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New SEMI Standards Published on Cybersecurity, Data, Traceability, and more

Over 10 new SEMI Standards published in 2024 bringing 1100 SEMI Standards and Safety Guidelines available to date.


By Paul Trio, Director, Standards, SEMI

2024 has been a tremendous year for SEMI Standards. We held our first-ever Global Standards Summit, formed 7 new Task Forces, initiated over 85 new activities, and issued over 150 ballots. This flurry of activities resulted in 11 new Standards as well as over 75 critical revisions, all made possible by our SEMI Standards Program leaders and participating members.

Below are the new SEMI Standards published in 2024:

  • SEMI D85 - Guide for the Tone Reproduction Curves for Transparent Displays
  • SEMI D86 - Test Method of Flicker Nuisance for Wide-Visual-Field Displays
  • SEMI E189 - Specification for Equipment Management of Consumables and Durables (EMCD)
  • SEMI E189.1 - Specification for SECS-II Protocol for Equipment Management of Consumables and Durables (EMCD)
  • SEMI E190 - Specification for Equipment Data Publication (EDP)
  • SEMI E190.1 - Specification for Common Data for Etch Components
  • SEMI E191 - Specification for Computing Device Cybersecurity Status Reporting
  • SEMI E191.1 - Specification for SECS-II Protocol for Computing Device Cybersecurity Status Reporting to Specification for Computing Device Cybersecurity Status Reporting
  • SEMI FH3 - Guide for Salt Mist and Washability Test Flow for Control Module Connector of Wearables
  • SEMI FH4 - Test Method and Guide for the Tactile Characteristics of Flexible Hybrid Electronics Materials and Products
  • SEMI T25 - Specification for ID Marking for Glass Carrier Characteristics of Panel Level Packaging (PLP) Applications

Updates were also made to existing SEMI Standards and Safety Guidelines, including (partial list):

  • SEMI 3D4 - Guide for Metrology for Measuring Thickness, Total Thickness Variation (TTV), Bow, Warp/Sori, and Flatness of Bonded Wafer Stacks
  • SEMI C69 - Test Method for the Determination of Surface Areas of Polymer Pellets
  • SEMI E5 - Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II)
  • SEMI E16 - Guide for Determining and Describing Mass Flow Controller Leak Rates
  • SEMI E30 - Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM)
  • SEMI E40 - Specification for Processing Management
  • SEMI E54.20 - Specification for Sensor/Actuator Network Communications for EtherCAT®
  • SEMI E87 - Specification for Carrier Management (CMS)
  • SEMI E90 - Specification for Substrate Tracking
  • SEMI E94 - Specification for Control Job Management
  • SEMI E113 - Specification for Semiconductor Processing Equipment RF Power Delivery Systems
  • SEMI E116 - Specification for Equipment Performance Tracking
  • SEMI E120.2 - Specification for Protocol Buffers for Common Equipment Model (CEM)
  • SEMI E125.2 - Specification for Protocol Buffers for Equipment Self Description (EqSD)
  • SEMI E132.2 - Specification for Protocol Buffers for Equipment Client Authentication and Authorization (ECA)
  • SEMI E133 - Specification for Automated Process Control Systems Interface
  • SEMI E134.2 - Specification for Protocol Buffers of Data Collection Management
  • SEMI E142 - Specification for Substrate Mapping
  • SEMI E157 - Specification for Module Process Tracking
  • SEMI E171 - Specification for Predictive Carrier Logistics (PCL)
  • SEMI E179 - Specification for Protocol Buffers Common Components
  • SEMI E181 - Specification for Panel FOUP for Panel Level Packaging
  • SEMI E182 - Specification for Panel FOUP Loadport for Panel Level Packaging
  • SEMI E184 - Specification for 300 mm Tape Frame FOUP Load Port
  • SEMI E185 - Specification for 300 mm Tape Frame FOUP
  • SEMI F31 - Guide for Bulk Chemical Distribution Systems
  • SEMI F63 - Guide for Ultrapure Water Used in Semiconductor Processing
  • SEMI F78 - Practice for Gas Tungsten Arc (GTA) Welding of Fluid Distribution Systems in Semiconductor Manufacturing Applications
  • SEMI M1 - Specification for Polished Single Crystal Silicon Wafers
  • SEMI S1 - Safety Guideline for Equipment Safety Labels
  • SEMI S2 - Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment

How to Access New and Existing SEMI Standards

SEMI Standards and Safety Guidelines are available for purchase as Individual Downloads or through SEMIViews.

Single document downloads of SEMI Standards are available from the SEMI website. This is also the best place to see the full list of available SEMI Standards.

SEMIViews is an annual subscription-based product for online access to SEMI Standards. SEMIViews allows password-protected access to over 1,100 Standards at your convenience. New and revised Standards are automatically made available through the system ensuring you access to the latest documents. SEMIViews includes Standards in English (the official language) as well as selected Standards in Japanese, Traditional Chinese, and Korean. Try the free 30-day evaluation today!

It is through the purchase of these products that helps fund our Standards Program enabling SEMI to provide this service for the benefit of the worldwide electronics design and manufacturing industries.

Get Involved

SEMI Standards development activities take place throughout the year in all major manufacturing regions. To get involved, join the SEMI International Standards Program at: www.semi.org/standardsmembership.

For more information, please visit our main Web site and current events page. If you have any questions regarding SEMI Standards activities, please contact your local SEMI Standards staff.

 

Standards Watch
SEMI
www.semi.org
April 17, 2025