Semiconductor Fabs

This article is the third in a series highlighting the vital importance of SEMI Standards to commemorate the publication of the 1000th SEMI Standard in July 2019. Find the entire series here.SEMI Standards are the bedrock of the modern microelectronics industry. Without standards for wafer dimensions – which SEMI Standards first defined through a collaborative process involving semiconductor manufacturers and wafer suppliers in 1972 – the semiconductor equipment industry as we know it would not exist today. The late Robert Noyce of Intel noted in this 1992 video “being good at producing semiconductors will mean we have better, more consistent, better controlled equipment than we have in the past. Standards are going to play a vital role in that. Standards saves money and time for everyone.” Noyce also called standards a bellwether to surges of innovation in critical process technology. This is still true today as, for example, important standards-setting activity is afoot in panel-level packaging, electron microscopy and energetic materials. Will a surge of innovation follow?Panel-level packaging: a chicken-egg scenarioFrom advanced materials to more efficient production tools, one hallmark of the microelectronics industry is our fearless exploration of new technologies that will spawn change across the industry by improving performance and reducing cost. Advanced packaging techniques, such as panel-level packaging (PLP) – which moves semiconductor packaging to a larger-panel format – is one of those critical catalysts. Citing PLP’s potential to shrink costs by improving efficiency and economies of scale, research firm Yole Développement predicts a remarkable 63% CAGR for PLP from 2017-2023.[i]It’s no stretch to say that we are close to realizing a burst of innovation in packaging. With a just-published SEMI Standard (SEMI 3D20) specifying panel sizes, equipment companies will find it economically viable to invest more in developing the much-needed production tools that enable PLP. “It is really important to create standards so we come together and work much more efficiently. Creating those fundamentals allows you to be more productive in the long term,” said Christina Chu, ASM Semiconductors, and co-leader of the Panel Level Packaging Task Force, and one of five industry leaders recognized for their outstanding accomplishments in developing SEMI Standards for the electronics and related industries at the recent 1000 SEMI Standards reception during SEMICON West 2019. “This effort came up from the trenches,” said Richard Allen, NIST Quantum Measurement Division, and a co-leader of both SEMI’s 3D Packaging and Integration Committee and its Panel Level Packaging Task Force. “Equipment vendors told us that they wanted to serve the market, but they couldn’t do so without some standards. To respond to their request, our committee surveyed the market and discovered at least 15 different panel sizes in development.”“As no vendor is going to make over a dozen unique tools for the same process, we worked with the manufacturers and tool companies to write a specification that standardizes on two of the most widely accepted sizes,” Allen said. “For the first time, the industry will have a real market for panel-level packaging tools, and that will spur commercialization of new technologies that never would have seen the light of the day without standardization.”Allen pointed out that evolution of standards in microelectronics reflects the dynamism of the microelectronics industry itself. “Given the rate of technology advancement in microelectronics, SEMI Standards committee and task force members know that a newly-published standard is often just a starting point, and change will likely follow,” he said. “The Panel Level Packaging Task Force, for example, is currently determining how to best support this packaging technology, whether through possible enhancements to 3D20 or by creating new PLP standards.”Process automation is key for TEMTransmission electron microscopy (TEM) is another area where industry cooperation will fuel progress.“People throw around the phrase ‘exponential growth,’” said James Amano, senior director, International Standards at SEMI. “It’s usually a gross exaggeration, but not when it comes to TEM data. That’s because demand for more TEM data, which uniquely enables innovations around smaller feature sizes, has exploded. At the same time, TEM data is a bottleneck in the fab. Operators literally use tweezers to carry around electron microscope samples by hand, and that is untenable.” TEM sampling standards are currently being formulated under the SEMI Standards development process. “Applying a model that we have employed successfully time and time again through SEMI Standards, we are gearing up for process automation in TEM,” Amano said. “We’ll start by establishing a grid carrier standard for electron microscopy. Through ongoing standards efforts, we may realize a fully automated TEM process within just a few years. That achievement will enable exponential growth in shrinking design geometries.”Energetic materials gain safety standardAlong with wafer-level packaging and design shrinks, the push for safety in materials’ usage is a hotbed of innovation. This is especially true with energetic materials, the potentially hazardous process chemicals used increasingly in semiconductor manufacturing to spur advances in materials purity, integrity and quality.“When you’re working with energetic materials, if you don’t get it right, you may face serious yield and cost issues, and most important of all, safety risks,” said Paul Trio, senior manager of strategic initiatives at SEMI. “This isn’t a theoretical concern. Real problems occurring in fabs have made an energetic-materials standard a high priority for the industry.”“After years of collaborating with companies across the supply chain to address this significant challenge, we recently published our 1000th SEMI Standard around safe usage of energetic materials,” Trio said. “Now manufacturers can turn to a new standard – which will evolve dynamically in response to industry changes – as they employ energetic materials in their quest to achieve higher yields while controlling costs and managing safety risks.” Whether it’s packaging, design shrinks, materials or other key innovations, standards are essential to progress in microelectronics. From equipment and materials suppliers that provide the most advanced, efficient and safest tools, materials, and processes to device manufacturers that get products to market, all stakeholders in the microelectronics ecosystem benefit from SEMI Standards. Are you curious about the areas of process technology where innovations are likely to occur? Would you like to get involved in standards efforts that could have an impact on your business? Take a look at the activity of SEMI Standards Committees and Task Forces. Because that’s where innovation, pragmatism and a commitment to harness industry resources come together.Use your voice to affect standardization in and around the microelectronics industry. Learn about SEMI Standards – and become part of the solution. Heidi Hoffman is senior director of technology communities marketing at SEMI. Hoffman and her team shine a spotlight on the work of the more than 20 technology communities under the SEMI electronics manufacturing supply chain collaboration platform. Actively engaging community members in marketing programs that showcase their unique value, Hoffman’s team helps companies to grow and prosper through the power of connection, collaboration and innovation. [i] Status of Panel Level Packaging report, Yole Développement, 2018

This article is the first in a series highlighting the vital importance of SEMI Standards to commemorate the publication of the 1000th SEMI Standard in July 2019. Find the entire series here. More than 40 years after establishing the SEMI International Standards program, SEMI recently announced its 1000th SEMI Standard – a safety guideline for handling energetic materials. Creating a resource for unpredictable changes in materials is the type of challenge the SEMI International Standards program is often called upon to tackle – where the standard is merely the end of the beginning. The semiconductor industry has learned to expertly control its facilities, equipment and components. The next logical step is materials. It’s common knowledge that the industry drives innovation with new process materials and enabling safer material exploration is critical to the industry’s success. Classification Schema The 1000th SEMI Standard provides three classifications of energetic materials and byproducts based on three criteria: Hazardously exothermic (large amount of heat released following a trigger event such as heating or a physical shock) Pyrophoric (self-igniting upon air exposure) Water-reactive (releasing a large amount of energy or flammable gas upon contact with water) Unsafe handling of any of these byproducts can, to put it mildly, result in a bad day for a fab or lab. The leader of the Energetic Materials Task Force and an expert in process and equipment risk assessment at his company Safety Guru, Eric Sklar recounted one of the stranger incidents. A cleaning crew detached a pipe from a piece of equipment associated with a process recipe that used no energetic materials. The team set it in a sink, sprayed some water to begin cleaning it, and the pipe ignited in flames. Remarkably, although the initial materials weren’t energetic, the process created new byproducts that were very much so. Standardizing on Shifting Ground Energetic materials are new ground for standards and that ground is shifting, with much more material innovation to come. The upshot is that it is particularly important that the energetic materials standard is dynamic. By design, all SEMI Standards are malleable – continuously shaped by the demands they aim to meet. The release of this document is nowhere near the end of the work, as the standard will evolve to keep pace with continuing materials innovation. Creating a Robust Materials Supply Chain SEMI Standards create the conditions for a more robust materials supply chain and sustain the needs of business. If the standards safeguards are too burdensome, they will never be adopted. Conversely, without protections, people and equipment are unnecessarily put in harm’s way and innovation slows. SEMI’s Energetic Materials Task Force members realized early on that the industry needed a standard that would be practical to implement and flexible enough to be optimized over time. They understood that collaboration and compromise, while time-consuming, are also essential for standards’ creation. They determined roles and responsibilities across the supply chain, and they struck delicate balances between sharing no information about the intended uses of potentially dangerous materials and sharing everything about proprietary process recipes. The sheer scope of this standard necessitated a multi-year timeline. “The effort began with SEMATECH assembling its members’ views about energetic materials safety,” said Eric Sklar. “It then required years of effort from SEMI to bring the key industry participants together to create pragmatic guidelines that address the challenges around energetic materials in the supply chain.” Only Getting Started Despite all the work, one certainty is that the standard isn’t perfect for the present and can’t reflect future demands. This is why the energetic materials standard is not a static document, but a living process that is in its germinal stages. Key players continue to shape the standard, and that’s fundamental to enabling future materials innovation and ultimately reducing the number of unexpected energetic materials reactions in fabs. The variables in standards development are numerous and ever-changing. Energetic materials only magnifies the need for the broad collaboration that SEMI has facilitated for more than 40 years. While the risks posed by energetic materials are substantial, the criticality for continued innovation is undisputed. Now, with its adoption, the work of adapting and modifying this 1000th SEMI Standard is only about to begin. Use your voice to help drive standardization in and around the semiconductor industry. Learn about SEMI Standards – and become part of the solution. Register to receive Standards Watch, SEMI’s quarterly e-newsletter. Heidi Hoffman is senior director of technology communities marketing at SEMI. Hoffman and her team shine a spotlight on the work of the more than 20 technology communities under the SEMI electronics manufacturing supply chain collaboration platform. Actively engaging community members in marketing programs that showcase their unique value, Hoffman’s team helps companies grow and prosper through the power of connection, collaboration and innovation.

Imagine a world where there are chips in about everything we touch on a daily basis. It is not hard to do with semiconductors already at the core of many leading-edge electronic devices. These sophisticated chips are hidden from sight, but their functions are vitally significant to our daily lives.Manufactured in multibillion-dollar facilities, the production process of chips is one of the riskiest, costliest, and most technically complex feats in business. Consider the difficulties of managing contaminants during device manufacturing: A single speck of dust on a lens could cause the entire output of the plant to be scrapped.For years, these exotic fabrication facilities, called fabs, have been packing more efficiency into ever smaller chips. As new technologies continue to emerge, chip manufacturers face constant pressure to continually refine and improve their operations to meet the challenge of rising device performance and yield goals. Fab managers must optimize tool performance, improve fabrication techniques, safely handle toxic materials and design better integration flows. Layer on top of those requirements customer demand for greater innovation and quality of service, it can be difficult for manufacturers to handle everything on their own while consistently meeting necessary requirements.Align for CollaborationWith the help of the Fab Owners Alliance (FOA), a SEMI technology community, manufacturers and their suppliers don’t have to travel this road alone. Membership in this international group allows semiconductor and MEMS fab managers and industry suppliers to come together to solve common non-competitive manufacturing issues and improve business results.Founded in 2004, the group consists of 25+ device manufacturers (DMs) with over 120 semiconductor manufacturing facilities and 60+ solution providers (SPs) who supply equipment and services. Through quarterly meetings, study teams, benchmarking surveys, case studies and online forums, FOA successfully provides a collaborative, non-competitive platform to the fab management and operations community. FOA members enjoying an engaging discussion and networking event during the recent Q1 2019 Collaborative Forum at the Double Tree Resort in Scottsdale, Arizona One of the most popular FOA platforms is the annual Collaborative Forum early in the year. The goal is to bring together DMs and SPs from around the world for an open dialogue under one roof. For two days, they share success stories and discuss issues facing their fabs and the industry in general and develop collective strategies to address them.The success stories are particularly engaging as they accentuate the value and benefits of FOA membership. Presented as case studies, these stories outline how the DMs and SPs work together to improve fab efficiency and increase yields. Often, the ideas for the case studies are conceived during networking events, fab tours and programs organized by the FOA.The case studies shared at the 2019 Collaborative Forum, held at the Double Tree Resort in Scottsdale, Arizona, February 13-14, 2019, illustrate the power of collaboration within the FOA. Following are a few examples.Scheduling System Implementation Broadcom was facing a steep ramp when it decided to engage with FPS, an INFICON product line. In addition, the manual decision making, and limited real-time visibility of factory data was negatively impacting their production in its 150mm and 200mm environment. By deploying an integrated Smart Manufacturing software solution and its digital twin, FPS was able to retrofit Broadcom’s manual factory with automated decision-making capabilities.This solution offered many benefits. Constraint tool utilization increased by more than 15 percent. The automated WIP management system also eliminated many manual wafer handling issues such as lost lots, WIP storage constraints, building transfers, and time spent looking for lots. Pushing Tool Performance BoundariesAs tools in the 200mm space are hard to find, GLOBALFOUNDRIES is always looking to squeeze every wafer out of its existing resources. To drive continuous improvement and increase equipment throughput, GLOBALFOUNDRIES leveraged MAX’s knowledge with Machine Rate Models. Together, they were able to employ a modelling technique that helped them model key toolsets and develop actions to increase intrinsic machine rate performance.Based on this knowledge, 10 capacity constraints were selected, and speed models were developed for all of them. This win-win collaboration allowed GLOBALFOUNDRIES to find some real opportunities that translated into CAPEX and cost savings. On average, the companies identified a 12 percent potential improvement opportunity per toolset and created engineering task force teams to prioritize and drive the improvements.Simplifying the Chamber Matching Process Using Trace AnalyticsThe collaboration between NXP and BISTel resulted from a shared vision of achieving Smart Manufacturing using analytic solutions enabled by artificial intelligence and other advanced technologies. Chamber matching is critical in identifying process variation to ensure manufacturing quality. Traditional tools like Fault Detection Classification (FDC) often do not provide clear enough insights to pinpoint the issues and require extensive time to collect data from each chamber.Through several use cases, NXP and BISTel successfully illustrated the effectiveness of using a trace analytic solution to quickly and accurately quantify and monitor chamber-to-chamber mismatches as well as changes within a chamber over time. The full trace analyses of all parameters allowed NXP to generate better FDC models to more quickly detect similar issues in the future. In addition, NXP was able to identify the cause of a parametric shift by comparing performance of the same chamber between two different time periods. All in all, the trace analytics solution brought together and analyzed the process data efficiently, thereby reducing analysis time from days to minutes.Eagleview Inspection of SiC and Transparent Wafers X-FAB challenged Microtronic to develop a new capability for its high-throughput recipe-less macro defect inspection systems. Microtronic’s EagleView machine vision macro defect inspection system is well known for its versatility in the semiconductor industry due to its wide deployment as well as its recognition as winner of the 2017 Best of West Award at SEMICON West. But X-FAB’s requirements to inspect and image transparent wafer substrates were novel. After working closely to understand X-FAB’s needs, Microtronic made extensive hardware and software enhancements to enable high-throughput macro inspection of Silicon Carbide (SiC) and other transparent wafer substrates.Get InvolvedThe FOA meetings are held at device manufacturing sites twice a year. The next meeting will be graciously hosted by MACOM in Lowell, Massachusetts, May 22-23, 2019. The DMs and SPs will meet again at SEMICON West at the Moscone Center in San Francisco on July 11, 2019.To attend these meeting and be part of this high-impact group, please email us at [email protected]. For more information about FOA, please visit our website.Nishita Rao is a marketing manager at SEMI.