Resochi LLC
http://www.resochi.com
RESOCHI provides specialized equipment and lifecycle support for semiconductor metrology and wafer inspection systems. Our services include equipment sourcing, inspection coordination, parts procurement, refurbishment management, preventive maintenance (PM), corrective maintenance (CM), and full-service contracts tailored to agreed equipment and service requirements.
* Overlay Metrology: KLA 5100, 5200, 5300; Archer 10, XT, XT+, AIM, AIM+, 200, 300, and 500.
* Bright Field Inspection: KLA-Tencor 2135, 2138, 2139, 2351, 2360, 2365, 2367, 2825, and 29XX series.
* Dark Field Inspection: KLA-Tencor AIT, AIT2, AIT XP, XP+, UV, XUV, and Puma family.
* Thin Film Metrology: F5X, FX100, FX200, UV 1250, UV 1280, Therma-Wave families, Aleris, SpectraShape, and SpectraFilm.
* Wafer Surface & Particle Inspection: KLA-Tencor Surfscan SP1 family, SP2, SP3, 6200, 6220, 6400, and 6420.
* CD-SEM Metrology: Hitachi S-8820, S-8840, S-9260, S-9300, S-9380, CG4000, and CG5000.