Health and Safety

As the volume of regulations grows across all levels of government, both in the U.S. and abroad, the semiconductor industry is increasingly struggling to keep up with its reporting obligations. Potential consequences include shipments delayed by customs, existing stocks of materials, parts, and components unexpectedly being made obsolete, and disruptions to multiple tiers of the supply chain that persist over time.To minimize the burden of numerous, varied reporting expectations, the SEMI PFAS Transparency Working Group, led by Intel and Tokyo Electron, is working to:Enable standardized communication on the presence of Per- and polyfluoroalkyl substances (PFAS) in chemical formulations, materials, tools, parts, and fab infrastructure to minimize the burden of varied reporting expectations;Enable traceability; andProtect confidential business information. While the initial focus of the effort is on PFAS, the intent of the group is for the methodology to be applicable to other substance reporting requirements.The group will be holding a working session at SEMICON West in Phoenix, Arizona on Wednesday, October 8 from 10:30 a.m.-12:00 noon at the North Building, 200 Level, Room 229A of the Phoenix Convention Center. All segments of the semiconductor manufacturing supply chain are invited to join the meeting and contribute to this critical effort. This session is intended for individuals involved in: Data management and reportingSupply chain managementMajor business continuity planning and crisis managementRisk assessment and mitigationEHS/regulatory complianceSub-supply chain visibility challengesThe PFAS transparency effort will also be introduced during the SEMI EHS Summit and SEMI Global Standards Summit, both scheduled on Tuesday, October 7.For additional resources, download the PFAS Explainer or SEMI PFAS Position Paper. Contact [email protected] for questions or more information about the working group session.James Amano is Senior Director of EHS at SEMI.

The work of the SEMI Environment, Health and Safety (EHS) COVID-19 working group to address industry EHS issues and share best practices has morphed as rapidly as COVID-19 itself as the vaccine rollout continues, inspiring new hope for a return to normal. The group has evolved from mounting crisis responses to urgent issues such as the shortage of masks and sanitization wipes and sprays to helping companies prepare for their employees’ return to the workplace and developing on-site health-screening procedures for employees and visitors to help ensure their safety. Hot SEMI EHS COVID-19 working group topics have included the following as the team continues to meet every other week to stay abreast of COVID-19 developments and their industry impacts. Vaccinations SEMI members have been monitoring the progress of U.S. states and counties in delivering vaccines. So far, no essential workers in the electronics industry have been eligible to be vaccinated. To help gauge the availability of vaccines to essential industry workers, some companies have hired external consultants to monitor the phase-in. The SEMI EHS COVID-19 working group will collect and centralize the information to help members plan for their employees’ return to the workplace. Policy Enforcement At manufacturing sites, some employees reportedly are becoming complacent in following masking and distancing policies, prompting reminder communications from top management for workers to comply until the pandemic is brought to heel. The higher-ups are also encouraging staff to get vaccinated once they are eligible, with some member companies offering workers time off or other incentives for their employees and families to get vaccinated. Contact Tracing Despite the intense focus on contact tracing since the initial COVID-19 outbreak last year and early efforts to track people movement using smartphone applications or wearables, no tracking technology has emerged as the standard for helping to curb the virus’s spread. SEMI members have been testing various technologies ranging from Bluetooth to wearables with wide-band radio waves to track employees while on site. Tracing by wearables has proven inaccurate. Left with no better alternative, the vast majority of SEMI members are performing time-consuming manual contact tracing. OSHA Compliance While OSHA has picked up the pace in issuing new regulations related COVID-19, pandemic-related site inspections have lagged, some SEMI working group members report. In California, CAL/OSHA recently passed a COVID-19 Preparedness Plan that defines the responsibility of employers in preventing workplace outbreaks, offering PPE to workers and conducting frequent testing. The California plan mirrors the CDC recommendations implemented at the onset of the pandemic. To join the SEMI EHS COVID-19 working group, contact our EHS team at [email protected]. Olivier Corvez is senior manager of Environment, Health, Safety and Sustainability at SEMI.

Back in March 2020, at the onset of the spread of COVID-19 in the U.S., SEMI quickly formed an Environment, Health and Safety (EHS) COVID-19 working group made up of EHS professionals who suddenly saw a critical need to share their experiences, validate untested policies, and collaborate on establishing best practices in response to an extraordinary public health crisis. The group, which today numbers 20 member companies, meets regularly to discuss an array of topics that have grown beyond their pressing need to react to a crisis earlier to a longer, more measured view of risk management as coronavirus cases continue to climb worldwide. While themes vary from one meeting to another, the recurring agenda remains the same to address the following topics: Phase approach – How to bring staff back on site Social distancing – How to manage people traffic flow on site Contact tracing – Track exposure to ensure workplace safety Space allocation – Changes to offices, cubicles and conference rooms HVAC systems – Optimizing workplace air flow and improving filtration systems Clean rooms – PPE and distancing protocols Training – Communications approaches to expanding awareness in order to reduce risk of spreading the virus Travel policies – Domestic and international travel guidelines Vaccines – Policies for vaccinating and monitoring personnel Site inspections – Preparing for an eventual increase in inspections from OSHA representatives In April, the SEMI EHS team issued a survey to assess the pandemic preparedness of member companies. Designed by the COVID-19 working group, the survey found that, despite having a pandemic plan in place, many member companies faced a shortage of PPE and sanitization equipment, their most significant challenge at the time. Members also pointed to operational challenges posed by the pandemic and raised questions about how to establish sound policies appropriate for their operations and geographic locations. Today, the SEMI EHS COVID-19 working group is well-established collaborative forum on public guidelines that members see as unclear as they continue to chart their own pandemic policies. With the first tranche of vaccines recently starting to ship in the U.S., the group has turned its attention to vaccine distribution and how companies will encourage employees to be vaccinated. For more information about the SEMI EHS COVID-19 working group or to join the group, please contact the SEMI EHS team at [email protected]. Olivier Corvez is senior manager of Environment, Health, Safety and Sustainability at SEMI.

The semiconductor industry must do far more to educate the electronics supply chain on the subtle differences among various fluoropolymers, 30 SEMI member companies learned in an October 13 webinar organized by SEMI to help maintain a unified voice on the critical importance of per- and polyfluoroalkyl substances (PFAS) in semiconductor manufacturing. At the same time, producers and customers of the substances used in chipmaking should work more closely together to steer clear of adopting policies that could limit the availability of safe fluoropolymers and the semiconductor industry’s ability to use them in the future.The insights were offered by representatives from the Performance Fluoropolymer Partnership – a group within the Washington, D.C.-based American Chemistry Council – on per- and poly-fluorinated substances including fluoropolymers. The Council is an industry trade association representing American chemical companies. Following are other key takeaways from the webinar. Fluorinated polymers and non-polymers are commonly found in components used in semiconductor manufacturing such as fittings, valves, tubes, O-rings, wafer carriers, filtration media, high purity air filters, greases and lubricants. The substances are ideal for use in corrosive chemicals, high temperatures and other harsh environments and are found in a variety of electro-technical components such as potentiometers, wiring, printed circuit boards and Lithium-ion batteries. Fluoropolymers are a diverse family of plastics also widespread in modern life, with applications ranging from food packaging and non-stick coatings on kitchen pans to rechargeable batteries for electric vehicles. The term PFAS (per- and poly-fluoroalkyl substances) covers more than 4,700 chemicals with diverse physical, chemical, environmental and biological properties and impacts. There are also significant differences among their chemical compositions. A careful appraisal of their risks and impacts should take into account any potentially hazardous properties, toxicity levels, their prevalence in the industry, and whether substitutes are readily available. Growing pressure from regulators worldwide threatens future access to fluorinated chemicals, increasing the importance of raising awareness on how to distinguish groups of chemicals and encouraging a measured approach towards eliminating only chemicals carrying the greatest risk. Fluoropolymer producers and opponents of the chemicals must look past their divergent interests to work together to voice common concerns to regulators. Various SEMI working groups respond to public consultations when opportunities to present the semiconductor industry’s position arise. Individual group members communicate both among each other regarding new regulatory developments and also with external constituents through SEMI about the importance of chemicals to chip manufacturing. As with other sectors, the semiconductor industry continuously seeks to “green” its manufacturing processes. SEMI believes the commitment of the supply chain to these efforts is crucial to protecting the industry’s interests and driving innovation.Olivier Corvez is senior manager of Environment, Health, Safety and Sustainability at SEMI.

Humanity has survived almost unimaginable challenges over the past 5,000 years of documented human history. From war, famine and natural disasters to the first global pandemic in the last 100 years, more often than not, people have relied on one another to survive and thrive again. As the industry association representing the global microelectronics industry, SEMI has similarly made collaboration and community integral to the fabric of its organization. From helping members to succeed through the COVID-19 pandemic to facilitating member-driven industry standards around environmental health and safety, materials, and manufacturing capabilities, this approach shows members that standing together is better than standing alone.On the eve of the 50th annual SEMICON West (July 20-23, 2020) — the first virtual edition in SEMI’s history — I spoke with SEMI’s vice president of technology communities, Michael Ciesinski, about the role of SEMI in tackling big challenges through an active member community intent on solving problems through collaboration.SEMI: How long have you worked with SEMI and in what capacity?Ciesinski: In January 2016, I started my second tour at SEMI when FlexTech, the industry consortium I’d been leading, became SEMI’s first strategic partner. Nearly two years into that role, SEMI President CEO Ajit Manocha asked me to form Technology Communities to engage members with common interests. After FlexTech, we brought on the Fab Owners Alliance, then MEMS Sensors Industry Group (MSIG), and later the Electronic System Design Alliance (ESD Alliance).SEMI now has more than 20 communities in all, including Smart MedTech, Smart Data AI, Smart Manufacturing, Electronic Materials, and Integrated Packaging, Assembly and Test.SEMI: What is your role with Technology Communities — and how do members stand to benefit?Ciesinski: The leadership of Technology Communities ensures that SEMI’s benefits and services align to our members’ interests so we can provide member benefits that matter most. This spans forming communities where people hold common interests (e.g., advanced packaging) to facilitating standards that will promote intelligence in manufacturing (e.g., data standards for AI and machine learning) as well as providing R D funding.I’m especially proud that over the past three years, SEMI has brought more than $40 million in R D funding to our members, with most grants in the $500,000-$1 million range. We’ve been especially successful in securing funding in flexible hybrid electronics (FHE) through U.S. Army Research Laboratories (ARL), a model we first developed through FlexTech.Two recent recipients of FHE funding, GE Research and ITN Energy Systems, show how the grants are spawning partnership opportunities among commercial enterprises, R D organizations and universities. In developing lightweight, non-invasive wearables, including a human-performance sweat-monitoring patch that remotely analyzes sweat to detect hydration levels and other vital signs, GE Research is using key components such as sensors and lightweight batteries in its designs.ITN Energy Systems designed a flexible all-solid-state lithium battery that’s printed on light, flexible substrates to power small and incredibly thin applications.Universities are also benefiting by plugging into the SEMI ecosystem. In fact, 40-50 percent of funded projects are seeding commercialization by universities. This is another validation that SEMI’s collaborative, community approach to microelectronics is working.SEMI: Position, Timing and Navigation (PNT) is another hot area where SEMI has secured ARL funding. What makes this funding different and why is it important?Ciesinski: The PNT grant makes ARL funding available to the MEMS Sensors Industry Group (MSIG) members through SEMI for the first time. If you’ve ever lost GPS signal while coming out of a tunnel, you know how frustrating that is. For us, that’s an inconvenience, but for a healthcare worker in a remote location who’s waiting for a delivery of medication by drone, it could be life-critical. While that’s just one example of why we need PNT to operate when GPS isn’t available, I can imagine dozens of other important dual-use cases, including autonomous driving.SEMI: How else do Technology Communities benefit under SEMI?Ciesinski: Technology Communities need access to diverse resources to spur continuous innovation. Electronic Materials Group participants, for example, need to stay informed on regulations coming out of Asia, the U.S. and Europe that may affect their businesses. Where else other than SEMI can like-minded stakeholders congregate with people up and down the supply chain to determine whether industry-wide action is needed on regulation?SEMI: What is the importance of SEMI’s global footprint?Ciesinski: I’ve worked with many associations and managed major industry consortia. The clear advantage of SEMI is our global footprint. And that’s vital because microelectronics is a global industry involving a multitude of stakeholders that play essential roles in the supply chain.Let’s say you want to discuss EU regulations on hazardous chemicals. Rather than decipher these complexities alone, you can pick up the phone to speak with someone on SEMI’s European team to learn what’s critical.What if you’d like more information on the 20-plus new fabs that are going up in China? You can explore that question with our SEMI China or SEMI Industry Research and Statistics teams.SEMI: How has SEMI evolved over the years?Ciesinski: SEMI has a long history of providing what the industry cares about. We started in trade shows and pivoted to industry standards. We began with small silicon wafers and wafer carriers, and now within the span of 50 years we’re working on data-format standards that will support the application of AI and machine learning (ML) in the semiconductor industry.While highly varied today, data-format standards will help component manufacturers refine processes to create more efficient solutions. This ARL-funded program, which pairs SEMI members with the grant recipient, Cornell University, may offer dramatic gains in the productivity of semiconductor manufacturing.SEMI: How does SEMI’s approach to COVID-19 reflect core values of collaboration and community?Ciesinski: Together with Ajit Manocha, CMO Terry Tsao and other team members at SEMI, we pulled together a task force to help SEMI members navigate the pandemic.We tapped two existing groups, Environment, Health and Safety (EHS) and Information Technology Leadership (ITL) from the start, documenting their strategic and tactical approaches to help all members through the COVID-19 resource section of our website. The EHS section provides tips on facilities and meetings, employee policies, business travel and communications, while the ITL section lists insights on computing hardware for staff, licensing, networks, security and employee policies.Our EHS leadership team, which includes Entegris, Axcelis, Versum, and Intel, immediately started sharing best practices for sanitizing facilities. As a result of team meetings, SEMI EHS shared best practices on keeping the workforce remote and guidelines for returning people to work safely. From securing PPE and safeguarding employees and visitors by performing thermal scanning to outlining communications around potential employee exposures, EHS has provided meaningful resources for the benefit of all members.SEMI also took immediate steps in the area of advocacy. Our advocacy team in Washington, D.C., together with regional SEMI presidents around the world, have ensured that semiconductor facilities were and still are considered essential businesses in the U.S., Europe and Asia. That’s because microelectronics are foundational to fighting the pandemic.Microfluidics are critical to the Reverse Transcription (RT) Polymerase Chain Reaction (PCR) tests most commonly used for COVID-19. Sensors are embedded in the pulse oximeters that allow patients and healthcare professionals to monitor a vital rubric: oxygen saturation level. If oxygen saturation level drops into the low 90 percentiles or below, it may be time to go to the hospital for treatment.Microcontroller units are essential components in a wide range of hospital equipment, including the ventilators that may make the difference between life and death in the most seriously ill patients.SEMI: How can the ingenuity realized through microelectronics continue to help us tackle other big problems? Ciesinski: We have MEMS and sensors to thank for distributed intelligence, giving us the ability to put sensors anywhere, locally based in the field or in the packaging house.Food production is a prime example. Leveraging miniaturized wirelessly connected sensors, we can trace food through the entire production lifecycle, from the seed in the ground to the food in the warehouse and, ultimately, to the product that lands on the table.From larger enterprise such as IBM Food Trust to small startups, we’re using MEMS and sensors to improve crop yields so we can feed a human population that’s growing each year.There’s a sustainability piece as well. We’re using MEMS and sensors to reduce the amount of fertilizer or other nutrients or chemicals in the soil. That’s good for the environment and for the agricultural workers who labor in the fields.MEMS and sensors can also condense the time it takes to perform a specific task, conserving human resources.SEMI: Where do you think SEMI will go in the next decade?Ciesinski: Ten years from now, I believe we will still have our global footprint in place. I expect it will expand, particularly in Asia.We may also expand into new areas such as Latin America and Central America, which would provide at least two major benefits: People working in microelectronics would, I hope, have access to better quality of life. And diversifying the supply chain would allow nations and regions to have more control over the products they need, from PPE to medications, which may help us to better manage through the next pandemic.I am also hopeful that SEMI will be on the leading edge of helping our members communicate in much different fashion from what we have today. We’re already expanding beyond the paradigm of in-person meetings for standards meetings and conferences. As we move forward, I think we’ll see a hybrid solution to doing business, combining in-person meetings with virtual conferences and digital content that’s available 24/7.Whatever changes we see in SEMI, I’m confident that we will continue to see a global footprint in an industry association that prioritizes connections among members.Engage in the SEMI experience at upcoming SEMICON WestRegister today to hear from keynote speakers such as environmental advocate and former U.S. Vice President Al Gore, futurist and author Steve Brown, and IBM Research senior vice president and director Dr. John E. Kelly III, and Lea Gabrielle, special envoy of the Global Engagement Center for the U.S. State Department, at SEMICON West , July 20-23, 2020. Content will be live streamed and available on-demand. Michael Ciesinski is vice president of Technology Communities for SEMI, the global microelectronics industry association, appointed in August 2018. At SEMI, he directs activity for more than 20 industry groups, oversees the association’s R D funding program, and develops new technology initiatives to serve SEMI’s 2,400 members. Prior to re-joining SEMI, Ciesinski was president/CEO of FlexTech Alliance, an industry consortium focused on new methods of creating electronics. From 1995-2008, Ciesinski served in a similar role at the U.S. Display Consortium (USDC), a private/public partnership chartered with building the infrastructure for electronic display and flexible electronics manufacturing. Both FlexTech and USDC annually sponsor multimillion dollar technology development programs and provide industry technical, financial and market services. Ciesinski is a graduate of the University of Albany, NY, and a former member of the Dean’s Advisory Committee at California Polytechnic State University.Maria Vetrano is a PR consultant at SEMI.

Olivier Corvez, senior manager of Environment, Health, Safety and Sustainability at SEMI, sat down (virtually) with Todd Patterson, vice president of global EHS for Entegris Global Operations, to discuss how Entegris has responded to the global pandemic.Corvez manages and Patterson participates in the COVID-19 EHS Task Force currently meeting weekly to discuss industry response and share best practices. SEMI: Was Entegris prepared for the COVID-19 pandemic? How did the company respond?Patterson: Entegris has a strong risk management framework and a risk assessment team of senior leaders who meet at least once a quarter. This focus gives us early visibility into events that could destabilize our organization or threaten our operations. Such a framework helps ensure we have the information necessary to act as soon as possible when the need arises. However, our business continuity plans for a pandemic of this scale were far less than with other more commonly occurring catastrophic events such as earthquakes or hurricanes. The COVID-19 crisis was clearly unprecedented and as such, the necessary systems and procedures were not in place with the depth and detail needed. Our strong governance structure made it possible for us to hold steady even as the pandemic caused increasing uncertainty and disruption around the world. For example, despite major supply chain shutdowns across many industries, to date, our supply chain and manufacturing operations have only been modestly impacted by COVID-19. Our supply chain team was assessing daily the areas of risk with our suppliers and taking appropriate action as well as preemptive steps to ensure our critical supply lines remained open.Our sales team engaged in regular communications with our customers providing them updates about our Business Continuity Plans and our actions to mitigate the risk to any of their deliveries. In addition, we maintained current information about the continuity of our supply chain on the company’s intranet for the global sales team to access as they engaged with customers. Also, a proactive communication plan was implemented immediately to send weekly video messages from senior executives directly to employees’ emails. It was an effective way to communicate with our global teams, to keep them informed about the status of the company’s operations and maintain a common sense of purpose at a time when many colleagues worked from home. In these weekly messages, we also focused significant attention on the health and safety protocols established to protect our manufacturing and lab employees from the virus.Among the health and safety protocols we implemented immediately as the virus moved across different regions were those related to facility screenings, work-from-home policies, social distancing, self-quarantine requirements, contact tracing, increased disinfecting, and travel restrictions. With approximately 5,300 employees worldwide, we had teams in every region ready to implement these comprehensive protocols. We believe we were among the first companies to implement work-from-home policies and travel restrictions.Temperature screening stations at Entegris facilities in Jangan, Korea (left) and Kulim, Malaysia (right). In addition, our CEO led a COVID-19 Steering Committee comprised of senior executives and managers from operations, human resources and communications. The committee met several times a week during March and April to evaluate and formulate responses to the issues that emerged as the virus spread from region to region. The committee’s work created a strong partnership among senior executives and divisional and functional leaders, and the initial guidelines developed by the committee have formed the backbone of a global playbook to limit the spread of the virus to our other sites around the world.Recently, the committee has changed its focus to more strategic issues such as creating a framework for transitioning remote workers back into our office locations. Meanwhile, local leadership teams at each of our global sites have been empowered to address ongoing tactical issues consistent with our thoroughly documented health and safety protocols.Looking to the future, we are using our experience in responding to COVID-19 to develop a more comprehensive pandemic response plan. We have project teams working on better ways to: measure temperatures of personnel entering our sites facilitate social distancing in the workplace redesign common use areas to reduce the number of high touch points disinfect all spaces thoroughly and regularly, and manage emergency pandemic supplies. SEMI: From the SEMI EHS survey, we noted that all members had a Business Continuity Plan. How effective has it been for deploying resources and adapting quickly and minimizing the crisis? Why or why not? Patterson: Because we have operations in China, Entegris experienced the impact of the virus immediately. We quickly formed two task force teams for our two primary facilities in the region. These teams developed the means for communicating key information to employees and started working on prevention plans to protect employees and comply with local requirements for when operations resumed. They met the challenges head on and found quick solutions. An example was finding an effective way of communicating to the employees for each location. Group chats were established through social media. It was this work that led to their success in getting approvals from local authorities to resume operations. Those plans have laid the groundwork on which our other sites around the world could build their response plans.The effective management of our global supply chain also stands out as a key success of the company’s Business Continuity Plan. Entegris has a highly complex supply chain with approximately 6,500 suppliers and a $850 million annual spend, and we ship work-in-progress and finished goods from over 90 sites globally.As I mentioned earlier, despite the virus crippling supply chains across many industries, Entegris experienced very little disruption to its supply chain. The supply chain team was able to accomplish this despite a 90% reduction in global freight capacity. A key factor in keeping goods flowing to our factories was the intensive work the team had done earlier to develop an in-depth understanding of the company’s top suppliers and to mitigate sourcing risks. They had established alternate sources, balanced the sources geographically, and placed inventory across our supply chain to buffer risk.The team also had integrated statistical modeling into reporting tools, which made it possible to reset safety stocks and logistics lead times quickly as conditions changed. And a supply chain digitalization provided one aligned and integrated view via dashboards, giving the company the ability to respond rapidly and to communicate in real time with our suppliers. We essentially had a virtual war room where we monitored the daily impact of the spread of the virus and could address bottlenecks and other issues immediately.SEMI: What lessons have been learned, so far? How do you see changes in your company’s operations in the future?Patterson: Institutionalizing what we’ve learned has already begun. Whether the measures implemented during the pandemic are temporary or become permanent is still to be determined. Regardless, the learnings need to be documented and available as a playbook for if – or when – the next pandemic occurs.Entegris is already working on a more comprehensive pandemic plan that will be based on five levels of preparedness. Level 0 will cover annual training requirements and management of emergency inventory of pandemic supplies. Level 1 will include early recognition of an outbreak, and then Levels 2-4 will include requirements for when specific response measures are implemented. Entegris also has formed the “New Normal” task force, which consists of leaders representing a number of disciplines directing the project teams previously mentioned to create a more comprehensive pandemic response plan. One of the project teams is working on improving the facility screening process that performs temperature measurement for personnel entering Entegris sites. The team is looking at the best technology to scan body temperature. As to whether this technology is employed only while COVID-19 is still active or becomes a permanent way of doing business, this is still being discussed.SEMI: EHS is involved in both providing technical support to protect individuals but also in making organizational changes to favorize social distancing. Could you explain some of the successes and challenges while tackling these two fronts?Patterson: Very early in the pandemic, Entegris established a work-from-home policy for non-essential employees. This significantly reduced the number of personnel and the potential for contact at the Entegris locations. Significant facility changes also were required. These included the design of facility screening booths and modifications to common gathering areas such as canteens, meeting rooms, prayer rooms, and smoking points. Physical markings were used to designate 2 meters distancing, and the seating in canteens and meeting rooms was reduced and staggered to minimize the risk of exposure to the virus. Entegris also has a project team focused on developing design solutions for offices and workstations when space makes it difficult to maintain 2 meters social distancing. These changes turned out to be essential for some sites in meeting mandates by local authorities. Our sites in Hangzhou, China and Kulim, Malaysia both were allowed to resume partial operations after demonstrating to government authorities the effectiveness of the preventative measures put in place. One particular challenge we are facing is the range of personal differences and awareness levels within the workforce – including those that don’t understand the importance of the new guidelines. We are working closely in advising supervisory staff to be aware of the need for employees to follow all health and safety protocols we have put in place, including social distancing. That preventative measure is the most difficult to make part of our new behavior – it is unnatural and inconsistent with our human nature, but it is critical to preventing the further spread of the virus.SEMI: How do you envision the progressive steps in deescalating to bring back “normal” operations? Patterson: I don’t know whether Entegris will ever go back to the old “normal.” As previously mentioned, we are working on the “New Normal.” Our focus now is on bringing our work-from-home employees back to the workplace without adding risk of exposure to the virus. We are still exploring options, but we expect to do it in a phased approach so that we can adequately assess the preventive measures that are in place and determine whether adjustments need to be made to any of our health and safety protocols.We are starting to see a variety of different frameworks emerge for evaluating repopulation timing and procedures. We will assess them on an office-by-office, or site-by-site basis, utilizing consistent criteria to define the potential for exposure to the virus. This also applies to our field service workforce. However, I have not yet seen any governmental guidance that offers a recommended framework for returning employees to the workplace. I think this represents an opportunity for SEMI EHS and the Standards groups to work to establish that framework for our industry.SEMI: Anything else you would like to share that you have observed throughout this crisis?We have not discussed the challenges faced in procuring and acquiring pandemic supplies. Almost immediately after the outbreak occurred in Wuhan, it became increasingly difficult to find supplies. Even when confirmation was provided by suppliers and delivery dates confirmed, the majority of the dates were pushed out or canceled. We found that what worked best was to have purchasing teams at the local site work with their local contacts on obtaining smaller quantities while a corporate point person was also managing larger orders. In preparation for any future pandemics, Entegris will be maintaining an emergency inventory for masks, sanitizer, thermometers, and disinfectants.For 18 months, Todd Patterson has held the position of VP Global EHS for Entegris Global Operations. His experience with emergency management and BCP has become invaluable in the past three months. He is grateful to his global response teams around the world for coming together to support the Entegris team in this unprecedented situation. Todd is an active participant on the SEMI EHS COVID-19 response teams led by Olivier Corvez at SEMI. Olivier Corvez is senior manager of Environment, Health, Safety and Sustainability at SEMI.

Cameron Burks, head of Global Security, Enterprise Business Resiliency and Health, Environment Safety with Adobe Systems, and a member of the White House Task Force for COVID-19 response, briefed members of SEMI’s IT Leadership (ITL) and Environment, Health Safety (EHS) groups on April 20, 2020, on enterprise resiliency principals specific to the current COVID-19 crisis. Burks has spent over 20 years in the global security, crisis management and business continuity fields for public and private global companies. In the meeting, he noted, “This is all new. No one has had to respond to a crisis of this magnitude and impact. Ever.” On top of all of the learning and responding that teams are doing in real-time, it is helpful to have a strong business continuity plan (BCP). The following is a recap of insights that Burks shared on best practices for business continuity with examples from Adobe’s BCP.The Long-Term Picture: How to Plan for Business ContinuityBurks emphasized that the first step in any crisis is identifying risks and ensuring the safety of all human life. Once human safety is assured, the next part of the plan must form a strong foundation for escalation, operation evaluation and response. A solid foundation also creates the business factors to restart operations efficiently. The foundation of the Adobe pandemic plan was laid during the summer of 2019 while the global team was updating their infectious disease plan and rehearsing with headquarters and regional offices. That plan includes six main sections:1. Crisis Management Plans – escalation, roles and responsibilities, team operations2. Crisis Communication Plans – internal and external stakeholder communications3. Incident Management Plans – site or regional management response4. Emergency Response Plans – immediate local response to events5. Business Recovery Plans – business and facility recovery6. Disaster Recovery Plans – IT and technology recoveryThis format has worked and scaled well over the past few months, and the company is now in the stage of evaluating how to help offices recover and repopulate. Response Team Structure – Global and LocalAlthough it is critical to have plans and leadership coming from headquarters when it comes to a crisis, LOCAL teams are on the front lines since most crises start and evolve quickly. In the planning process, the local teams need to know and be trained on plans for a wide range of incidents and events including: People- and product-related Security – both external and internal Operational (e.g. cyberattacks) Natural disasters Health-related, such as this pandemic The severity of the event will determine the corporate impact and activation of appropriate plans. Low-impact events include those where stability is quickly reached and response plans have effectively contained the incident. High-level events will cause severe disruption for employees and customers and require an efficient and coordinated response. Regardless of the severity level of the event, all response teams need to be prepared to quickly activate and then to thoroughly coordinate on crisis management and communications. It is critical to have established actions to implement based on the severity level of an event. Table 1 provides an example of Key Trigger Levels for implementing specific actions depending on the severity of an event. Table 1 – Key Trigger Levels X = phase to consider first implementing controls The team needs to understand what the staff requires to maintain business continuity. Burks recommended aligning with ISO 22301, the Business Continuity standard. The standard will lead a company to understand what redundancies need to be in place to keep essential operations running. In Adobe’s case, this includes keeping data centers running and providing essential gear to the 90+ members of the response and global security teams. Adobe tests the plans every month and addresses the bugs – every time.Repopulating Business Facilities During COVID-19 While COVID-19 infection and death rates are currently flattening in many locations, there remain a significant number of new infections, limiting the ability to repopulate business facilities without threatening the health of the workforce and their families. Adobe is using multiple indicators to calculate when the virus is contained, the threat is reduced, and employees can return to workplaces. For now, Burks recommended maintaining social distancing as much as possible while keeping operations running. He believes summer may see some abatement due to weather. However, most experts expect to stay hyper-aware and responsive well into 2021.Although Adobe tries to provide actual dates for return to their employees – and did early on with best estimates – they have had to change to a “until further notice” statement. Repopulating is going to be much more complicated than the original decisions to work from home. The Adobe operations team is providing much larger conference rooms, enhanced cleaning regimens, and new norms of interacting at the workplace for everyone. The goal is to bring people back in small groups on a site-by-site basis. The first group will be only 7-10% of the workforce. That group includes the cleaning and facilities crews to support the professional staff, who would return to reap the benefits of a collaborative environment. Many people want to come back to the office. They are suffering in isolation, and productivity is dropping in those cases.Adobe is planning to create a manual on interacting at the workplace and will require training and adherence to new social constructs. Security officers will be “ambassadors,” helping the workforce remember and adhere to the new rules. The company will use footprint stickers to provide visual clues to employees on walking single file and avoiding groups. Stickers will designate desks that can and cannot be used. To provide a more open office plan, they will remove desks and arrange movable white boards to accommodate the collaboration employees want.The situation is complex and dynamic and requires decision-making based on a definitive set of criteria. The following is a summary of information that Burks shared on Adobe’s criteria for returning to work after COVID-19: Indication of health and safety assurance utilizing risk assessment criteria – locally assessed and qualified for a minimum of six weeks. Travel prohibitions and local/external meeting guidelines to be modeled separately utilizing case-by-case risk assessment criteria. Assessment of the case fatality rate, infection peak and downside projections – curve must be flat. Management team decision on how much risk to assume, as this disease is durable Assessment of infection vector and prevalence vis-à-vis relaxation of nonpharmaceutical interventions; assessment of local healthcare capacity Government shelter-in-place restrictions fully (or partially) lifted; declarations by public leaders that the virus has been contained at some level (city, state, country) Assessment of facilities to physically distance employees and/or staggered shift schedule; assessment of security capability/resource availability Assessment of public transportation and infrastructure, including parking garage Assessment of school closures, childcare and/or adult-care Assessment of nonpharmaceutical intervention awareness campaign, medical surveillance program, and/or onsite medical or clinical support No visitor program until approved by global security staff when office repopulation program begins. Create exceptions list. Emergency plans formally in place Site capacity identified; Emergency Response Team (ERT) skeleton crew part of the repopulation Full plan in place to close offices for a period of no less than three weeks if one employee or vendor tested positive for COVID-19 during repopulation exercise; plan includes informing workforce within “return population” of circumstance and having the facilities team execute a deep clean. The plan would then activate communications for the crisis management remediation phase, which includes full workforce transparency via town halls, webinars, emails, etc. Burks noted that contact tracing has moved from an unthinkable invasion of privacy to a likelihood for most workplaces, taking into consideration privacy laws predominant in Europe and U.S. If anyone falls ill or tests positive for the virus, they will automatically be sent home and everyone who has been in contact with them will need to enter a 14-day quarantine before returning. Burks’ presentation, and his thoughtful approach to planning and the current situation with COVID-19, allowed the attendees to consider their positions and paths for bringing their workers back to the offices and facilities. A lively question and answer session enabled members to further clarify points and get immediate feedback on their plans and strategies. Burks finished with a request to industry members to continue the dialogue and send industry data for him to report back to the White House Task Force. For additional resources from SEMI, visit our COVID-19 response website, which provides best practices and the opportunity to submit company stories.About the AuthorHeidi Hoffman is Senior Director of Corporate Marketing for SEMI. She is currently serving on the SEMI COVID-19 Response Team, coordinating multiple inputs from across the industry to assist all SEMI members in responding to the crisis. To submit your company response story, visit our COVID-19 News and Blogs webpage and scroll down to the green submit bar below the news.

Part 2 of 2Read Part 1.While companies navigate the ongoing COVID-19 crisis, corporate leaders should be evaluating a number of key business continuity issues as well as steps they can take to not only react to business disruptions but also reshape their business and recovery plans.We spoke with Dan Steele, Senior Director and the APAC Head of Environmental, Health, Safety, and Security (EHS S) at GLOBALFOUNDRIES (GF) Singapore, via teleconference for insights into the best practices he and his team have implemented from their Business Continuity Plan (BCP) to guide them through the health crisis.SEMI: How can SMEs (small and medium-sized enterprises) afford BCP, as they are often quite costly?Steele: BCP is not something you afford. Rather, it is essential to good management. Every business is about managing risks and every manager’s responsibilities include risk mitigation. Regardless of their size, companies often pay a higher price for survival in a crisis because they are ill-prepared. All companies owe it to themselves, their employees and other stakeholders to conduct ongoing business continuity planning. No one knows what or when the next crisis will be, and no plan is perfect in mitigating crisis impacts.However, it is critical to plan for potentials, institutionalize EHS and security best practices, ensure the supply chain has both redundancy and robustness, train employees to adopt additional skills, and work with customers in advance. Companies that continue to ask themselves what if are the ones that will be the best prepared. And, if BCP is done right, businesses can avoid huge losses. Dwight Eisenhower said, "Planning is everything, the plan is nothing." I think too many companies spend far too much time creating exacting plans when instead they should be planning. Since planning the survival of the company is every manager’s daily responsibility, BCP should not be purely looked upon as a cost, but also as an expected deliverable from the management team.SEMI: Companies have rolled out mandatory work-from-home (WFH) policies and it has become a new normal for many of us. What other measures can GF take should this WFH period be extended?Steele: Our work-from-home policy seems to be working quite well at this point. However, WFH will only be effective if the right tools are provided to employees – we give our employees access to our system so they can work remotely. WFH also offers opportunities to drive new and innovative ways of working, and accelerates some of our automation efforts such as Augmented Reality (AR).At the same time, mental health is just as important and we conduct weekly check-ins with employees to assess their anxiety levels by asking two basic questions: How is the team’s morale and has it impacted productivity in our operations? For us at GF, WFH is not a disintegration of the team. It is important to our operations to continue the social aspects of working as ONEGF. That means online meetings should require face-to-face interactions. It is important for people to connect. Additionally, we maintain the same quality expectations for remote work as we do when employees are on-site. If this WFH period is extended, we need supervisors and managers to reach out and ensure that we stay connected with our employees.SEMI: What BCP lessons have you learned during the outbreak and will the learnings change any of your business or operations strategies when normalcy returns?Steele: I am not sure we learned anything new about BCP. As stated, our approach to BCP is to spend less time on exact plans and more time on planning, asking ourselves what if and mentally walking our way through potential solutions. This crisis reinforces the premise that we must be prepared. We did not have a plan on our shelf for working-from-home, but we had visualized it, knew what we would have to enact and now have employees managing highly sophisticated, technical and skilled manufacturing operations from home, and some of them reside in Malaysia. BCP must be a conscientious, concerted effort even when normalcy returns – it helps us better prepare. Additionally, BCP is not the responsibility of a single person or department. Just like our daily business, BCP is an integrated effort across many functions. Good and great ideas come from anywhere in a time of crisis. Listening is extremely important.SEMI: If there is one takeaway from this unusual and uncalled experience, what will it be?Steele: What we walk away with is the fact that we are dealing with a pandemic that is highly unpredictable, and that we need all types of employees with diverse backgrounds, experiences and perspectives. This inclusion has made us successful all along, and that is what is helping us ride through this crisis today and into tomorrow. We are glad that we have a diverse and proactive BCCM team that is able to quickly adapt and respond to the many challenges of a crisis. SEMI: What advice would you offer to stay productive while WFH?Steele: We acknowledged that it is difficult for the WFH policy to be effective in the manufacturing sector. Although we do not see any productivity loss thanks to automation, we’ve seen a slowdown in our engineering activities.My advice: First stay healthy, monitor your health, and follow the government’s hygiene advice for yourself, your families and the communities you live in. If you socialized before, there is no reason to stop. Stay connected with your co-workers and team. Personally, I don’t believe WFH now means you are always on. Just as you did when working on-site, you still need your personal time. You have to strike the balance that works best for you.Dan Steele has over 25 years of experience in environmental, health, safety and security operations. He has also held other leadership roles in facilities engineering, quality, reliability and assurance, and risk management.Bee Bee Ng is president of SEMI Southeast Asia.

Hello SEMI members:First and foremost, I hope this finds you all healthy and safe. With new developments emerging every day on the COVID-19 coronavirus outbreak, we want to make sure you’re aware of the resources that SEMI is making available to your business, and many others in the electronics manufacturing and design supply chain, to help you navigate through these tumultuous times. Our SEMI Responds webpage lists best practices for company policies, communications and working from home, based on recent calls with members led by our Environmental Health and Safety (EHS) and Information Technology Leadership (ITL) groups. The EHS section provides tips on facilities and meetings, employee policies, business travel and communications, while the ITL section lists insights on computing hardware for staff, licensing, networks, security and employee policies. SEMI greatly appreciates the invaluable member input. Our goal is to help our member companies make informed business decisions during these highly challenging and uncertain conditions, and your contributions to this effort will benefit the industry as a whole. I am pleased to announce that SEMI has partnered with McKinsey Company to provide an additional source of information: a joint-webinar – COVID-19 Insights: Microelectronics Industry Impact and Best Practices – on Thursday, March 26 at 4pm PT. We will present insights gathered through SEMI member surveys and other industry outreach along with the latest expert data from McKinsey Company to help guide your business continuity plans. Click here to register.The SEMI Global Advocacy team has been evaluating how government responses to the outbreak will impact the industry. In the U.S., the team sent letters to 16 state governors last week to request the classification of the semiconductor industry as an “essential business” so that operations can continue if states institute “shelter-in-place” orders. The letters note that SEMI members are “employing all measures necessary to maintain the health and safety of their employees as they maintain continuous operations critical to the industry” based on the input of participating companies.As for SEMI events, I want to reassure you that SEMI continues to make the safety of our members, exhibitors, visitors and employees our top priority. We continue to track COVID-19 developments worldwide and advisories from the World Health Organization (WHO) and the U.S. Centers for Disease Control and Prevention (CDC). We are also working with our regional offices to engage with industry contacts for inputs, and SEMI has postponed or cancelled several of our major events including: Canceling SEMICON Korea 2020, which was scheduled for February 5-7 Postponing SEMICON China 2020 from March 18-20 to June 27-29 Postponing ISS Europe 2020 from April 1-3 to September 1-3 Postponing ASMC 2020 from May 4-7 to the week of August 23 (still finalizing) Postponing SEMICON Southeast Asia from May 12-14 to August 11-13 If plans for any other upcoming events change, SEMI will immediately notify event exhibitors, visitors and speakers. You can find the latest information on changes to our event schedule on our Coronavirus Status Updates webpage. SEMI is working to help our members continue to connect and do business in the interim. For example, our Standards team is hosting virtual meetings for task forces, and we are exploring other virtual events and ways to keep the lines of communication open. I have challenged the SEMI team to think outside the box and will keep you posted as we make new services available.In the meantime, SEMI continues preparations for later events with laser-sharp focus and determined intent to help spark the industry to reignite business growth and meet pent-up demand. The first major rescheduled event is our largest, SEMICON China in Shanghai. You have probably heard news on some of the positive signs coming out of China. You can read about some of these developments in this blog post from the SEMI China team, which has been in close contact with key exhibitors, domestic suppliers and large multi-national corporations that have confirmed that they will participate in SEMICON China based on the current outlook. We are determined to help the industry return to growth. For the first time we will feature an IC Design Pavilion at SEMICON China to help our traditional semiconductor manufacturing members form more connections across the microelectronics supply chain.In the U.S., this year is proving how quickly everything can change. While the immediate future is steeped in uncertainty, we are diligently assessing current conditions while planning for SEMICON West 2020 in San Francisco from July 20-23, though the event dates are subject to change. SEMI is monitoring the COVID-19 containment efforts closely, and we will keep you informed of any changes in plans.In closing, I want to provide a brief reminder that SEMI members should be proud of the roles your companies have played in enabling the technology that will beat the COVID-19 coronavirus. The most powerful supercomputers in the world are helping in the push to develop a vaccine, and these machines would not exist without countless innovations from SEMI members over our 50-year history. The team at SEMI is proud to serve you all and is absolutely committed to doing all that we can to help the industry rise to meet this newest challenge. Sincerely yours,Ajit ManochaPresident and CEO, SEMI

The U.S. Toxic Substances Control Act (TSCA) requires the Environmental Protection Agency (EPA) to cost-share risk assessment fees for 20 chemicals designated as high priority across all U.S. manufacturers (including importers) that produce or import at least one of the chemicals including Formaldehyde, Di-ethylhexyl phthalate (DEHP) and Dibutyl phthalate (DBP). Providers of the substances must self-declare as manufacturers or importers under a 5-year look-back requirement.The SEMI EPA TSCA working group formed to assess the potential impact of the self-declaration requirement has uncovered two points of primary concern: 1. Of the 20 substances, about 10 are commonly found in electro-technical components such as capacitors, resistors, transformers and power supplies.2. Companies that import articles (e.g., components and parts) containing any level of these substances, even unintended residue from a production process upstream in their supply chain of imported articles, must self-identify. Manufacturers and importers that self-identify will be required to share the $1.4 million risk-assessment cost per substance. Small business concerns qualify for an 80 percent discount, with larger businesses covering the balance.The EPA has identified a preliminary list of companies that provide each chemical. The number of companies on the lists ranges from two to 525.On January 27, 2020, the EPA opened a 60-day period for organizations to submit comments to the EPA and self-identify as a manufacturer (or importer). SEMI plans to submit comments prior to the March 27 deadline, in part to request an extension.More information is available by visiting the Federal Register or contacting Olivier Corvez. This EPA webpage contains a February webinar transcript that is also a helpful resource.Olivier Corvez is senior manager of Environment, Health, Safety and Sustainability at SEMI.