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Tutorial Overview of the SEMI Software Standard GEM300

By Yuko Toyoshima, Hitachi High-Tech Corporation

GEM300 is the generic name for a group of Standards that define the Generic Equipment Model, the Standard specification for the software used to automate the manufacturing equipment used in 300mm wafer semiconductor production lines. The GEM300 has been referenced as the basis for automation specifications for semiconductor production lines for over 20 years. These Standards are still valid today for 300 mm semiconductor production lines and should be applied to their automation.

gem300 article image 1

Figure 1: Image of Automatic Transportation on a 300 mm Semiconductor Manufacturing Line

The GEM300 is a "group of Standards", which means that several Standards are defined, as shown in Figure 2.

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Figure 2: Positioning of the Standards for Automation of 300 mm Semiconductor Production Lines

Table 1 summarizes the main GEM300 Standards that will be discussed in this seminar. These Standards define the specifications applicable to the automated operation of 300 mm equipment, function by function.

Table 1: GEM300 Main Standards

Standard Designation

Title

Feature

SEMI E40

SPECIFICATION FOR PROCESSING MANAGEMENT

Specifications for managing and controlling wafer processing conditions (recipes) and process execution.

SEMI E87

SPECIFICATION FOR CARRIER MANAGEMENT (CMS)

Specifications for managing and controlling for loading and unloading carriers.

SEMI E90

SPECIFICATION FOR SUBSTRATE TRACKING

Specification for reporting wafer information within the equipment.

SEMI E94

SPECIFICATION FOR CONTROL JOB MANAGEMENT

Specifications for managing and controlling carrier-based processing in response to semiconductor manufacturing process steps.


The SEMI Standards are still being updated, and it is hoped that this seminar will help to maintain and continue to support a workforce that understands and can use them.

Past GEM300 Seminar link

Get Involved

SEMI Standards development activities take place throughout the year in all major manufacturing regions. To get involved, join the SEMI International Standards Program at: www.semi.org/standardsmembership.

For more information, please visit our main Web site and current events page. If you have any questions regarding SEMI Standards activities, please contact your local SEMI Standards staff.

 

Standards Watch
SEMI
www.semi.org
December 2, 2021