sustainability

Q3 2025 was packed with activity. From finalizing the Standards program for SEMICON West, to organizing the event’s corresponding Global Standards Summit (GSS), the Standards team is excited to share its most recent quarterly developments.On Tuesday, October 7, leaders from across the industry convened in Phoenix, Arizona, for the second annual GSS. This half-day summit focused on future standardization needs for supply chain traceability and environmental sustainability. In addition, the Standards team conducted two workshops at SEMICON West. The first, SEMI Liquid Chemicals Analytical Workshop, detailed recent advances in analytical methodology and instrumentation related to particle measurement, trace metals, and organics in liquid chemicals. The second, Enhancing Voltage Sag Immunity: SEMI F47 Standards Updates Insights Workshop, offered a forum for sharing improvements to SEMI Standard F47 to further enhance tool performance and reliability. Finally, Q3 saw the official introduction of SEMI Standards T26 and E195. SEMI T26-0925, Specification for Electronic Supply Chain Traceability Using Distributed Ledger Technology, will be crucial for improving security and transparency for the industry’s supply chain. Additionally, SEMI E195-0925 is now available for purchase. This standard, Test Method Using Adhesive Replacement Substrates to Assess Particulate Surface Contamination on Critical Chamber Components, offers a testing approach for measuring the ISO 14644-9 cleanliness of a critical chamber component.To participate in upcoming standard developments, learn more about becoming a member of the SEMI International Standards Program. Global Standards Summit The SEMI GSS made its North American debut at this year’s SEMICON West in Phoenix. Building on its inaugural event at SEMICON Japan 2024, GSS is a strategic forum dedicated to creating an industry-wide standardization roadmap for the next three and seven-year benchmarks. The 2025 GSS continued conversations from SEMICON Japan on environmental sustainability, while expanding its program to include supply chain traceability. As geopolitical tensions, mounting cybersecurity threats, and rising technological demands continue testing the limits of the industry’s supply chain, the need for global standardization is becoming increasingly apparent. The 2025 GSS program addressed these concerns and others across multiple sessions, offering insight on how these challenges are being addressed in the industry while highlighting critical areas still in need for standards development. Key outcomes from the GSS program include: Addressing data sharing across multiple supply chain tiers while protecting IP rights and a call for harmonization across standards. The presentation by Randy Hall from the Provenance Chain Network, offered approaches on how data owners can share information with authorized users without compromising sensitive manufacturing details. While there are standards gaps that hinder broader adoption, there is opportunity to address insufficient visibility across the industry’s supply chain amid ongoing cybersecurity threats by harmonizing across existing standards implementations. An integrated modeling framework for informing energy efficiency and carbon reduction approaches. Developed by the International Roadmap for Devices and Systems (IRDS) Environmental Sustainability for Semiconductor Facilities (ESSF) team, this effort helps address demands for maintaining rapid technological progress while still meeting the industry’s ambitious sustainability goals.Standardization opportunities for improving sustainability within manufacturing facilities. Nate Monosoff from Jacobs offered insight into the decision-making tradeoffs that balance sustainability with other facility performance areas, focusing on standard methods for calculating ESG performance. GSS concluded with a panel discussion that featured leaders from AMD, FTD Solutions, Intel, The Provenance Chain Network, Jacobs, Qualcomm, and Tokyo Electron. In this session, our thought leaders discussed the fundamental importance of standardization for our industry, standards adoption, incentivizing stakeholders, and how standards can be designed to remain flexible and adaptive as technologies and regulatory landscapes evolve. SEMI Standard T26In line with the 2025 GSS theme of supply chain traceability, the Standards team is pleased to introduce SEMI T26, Specification for Electronic Supply Chain Traceability Using Distributed Ledger Technology. This standard was published in September to define a secure and decentralized traceability system that all members of the electronics supply chain can safely share. This system is based on distributed ledger technology to improve industry-wide reliability assurance.Update on Document 7130CIn February, Document 7130C was approved during the North America Metrics Technical Committee Chapter Meeting. The document officially became SEMI E195 - Test Method Using Adhesive Replacement Substrates to Assess Particulate Surface Contamination of Critical Chamber Components in September.SEMI E195 describes a quantitative method for measuring the ISO 14644-9 surface cleanliness for particle concentration of a critical chamber component (CCC), by means of an adhesive replacement substrate. The purpose of this standard is to ensure measuring and reporting consistency across CCCs or processing equipment manufacturers. To help acquaint the industry with this standard, SEMI offered a combined, in-person course on SEMI E194 and SEMI E195 during SEMICON West. The course provided fundamental information on each standard, in addition to other process approaches for improving reliability and yield.Other SEMI Updates:SEMI Preventive Maintenance Automation White Paper SEMI Korea conducted a Global PM Automation Survey in August to better understand today’s preventive maintenance readiness issues for autonomous fabs. The results will be included in SEMI’s upcoming PM Automation Whitepaper and will ultimately guide future developments for related SEMI Standards. Standardized Semiconductor Cyber Assessment FrameworkIn Q3, the Semiconductor Manufacturing Cybersecurity Consortium (SMCC) released its Standardized Semiconductor Cyber Assessment (SSCA) framework. This document provides a detailed cybersecurity readiness plan for semiconductor companies across the supply chain. Its goals are to standardize industry-wide cybersecurity risk evaluations, establish and accelerate the adoption of best practices, and improve information sharing and collaboration. Download the SSCA framework for free.New Data Standard for Equipment Edge Governance In June, Document 6938C was approved during the Taiwan Information Control Technical Committee Chapter Meeting. The document officially became SEMI E196 - Guide for Equipment Edge Data Governance. SEMI E196 provides guidance for identifying equipment data supplied by manufacturers that can be used in equipment engineering or analysis applications.New Guide to Meet IRDS Yield Table RecommendationsAt the NA Summer Meetings, Document 6601B passed TC Chapter review with technical changes and a Ratification Ballot was issued in Cycle 7-2025. Pending final Procedural Review, Guide for Meeting IRDS Yield Table Recommendations for High Purity Polymer Materials and Components Used in Ultrapure Water, will cover areas that establish criteria for allowable contribution by critical components used for UPW treatment plant and distribution system. This document will be proactively updated to manage the risks associated with the high purity polymer materials used in the semiconductor process. The biggest challenges today are metals and particles and certain organics.Flex Standards Meeting at FLEX 2026Meet the leaders of the SEMI Standards Flexible Hybrid Electronics (FHE) Task Forces at Flex 2026, in Arizona, February 24-26, and learn about ongoing FHE standardization efforts!Standards Introduced in Q3 2025New and revised standards released in Q3. July 2025 StandardsAugust 2025 StandardsSeptember 2025 Standards Get InvolvedSEMI Standards development activities take place throughout the year in all major manufacturing regions. To participate, join the SEMI International Standards Program.SEMI Standards are available through individual download purchases or online via SEMIViews. Sign up for a 30-day SEMIViews trial.For more information, please visit the Standards website and events page. For any questions regarding SEMI Standards activities, please contact your local SEMI Standards staff. Paul Trio is Director of Standards at SEMI.

AI is proliferating rapidly, fueled by ever-larger models and data sets that are expanding AI use cases and improving its accuracy. Future computing systems are now required to simultaneously deliver high performance, process large amounts of data, and use the least possible energy. The growing energy footprint of AI and the strain it places on the power grid is an increasing concern for companies and even entire countries. This could adversely impact future growth and could slow the semiconductor industry’s march towards $1 trillion in revenue, which is largely driven by AI applications.This is a formidable challenge that cannot be addressed in silos by individual companies or even industry segments. The SEMI Smart Data-AI Initiative is exploring how to overcome this challenge with collaborative and innovative system-level solutions that connect the dots across the entire AI system stack. In March 2025, we hosted a successful workshop, bringing together industry leaders across the value chain for a day of thoughtful discussions and knowledge sharing. Building on this foundation, we developed an exciting Smart Data-AI session to be held at SEMICON West in Phoenix, Arizona on October 7 from 10:30 a.m.-4:40 p.m. The “Future of Computing: Energy-Efficient Computing for AI and Beyond” forum will bring together executives and thought leaders across the entire ecosystem – including design, fabrication, interconnects, system integration, hyperscale architectures, advanced materials, and emerging technologies such as photonics and quantum. Attendees will have a unique opportunity to get strategic perspectives from these distinguished experts and learn about exciting future trends.Why Attend?Gain insights from global leaders and learn about innovative paths towards an energy-efficient computing future.Network and build cross-industry collaborations for the next wave of AI, photonics and quantum.Promote a more sustainable path for continued growth of AI to benefit humanity and the planet.Join the SEMI Smart Data-AI initiative to develop solutions and take concrete actions to reduce AI’s growing energy footprint.Support the industry in achieving its goal of reaching $1 trillion in revenue. Speaker Highlights Include:AMD • Ciena • Hewlett Packard Enterprise • IBM • Merck KGaA, Darmstadt, Germany •Microsoft • Quantum Economic Development Consortium • Rapidus • Rigetti •Siemens AG • Stanford UniversityDr. Pushkar P. Apte is the Strategic Technology Advisor and leads the Smart Data-AI Initiative at SEMI.

As the volume of regulations grows across all levels of government, both in the U.S. and abroad, the semiconductor industry is increasingly struggling to keep up with its reporting obligations. Potential consequences include shipments delayed by customs, existing stocks of materials, parts, and components unexpectedly being made obsolete, and disruptions to multiple tiers of the supply chain that persist over time.To minimize the burden of numerous, varied reporting expectations, the SEMI PFAS Transparency Working Group, led by Intel and Tokyo Electron, is working to:Enable standardized communication on the presence of Per- and polyfluoroalkyl substances (PFAS) in chemical formulations, materials, tools, parts, and fab infrastructure to minimize the burden of varied reporting expectations;Enable traceability; andProtect confidential business information. While the initial focus of the effort is on PFAS, the intent of the group is for the methodology to be applicable to other substance reporting requirements.The group will be holding a working session at SEMICON West in Phoenix, Arizona on Wednesday, October 8 from 10:30 a.m.-12:00 noon at the North Building, 200 Level, Room 229A of the Phoenix Convention Center. All segments of the semiconductor manufacturing supply chain are invited to join the meeting and contribute to this critical effort. This session is intended for individuals involved in: Data management and reportingSupply chain managementMajor business continuity planning and crisis managementRisk assessment and mitigationEHS/regulatory complianceSub-supply chain visibility challengesThe PFAS transparency effort will also be introduced during the SEMI EHS Summit and SEMI Global Standards Summit, both scheduled on Tuesday, October 7.For additional resources, download the PFAS Explainer or SEMI PFAS Position Paper. Contact [email protected] for questions or more information about the working group session.James Amano is Senior Director of EHS at SEMI.

As artificial intelligence (AI) proliferates rapidly, AI models and datasets are also growing rapidly in size. This growth far outpaces performance improvement in hardware systems, and is increasing AI’s energy consumption unsustainably. To address these challenges and explore collaborative solutions, SEMI’s Smart Data-AI Initiative - as part of its Future of Computing focus - recently hosted a day-long workshop on Sustainable AI Systems that brought together domain experts from the entire AI ecosystem. Speakers included industry leaders Applied Materials, AMD, Arm, ASE, Google DeepMind, IBM, Intel, Lam Research, McKinsey, Micron, NVIDIA, Qualcomm, SK hynix; exciting start-ups Cerebras, LightMatter, Mentium Technologies and Mueon; and leading-edge academic institutions, Stanford University and University of California, Davis Irvine. The keynotes, panels and spirited audience discussions covered novel devices, materials, advanced packaging, chiplets, photonics and architectures algorithms for data centers, cloud edge. This article synthesizes high-level insights from the workshop.The AI ImperativeThe day started with a basic question – why is AI essential to continued progress and prosperity? The answer lies partly in shifting global demographics, with the population aging in most developed economies. At the turn of the century, there were ~6 people in the workforce supporting each retiree, but projections indicate there will be only 2 active workers per retiree by 2050. In parallel, productivity growth rates have fallen to half of what is required. AI can help bridge this gap, if we can ensure continued progress of AI in a responsible and sustainable manner.The Energy WallA formidable roadblock to continued progress of AI is its rising energy demands. For example, the energy used by some large language models (LLMs) to run just one training cycle could be used to power thousands of homes. The switch to transformer models has increased AI-driven computing demand by a factor of 50 million over 5 years, and by some projections, this demand will consume half the world's generation capacity by 2050. This is clearly not sustainable! All players in the ecosystem are deeply committed to reducing AI’s energy consumption, and the industry has already decreased the energy used per token of computing by a factor of 100K in the past 10 years. However, the rapid growth of AI outpaces this, highlighting the huge challenge ahead.The System StackThis workshop was developed with the hypothesis that innovation is required across all segments, and an important first step is to initiate a dialog. Our highly distinguished speakers covered the entire solution stack, and while it is impossible to capture the ocean of insights that they shared, the following provides a flavor.Materials DevicesMaterials and devices used to build semiconductor chips form the foundation of the stack for all computing systems. Silicon substrates with copper interconnects remain industry’s mainstay, but are being augmented by innovative ideas. As device dimensions continue to shrink, novel 2D materials such as MoSe2, WSe2, ZrSe2 and NbP are being researched. While Si mobility degrades with decreasing film thickness, 2D materials maintain high electron mobility in thin-film substrates. These can be stacked to build 3D systems with lower power consumption than traditional planar structures. In parallel, novel device technologies such as gate-all-around (GAA) can provide power savings up to 25%.These novel materials and devices are complex, and require almost magical wizardry to build. For example, they may require depositing a stack of multiple defect-free films that are only a single (or few) atomic layer(s) thick, or etching a steep well that is one hundred times as deep as it is wide. It is an incredible accomplishment of the semiconductor industry to build these devices and chips successfully, but it is getting harder and more expensive. Consequently, AI is now being used as a tool to help with this ever-growing fabrication complexity of semiconductor R D and manufacturing. This is a synergistic virtuous cycle, where AI algorithms enabled by chips are used in turn to help with chip fabrication.System IntegrationThe next layer of the stack is the integration of individual devices into a system. Advanced packaging techniques, such as silicon or glass interposers (2.5D) for interconnecting chips, can reduce the communication distance and power consumption. These are often deployed for high-performance computing systems running AI algorithms. Beyond this, the industry is actively exploring 3D systems that are even more compact, both as multi-die 3D packages and as monolithic 3D chips.The concept of chiplets – smaller chips with specialized functions that can be assembled flexibly to optimize system performance – holds much promise. Industry consortia are developing protocols such as Universal Chiplet Interconnect ExpressTM (UCIeTM) to enable seamless integration of chiplets both in the planar and vertical dimensions. These advanced techniques pack more functional elements into increasingly compact form factors, but this proximity makes power delivery challenging and often generates intense heat. Much work is needed to ensure optimal power delivery and adequate thermal dissipation.Looking beyond traditional electronics, photonics represents an exciting opportunity. Most long-distance data communication is on fiber-optic cables and thus already photonic – bringing this to shorter distances can save energy while increasing bandwidth and performance. This requires efficient photonic-electronic integration at the packaging or even chip level, which is a major challenge requiring cross-disciplinary collaboration.Architectures and AlgorithmsAI algorithms need enormous amounts of data processing compared to traditional computing workloads. This requirement stretches (or breaks) the limits of traditional Von Neumann architecture, which requires frequent data movement between memory and processor elements for each computation cycle. Much of current architecture innovation focuses on bringing processor and memory elements closer to each other. System integration is already driving “compute-near-memory” architectures like high bandwidth memory (HBM). Other forward-looking implementations combine them into a single chip, known as compute-in-memory (CIM). Memory elements being explored for this purpose include resistive RAM (RRAM), phase-change memory (PCM), ferroelectric RAM (FeRAM) and magnetic RAM (MRAM). However, there is no one “perfect” memory – each has pros and cons in terms of latency, capacity, bandwidth, power consumed per operation, manufacturability, etc. Other researchers are also exploring devices like memristors for analog computing, which can improve energy efficiency for certain workloads.Finally, hardware-software co-optimization is crucial. Algorithms mismatched with the underlying system are energy expensive; conversely, co-optimized systems are highly efficient. While conceptually obvious, this is difficult in practice because development cycles are quite different – software algorithms can transform in a few months, while new hardware often takes years to develop. While some strategies can be used for mitigation – such as designing in redundancy/flexibility or making the hardware application-specific – much work remains to solve this conundrum.Pre-competitive Collaboration to Find SolutionsAll speakers emphasized that pre-competitive collaboration across the entire stack is critical, as these challenges are formidable and cannot be solved by one entity or in isolated silos. SEMI is a global and neutral organization with over 3,000 member companies, and is well-positioned to provide a pre-competitive collaboration platform to connect the dots across silos. In fact, SEMI’s mantra is “Connect, Collaborate, Innovate” – reinforcing its commitment to advancing the entire industry. For this purpose, SEMI’s Smart Data-AI Initiative continues to drive robust discussions on this topic – next there will be a roundtable discussion during SEMICON Southeast Asia, May 20-22 in Singapore, followed by a focused technology session at SEMICON West 2025, October 7-9 in Phoenix, Arizona. The overall objective is to move from “talking-the-talk” to “walking-the-walk,” towards creating system-level solutions for energy-efficient AI computing. Specifically, we want to identify the pre-competitive actions that could synergize individual innovations and make the whole greater than the sum of parts. Some ideas include collaborative proof-of-concept projects, industry standards and independent benchmarking. Come join us on this journey and connect with us at [email protected]. Dr. Pushkar P. Apte is the Strategic Technology Advisor and leads the Smart Data-AI Initiative at SEMI.

The world is abuzz with the new opportunities being created by artificial intelligence (AI), enabled by availability of unprecedented amounts of data. AI runs on the semiconductor engine, and in turn, creates a rising demand for semiconductor chips. The semiconductor industry is predicted to reach $1 trillion in revenue by 2030 by McKinsey Co., in large part due to the market demand for AI and data. There are, however, formidable challenges to overcome for this virtuous cycle to continue. The SEMI Smart Data-AI Initiative, together with the SEMI Future of Computing Think Tank, is working to help the industry address these challenges. This article paints the big picture and lays the groundwork for an in-person workshop on March 19, 2025, in Silicon Valley, where pre-competitive and collaborative solutions will be explored.“To unlock the full potential of AI, innovation is required across the technology stack – from the models and software to datacenter architecture, chip design and how those chips are made. Advancements in foundational semiconductor technologies will have a dramatic impact on system-level energy and cost reduction in the AI datacenter.” – Gary Dickerson, President and CEO of Applied MaterialsThe Performance ChallengeInvestment in AI system infrastructure is rising at a dizzying pace, with hundreds of billions of dollars being committed by individual companies as well as public-private partnerships around the world. AI models built on larger data sets generally deliver better results, so model sizes are growing exponentially each year, with leading-edge models requiring billions and even trillions of parameters. This is especially true with the rapid growth of the Large Language Models (LLMs) used for Generative AI. Can the foundational semiconductor technology keep up? Even if semiconductor chips were following the famous Moore’s Law, performance would only double every 2 years. The real pace of performance improvement is even slower, as leading-edge technologies are reaching physical limits of materials – with the tiniest patterned dimensions on chips now approaching the fundamental atomic separation distance. While semiconductor designers and process technologists continue to innovate with new materials, devices, 3-dimensional stacking and so forth, there remains a formidable challenge for silicon chips and hardware systems to keep up with the growth rate of AI models and data sets. The Energy ChallengeProcessing ever-larger data sets and AI models also requires increasing energy. A recent report by the US Department of Energy indicates that data center energy consumption tripled over the past decade and may triple again in just 5 years! Other analyses show that a single data center powered by 20,000 GPUs can consume almost 40,000 KW, which is enough to power 31,000 homes in the US! Consequently, it is challenging for data centers to meet their power needs through public utilities, and several hyper scalers are investing in nuclear power. This acceleration in AI energy demand is further exacerbated because silicon technology evolution no longer follows power scaling with “Dennard’s Law,” which states that power density remains constant as technology scales to tinier dimensions. In fact, energy consumption of silicon devices has been increasing with technology scaling for the last decade. These combined factors give rise to the second formidable challenge – energy consumption is rising unsustainably for AI systems.Exploring SolutionsAddressing these challenges requires innovation from algorithms and architecture to foundational silicon technologies. The following are illustrative examples (not comprehensive) spanning the entire AI system stack.At the software and algorithm level, innovators are finding ways to reduce model size and to use hardware more efficiently. For example, IBM’s Granite models are smaller in size, with less than a billion parameters. Similarly, Google's Gemma platform offers small language models (SLMs). The recent market disruption from the publication of the DeepSeek reasoning model suggests that relatively smaller domain-specific reasoning models may offer significant efficiencies. At the architectural level, multiple paths are being explored. Special-purpose (or domain-specific) processing elements can deliver improved performance at equal or lower power for specific tasks. Examples include Cerebras’ wafer-scale designs with optimized AI accelerators and Mueon’s system-scale integration solutions. Another innovation path focuses on bringing computing closer to the memory elements, where the data resides. This addresses the major bottleneck between processors and memory in the traditional Von Neumann architecture, which has been the mainstay of the industry since inception. In-memory or near-memory computing, such as memory-focused architectures from Micron or processor-in-memory (PIM) solutions from SK hynix, offer higher performance with lower energy consumption for certain workloads. In parallel, leading CPU and GPU makers like AMD, Intel, and NVIDIA continue to innovate with power-efficient solutions. And “Edge Intelligence” innovations – for example, internet-of-things (IoT) solutions from Arm and Qualcomm – help reduce the processing and power load on data centers by executing more operations on edge devices.Critical enabling technologies also contribute significantly. Advanced packaging, for example ASE’s heterogeneous integration solutions, enable efficient, high-performance computing by integrating multiple diverse components optimally. Another emerging development is the advent of “chiplets,” which split the chip into smaller parts, and enable special-purpose accelerator building blocks to be assembled with more general processor, memory, and interconnect elements. A well-developed chiplet ecosystem could provide silicon designers with more degrees of freedom to design optimized systems. Looking beyond electronics, the integration of photonics can enable low-power, high-bandwidth connectivity – for example, LightMatter’s silicon photonics interconnects and Ciena’s data center interconnects.Materials and devices form the foundation of the technology stack. Example technology innovations include Stanford University-led N3XT, a 3D solution that integrates multiple novel devices and materials including resistive and spin-torque transfer RAMs, carbon nanotubes and 2D materials. Similarly, a University of California-led effort synthesizes low-dimensional nanostructures, sensors, detectors and photonics in an integrated solution. Finally, advanced and innovative processes and equipment are being developed – for example, by Applied Materials and Lam Research – to fabricate these novel materials and devices.All these individual innovations are amazing and necessary, but are they sufficient? What if we could collaborate across the entire system and co-optimize hardware and software innovations synergistically? Could the integrated whole be greater than the sum of parts? What efficiencies could we unleash? And what business opportunities would this unlock?The SEMI Future of Computing workshop on March 19, 2025, seeks to answer these questions by uniting AI innovation leaders from industry, academia and start-ups, including most of the companies and universities mentioned in this article. We will begin building pre-competitive collaboration that breaks through silos and explores system-level solutions – with the ultimate objective of radically improving the energy-efficiency of computing for AI.Pushkar Apte is the Strategic Technology Advisor and leads the Smart Data-AI Initiative at SEMI.Jim Sexton is a Fellow at IBM.Melissa Grupen-Shemansky is CTO and VP of Technology Communities at SEMI.

The sensor revolution is shaping the future of connectivity, with innovation in MEMS and imaging technologies paving the way for a smarter and more integrated world.As the world becomes increasingly interconnected, MEMS and imaging sensor technologies are driving transformative changes across industries, shaping the future of connectivity, intelligence, and sustainability. Powered by advances in miniaturization, AI integration, and sustainable design, MEMS and imaging technologies are enabling groundbreaking applications—from autonomous vehicles to wearable health devices—while addressing urgent global challenges like climate change and energy efficiency. At the MEMS Imaging Sensors Summit 2024, Laith Altimime, President of SEMI Europe, emphasized the pivotal role of MEMS and imaging technologies. Setting the stage for discussions on technological breakthroughs and market trends, Altimime remarked, “Sensors are at the heart of the next wave of innovation, enabling unprecedented levels of intelligence that are transforming industries and fostering a smarter, more sustainable, and seamlessly connected future.”Laith Altimime, President, SEMI EuropeStefan Finkbeiner, CEO of Bosch Sensortec, underscored in his opening keynote how advanced sensor technologies are enabling life-changing use cases. “Sensors are all around us, though we don’t always notice them,” emphasizing sensors’ ubiquitous role in smartphones, wearables, and hearables. Finkbeiner highlighted miniaturization as a key challenge, noting that even as sensors continue to shrink, they are increasingly integrated with edge AI to enable efficient, local decision-making.Stefan Finkbeiner, CEO, Bosch SensortecSimone Ferri, APMS Group Vice-President and MEMS Sub-Group General Manager at STMicroelectronics, highlighted the pivotal role of sensors as a bridge between the physical and digital world, noting “the most sophisticated machine is the human – so it is best to emulate human capabilities to enable the next generation of devices to accurately measure the parameters of your body.” Ferri stressed the importance of sustainability, advocating for smart, transformative, and precise sensors that provide meaningful data with optimal efficiency. By aligning technological innovation with environmental responsibility, Simone Ferri demonstrated how sensorization can enhance lives while enabling a net-zero transition across industries.Simone Ferri, APMS Group Vice-President and MEMS Sub-Group General Manager, STMicroelectronicsMEMS Growth Fueled by Piezo Materials and ElectrificationJean-Christophe Eloy, CEO and President of Yole Group, grounded the discussion in market data, forecasting a 5% CAGR for the MEMS market, which is set to exceed $20 billion by 2029. He highlighted key trends such as the increasing sophistication of automotive sensors—more cameras, higher resolution—and the impact of electrification. On the technology front, Eloy noted a “strong shift towards piezoelectric (piezo) MEMS,” driven by advancement in new materials like Lead Zirconate Titanate (PZT), Aluminum Nitride (AIN), and Scandium-doped Aluminum Nitride (ScAIN).Jean-Christophe Eloy, CEO and President, Yole GroupAlissa Fitzgerald, CEO of A.M. Fitzgerald Associates explored the expanding roles of MEMS technology in new domains, such as fiber optics for data centers. “Photonics is in the news,” she remarked, highlighting its potential to deliver 40% power savings compared to copper technologies. “MEMS manufacturing is set to evolve by 2030 and beyond,” said Fitzgerald, emphasizing the continued innovation in traditional wafer-based processes through the adoption of advanced thin-film materials like piezoelectrics and GaN. Furthermore, Fitzgerald discussed emerging manufacturing techniques such as 3D-printed MEMS and biodegradable materials to enable low-cost, sustainable sensors.Alissa Fitzgerald, CEO of A.M. Fitzgerald AssociatesAdding to the conversation on manufacturing, Jessica Gomez, CEO of Rogue Valley Microdevices, shared her perspective on how 300mm-capable MEMS foundries could “change the game,” improving production efficiency and lowering costs. Gomez also outlined the unique challenges of MEMS manufacturing, including the need for custom processes and the high-mix, low-volume nature of production.Advancing Smart Mobility Through Interoperable NetworksSmart mobility gained significant traction as Patrice Ancel, In-Vehicle Technologies Leader at BMW, tackled the intricacies of in-vehicle networking. Ancel shed light on the complexities of today’s vehicles, which contain 20,000 components and over 100 electronic control units (ECUs) from multiple suppliers. His message was clear: “Interoperability is key for us; without interoperability, none of this will happen.” Ancel’s call for collaboration resonated throughout the summit, highlighting the critical role of teamwork in driving innovation and progress within the automotive industry.Patrice Ancel, In-Vehicle Technologies Leader, BMWA Vision for the Future: Sustainability, Collaboration, and InnovationThe MEMS Imaging Sensors Summit demonstrated how collaboration, sustainability, and innovation are driving the sensor industry forward. From addressing market trends to tackling manufacturing challenges, the discussions revealed a shared commitment to creating a smarter, more connected world.On behalf of SEMI, the SEMI Europe team would like to thank the industry leaders whose expertise and enthusiasm made this summit a resounding success. SEMI ContactAna Bernardo, Manager of Technology ProgramsEmail: [email protected] Mobile: +49 175 4129 764Sitong He, Communications Manager Email: [email protected]: +49 151 5546 2638

With increasing demand for personalized smart devices, the MEMS and sensor market is undergoing rapid transformation. MEMS sensors are the backbone of smart wearable devices, seamlessly integrating multiple functions to monitor and simplify our day-to-day activities. As applications in healthcare, environmental tracking, and AR/VR expand, the need for ultra-compact, energy-efficient, and intelligent sensors is more critical than ever.In an exclusive conversation with SEMI, Stefan Finkbeiner, CEO of Bosch Sensortec, shared his perspective on the dynamic landscape of MEMS sensor technology. From Bosch’s evolution to a solutions provider with a focus on sustainability and market-driven innovations, Finkbeiner offered a deep dive into how Bosch Sensortec is positioning itself at the forefront of the industry. “We have to think in terms of the end application and determine what the right hardware and software configuration should be in order to provide solutions with the greatest benefit and flexibility.”Further insights into the future of MEMS and sensor technology will be shared by Finkbeiner during his keynote at the SEMI MEMS Imaging Sensors Summit on November 14, 2024, in Munich, Germany. Registration is still open.SEMI: Welcome, Stefan, and thank you for sharing your insights on advanced sensor technologies. Let’s start with a personal question: What motivates and inspires you about working in sensor technology?Finkbeiner: Sensor technology is very diverse and has significant impacts on consumers. We take pride in prioritizing consumers’ needs and benefits. True to the Bosch motto, “Invented for life,” we are committed to making life better, easier and healthier. This is demonstrated in our sensing solutions, which provide valuable data for fitness tracking in smartwatches, enhance the audio experience in hearables, and enable real-time monitoring of air quality to help individuals make informed decisions for a healthier environment. I am fascinated by technology advancements that are enabling the scaling of sensors—and the processing power and intelligence packed into these increasingly compact devices. For instance, our latest acceleration sensors for hearables are the smallest in the world and are nearly invisible at just 1.2 x 0.8 x 0.55 mm³.We leverage innovative wafer level chip scale packaging (WLCSP) to achieve this reduced form factor. These compact, feature-rich, high-performance accelerometers are easier to integrate in the latest generation consumer products where size and functionality are critical requirements.SEMI: How has Bosch Sensortec’s approach evolved over the years and what is the company’s primary focus today? Finkbeiner: We began our success story a few years ago as a hardware supplier, with one of our first applications being the 'Portrait-Landscape' function in smartphones. Over time, we’ve evolved into one of the leading providers of MEMS sensors.Today, we no longer see ourselves purely as a sensor manufacturer, but as a technology solutions provider. Our focus has shifted to think in terms of the end application and determine what the right hardware and software configuration should be to provide solutions with the greatest benefit and flexibility.Achieving this requires significant software and artificial intelligence (AI) development. In essence, we are optimizing software through self-learning models. Hardware remains essential for optimizing power consumption, with most sensors integrating a controller alongside the ASIC to enable seamless software integration.This unique software and hardware configuration unlocks exciting possibilities and broadens our market reach. We see significant growth in head-mounted devices, and we are actively working on related acoustics solutions.SEMI: Looking ahead, what trends do you anticipate will have the most significant impact on the MEMS sensors market?Finkbeiner: We see several trends that will significantly impact the MEMS sensor market. First, there is growing demand for personal health monitoring in consumer and mobile electronics. Wearable devices, in particular, are becoming essential tools for individuals to track their health and fitness status. This trend requires MEMS sensors to become even more accurate, with solutions that include sophisticated software algorithms to ensure reliability, accuracy, and reproducibility. As a result, AI and machine learning (ML) technologies will play a crucial role in enhancing sensor performance.A second important trend is the continued miniaturization of MEMS sensors. To meet customer demands, sensors must integrate more functionality, including edge-processing capabilities. For example, what once may have been a simple accelerometer with a step-counting algorithm is now evolving into a 6-axis Inertial Measurement Unit (IMU) with an integrated microcontroller and advanced AI/ML software. A great example of this is in True Wireless Stereo (TWS) earphones, where the IMU not only tracks steps but also enables complex tasks like dead reckoning and supports 3D audio—all within the tight constraints of a small TWS earbud housing. Low power consumption, as always, is a critical factor for these mobile devices to meet CE (Conformité Européenne) standards.Finally, we believe that smart glasses, augmented reality (AR) and virtual reality (VR) devices are poised to become the “next big thing.” These devices require advanced image projection optics that offer excellent optical quality, low weight, and ease of use to ensure consumer adoption. We believe our MEMS-based LBS (Laser Beam Scanning) solution is ideal for these applications. Additionally, the successful adoption of smart glasses hinges on high-performance MEMS sensors that are compact, accurate, and power-efficient—critical requirements for all-day wearability and functionality.These trends underscore the need for MEMS technology to evolve, integrating greater functionality, precision, and efficiency to meet the demands of next-generation consumer devices.SEMI: What are some of the biggest challenges facing the MEMS sensors industry today, and how can companies overcome them?Finkbeiner: One key challenge is that the smartphone market—arguably the most attractive market for a variety of MEMS and MOEMS sensors—has become more or less saturated. To stay competitive, MEMS companies must innovate existing products while also developing new, differentiated sensors and actuators for next-generation mobile products.SEMI: How is Bosch Sensortec supporting sustainability initiatives?Finkbeiner: We are helping to mitigate climate change with our low carbon footprint solutions.Up to 20% of annual global carbon emissions are caused by forest fires. This is equivalent to carbon dioxide emitted by all the vehicles driven worldwide. Our sensors can detect forest fires before they develop into wildfires by measuring various gases such as carbon monoxide and hydrogen. In parallel, we are working with our production partners to reduce our carbon footprint over the coming years, while also replacing or minimizing the use of environmentally hazardous chemicals, such as PFAS.SEMI: What are you most excited about for the MEMS Imaging Sensors Summit, and how do you think it will impact the European semiconductor industry?Finkbeiner: The European semiconductor industry has deep expertise in MEMS and sensor technologies, positioning it to make a significant impact in markets such as consumer health, optical sensing, and AR displays. By continuing to focus on sustainable solutions, we can drive even greater impact for the broader industry and secure Europe’s leadership in these growth sectors.I look forward to collaborating with industry peers at the Summit to define next steps needed to advance Europe’s leadership. The MEMS Summit is an invaluable opportunity to collaborate and drive progress, and I warmly invite my colleagues to join us in shaping the future of the European semiconductor industry.Dr. Stefan Finkbeiner Dr. Stefan Finkbeiner has been CEO and General Manager at Bosch Sensortec GmbH since 2012. He was born in 1966 in Freudenstadt, Germany. Stefan Finkbeiner held various senior positions at Bosch including Director of Sensor Marketing, Director of Corporate Research in microsystems technology, and Vice President of Sensor Engineering. He looks back on almost 30 years in semiconductor industry working in different positions related to sensor research, development, manufacturing, and marketing. Due to his wide experience in semiconductor and sensor industry, Stefan Finkbeiner is a recognized guest in panel discussions and as keynote speaker. SEMI ContactSitong He / Communications Manager, SEMI EuropeEmail: [email protected]: +49 151 5546 2638

In today’s rapidly evolving semiconductor industry, ensuring both precision and efficiency in manufacturing has become an increasing challenge, particularly as advanced technologies like MEMS and AI chips push the boundaries of design and production. Inspection methods that were once sufficient are now falling short, making room for cutting-edge solutions powered by artificial intelligence (AI). The introduction of AI-driven 3D X-ray inspection technologies is transforming the landscape, offering manufacturers a sophisticated tool to ensure quality control, while driving sustainable production strategies.SEMI spoke with, Joscha Malin, Product Manager, and Daniel Stickler, R D Expert for X-ray Imaging at Comet AG, Industrial X-Ray System Division, to explore how AI-powered 3D X-ray inspection technologies are shaping manufacturing. They delve into how these technologies address critical challenges during inspections and defect analysis, using tools such as Dragonfly 3D World software for user-friendly, AI-driven insights that facilitate effective decision-making.Further insights into the application of AI-powered 3D X-ray inspection technologies and their role in advancing MEMS manufacturing will be presented by Stickler at the SEMI MEMS Imaging Sensors Summit on November 14, 2024, in Munich, Germany. Registration is now open.SEMI: Thank you both for agreeing to share your insights. To start, can you explain the importance of inspection strategies in the context of MEMS manufacturing?Malin: As MEMS devices become increasingly miniaturized and complex, effective inspection strategies are crucial. These strategies not only accelerate the wrap-up of production processes, but also significantly enhance product yield. With tighter tolerances and various materials involved, ensuring the integrity and functionality of each component is more critical than ever. A robust inspection strategy allows us to catch potential defects early, which can save time and costs associated with rework or scrap.Stickler: The evolution of MEMS technology, particularly in AI chips, demands a higher level of inspection sophistication. Traditional methods may fall short in providing the necessary detail and speed, which is why we’re focusing on advanced solutions like our AI-powered 3D X-ray inspection.SEMI: Could you elaborate on how the 3D X-ray technology differs from conventional inspection methods? Stickler: The 3D X-ray technology we utilize acts as a bridge between traditional optical methods and standard 2D X-ray inspection. It offers high-resolution, three-dimensional images without damaging the samples. 3D X-ray technology emphasizes three main benefits: clarity, efficiency, and actionable insights. This means we can obtain detailed images that help us analyze components more effectively, allowing for real-time decision-making.Malin: Moreover, the clarity and detail provided by the 3D X-ray images are critical when it comes to defect analysis in MEMS devices. They allow us to assess mechanical, electrical, and assembly errors in ways that conventional methods simply cannot. This leads to a more reliable production process.SEMI: What specific MEMS defects can be effectively analyzed using this technology?Stickler: There are several types of defects we can analyze. For instance, we can detect mechanical defects such as stiction or fractures, as well as electrical failures like short circuits. The 3D X-ray inspection allows us to visualize these defects in detail. Additionally, we can monitor assembly errors, which are particularly important in complex MEMS devices where misalignments can lead to significant issues.Malin: I’d like to add that early detection of these defects is paramount. The faster we identify issues, the quicker we can implement corrective actions, thereby improving overall yield and reducing production costs.SEMI: You mentioned yield improvement earlier. Can you explain how your technology contributes to that?Malin: Our approach supports process optimization by providing information on product characteristics and, for example, allows us to identify trends early on that may lead to yield issues later. We also aim to accelerate new product introduction in the early phase by rapid feedback, saving time and cost. This is crucial because many defects may not be apparent until later stages of production. With our technology, we can monitor samples in real-time, allowing us to react promptly to emerging challenges.Stickler: By integrating this feedback loop, we can significantly shorten the time to market for new products. This is particularly beneficial in industries where speed and efficiency are essential.SEMI: Can you tell us about Dragonfly 3D World software and its role in this process?Malin: Dragonfly 3D World is a user-friendly software that leverages AI and, specifically, deep learning for image processing. It enables users to efficiently perform bump metrology and defect identification, for example, without needing extensive expertise in the field. The software makes complex processes manageable, even for operators who may not be specialists in image processing.Stickler: Beside MEMS and advanced packaging in GPU production, this software is indeed an “AI-for-AI” application. By utilizing deep learning, users can train models that adapt to various imaging tasks, making the entire inspection process more efficient. The insights generated from the 3D X-ray images are automated, enhancing usability and streamlining workflows.SEMI: In conclusion, what are the key takeaways you’d like to share?Malin: The key takeaways are that AI-driven 3D X-ray inspection is transformative for the MEMS manufacturing process, enhancing inspection strategies and defect detection significantly. By integrating advanced technologies, we can ensure higher product quality and efficiency.Stickler: Yes, and I would emphasize the importance of powerful monitoring and non-destructive test tools. Our innovative solutions not only improve yield, but also pave the way for sustainable practices in manufacturing, ultimately benefiting the industry. Dr. Daniel SticklerDirector X-ray Technology Components at Comet AG, Industrial X-Ray System Division. Based in Hamburg, Germany, he holds a PhD in Physics from the University of Hamburg and has extensive experience in X-ray imaging, semiconductor X-ray applications and product innovations. Joscha MalinDirector Product Marketing Software Products at Comet AG, Industrial X-Ray System Division. Based in Hamburg, Germany, he holds a degree in Electrical Engineering with specialization in Semiconductors and profound experience in the industry. For over a decade, he has focused on developing X-ray inspection and metrology solutions, especially for the Semiconductor industry. SEMI ContactSitong He / Communications Manager, SEMI EuropeEmail: [email protected]: +49 151 5546 2638

With the rapid proliferation of electronics applications with more powerful embedded intelligence, demand for smarter, more efficient sensors is increasing to help devices connect to the world around them. As the semiconductor industry drives the future of connected technologies and sustainable solutions, it faces challenges in energy consumption, resource management, and ensuring data security.SEMI spoke with Simone Ferri, Vice President and General Manager at STMicroelectronics (ST), about current trends and challenges in the Micro-electromechanical Systems (MEMS) and imaging sensors market and how ST is driving innovation in this rapidly evolving industry. Ferri shared insights ahead of his keynote presentation at the SEMI MEMS Imaging Sensors Summit on November 14, 2024, in Munich. Registration is open.SEMI: Welcome, Simone, and thank you for sharing your perspective on the dynamics and trends for today’s MEMS and imaging sensors. To start, how would you describe the current market dynamics for these technologies, and what key factors are influencing these dynamics? Ferri: Right now, the MEMS and imaging sensors market is primarily driven by applications such as automotive electronics, consumer medical devices, AI-powered devices, and intelligent wake-up systems.According to Omdia, the MEMS market is projected to reach approximately $11 billion by 2027, with a CAGR of 2.8% from 2022 and 2027. Currently, automotive applications account for 50% of this market, with industrial at 15% and consumer at 35%. Notably, the automotive sector is the fastest growing, with a 5.4% CAGR, driven by the increasing use of inertial measurement units (IMUs) and microphones.In addition, Yole Group estimates that the imaging market, including optical sensing, will grow at a 4.7% CAGR between 2023 and 2029. Although mobile phone applications remain the primary driver of Complementary Metal-Oxide-Semiconductor (CMOS) image sensors (CIS) volumes, other sectors, including consumer electronics, automotive, and security imaging, are also contributing to the growth.Long-term forecasts for smartphone sales have been trending downwards, but mobile phones still remain a major driver of applications, innovation, and overall volume in the imaging market. Notably, the automotive imaging sector is one of the fastest growing markets and is expected to drive additional demand for CIS.Factors that influence the current market include global economic conditions, regulatory changes, geopolitical factors, technological innovations, and the emergence of new applications and use cases.SEMI: Can you elaborate on the growth strategies that STMicroelectronics is adopting to stay competitive in the MEMS and imaging sensors market? Ferri: ST has played a pivotal role in both the MEMS and imaging sensors markets for over two decades with its proprietary silicon technologies. We fully leverage our Integrated Device Manufacturer (IDM) business model, which allows us to support our customers through integrated capabilities for both design and manufacturing.To remain competitive, we are exploring new markets for MEMS sensors, particularly in digital healthcare with biosensors, where wearable devices are expected to exceed 500 million units per year by 2027.We’re focusing on the growing demand for automotive sensors such as accelerometers, Inertial Measurement Units (IMU), and pressure sensors, particularly with the rise of electric vehicles. We are enhancing the integration and synergy between automotive and personal devices. For example, we are combining high-g and low-g accelerometers within a single IMU, enabling accurate fall and crash detection, along with precise orientation and wake-up functionality.AI is another one of our priorities. In today's digitalized world, AI enables real-time, contextual understanding and the ability to make decisions that optimize and reduce the power consumption of the final device. Sensors are no longer merely for data collection. Thanks to AI, sensors can interact with their environment and significantly contribute to innovation and sustainability.We are also prioritizing low power consumption. Our MEMS technology operates in low-power mode with almost negligible energy use, activating only when necessary, without waking up the system to understand its environment or to be reconfigured.In addition, we’ve seen optical sensing continue to grow year over year. Optical sensing now offers features such as 3D capture, low-power and low-footprint computer vision, Near InfraRed (NIR) and even Short Wavelength InfraRed (SWIR).We are accelerating and leveraging our IDM model and broadband semiconductor supplier positioning to propose wider system offerings based on the array of sensors and microprocessors that ST develops. As the world shifts toward widespread use of sensors and data collection, the demand for secure sensing technologies is growing, extending beyond mobile and PC applications to spatial computing and AR/VR environments. For example, if we are talking about recognizing specific persons in an AR environment, we don't want the data related to these persons to be sent to the cloud before a decision is made about whether they are supposed to be there or not, as such information can be intercepted. We want all the data to be managed at sensor level and only a warning of rejection or acceptance to be transferred outside our secure sensor. SEMI: What are some of the latest technological innovations in MEMS and imaging sensors that are shaping the industry? Ferri: In MEMS, we're seeing significant advancements in three key areas:- In-sensor AI is integrating technologies in the sensors such as machine learning core (MLC), adaptive self-configuration (ASC), and intelligent sensor processing units (ISPU).- Open sensors are designed to interface seamlessly with other sensors, allowing third parties to benefit from on-sensor processing innovations, while building an ecosystem to create joint value with customers.- Accurate sensors are providing high-precision data, enabling better decision-making and smoother, more natural user interactions. These sensors also reduce factory calibration time and resources, leading to overall lower energy consumption. Because of their accuracy, onboard MLC, and ASC, the sensors can also reconfigure themselves without interaction with the processor, thus guaranteeing the proper accuracy at lower power consumption, at any time, under any condition.In the imaging sensor market, key trends include:- Higher Pixel performance is leading to improved signal-to-noise ratio (SNR), low light performance, better quantum efficiency (QE) and lower noise performance. Despite post processing, pixel performance remains the key factor as SNR performance must remain high while the pixel shrink roadmap advances.- Embedded Intelligence is providing local processing for local decision making, enhanced security, advanced image sensor processing (ISP) for improved image quality, and fusing sensor functions to deliver a better user-experience.- "Always on" capabilities are supporting mass sensorization and deployment of optical sensing solutions everywhere through specific low-power design techniques, process development, and overall system architecture optimization.SEMI: Looking toward the future, what trends do you anticipate will have the most significant impact on the MEMS and imaging sensors market? Ferri: Some macrotrends for sensors include:Electrification: Certain consumer and industrial applications are now being adopted in the automotive sector, especially with the rise of electric vehicles creating new opportunities for innovation and for new players to enter the market. As example, the predictive maintenance that has been developed for industrial electric motors is ported 1:1 to electric vehicles.AI: Regarding data transmission, distributed architecture will push AI towards edge computing, increasingly supported by advancements in 6G and foldable technologies. Additionally, as AI becomes more integrated, the maintenance and security for AI will require more attention.Smart home, buildings, and cities: As cities grow, the demand for smart homes and buildings rises, requiring more sensors to manage energy, security, and urban infrastructure efficiently. Over 55% of the global population and 70% of the EU population reside in cities. Urban areas generate more than 80% of the world’s GDP, and by 2030, it's anticipated that 68% of the global population will be urban dwellers, pointing to the growing need for smart cities.Aging population and digital health: The integration of biosensors with MEMS technology will be crucial for addressing the needs of an aging population.Overall, the use of image sensors for environmental sensing is steadily increasing. This is a major focus for ST, particularly in 3D sensing. New use cases, such as presence detection, are enhancing security and reducing power consumption due to efficient data processing. Additionally, the average number of cameras in smartphones, automobiles, and even in devices like robots and vacuum cleaners, continues to grow.SEMI: What has STMicroelectronics been working on, and what are your plans for the upcoming years? Ferri: To date, we have shipped over 23 billion MEMS sensors. Still, we remain committed to continuously improving our products and enhancing our MEMS technology in terms of affordability, miniaturization, performance, and novelty. We are striving to set the stage for a future defined by innovation and excellence with:Evolution of our current product portfolio by investing in lower power consumption, lower supply voltage, and additional and more sophisticated in-sensor AI for an effective distributed AI conceptNew sensors for presence detection, like infrared (IR) sensors, and health-focused sensors such as biosensors.MEMS sensors are also becoming increasingly accurate, open towards different ecosystems of technologies, and so intelligent that they can self-configure and reduce power consumption thanks to optimal data processing. These attributes allow us to provide meaningful and sustainable solutions across sectors such as automotive, industrial, infrastructure, and personal electronics, enabling us to improve energy efficiency, reduce waste, and support sustainable practices for a greener planet.For the past 10 years, ST has focused on depth sensing across multiple use cases. Today, ST is the number one in the world for time-of-flight solutions through our ST FlightSense product family. More recently, we launched our global shutter image sensors family, ST BrightSense, to address markets like personal electronics, automotive, industrial, communications equipment, and computers and peripherals.More specifically on the automotive side, we have the portfolio, customers, and customer program awards to lead the driver and occupancy monitoring market. We continue to secure design wins from our growing customer base while we expand our product portfolio and broaden our customer and application footprints.SEMI: What are some of the biggest challenges facing the MEMS and imaging sensors industry today, and how is ST addressing them? Ferri: The MEMS and imaging sensors industry faces several challenges, but with strategic planning and innovative solutions, companies can overcome these obstacles by focusing on the following:Integration: With our biosensors, we are doing more with less space. For example, in a standard accelerometer, we integrate an analog front end for electrocardiogram (ECG) analysis, enhancing functionality without increasing the device footprint.Performance enhancement: Ensuring high performance and reliability in various environmental conditions is crucial, especially in automotive and healthcare applications. To meet these demands, we deploy comprehensive testing protocols to ensure our sensors meet performance and reliability standards.Power efficiency: Reducing power consumption is vital, particularly for battery-operated devices like smartphones and IoT devices. We are developing low-power architectures to address this need.Data security: With the growing use of imaging sensors in surveillance and personal devices, data security and privacy have become paramount. Our solutions include encryption for data transmission and storage, as well as robust access control mechanisms to prevent unauthorized access to sensor data.Additionally, supply chain issues remain a significant challenge today. We believe our strategy and capacity as an IDM, combined with our strong innovation capabilities, give us a competitive edge in supply chain management.SEMI: What are you most looking forward to at the MEMS Imaging Sensors Summit, and what does it mean for the European semiconductor industry? Ferri: I look forward to the Summit as a valuable opportunity to connect with industry peers, share insights, and explore new collaborations. I encourage my peers to attend, as it’s a unique platform to collectively shape the future of our industry and sustain Europe’s leadership in semiconductor innovation. About Simone FerriSimone Ferri is Vice President of APMS Group and General Manager for MEMS sub-group at STMicroelectronics. Ferri began his career in STMicroelectronics in 1999 as an R D engineer before becoming a digital designer for the company’s audio division, leading into product management after 5 years. In 2014, ST entrusted Ferri with MEMS consumer sensors followed by global MEMS-sensor related Marketing and Application activities across all markets and segments, leading into his current role. Ferri graduated with a degree in microelectronics from Politecnico di Milano (Polytechnic of Milan), where he also completed his MBA. Sitong He is Marketing and Communications Manager at SEMI Europe.

Silicon carbide (SiC), with its wide band gap and high thermal conductivity, is increasingly favored for semiconductor power applications across several fast-growing industries. Its ability to operate at higher voltages and frequencies enables significant efficiency gains, particularly in e-mobility, where SiC offers key advantages in size, weight, and speed compared to traditional silicon-based power devices.However, as promising as SiC is, the industry still faces critical challenges in scaling to meet growing demand. Key barriers include cost, reliability, and manufacturing capacity, all of which must be addressed for SiC to fully mature.SEMI spoke with Entegris Senior Director - Advanced Technology Engagements, Office of the CTO Mark Puttock, Ph.D., to discuss the challenges of scaling SiC power chip manufacturing from a material supplier’s perspective. Puttock shared insights ahead of his presentation at the Entegris session, Cultivating a Thriving SiC Market: Tackling Key Challenges Across the Value Chain, taking place on November 14, 2024, at SEMICON Europa in Munich, Germany. Don’t miss the opportunity to engage with experts from Entegris and other industry leaders. Registration is now open. SEMI: Global megatrends like environmental crises and AI drive the necessity for SiC power semiconductors. What is the current status? Puttock: The increasing demand for efficient power electronics — fueled by global megatrends such as vehicle electrification, environmental de-carbonization, and the rise of power-hungry AI chips — drives the necessity of wide bandgap semiconductors. SiC offers advantages of weight, size, and speed over traditional silicon (Si) solutions, which are particularly vital in automotive applications 600V and above. However, SiC chip manufacturing has not reached the maturity of silicon-based processing. Greater maturity will help reduce costs, which will accelerate adoption in the market.SEMI: What are the main challenges in scaling SiC?Puttock: Challenges in scaling SiC power chip manufacturing to high volumes are not surprising. That’s because high volume producers have not been operating long enough to resolve early-stage issues. From a material perspective, SiC is more challenging to manage compared to Si. The challenges we identify include:Chemical Mechanical Planarization (CMP): SiC is nearly as hard as diamond and significantly harder than Si, making it challenging to achieve a high removal rate while maintaining both planarity and low defectivity. This step is crucial toward the end of the wafering process and before the epitaxial growth of device layers.Handling: SiC is more brittle than Si, making it more susceptible to damage or breakage.Implantation: SiC is more difficult to implant than Si, requiring higher temperatures and the use of aluminum instead of boron as a P-type implant species. Additionally, it is a significant challenge to achieve a reliable aluminum source with a long and stable lifetime.Thermal Processing for Wafer Growth and Epitaxy Processes: SiC processes run hotter than Si ( 2000° C for wafering, 1500° C for epitaxial growth), demanding resilient chamber parts to achieve good lifetimes.Sustainability: Because SiC is extremely hard, the CMP process requires significant amounts of slurry. Improving slurry recycling and wastewater management continues to be a challenge.On October 29, we will address these issues in our webinar, “Challenges in Scaling SiC Power Chip Manufacturing: A Material Supplier's Perspective” This session will provide valuable insights and considerations for advancing maturity in high-volume SiC power chip manufacturing. SEMI: Can you elaborate on the challenges associated with CMP for SiC wafers? Puttock: SiC wafers are challenging to process, requiring specialized materials and methods compared to traditional silicon. Defects in the SiC wafer crystal during non-optimized CMP processing can propagate into the device epitaxial layers. This leads to yield loss, increased electrical resistance, reduced performance, and wasted power.SiC wafers must be cut, ground, lapped, and polished to create the necessary surface properties before depositing active layers. As the demand for these devices grows, optimizing the CMP process is essential to ensure the desired surface quality and planarity required for device fabrication. For a deeper understanding of these challenges, we recommend downloading our latest white paper, “Solving CMP Challenges in High-Volume SiC Production,” which covers:Achieving maximum smoothness with high removal ratesReducing the total cost of ownership Optimizing CMP slurry and pads for the unique wafer chemistry and topology of SiC wafersSEMI: What do you mean by optimizing slurry for SiC CMP?Puttock: CMP slurry typically consists of abrasive nanoparticle powder dispersed in a chemically reactive solution. The objective is to achieve a smooth, defect-free surface (less than 1 A Ra) with a high removal rate (greater than 7 µm/m).Traditionally, achieving high removal rates and smooth surfaces required two separate slurries. This approach sometimes forced SiC wafer manufacturers to choose a defect-free surface over a faster, more efficient CMP process, depending on their fab capabilities. Today, optimization allows SiC wafer manufacturers to achieve both high polishing capacity and good final surface quality using a single slurry.Additionally, while the slurry is the most critical part of the CMP process, the pad must be compatible with the application. This ensures the desired planarity while also preventing scratches or contamination of the SiC wafer surface. Research shows that optimized thermoplastic polyurethane CMP pads outperform traditional thermoset polyurethane pads. The optimized pads minimize surface damage and enhance removal rates due to their bulk hardness.SEMI: What are the future challenges for SiC devices? Puttock: SiC devices are increasingly favored for their superior energy efficiency and reduced environmental impact. However, the SiC manufacturing process presents challenges due to its high-temperature operations, which consumes significant amounts of energy and shortens the lifespan of chamber components. To address this, improving efficiency in these processes will be crucial in the coming years.Recycling is another important challenge. For example, CMP slurries present an opportunity for water recycling and conservation. At Entegris, we are committed to this issue and are actively collaborating with key industry players to enhance material circularity and prioritize sustainability in our new product development.SEMI: How is Entegris contributing to advancements in SiC technology, and what initiatives or partnerships do you have planned for the near future? Puttock: Entegris is an active member of the SEMI Global Automotive Advisory Council (GAAC) and participates in a working group focused on SiC with key industry leaders such as Volkswagen, BMW, Porsche Consulting, onsemi, Infineon, STMicroelectronics, and others. Our engagement spans the entire semiconductor supply chain, collaborating with integrated device manufacturers and original equipment manufacturers in fabs worldwide. Additionally, we recently announced our latest long-term agreement with onsemi, which underscores our commitment to advancing SiC technology.SEMI: What are your expectations regarding your participation at SEMICON Europa? Puttock: SEMICON Europa is a unique platform to connect with the semiconductor and automotive ecosystems. Last year, we organized a highly successful SiC session in collaboration with SEMI at both SEMICON West and SEMICON Europa, focusing on “Connecting the Automotive Ecosystem Towards More Mature SiC Manufacturing.”This year, we will continue the discussion with industry leaders during our session, “Cultivating a Thriving SiC Market: Tackling Key Challenges Across the Value Chain.” Our goal is to provide insights and propose solutions that will enable SiC power chips to achieve their anticipated role in future technology ecosystems.We will present alongside Porsche Consulting, and the talks will be followed by a panel discussion that will explore the current state and future prospects of SiC technology in power electronics. We invite visitors to join us at the Executive Forum on Thursday, November 14, from 1:40 – 3:00 p.m. and to visit us at Silicon Saxony booth 219 in Hall C1.About Mark PuttockMark Puttock, Ph.D., is the senior director of advanced technology engagements in the office of the CTO at Entegris. He has worked in the semiconductor industry for over 30 years with a background in physics and plasma processing. As a team member of the Entegris CTO office since 2014, Mark has followed technology trends and collaborated with Entegris’ global product development teams to develop timely and differentiated new materials, chemistries, and components for all the world’s semiconductor manufacturers. Maria Daniela Perez is Communications Manager at SEMI Europe.