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Trace Water Measurement in Organic Solvent Systems for Semiconductor ManufacturingABSTRACTThe control and measurement of trace water in organic solvent systems is a fundamental yet often...

BIOGRAPHYKathryn is the Director of Research at the Kyl Center for Water Policy at Arizona State University.  She served for many years as Director of Phoenix Water Services as well as Director...

BIOGRAPHYOlga L. Teran has over ten years of experience in higher education, workforce development, and community engagement. Ms. Teran currently serves as the Workforce Program Manager at the...

BIOGRAPHYLalitha Immaneni is an engineering leader with 30 years of experience in cross-functional global engineering management, strategic planning and execution, and operations management. A solid...

TTV Optimization in Wet Chemical Thinning Using Integrated MetrologyWet chemical thinning is essential for enhancing substrate uniformity by removing subsurface damage from prior mechanical...

BIOGRAPHY  Siddarth Sampath is a technology leader and subject‑matter expert in liquid filtration, contamination control, and purification for the semiconductor...

Wet Cleaning of Sulfur Residues Post RIE for Advanced BEOL IntegrationIn this study, we investigate traditional wet cleaning methods for removing sulfur residues after RIE etching. The effectiveness...