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Hybrid Bonding

SEMI’s annual Surface Preparation Cleaning Conference (SPCC) brought industry experts to Chandler, Arizona, to address the biggest challenges affecting this area of the semiconductor industry. As the premier technical forum dedicated to advancing surface preparation, cleaning technologies, and wet processes, the conference featured dozens of speakers who shared insights on the current market, emphasizing key themes like advanced packaging, power delivery, advanced DRAM, sustainability, and more.Ahead of this year’s conference, SEMI and Global Net Corp. (GNC) developed a new report, Glass Core Substrate Market and Development Trends, examining manufacturing challenges, supply chain structure, and market outlooks through 2040. This resource helps organizations evaluate the glass core substrate landscape before committing to production. A sample of the report is available for complimentary download. High-Level Updates and SEMI Insights Joe Stockunas, president of SEMI Americas, kicked off SPCC 2026 by announcing that the industry is entering its biggest era yet, on pace to reach $1 trillion in annual revenue in 2026 – 4 years ahead of prior forecast. The semiconductor industry has become the third most valuable global industry with top companies' market capitalization surging over the past decade. By 2030, industry analysts expect annual revenue to soar to $1.9 trillion, driven largely by demand for AI infrastructure, with logic and micro capacity also expected to nearly double. However, Stockunas also noted headwinds including geopolitical tensions and a growing talent shortage.Duncan Meldrum from Hilltop Economics offered a cautionary macroeconomic view, warning that AI growth is now concentrated among a handful of hyperscalers and leading-edge chipmakers, creating concentration risk. Geopolitically driven inflation is squeezing consumers, while supply chain disruptions are impacting critical materials like sulfuric acid, helium, and tungsten. Meldrum also highlighted concentration risk in production, with a few ODMs and manufacturers dominating the AI server market.SEMI analyst Inna Skvortsova provided materials market updates, emphasizing that advanced devices are driving materials intensity per wafer. Lithography, wet chemicals, and CMP are already seeing double-digit growth, led by increasing number of processing steps, rising count of EUV layers, and tightening CMP process windows at advanced nodes. Deposition materials were noted as another fast-growing segment that is forecast to grow at a 13.5% CAGR through 2030, driven by molybdenum adoption and backside power networks. Furthermore, introduction of new materials, including Ruthenium and Tungsten Carbon Nitrite (WCN) hardmasks, brings new opportunities and challenges with regards to wet processes.On memory, Skvortsova confirmed that AI pull has made memory a compute-stack bottleneck, driving capital toward leading-edge logic and HBM. Logic and micro capacity nearly doubles by 2030, but growth is highly concentrated in advanced nodes (≤7nm) pressuring non-AI segments.Skvortsova also highlighted a supply chain shift from globalization to localized production networks, with China emerging as a significant player in areas like bulk wet chemicals, gases, and deposition materials. While alternative sources are emerging, supplier re-qualification may result in higher material costs.Theme 1 - Hybrid Bonding FluxSPCC 2026 highlighted cleaning innovations for hybrid bonding, a core technology enabling AI scaling and glass core substrates. Srini Raghavan (ProSys) presented a paper based on the collaborative work between Intel and ProSys in the area of megasonic removal of flux from narrow gaps in advanced packaging structures. His team found that application of 10 msec pulses of 925 kHz sound wave at 90% duty cycle was very effective in flux removal in a semi-aqueous formulation Acoustic streaming rather than cavitation appears to be the primary cleaning mechanism under the test conditions.Koji Nakata (Kurita Industries) tackled particle contamination, copper corrosion, and chemical consumption in 3D stacking. His solutions include:Functional water + megasonic cleaning for higher particle removal than SC-1.Alkaline water rinsing to reduce copper pad recessing vs. DI water.Functional water to lower chemical consumption, cost, and environmental impact.Theme 2 – Wet Etch, Gate-All-Around, SelectivityTwo presentations highlighted next-gen logic wet etch challenges. IBM's Alma Vela Ramirez showed that an oxide-selective wet chemistry reduced buried void defects by over 20× during dummy gate polysilicon removal in GAA nanosheet flows. From her findings, chemistry 1 showed higher defectivity, while chemistry 2, selective to gate oxide and compatible with spacers, drastically reduced void formation by preserving the bottom oxide layer.Mitsubishi Chemical Corporation’s Tomoki Nara demonstrated a Si/SiGe selective etchant achieving a record 750:1 selectivity, critical for protecting thin SiGe layers during Si thinning in backside power delivery networks (BSPDN). His new alkaline wet etchant and single-wafer spin process address conventional etchants' inability to stop cleanly on SiGe, significantly expanding the process window during Si thinning and reducing the risk of SiGe damage.Theme 3 – Scaling DRAM to Advanced NodesMicron presented two DRAM manufacturing breakthroughs. Shihui (Adara) Yang introduced a dilute sulfuric peroxide clean achieving 3.59× BCF:TCF (bottom container fill and top container fill) selectivity—solving uniformity issues where conventional fluorine-based chemistries etch both layers at similar rates, causing container shorts and yield loss at advanced nodes.Hiroki Uoyama introduced a wafer backside polishing brush incorporating diamond or silicon carbide, achieving over 90% defect height reduction with no wafer thickness loss. This physical cleaning approach improves focus control, alignment accuracy, and overall yield — critical as lithography margins narrow dramatically at smaller nodes.Theme 4 – Sustainable Materials Stripping Solutions Sustainability was another core focus at SPCC 2026, with three distinct approaches taking center stage — each addressing a different facet of environmental impact in the fab.PFAS are among the major pollutants in semiconductor manufacturing waste streams, whose separation and destruction are challenging. As demonstrated by imec’s Sina Kaabipour, representing the collaborative research work between imec, Purdue University, and Enspired Solutions, UV destruction can achieve more than 99% PFAS destruction efficiency for simulated semiconductor manufacturing waste, showcasing great potential for scale-up and direct mineralization from liquid fab waste effluents.Diane Bijou from Technic launched TechniStrip® Micro 680, an NMP-free stripper with sub-2-minute stripping time, better loading capacity, extended bath life, and lower cost per wafer than NMP/amine-based strippers.Chihiro Kobata of JSR unveiled a water-rich stripper removing both photoresist and spin-on glass without NMP, DMSO, and TMAH, at lower temperatures (40–60°C), with ECO conscious, high performance, and high material compatibility and fab-part compatibility.Connect With SEMI SEMI would like to thank all speakers, sponsors, and attendees for the success of SPCC 2026. Download a preview of SEMI and GNC’s new report, Glass Core Substrate Market and Development Trends, and stay connected with SEMI on LinkedIn and X. Clark Tseng is Senior Director of Market Intelligence at SEMI.
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Advanced packaging is no longer operating behind the scenes. The technology of advanced packaging is helping to sustain the speed of the semiconductor industry’s improvement in power and performance, even as the Moore’s Law roadmap for wafer-level scaling comes under strain.At the Advanced Packaging Conference during SEMICON Europa 2025 in Munich, global experts examined the growth trajectory of this critical sector and Europe’s potential to lead in next-generation packaging solutions.Market Momentum Fueled by AI and HPCRomain Fraux, Chief Research Officer at Yole Group, forecasted that global revenues for advanced packaging will grow from $46.1 billion in 2024 to $79.4 billion by 2030. “Everything is linked to AI and high-performance computing (HPC),” said Fraux, while also emphasizing the growing relevance of automotive applications in driving demand.Romain Fraux, Chief Research Officer, Yole GroupThis demand is accelerating innovation across the supply chain. One emerging area is panel-level packaging, which breaks away from traditional round wafers. As Andreas Wocko, Sales Manager at Lam Research, observed, “Since the 1970s, the semiconductor industry has built on wafers. Now we are not just scaling, we are reshaping, building in a square format for the first time” – an innovation which substantially increases area efficiency and reduces device cost. Andreas Wocko, Sales Manager Europe, Lam ResearchTechnology Transformation from Lab to FabEurope is already investing in the foundational technologies that will power tomorrow’s packaging systems. Rolf Aschenbrenner, Deputy Director of Fraunhofer IZM, the home of the European Union’s APECS advanced packaging pilot line, discussed ongoing research into functional interposers, routing density, and organic interposers. “Our goal is to show how a new design philosophy incorporating chiplets can be brought to the industrial systems level,” said Aschenbrenner.Rolf Aschenbrenner, Director Deputy, Fraunhofer IZMThese breakthroughs are essential, as pitch sizes shrink and new materials emerge. Dr. Jessica Stubbe, Global Application Manager at MKS Atotech, described how interconnect densities have doubled in the past two years, with the industry moving to pitch sizes of less than 10µm. Stubbe said this new technology “will be enabled by a move from traditional solder-based interconnects to copper-to-copper hybrid bonding to provide higher density I/Os and lower resistance.” Jessica Stubbe, Global Application Manager, MKS AtotechInnovation Meets Real-World IntegrationThis increased density carries thermal risks with it. As Ram Trichur, Global Head of Semiconductor Packaging at Henkel Corporation, said, “New architectures enabled by advanced packaging are putting power devices on the backside, interposer or substrate, and this addition of more power delivery components in the package creates more local hotspots.”The reduced feature sizes inside the latest packages make it more difficult than ever to apply thermal interface materials. “At Henkel, we are now making 1µm-level fillers which enable the effective filling of gaps as small as 7µm,” said Trichur.Ram Trichur, Global Head of Semiconductor Packaging Market Segment, Henkel CorporationOne of the applications which stands to gain the most from the development of advanced packaging technology is silicon photonics. Dr. Himani Kamineni, Director for Advanced Packaging at GlobalFoundries, described how co-packaged optics (CPO) brings photonics directly inside the package, reducing connection lengths from centimeters down to millimeters, and providing higher bandwidth and lower latency at lower power. “Advanced packaging and CPO are foundational elements for AI and data centers to enable scalability to the next generation of compute,” said Kamineni. “But it will need a lot of packaging innovation: silicon interposers, copper-to-copper interconnects, and fiber-attach units for precise alignment.” Himani Kamineni, Director, Advanced Packaging, GlobalFoundriesReliability and Test Under PressureIn the transition to new packaging technology, it is crucial that the industry does not lose sight of the reliability standards which have made semiconductors so valuable in sectors such as automotive and aerospace. Amar Mavinkurve, Director of Materials and Labs Package Innovation at NXP Semiconductors, warned the finer spacing and smaller feature sizes in the latest packages posed a problem for reliability and long-term performance. He said, “We are dealing now not just with one failure mechanism, but with multiple. So, the way that we are used to describing behavior in models will not necessarily hold in future. Even industry standards might not hold.”Discussing new technologies such as copper-to-copper interconnects, Mavinkurve pointed out that failure would not be due to a single event, but to processes such as electromigration, corrosion, and thermomechanical effects. To model reliability properly in future, he said, “we need to move from a physics of failure to a physics of degradation.” Amar Mavinkurve, Director Materials and Labs Package Innovation, CTO, NXP SemiconductorsFabio Pizza, Business Segment Manager at Advantest Europe focused on quality and failure. With geometry scaling toward 1nm, early identification of known-good dies is essential to optimize cost and test coverage. Pizza said that, while device manufacturers need to keep time-to-market and the cost of test under tight control, they are also trying to figure out how to increase test coverage. “In a modern GPU, even a 100 DPPM quality process leaves 20 million transistors untested,” he said. Fabio Pizza, Business Segment Manager, Advantest EuropeEurope’s Position in the Global EcosystemThe conference concluded with a panel discussion about the prospects for Europe in the global advanced packaging market. According to Yole’s Romain Fraux, there is a strong ecosystem in Europe: “Europe’s strengths include specialized packaging service providers in the photonics and power market segments, as well as many packaging equipment manufacturers,” said Fraux. This resonated with the instincts of NXP’s Amar Mavinkurve and Advantest’s Fabio Pizza. Mavinkurve said: “We should focus on what we are already good at doing. It will be challenging to compete with advanced packaging providers elsewhere for AI and HPC business.”Ram Trichur of Henkel, however, urged the industry in Europe, “Do not take your foot off the gas on advanced packaging. You cannot do the full stack here, but in a technology such as CPO, there is a lot of innovation in Europe, and there is scope to add the manufacturing of these devices on top of the research capabilities.”Chris Scanlan, Senior Vice President of Technology at Besi, raised the idea of shifting production toward Eastern Europe. But Trichur cautioned that talent and infrastructure remain limiting factors in that strategy. From left to right: Chris Scanlan, Senior Vice President Technology, Besi;Amar Mavinkurve, Director Materials and Labs Package Innovation, CTO, NXP Semiconductors; Fabio Pizza, Business Segment Manager, Advantest Europe; Rolf Aschenbrenner, Director Deputy, Fraunhofer IZM; Ram Trichur, Global Head of Semiconductor Packaging Market Segment, Henkel CorporationCollaboration is the Path ForwardSpeakers throughout the conference echoed a common message: advanced packaging is reshaping the semiconductor landscape, and global collaboration will be essential to success. “It is impossible for one country or one region to do the entire stack,” Trichur concluded. “Innovation must be matched with strategic partnerships to bring advanced packaging from research to real-world impact.”On behalf of SEMI, the SEMI Europe team would like to thank the industry leaders whose expertise and enthusiasm made this conference a resounding success. SEMI ContactCassandra Melvin, Senior Director of Business Development and OperationsEmail: [email protected]
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