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The Critical Role of Pre-Saturated Cleanroom Wipers in Contamination Control for Advanced Semiconductor ManufacturingABSTRACTAs semiconductor feature sizes continue to shrink and yield requirements...

Low Stiction PFR FFKM and Related Test Method ABSTRACTPerfluoroelastomers (FFKMs) are key raw materials for producing seal elements for applications in semiconductor manufacturing. Beside the...

BIOGRAPHY Mr. Wagner has been in the semiconductor wet processing and chemical wet bench industry since 1981. He joined Modutek in 1987 and has been with the company for over 30 years. He has...

Quantitative Analysis of Damage Depth in Highly Selective Etching and Cleaning Processes for Spacer Nitride PreservationABSTRACTIn advanced device integration, highly selective etching and post-etch...

Highly Selective SiOC Etch for Advanced Sub-3nm ApplicationsABSTRACTSilicon Oxycarbide (SiOC) is a hybrid low-k dielectric material which comprises between k-values and robustness.  It is widely...

Semiconductor Equipment Part Coating Opportunities with Atomic Layer Deposition (ALD)ABSTRACTAs semiconductor architectures evolve toward 3D logic and memory, part coatings must address escalating...

Mayura Padmanabhan is a Program Manager at SEMI, where she leads the Semiconductor Manufacturing Cybersecurity Consortium (SMCC) technology community. She previously worked as a Probe Engineer in...

Dr. Dory has extensive experience in microelectronics covering semiconductor fab processing and assembly, hybrid circuits, and package assembly & test. He has worked in many different aspects of...

BIOGRAPHYMike Eugenis is the Director of APS’s Resource Planning group, which is primarily responsible for the development of the company's fifteen-year Integrated Resource Plan (IRP) and supporting...

BIOGRAPHYMayor Kevin Hartke is passionate about all things Chandler and Arizona. He began his second term in January 2023. Kevin served as Vice Mayor twice, as well as on City Council for nine...