MEMBER DIRECTORY

SENTECH Instruments develops, manufactures, and sells worldwide advanced quality instrumentation for plasma process technology, thin-film metrology. SENTECH plasma process systems, including ALD and ALE, support leading-edge applications. They feature high flexibility, reliability, and value for money. SENTECH develops and manufactures in-house and thus allows for customer-specific adaptations for research facilities and industry. We specialise in applications for optoelectronics, MEMS, sensors, power devices and quality control. SENTECH offers a broad range of automated and semi-automated spectroscopic ellipsometers, laser ellipsometers, and reflectometers for the reliable and precise measurement of thickness and optical constants on thin films and layer stacks.

At SPS, we're dedicated to driving technological innovation forward and leading the charge towards a more sustainable future. With over 35 years of experience in the semiconductor industry, we're dedicated to helping our customers succeed and driving progress for a better future. As a key player in the industry, we take pride in our role, offering cutting-edge solutions, deep expertise, and exceptional service to our customers. In today's rapidly evolving landscape, our customers face constant pressure to produce smaller, smarter and more efficient microchips while maintaining high standards of cleanliness. Leveraging our expertise in wafer handling and wet process equipment, we're here to guide our customers through every step of their semiconductor processes, providing a comprehensive range of advanced products and tailored solutions. Our own brands: waferhandlingsystems.com | sps-polos.com | esproflow.com | spincoating.com

SUSS is a leading supplier of equipment and process solutions for microstructuring in the semiconductor industry and related markets. In close cooperation with research institutes and industry partners SUSS contributes to the advancement of next-generation technologies such as 3D Integration and nanoimprint lithography as well as key processes for MEMS and LED manufacturing. With a global infrastructure for applications and service SUSS supports more than 8.000 installed systems worldwide. SUSS is headquartered in Garching near Munich, Germany.

Siconnex is a global leading equipment manufacturer for the semiconductor and related industries.Siconnex provides surface preparation equipment and processes, including WET BATCHSPRAY systems for the III-V semiconductor, MEMS, wireless, power, energy harvesting, WLP, data storage and logic industries. Our technologies help to make innovations like smartphones, solar panels and power electronics more affordable and accessible to consumers and businesses around the world. Siconnex systems are leading when an extremely small footprint, safety, full automation, high throughput and economical resource consumption is important.

COLANDIS, as a clean room technology company, offers comprehensive solutions for the prevention and elimination of various types of contamination. Minienvironment-technology is the basis for all other products and services. Customer-specific fan-filter modules FFU create the necessary cleanliness in the immediate product and process environment. Whether particles or chemical contaminations, the necessary solutions are realized by COLANDIS. The focus is on the respective process and not on the clean room. "The best cleanroom is the one you don't need". The extensive product range is supplemented by various services such as cleanroom and cleanliness suitability tests, the rental of mobile cleanrooms, cleanroom qualification measurements and cleanroom-compatible cleaning and packaging of machines, systems and components under defined cleanroom conditions..

As a global leader in the design, engineering and building some of the most advanced semiconductor fabs in the world, Exyte provides fab owners with the certainty they expect in safety, costs, timelines, and quality. With a history of more than a century, the company has developed a special expertise in controlled and regulated environments, Exyte's comprehensive expertise covers the area of Mechanical, Electrical, and Process (MEP), and Civil, Structural, and Architecture (CSA), including Tool Install. With the acquisitions of Critical Process Systems Group (CPS), Airgard, Collabratech, Kinetics, and Intega, Exyte expanded its services to include innovative cleanroom technologies, critical subsystems, like precision chemical and gas mixing and distribution systems, facilities management, and abatement / exhaust systems to reduce greenhouse gas emissions. Operating in more than 20 countries, Exyte is uniquely positioned and committed to support the microelectronic industry.

AES motomation provides clean room handling solutions for the semiconductor, flat panel display and solar industry. We offer a variety of atmospheric and vacuum handling robot systems as well as Load Ports. Integrated solutions range from modules such as EFEMs and vacuum transfer chambers up to fully integrated complete handling platforms. Our solutions are based on a wide variety of products which we also customize to exactly meet specific customer requirements. Our Auto-Teaching solution allows the robot to use a sensor carrier to learn all teach positions within the entire tool independently, requiring no external assistance. This significantly shortens the initial tool set-up time, as well as any down time in the field for re-teaching purposes.

We supply Wafer Handling, Metrology and Consumables. Products include Batch Wafer Transfer systems and Wafer Loading Systems for process tools including 300mm technologies, FOUP stockers. Non-Contact Sheet resistance and Bulk resistivity measurement for X-low Ohms to k-Ohms, conductivity type analyzer, Thin Film meurement system and Profiler.

SEMILAB provides state-of-the-art process control and metrology solutions for semiconductor wafer and device manufacturers, as well as the solar and display industries worldwide. With over 300 unique products, our growing portfolio offers a wide range of optical and electrical measurement technologies, from tabletop to inline solutions. LST is the industry standard for monitoring and analysis of bulk microdefects, while Semilab AFM enables nanoscale surface roughness monitoring and defect review of Si, SiC, and GaN samples. PMR monitors various ion implantation parameters in Si and SiC wafer production. EIR is designed for epitaxial thickness characterization. uSE offers high-throughput thin film characterization. En‑Vision targets non-destructive detection of buried defects. Semilab covers the full R&D lifecycle, from research and metrology development to manufacturing and implementation, enabling efficient production control while ensuring an exceptional user experience.

Polyteknik AS - WHEN THIN FILM MATTERS Polyteknik AS is a PVD equipment manufacturer with an innovative and best service approach. With more than twenty years in business, a global reference list, and an excellent platform of technology, Polyteknik AS has turned to be an appreciated partner in the thin film industry. PVD Systems The portfolio of platform systems range from small scale R&D to high volume or large area deposition systems - covered by the FLEXTURA and INFINITY VB platforms. Polyteknik AS cover several deposition processes including sputtering, evaporation, and varieties of these. At Polyteknik AS you will meet a dedicated team interested in a strong cooperation towards the best solution. We offer both standard systems and joint customer developed systems for specific purposes. Our reliable PVD systems are featuring: Modular standard systems Modular process packages Modular investment platforms Contract Coating Polyteknik AS has various industrial coating equipment installed for daily subcontract coating (Coating Service). The Coating Service division has more than 10 different variations of PVD systems in-house. This enable us to do proof of concept on wafer, 3D objects or even roll-to-roll, which can be essential for non-standard coatings. They d(more...)

Analysis/Measurement: Film Thickness, Microscopes, Probing Equipment/Accessories, Surface Inspection/Flatness - Surface and defect inspection, SEM CD Overlay. Assembly/Hybrid Equipment: Automation & Robotics, Burn-In, Cleaning Equipment, Inspection. FLAT PANEL DISPLAY (FPD) - Materials: Developer/Stripping & Cleaning/Etchants/Other. FLAT PANEL DISPLAY (FPD) - Processing Equipment: CVD, Wet Etching/Stripping. FLAT PANEL DISPLAY (FPD) - Test/Measurement/Repair Equipment: Optical Test, Surface Inspection/Flatness, Thickness Measurement. Photomask Equipment/Materials: Mask Making Equipment. Process Equipment: Handling/Transfer/Linear Motion Systems, Inspection Equipment, Laser Beam Equipment, Flat Panel Display, Manufacturing Equipment. Services: Training.

SINGULUS TECHNOLOGIES develops and assembles innovative machines and systems for efficient and resource-saving production processes, which are used worldwide in the solar/hydrogen, semiconductor, medical technology, consumer goods and data storage sectors. The applications include vacuum thin-film coating, surface engineering, wet-chemical processes as well as thermal process technologies.

Analysis/Measurement, Probing Equipment/Accessories. Test: Wafer Chucks(Hotchucks), Handlers, Positioners, Probers, Hybrid Thermal Test Equipment, Thermal Systems for Wafer-Probing, Hybrids, components. Individual Thermal Test Solutions.

Association of more than 100 companies, universities and research institutions of the microelectronic field in Saxony (Germany). Its an intermediary for know how, people, information and service.

DAS Environmental Expert is a leading environmental technology company that provides sustainable solutions for waste gas abatement and waste water treatment while minimizing resource usage. The family-owned, mid-sized business with headquarters in Dresden, Germany stands out with more than two decades of technology and market know-how. Our worldwide employees further develop this knowledge every day. Every one of them is an Expert in his or her own field. This enables us to offer products and services that set the highest international standards. That is what we want to express when we say “Environmental Expert”.

Plan Optik AG, a high tech glass processor, existing since 1962 and based in Germany, has focused more and more on MEMS related products from glass or similar materials (mainly borosilicate glass wafers used for wafer level packaging of MEMS). Within the last years, Plan Optik - Wafers set the standard for glass wafers of this still young market.This success is driven by the development of own manufacturing methods e.g. for the polishing of glass wafers. So called MDF (micro damaging free) polished wafers show an impressive surface quality (no sub surface damaging) and are suitable for safety relevant devices such as tyre pressure sensors. No sub-surface-damaging means a dramatically increased yield during etching processes. Additionally the surface roughness is much below 5 Angstrom (0.5 nm) - this makes them suitable for direct bonding.The chips manufactured with Plan Optiks wafers are already implemented in more than 100 million sensors and micro fluidic systems per year.Our structured wafers are used in active components of micro fluidic and lab-on-chip devices. This includes Nano-Dispensing-Systems and Nano-Vaporizers for medicament administration.In the near future the technologies developed and used by Plan Optik will set new standards in consumer electronics - especially (more...)