum, Final Phase Systems, GE Digital, Infineon, Jabil, Lam Research, Osaro, Otosense, PEER Group, Qualcomm, Rockwell Automation, Rudolph Technologies, Schneider Electric, Seagate, Siemens, Stanford University, TEL, TIBCO Software. See semiconwest.org.What’s next for smarter, more connected electronics manufacturing - Part 2What’s next for smarter, more connected electronics manufacturing - Part 3Paula Doe, SEMI

As artificial intelligence’s (AI) sprawling influence reshapes industries from logistics and healthcare to automotive and manufacturing, Taiwan is poised to leverage its cutting-edge capabilities and rich history in semiconductor manufacturing to stake out a leadership position in AI. Taiwan’s semiconductor manufacturing industry accounts for a major share of the region’s GDP and, with its manufacturing prowess, the region is fertile ground for using AI to optimize and even revolutionize chip manufacturing. In an AI and Semiconductor Smart Manufacturing Forum recently hosted by SEMI Taiwan, experts from Micronix, Advantech, Nvidia and the Ministry of Science and Technology of Taiwan (MOST) shared their insights on how deep learning, data analytics and edge computing will shape the future of semiconductor manufacturing. Here are four key takeaways.1. Monitor, Forecast, and PreventToday, tier 1 foundries use AI tools to combine equipment know-how and manufacturing statistics in managing massive Fault Detection (FD) data, much in the way that a car’s tire-pressure monitoring system helps maintain safe inflation levels and prevent accidents. For example, AI enables the real-time collection and monitoring of massive amounts of processing data, then alerts system administrators of any hardware failures or other manufacturing abnormalities.AI also makes it possible to adopt Run-to-Run (R2R) control to automate manufacturing process adjustments and corrections by providing feedback that can drive higher processing efficiency. In addition, virtual metrology replaces manual sampling inspection for comprehensive quality control, enabling foundries to improve yields, reduce costs, and strengthen their competitive advantage.2. Beyond Automation: Edge Computing The evolution of IoT is giving rise to a paradigm shift in the industry as the recognition grows that smart factories must go beyond automation to focus also on intelligence. All information – from equipment status and manufacturing process statistics to on-site environmental data – needs to be collected through sensors. In highly time-critical scenarios, returning all sensor data to the cloud for processing is time-consuming and impracticable. This is where edge computing’s real-time features and lower cost than cloud computing come into play.How does edge computing work in a smart factory? First, a rich trove of data from various devices is collected and integrated via Manufacturing Execution Systems (MES). Software analysis then produces a real-time factory production status before production data is visualized through a combination of system platforms and human-machine interfaces. In the end, the data is analyzed realtime in the cloud so failures can be predicted and prevented to help increase capacity and reduce costs. The approach is even capable of Bill of Materials (BOM) predictions, allowing better collaboration between upstream and downstream suppliers.3. Deep Learning Accelerates AI Deep learning enables autonomous driving, intelligent voice assistance and many other AI breakthroughs. The heart of deep learning is its ability to automatically process and learn data in various formats such as images, video and text with no human domain knowledge. This increases predictive accuracy and efficiency in processing massive amounts of data. Deep learning also enhances the efficiency of human-machine collaboration.4. Taiwan’s Competitive Niche: Industry 3.5Industry 4.0 is not just about improving production management. It also focuses on integrating supply chains, even among competitive companies. For Industry 4.0 to thrive, rival companies must grow together. The first and third industrial revolutions centered on disruptive technologies like steam engines, transistors and digital, while the second and fourth revolutions homed in on competition among various business models, platforms and industry ecosystems.While Taiwan’s strengths include innovation, short time-to-market, low manufacturing costs, and high supply chain management efficiency, the region still lags advanced countries in basic industry and research capabilities. Squeezed by Chinese supply chains and high-end manufacturers in advanced countries, Taiwan should start by carving out an Industry 3.5 niche for the island’s manufacturers. SEMI will continue to facilitate cross-industry connection, collaboration and innovation to help manufacturers seeking higher production efficiency and lower costs incorporate AI as a core competitive advantage. At SEMICON Taiwan 2018, SEMI will unveil its Smart Manufacturing Journey, an exhibition that gathers leading AI companies such as ABB, Advantech, Nvidia, Sony and UPS to demonstrate a comprehensive roadmap for smart manufacturing technologies and applications. For more information, please visit the SEMICON Taiwan website.Emmy Yi is a marketing specialist at SEMI Taiwan.

Part 1 of this two-part piece explores best-practice perspectives on collecting and utilizing smart data in industries outside semiconductor manufacturing, one of the important takeaways from the Smart Manufacturing panel discussion at SEMI ASMC 2018. Part 2 examines the potential benefits to be realized by pairing human Subject Matter Experts with smart silicon assistants, and what these new arrangements mean for semiconductor device manufacturing. The spacecraft Discovery and its HAL 9000 computer system had a digital twin. Did you know? Stanley Kubrick’s seminal film “2001: A Space Odyssey” had its theatrical release 50 years ago this April. “2001” isn’t just a great science fiction film. Rather, it’s a great work of cinema overall, across any category. (The American Film Institute lists “2001” as #15 in the AFI Top 100; a bit below “Vertigo,” a bit above “It’s A Wonderful Life.”) It’s a film so distinguished and so prescient that its lessons can inform our thinking about smart manufacturing, Industry 4.0, and artificial intelligence (AI) today. Not to give too much away, but the earth-bound digital twin of Discovery / HAL identifies a diagnostic error the onboard, Jupiter-bound HAL 9000 has made, things go awry from there, and one of the mission pilots, astronaut Dave Bowman, is forced to intervene. At the recent SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2018, on 02 May 2018 in Saratoga Springs, NY, five diverse panelists representing capital equipment, IDMs, academia, the semiconductor supply chain, and smart manufacturing best practices outside the semiconductor industry engaged in a lively discussion with the ASMC attendees. They explored where “smart” is in our industry today, where it’s headed, and what that’s going to mean for us -- the professionals who have brought semiconductor manufacturing to the current state of smart, and are looking to implement an ever-smarter tomorrow. Not to give too much away, but the panelists and audience agreed that there’s nothing artificial about pairing human intelligence with machine-based smart manufacturing. Implementing an ever-smarter tomorrow in semiconductor manufacturing requires smart people just as much as it requires smart machines. Moving towards “smart” means understanding how to derive useful information and actionable intelligence from the ever-increasing pool of big data created during semiconductor manufacturing. Modern manufacturing sites are extensively instrumented today, and create massive amounts of data to consume, decipher, base decisions upon, or discard. As we dig into this problem we realize that equipment and processes in our industry are both obviously complex, but, also, subtly complex. Semiconductor manufacturing tools easily contain 100s to 1000s of components working together to produce nanometer scale, angstrom scale, or even atomic scale features using complex chemical, physical, and plasma processes. There is a plethora of potential failure points and modes, and despite our best efforts to collect more data, many processes continue to be only poorly observable. On top of that, semiconductor fabrication processes are always drifting, and the operational context is continually changing as we change product mix, process maintenance swap-out kit components, and operating conditions and recipes. Sounds like … hospitals, and healthcare? When you see your doctor, she will collect and look at your instrumented data – blood work, blood pressure, weight, and other quantifiable factors. But, typically, your doctor won’t draw a conclusion based on that analysis alone. Rather, your doctor will sit with you, ask probing questions, and record what she asked, your responses, and what she saw, what she heard, and what she thought. Then she’ll build a hypothesis, combining the “anecdotal” data with the instrumented data, and derive from that data set both a likely diagnosis and an effective course of action. In this case, beyond the instrumented data, two humans, and their natural language input, are part of the equation: the patient, with his observations and thoughts, as well as the doctor, with hers. And it’s been a formula for success. Healthcare has made huge, step-function improvements across a spectrum of deadly diseases, as well as with less-deadly chronic afflictions, by harvesting this complex input, committing the proven disease presentation – disease diagnosis – and disease treatment models to medicine’s collective memory, and then teaching the next generation of healthcare providers both the general methods and the standard protocols essential to maintaining good health and successful outcomes. Maybe, in medicine, what seems a big data environment is really just clusters and clusters of loose small data connected by the collective neural network of highly trained doctors and their colleagues. Nancy Greco (IBM Watson), Dave Mayewski (Rockwell Automation), James Moyne (University of Michigan / Applied Materials), and Paul Werbaneth (Intevac, Inc.), along with Julie Jacob (Ernst Young), and Carson Henry (Micron Technology), were members of the SEMI ASMC 2018 panel discussing Industry 4.0 and the Future of Commercial Semiconductor Device Manufacturing. All opinions here are purely our own. Please contact Paul Werbaneth via email at [email protected]. The SEMICON West (July 9-11, 2018, in San Francisco) Smart Manufacturing Pavilion features working production equipment on the floor and three full days of speakers providing insights on building the infrastructure needed to enable AI. Equipment from Bosch Rexroth, Cimetrix, Rudolph Technologies, INFICON, Final Phase Systems, OMRON, DISCO and Edwards Vacuum will showcase cutting-edge smart manufacturing technologies. For information on the SEMI Smart Manufacturing initiative and how to get involved, please click here.

The fast-maturing hardware and software that are enabling practical applications of equipment intelligence and machine learning mean disruptive change for microelectronics manufacturing. But first comes the basic work of building the basic infrastructure, figuring out IP separation, and learning to solve physical problems in the digital world. Just how much can the semiconductor industry leverage industrial IoT practices from other industries? Common wisdom may be that industrial software solutions aren’t well suited to the IC sector’s complex needs. But GE Digital enterprise account executive Luke Smaul, currently working with Intel, argues that semiconductor fabs and toolmakers are dealing with similar issues as GE did when it first started working with Delta Airlines to monitor the GE engines on Delta planes. Smaul will speak at SEMICON West about GE’s work with Intel over the past few years and, in particular, how its solution for cloud security and IP separation can work for ICs. “GE learned to provide IP security and separation in the aviation space with its suppliers, which moved us all up the value chain, providing a big engine for growth,” says Smaul, who started his career as an IC engineer. “GE Aviation saw a 25 percent increase in issue detection rates by leveraging the same common platform. We’ve shown that we can protect Intel intellectual property in its own cloud space and control who can access what.” A toolmaker can access only particular fab data as needed for analysis, and then can reveal only the output from the analysis and a subset of supporting data. “IP separation has to happen, and it will unlock huge added value,” Smaul says. GE’s Predix solution aims to supply an easy-to-use, plug-and-play system for analytics to enable a yield engineer without a deep data background to select a supported sensor, a gateway to connect automatically to the cloud, and an analytics application to test a hypothesis of how the collected data relates to yield. “This empowers the yield engineer to use and unlock information for a quick improvement, even for simple things such as looking at the impact of degradation of fan performance over time on yield,” says Smaul. “Though the scope may be small, the impact on yield in aggregate, and when scaled, is large.” “There needs to be much more collaboration across the industry to make this work, and to share best practices,” says Smaul. “Just as GE moved from selling gas turbines to selling power-as-a-service, vendors of other big, expensive assets like IC equipment will likely change their business model from selling tools towards selling yield-as-a-service. This will simplify life for the fab while bringing the toolmaker more opportunity to sell improved capabilities on existing tools.” More human intelligence makes AI smarter Applying AI neural network approaches such as deep learning to predict outcomes from digital models is enabling disruptive advances in speech and image recognition, but applying it to complex IC manufacturing problems such as predictive maintenance has been a challenge. These neural networks require massive amounts of data to train, and the IC sector doesn’t really have big data, just a lot of little data clusters due to the dynamics and context richness of processes. This data is difficult to combine for analysis. In addition, the neural network provides only an answer but can’t explain why, notes Michael Armacost, managing director of advanced service engineering at Applied Materials. “We’ve learned that it works better if we do not ignore what we know already, but rather incorporate expert knowledge in a structured way to help us focus on the key features and the key data,” says Armacost, who will also speak in the program. This includes choosing the most important steps to include in the model, identifying the limited data to collect and how to filter the data for outliers, and then selecting the final parameters and features, adjusting the limits, and making adjustments as results drift change over time. The less data needed, the better for the complicated issue of IP protection as well. The big gains from these new analysis approaches will likely require data from more than one company and supporting security for remote connectivity. “Some end users are attempting to do the AI all themselves, but in the long term there will need to be collaboration across companies,” says James Moyne, University of Michigan professor and consultant to Applied Materials, another speaker. Collaboration will need to balance the value of the solution against the risk of compromising IP. “The low-hanging fruit are applications such as predictive maintenance in areas that do not involve high-priority IP. Another approach will be to limit the amount of shared data needed – to first build the model on a wide range of data, but then to use only a very small amount of data to operate the models.” Ready-made models could speed the process Coventor’s semiconductor process models are finding initial applications in R D whereby companies use the simulation to understand the effect of process variation on their complex designs. Instead of running dozens of actual wafers to optimize semiconductor processes, users can instead quickly simulate the results of complex process interactions on their design. Going forward, the process models could find a wide range of applications, from accelerating stabilization of new processes in the fab to enabling real-time co-optimized control across previously independent unit steps to improve wafer uniformity. “This improved uniformity across wafers and equipment could potentially reduce the need for costly physical silicon validation,” suggests Joseph Ervin, Coventor director, semiconductor process and integration, another SEMICON speaker. “Making use of in-situ metrology for real-time control also demands a digital model to process and analyze the collected data for quick response. This area has tremendous potential for improving semiconductor process control.” SEMICON West features a Smart Manufacturing Pavilion with displays and three full days of speakers on building the infrastructure needed to enable disruptive artificial intelligence in the microelectronics sector. www.semiconwest.org The SEMICON West Smart Manufacturing Pavilion features interactive Touch Liquid Crystal Displays (TLCD) and working production equipment on the floor from Bosch Rexroth, Cimetrix, Rudolph Technologies, Inficon/Final Phase Systems, OMRON, DISCO and Edwards Vacuum. For information on the SEMI Smart Manufacturing Initiative and how to get involved, please click here. Paula Doe, SEMI