MEMS sensor

PNI Sensor, a member of the SEMI-MSIG Positioning, Navigation and Timing (PNT) Technical Advisory Council, is developing advanced tracking systems that promise to increase industrial worker safety.The availability of low-cost GPS jamming and spoofing technologies renders GPS-only solutions for location and navigation an increasingly dangerous and ineffective choice for the dismounted soldier in a battlefield environment. This threat to armed forces has spurred development of new self-contained location and navigation technologies for defense applications — an innovation that offers significant advantages for commercial applications.Though not as complex and mission-critical as in defense, self-contained location technology is also essential in commercially available industrial applications. That’s particularly true for workers in industrial sectors such as utilities, mining, and construction, and in environments with lone or remote workers, such as first responders. While jamming and spoofing are not a threat in the industrial sector, determining the precise location of workers in GPS-denied environments is fundamental to ensuring their safety. This makes it a priority to adapt any self-contained, non-infrastructure-based location technology — which was first developed for the modern dismounted soldier — to industrial applications.Bodies in MotionInertial solutions are very difficult to implement properly, even without the challenges uniquely created by human motion dynamics. On a construction site, for example, workers tend to cover a wide range of disciplines: supervisors, electricians, iron workers and equipment operators, among others. While performing their jobs, construction workers change locations, both indoors and outdoors, and perform dynamic motion such as crawling, ducking and climbing. These are all motions that are very difficult to model using traditional adaptive filtering techniques, which are typically applied in vehicular inertial navigation platforms, such as aircraft, ships and tanks. Even if existing inertial navigation systems could be made size, weight, power and cost (SWaP-C)-compatible to be body-worn, their performance accuracy would still need to satisfy the application’s requirements. To properly determine a worker’s precise location to ensure safety on job sites and in remote locations, we must tackle the combined challenges of SWaP-c and human dynamic motion. That’s the most effective approach for creating a complementary positioning technology that augments GPS or other infrastructure-based location systems.To address these challenges, we need to build a high-performance inertial measurement solution using commercially available MEMS inertial sensors. The issues of bias drift error and low sensitivity have traditionally made such sensors practically useless for any meaningful inertial tracking. Fortunately, this is no longer the case. We now have sensors that already conform to the necessary SWaP-C requirements for the application, and have the additional advantage of high dynamic range of measurements without saturation errors, which helps to reduce high-force and rapid movement-induced errors, promoting greater accuracy.Thus, a path forward is emerging. The current generation of high-performance MEMS gyros can now inertially track workers’ locations to step-level resolution very well for up to 30 minutes — without significant location errors due to bias or scale errors. That’s an order of magnitude better than previous generations. With the new MEMS gyros, errors typically remain less than 2% of distance travelled over that time period. Strategically applying algorithm improvements with higher levels of magnetic corrections has the potential to bring that accuracy down even lower, to less than 0.5% of distance traveled for durations of one hour or more. What’s more, the improved gyro and accelerometer bias, gain, and signal-to-noise (SNR) performance allows for better magnetic anomaly rejection. This enables finer and more sustained gyro bias corrections in the fused solution, which creates a system greater than the sum of its parts. We believe that these newer systems will promote greater worker safety at a truly affordable price.PNI Sensor, a member of the SEMI-MSIG PNT Technical Advisory Council (TAC), is developing a tracking system that combines the best elements of the newest-generation MEMS devices with an electronic compass that uses advanced magnetic anomaly detection and rejection algorithms. Based on PNI’s latest attitude and heading reference system (AHRS), the novel PNT system employs a unique Kalman algorithm that intelligently fuses its reference magnetic sensors with gyros and accelerometers. In conjunction with this work, PNI Sensor has developed advanced pedometry functionality for use in its tracking system for very high dead-reckoning tracking performance used in defense industry applications. PNI is initially designing that system to track dismounted soldiers and special forces operating in GPS-denied or contested environments.For more information about PNI Sensor’s advanced location and navigation technology, please visit PNI Sensor. To learn more about the SEMI-MSIG PNT TAC, please contact Carmelo Sansone, director, MEMS Sensors Industry Group.George Hsu is a founder and CTO of PNI Sensor. He has focused his career on the sensor industry, having invented several magnetic sensor breakthroughs, including the magneto-inductive technology, the core of today’s electronic compassing in the automotive, consumer, scientific and military markets. Hsu is a graduate of Stanford University School of Engineering, holds several patents, and is a much-published author of technical articles on sensor theory, design and applications. He is an active member of the MEMS Sensors Industry Group PNT TAC.About the SEMI-MSIG Positioning, Navigation and Timing ProjectMEMS Sensors Industry Group (MSIG) created a member-based PNT TAC to identify and pursue PNT system innovations for GPS-denied environments. To that end, MSIG solicited proposals from its membership for the SEMI-MSIG PNT Project, a U.S. Army Research Laboratory-funded R D project. PNT committee members that have secured funding are pursuing R D platforms that improve accuracy and performance. Platforms may include software, hardware, and advanced packaging requirements of optical and MEMS-based positioning and timing systems.

Inertial sensors have continued to underpin the success of wearables in increasingly important ways. Propelled by evolutionary advancements in inertial sensors, wearables have strayed from their humble beginnings in simple activity and wellness, which defined the user experience over the past decade. What started with the simple act of telling people their daily step count has morphed to provide deeper insights into swim stroke and run cadence, all the way to mapping out a person’s off-piste ski route. Layered on top of this foundation of inertial sensors, we’ve fused optical, temperature and other sensor technology to provide clinical-grade healthcare snapshots available previously only by visiting the doctor’s office.Inertial sensors today are again leading the way in improving health and wellness. Instead of humans, however, this time the patients are machines. In fact, the health of critical assets – whether factory-based equipment, windmills, train bogies or aircraft – has been assessed through sophisticated analysis of their vibration signatures for many years. The sensors used for these applications have depended on piezoelectric technology because their vibration amplitude signals are very small and difficult to detect and because of the importance of understanding their spectral content over a wide bandwidth. When it comes to noise and bandwidth, bulk piezoceramics have had a major advantage over electrostatic MEMS technology – until recently.Using bulky expensive piezoelectric sensors for condition-based monitoring has been akin to going to the doctor’s office to have an MRI. The equipment required (sensors, receivers) is expensive and requires highly trained specialists to operate the machine and to interpret the information. For this reason, only mission-critical assets are instrumented. For nearly all other equipment, we tend to use inefficient schedule-based maintenance approaches to cover the gap of not having continuous data. Condition-based monitoring leverages real-time sensing of critical machine parameters to reduce system downtime and improve efficiency. Evolving machine healthMEMS started to democratize machine health several years ago, when suppliers began switching from piezoelectrics to capacitive MEMS. While the performance was still not on par with piezoelectric sensors, MEMS technology could already capture a wide array of faults. One example, the ADXL001, started making its way into Integrated Electronics Piezo-Electric (IEPE) and 4-20 mA sensors, which form the backbone of the vibration monitoring market. Although the bandwidth and noise of the sensor did not allow for very early detection and prescriptive monitoring, it did allow the tracking of faults as they progressed and became more imminent.Other digital accelerometers started finding their way into new wireless prototype systems with the goal to simplify and increase deployment to a greater population of assets. The thinking was that self-contained digital wireless sensor nodes could be deployed more economically and quickly, and that these digital sensors would bring the power of computing to the edge node.Unfortunately, even the lowest-noise MEMS products did not have the bandwidth needed to diagnose and predict faults early enough to influence how and when machines are maintained most economically. Instead, such devices were used to detect imminent failure to prevent irreparable harm. As we all know, however, the earlier the doctor spots a problem, the better the probable outcome. That’s because early detection increases the likelihood that the doctor will have access to the full spectrum of treatment options available to fix the problem.Inertial MEMS is blazing a new frontier with the introduction of next-generation capacitive MEMS such as the ADXL100x portfolio. Offering ultra-low noise density and high-frequency response, these newer capacitive MEMS devices fit the bill. With 3dB bandwidths up to 25 kHz and flat response curves within 0.4dB all the way to 10kHz, these accelerometers demonstrate compelling enabling characteristics such as better DC performance, improved robustness, lifetime stability, linearity, and of course, cost, making capacitive MEMS a better choice than piezoelectrics.With high-bandwidth capacitive MEMS much easier to use and deploy – as well as more affordable – the market is starting to respond. Condition monitoring equipment and instrumentation is becoming more accessible to a larger base of manufacturers. In turn, a wealth of data is being created and mined to develop better and timelier predictive and prescriptive maintenance approaches that rely heavily on machine learning and artificial intelligence (AI).It’s worth paying attention to the sizable condition-based monitoring market. Estimated at $3.5 billion and growing, condition-based monitoring reduces downtime and increases equipment utilization in quantifiable ways. And it’s not just manufacturers who stand to benefit. More sustainable and efficient industrial processes, safer trains that crisscross continents at ever increasing speeds, autonomous cars and trucks that know what’s happening under the hood as well as on the road, and modern infrastructure to support our evolving lives show us that condition-based monitoring has something for everyone.Learn more about Analog Devices’ condition-based monitoring signal-chain options that help customers on the journey from sensor to solution. View ADI’s whole portfolio of condition-based monitoring solutions online or download Next-Generation Condition-Based Monitoring brochure.Tzeno Galchev is product marketing manager in the Inertial Sensor Technology Group at Analog Devices Inc. He oversees the strategic marketing and product definition of the inertial sensor component portfolio. He received B.S. degrees in both Electrical and Computer Engineering in 2004, and M.S. and Ph.D. degrees in Electrical Engineering in 2006 and 2010 respectively from the University of Michigan, Ann Arbor. He has over 30 publications in the area of MEMS, holds multiple patents, and is a frequent lecturer and speaker on topics related to MEMS, energy harvesting and sensors.Analog Devices is a longtime member of MEMS Sensors Industry Group (MSIG), a SEMI technology community that enables the MEMS and sensor industry to address common challenges, innovate and accelerate business results.

As the body’s largest organ, skin is responsible for the transduction of a vast amount of information. This conformable, stretchable, self-healable and biodegradable material simultaneously collects signals from external stimuli, which translates into information such as pressure, pain and temperature. The development of electronic materials, inspired by the complexity of this organ, offers a tremendous unrealized materials’ challenge. Fortunately, the advent of organic-based electronic materials may offer a solution to this longstanding problem.Zhenan Bao, K.K. Lee Professor of Chemical Engineering, Stanford University, is one of the world’s leading researchers working on the design of organic electronic materials that mimic skin functions. SEMI’s Maria Vetrano interviewed professor Bao to preview her February 25 keynote, Skin-Inspired Electronics, at FLEX|MEMS Sensors Technical Congress (MSTC) 2020, February 24-27, 2020, at the DoubleTree by Hilton in San Jose, California.Join us at FLEX|MSTC to meet Professor Bao and other industry influencers furthering innovation in flexible hybrid electronics (FHE) and MEMS sensors. Register now to connect with her at FLEX|MSTC or visit her on LinkedIn.SEMI: Your pioneering work on the use of electronic materials to construct second skin is a major step forward in human-machine interfaces. Could you please describe second skin?Bao: Second skin is a new electronic-device platform encompassing electronic devices that have skin-like properties such as stretchability, self‐healing ability, biocompatibility and biodegradability. In essence, the second skin is an electronic system of fully integrated multifunctional components operating on the surface of or inside the body to enable smart healthcare for disease prevention and treatment and to enhance the functional capabilities of natural skin. The second skin could also serve as a module to connect our human body to the Internet, thereby allowing human integration with the Internet of Things (IoT) for next‐generation wireless communications. In this way, we can view the second skin as an artificial body part that can be used to improve our everyday lives.SEMI: How might second skin operate in the human body?Bao: It has many potential uses. It could be a prosthesis for people who have lost their sense of touch. It could be used to repair damaged skin as well as to provide enhanced functionality that’s not possible with biological human skin. It could, for example, connect us with our external environment, with other people, even with our cars.I can also envision second skin as an implantable device for both neurostimulation and for early detection of disease. Schematic illustration of structure of second skin composed of functional devices: sensor, integrated circuit, display and power supply. Source: Stanford University SEMI: How did you get started in this research? Bao: Sixteen years ago when I started at Stanford, I learned of a colleague in mechanical engineering who was working on robotic cockroaches. That’s when I understood the need for sensor functions in robotics.I considered the large number of people with prosthetics who do not have a sense of touch. With this audience in mind, I started by designing a simple flexible electronic device that could take the shape of skin, even conforming to a robot hand, thereby approximating the natural sense of human touch.Once we developed the first sensor, and realized that its touch sensitivity could eclipse that of human touch, I asked myself: what can we learn from second skin – in addition to its sensing functionality?Skin is not just flexible; it is biodegradable and stretchable. So we started to dream. We began by developing electronic materials, either conductors or semiconductors. We added new functionality, such as self-healing properties, biodegradability and stretchability. That opened the way to new materials’ development.SEMI: What discoveries have you made in new materials?Bao: Over the past decade, we’ve developed skin-like materials with electronic properties that are on par with the best conducting and semiconducting polymers. Some of our skin-like semiconducting polymers can perform even better than amorphous silicon. That means with suitable processing methods, we can make stretchable ICs, initially with tens of transistors that can perform analog or digital functions, and in a later stage, stretchable displays driven by active matrix arrays.SEMI: What would it take to put these materials into production?Bao: We need to develop methods to pattern the skin-like electronic materials into fine features. We have been leveraging similar processes used for flexible circuit boards. Some research groups are developing roll-to-roll fabrication and printing methods.SEMI: Which technologies/applications are you commercializing?Bao: C3Nano is a Bao Research Group spin-off startup that is commercializing nanomaterials that are promising for bendable and foldable electronics.Another spin-off that is licensing our technology, PyrAmes, is developing a continuously non-invasive blood-pressure monitor. It’s not a cuff so the patient doesn’t have to remember to put it on.In the shorter term, we’re looking at putting artificial skin on prosthetic limbs and robotic hands. Further down the road, we could put skin on wounded regions of the body, forging connections to nerves that would support realistic sensation.To realize these applications, we’ll need to conduct further R D on materials and applications. The manufacturing of these devices still needs much more development.Fortunately, we’re part of a fertile development ecosystem at Stanford. I started the Stanford Wearable Electronics Initiative (eWEAR) to forge collaborations across Stanford campus as well as with industry.SEMI: What would you like FLEX|MSTC attendees to take away from your presentation?Bao: I’d like them to realize that the future of electronics is changing. I imagine a future in which the functions of a smartphone will disappear into what we wear, what we attach to our skin and what we implant inside our body. I believe that skin-like electronics will help to facilitate this future, allowing us to connect with each other and our surroundings in ways that feel natural, yet that also enhance our quality of life. Zhenan Bao is K.K. Lee Professor of Chemical Engineering with courtesy appointments in Chemistry and Material Science and Engineering at Stanford University. She founded the Stanford Wearable Electronics Initiate (eWEAR) and serves as the faculty director. Prior to joining Stanford in 2004, she was a Distinguished Member of Technical Staff at Bell Labs, Lucent Technologies from 1995 to 2004.Bao has over 500 refereed publications and over 65 U.S. patents with a Google Scholar H-Index 155. In her recent work, she has developed skin-inspired organic electronic materials, which have resulted in unprecedented performance or functions in medical devices, energy storage and environmental applications. She has pioneered several important design concepts for organic electronic materials. Her work has enabled flexible electronic circuits and displays.For more information on professor Bao’s research, visit Bao Research Group. FLEX|MSTC is organized MEMS Sensors Industry Group (MSIG) and FlexTech, SEMI technology communities focused on the growth of MEMS sensors and the flexible electronics supply chain, respectively. Maria Vetrano is a public relations consultant at SEMI.

MEMS technology has changed human interaction with electronic devices. Introduced in the 1990s, the first mass-market MEMS devices were used for inkjet printheads and automotive airbag crash sensors. Today, MEMS are ubiquitous, with billions of the tiny devices adding intelligence and interactivity to smartphones, smart speakers, wearables, automobiles, biomedical devices, remote monitoring and event detection systems, and countless other applications. Integrating MEMS with Flexible Hybrid Electronics (FHE) is an important step in the evolution of this miniaturized intelligent sensing technology, paving the way for its use in new classes of flexible, conformal devices.The integration of the two technologies promises to breed new applications in small form factors but also presents challenges inherent to FHE design and fabrication processes. SEMI’s Nishita Rao caught up with Nathan Pretorius, prototyping and automation engineer, NextFlex, to discuss MEMS-FHE device integration challenges and opportunities ahead of his February 26 presentation, Integrating MEMS Devices in FHE, at FLEX|MEMS Sensors Technical Congress (MSTC) 2020, February 24-27, 2020, at the DoubleTree by Hilton in San Jose, California.Join us at FLEX|MSTC to meet Nathan and other industry influencers advancing innovation in FHE and MEMS sensors. Register now to connect with him at FLEX|MSTC or visit him on LinkedIn.SEMI: Why is integrating MEMS devices into FHE systems important? What new use cases might it enable?Pretorius: The main value proposition of integrating MEMS devices into FHE is that it allows MEMS devices to exist in a different form factor than was possible previously, giving us high-quality MEMS sensors on the flexible and conformable platform of FHE.Ease of application, flexibility, lower cost and rapid iteration on a design are just some of the benefits of FHE devices. And because there are few robust FHE sensors that overlap with MEMS’ capabilities, when you combine the two, you get a lot of compelling uses. That’s why NextFlex is working with agencies and companies to evaluate MEMS’ integration, including using bare MEMS die with microfluidics and promoting new ways of attaching and packaging MEMS die for use with FHE. SEMI: Why is FHE an ideal platform for integrating various types of sensors?Pretorius: MEMS integrated with FHE devices are ideal for rapid design and deployment of data-gathering sensor nodes — which we can iterate for specific applications. A few examples include on-body health monitoring devices for bio-fluids analysis, medical pressure sensors for monitoring blood pressure, and peel-and-stick sensors nodes for infrastructure monitoring. In terms of design and production, FHE devices support rapid prototyping, allowing for instantaneous design-iteration cycles. This speeds design-to-production over traditional rigid PCBs and copper flex because the feedback cycle time between design, manufacturing and testing is shorter, accelerating time to market. What’s exciting about FHE technology is that a variety of sensors or components, including MEMS, can be designed into the base system to easily customize it for a specific application. In addition, our experience shows that when compared to a traditional rigid PCB, an FHE board reduces manufacturing steps and device weight by two-thirds and, perhaps most importantly, converts the device to a thin, conformal shape that makes possible products in new form factors. SEMI: What are the primary challenges to integrating MEMS with FHE? What is NextFlex doing to help device manufacturers address these challenges? Pretorius: There are a few challenges, some of which are device-specific. Most recently, I’ve been focusing on inertial and timing devices, including accelerometers, gyroscopes and resonators. There are a few technical challenges involved in the process of getting the devices from the wafer to an FHE substrate. The wafer processing is very important, especially the dicing and thinning steps. After thinning and dicing, the die is placed onto the FHE substrate. The stresses caused by bonding to the substrate have to be understood and characterized. After placing the die, you then have a calibration step, which is normally performed after the device is packaged. With a MEMS die placed onto directly onto an FHE substrate, calibration then must be done.Finally, the device encapsulation is important, since on an FHE substrate the hard-to-soft material transition is very important to mitigate stresses to rigid component interfaces. We have also been looking at how to work with devices that have damping vents. Flexible encapsulants are inherently more permeable to gases and water vapor than hard encapsulants, so studying the encapsulation of MEMS devices on FHE is another area of interest. NextFlex has been working in a supporting role to evaluate best design practices and best attach and integration methods. In addition to our ongoing collaborative programs, NextFlex is developing the FHE manufacturing ecosystem to include system and component manufacturers and designers, product developers, and materials and equipment providers.SEMI: How do we facilitate closer collaboration between the FHE manufacturing ecosystem and MEMS suppliers such as MEMS device manufacturers, product developers, and materials and equipment providers?Pretorius: It’s important to include manufacturers early in the design process so we can identify challenges up front. That’s why NextFlex spearheads technology road-mapping efforts that include representatives from across the manufacturing ecosystem. We use the roadmaps to prioritize challenges that we can address effectively through collaboration, focusing the industry on solving problems through Project Calls that reveal integration challenges and results from real devices and that tell us how the materials and equipment actually perform with a real device.NextFlex keeps the information flowing, holding quarterly project update webinars to share results. As current devices are optimized for the process in which they will be used, we learn a lot from the project performers who make FHE system demonstrators — and we share that information with the member community. SEMI: Can you point to an example of a successful MEMS-FHE device integration?Pretorius: MEMS-FHE integration is still in the early stages, but we are working on several projects including a DARPA Seedling project for which we have integrated MEMS sensors into FHE systems for testing and evaluation. We plan to continue this work by integrating MEMS and FHE devices using methods that support mass production.SEMI: What would you like FLEX|MSTC attendees to take away from your presentation?Pretorius: We would like to see the FHE community work more closely with MEMS device manufacturers. For example, NextFlex often works with manufacturers to gain access to bare die, which is still a significant hurdle in making devices.The best way to speed things along is to get involved. We encourage FLEX|MSTC attendees to join NextFlex. As a prototyping and automation engineer at NextFlex, Nathan Pretorius explores new print methods for prototyping and automation using novel materials and processes. Pretorius currently focuses on how best to apply software scripting and machine learning to streamline FHE processes. Prior to joining NextFlex, he researched the strengths of roll to roll and screen printing on printed electronics designs, including capacitive touch interfaces, FHE passive component design, and antennas. Nathan holds a Bachelor of Science degree in Graphic Communications from Clemson University. FLEX|MSTC is organized MEMS Sensors Industry Group (MSIG) and FlexTech, SEMI technology communities focused on the growth of MEMS sensors and the flexible electronics supply chain, respectively.Nishita Rao is marketing manager for technology communities at SEMI.

VTT Technical Research Centre of Finland Ltd (VTT) has its sights set high. As a leading global research and development firm , VTT is out to produce bio-interfacing and biodegradable flexible hybrid electronics (FHE) devices that help tackle some of the world’s greatest challenges including environmental degradation and food scarcity.SEMI’s Maria Vetrano interviewed Antti Vasara, president and CEO of VTT Technical Research Centre of Finland, to preview his February 25 keynote, Beyond Flexible Hybrid Electronics: Biodegradable Electronics and Interfacing Bio+Electronics, at FLEX|MEMS Sensors Technical Congress (MSTC) 2020, February 24-27 at the DoubleTree by Hilton in San Jose, California. Join us at FLEX|MSTC to meet Antti and other industry influencers driving innovation in flexible hybrid electronics (FHE) and MEMS sensors. Register now to connect with him at FLEX|MSTC or visit him on LinkedIn.SEMI: What is body-interfacing electronics and what is your vision for bio-interfacing and biodegradable electronics?Vasara: Body-interfacing electronics have existed for decades. Developed in the 1970s, the wireless heart rate monitor is a good example. While continuous heart monitoring with a compact, inexpensive wearable device is widely accessible technology, other bodily parameters, such as cholesterol levels or biomarkers, are diagnosed every time we see a doctor. Establishing a baseline using multiple measurements — before symptoms develop is actually much more effective.That’s where bio-interfacing comes in. Bio-interfacing devices will continuously measure and analyze complex biogenic substances such as sweat, breath, blood and urine. A smart patch for continuous sweat monitoring, for example, would overcome several challenges: supporting electronics functionality in liquid environments, managing the transport of harvested samples to and from the sensor, managing potential contamination, and disposing of samples after measurement.While FHE in principle delivers the right building blocks and is an ideal form factor for a wearable sweat analytics patch, flexible circuits are not ready for out-of-the box interaction with biological matrices. Hence, our mission at VTT is to anticipate and develop the upscaling process know-how required for FHE devices that either interface with biological systems — or that must themselves biodegrade.We’re also focusing on biodegradable electronics because environmentally conscious end-users and manufacturing companies want biodegradable versions of energy-autonomous, label- or sticker-like Internet of Things (IoT) sensors. Typically used for packaging, logistics, environmental monitoring and medical diagnostics applications, these sensors — which have a lifetime of a few days, weeks or months — have become very popular. Unless they are biodegradable, however, they just add to landfill.SEMI: What approaches is VTT using to develop bio-interfacing and biodegradable electronics?Vasara: In our Business Finland-funded ECOtronics project, we are working with our partners to create recyclable and compostable electronics and optics that use renewable resources. For example, devices developed using substrate materials like paper, cardboard or VTT’s in-house-developed nanocellulose films and biopolymer films for environmental monitoring or skin patches can be easily recycled or even biodegrade naturally. Where possible, we use roll-to-roll printing to generate the device circuitry, and on a component level, we have optimized our assembly process towards bare-die component bonding to reduce the overall footprint of non-biodegradable waste per device.SEMI: What use cases do you find most promising and why?Vasara: A prominent example of a single-use test that generates a large amount of waste is the digital pregnancy test. When breaking it down into components, you will find a rigid circuit board with microprocessor, a couple of coin cell batteries, a liquid crystal display, a LED light source and photodiode, and a large chunk of plastic packaging around it. The materials and battery capacity of such a device would be sufficient to run hundreds of pregnancy tests – actually technical overkill.By using printed circuits on biodegradable substrates, bare-die assembled components (ASIC, LED light sources, photo diodes, thin film batteries as power sources) and device packaging composed of biodegradable plastics, we can completely redefine the environmental footprint of single-use tests. We are currently developing a toolbox for our customers to turn their existing conventional test into an ecotronic form factor.Another exciting use case is a sweat sensor that we developed collaboratively with Ali Javey, Ph.D., professor of Electrical Engineering and Computer Sciences, UC Berkeley, and the co-director of Berkeley Sensor and Actuator Center (BSAC). Together with his team, we created a wearable electrochemical sensor for continuous sweat analysis during exercise. With the UC Berkeley group providing the chemistry to monitor N+, K+ ion and hydration levels in sweat over the duration of several hours, VTT delivered the underlying sensor platform, featuring the printed sensor electrodes and sweat harvesting microfluidic channels for fluid management and transport. It’s exciting to see what we can achieve by combining techniques from different disciplines, in this case electrochemistry, printing, packaging and microelectronics.SEMI: How can industry enable the development/manufacture of flexible FHE devices? Where does VTT fit into the ecosystem?Vasara: As many FHE devices target large-volume markets, scalability of manufacturing is key: How can I get from one device (= working prototype) to a handful of devices (= feasibility study), to thousands (= pilot manufacturing), to a million (= mass manufacturing) without compromising the quality of the system’s performance and reliability?Access to upscaling infrastructure is essential for the development of novel FHE devices and methods, but infrastructure is expensive. That’s where our establishment of a roll-to-roll pilot printing line to bridge the gap between laboratory R D and mass manufacturing has proved invaluable. We can provide a unique worldwide upscaling infrastructure for advanced FHE devices, with a strong focus on large-area roll-to-roll processes and hybrid assembly. This service removes our customers’ burden of high infrastructure investment in early development stages and it allows us to guide customers along their development path, from prototype to mass production.Watch our video: VTT pilot manufacturing for diagnostics and wearablesSEMI: Is there anything else that device manufacturers need to know in order to succeed?Vasara: In my eyes, the success of FHE devices eventually depends on several factors: It requires a high degree of automation, well-optimized processes, reliable supply chains, and perhaps most importantly, clear standards and rules for designers to guarantee flawless interoperability of all the different elements on a flexible and hybrid circuit. Let us not forget – we are trying to marry electronics with printing, biology, packaging, microfluidics, injection molding and other fields of expertise.We recently finalized the compilation of a set of design rules for publication in our state-of-the-art overview of printed and hybrid electronics manufacturing methods. You can download the overview, PrintoCent Handbook, for free.SEMI: What would you like FLEX|MSTC attendees to take away from your presentation?Vasara: The latest technologies and innovations in microelectronics, MEMS, printing, materials, and biosensors provide us a toolbox for true innovation in the FHE space. Now we need cross-disciplinary thinking and daring steps to combine different manufacturing methods and skill-sets. The ideal cross-disciplinary team might include: The printing engineer who knows how to design contact pads for a bare-die IC assembly The biologist who knows about the thermal and mechanical stress in a printing environment to design processes for bio-functionalization of surfaces The electronics engineer who knows how to optimize a circuit powered with an enzymatic biofuel cell The number of sensors deployed on (or inside) our body, in our drinking water, in our cars, on our fields, in our pets, and everyday products will surely grow. Let us make sure they leave the smallest environmental footprint possible.Antti Vasara, Ph.D. has been the president and CEO of VTT Ltd since 2015. VTT is a visionary research, development and innovation partner with over 2000 people and a turnover exceeding 250M EURO. Vasara is president of EARTO (European Association of Research and Technology Organisations) and is chairman of the board of Palta (Finnish Service Sector Employers). In addition, he is a non-executive director of Elisa Oyj (largest communications operator in Finland) and a board member at EK (Finnish Confederation of Industries).He has served on several high-profile groups on industrial and innovation policy of the European Commission, in addition to several groups in Finland on artificial intelligence and research policy. Previously, Vasara spent close to 25 years in private industry, working at Nokia, Tieto, SmartTrust and McKinsey Company. Earlier in his career, he was a researcher in optical communications with 20+ peer-reviewed articles and one international patent. Vasara holds a Doctor of Science (Technology) degree from Aalto University in Finland.For more information about VTT’s work in bio-interfacing and biodegradable FHE devices, visit VTT Research. FLEX|MSTC is organized MEMS Sensors Industry Group (MSIG) and FlexTech, SEMI technology communities focused on the growth of MEMS sensors and the flexible electronics supply chain, respectively.Maria Vetrano is a public relations consultant at SEMI.

Today’s mobile devices are smaller, more power-efficient, and have more capability than we could have imagined just a decade ago. Offering ever-increasing levels of user functionality, mobile devices are now ubiquitous, and are rapidly becoming the primary mechanisms through which we interact with the digital world, our physical environment, and one another. An unintended side effect of our dependence on the current crop of mobile devices is that they are driving us to distraction.A major industry dynamic will shake things up for the better. Sensors are getting smaller and more efficient, and they’re offering attractive new functionality, giving us the ability to monitor our air and water quality, assess potential toxins in our food sources, and analyze personal health conditions, to name a few use cases. At the same time, the realization of flexible hybrid electronics (FHE) through new materials and production processes, better integration with other electronic components, more efficient energy production and consumption, and pervasive wireless connectivity are fueling the next generation of devices and experiences. What can we expect from tomorrow’s mobile devices — and how can we manage them, instead of having them manage us?SEMI’s Nishita Rao caught up with Mike Wiemer, Ph.D., VP of Engineering, CTO and co-founder, Mojo Vision, to preview his February 25 keynote, The Art of the Possible, at FLEX|MEMS Sensors Technical Congress (MSTC) 2020, February 24-27 at the DoubleTree by Hilton in San Jose, California.Join us at FLEX|MSTC to meet Mike and other industry influencers advancing innovation in FHE and MEMS sensors. Register now to connect with him at FLEX|MSTC or visit him on LinkedIn.SEMI: Mojo Vision has conducted its own research on human interaction with mobile devices. Why is this important?Wiemer: Our mobile devices have given us access to the information we need and want, improving many aspects of our lives. But our devices have also influenced our relationships and attention to our environment in negative ways. We believe that the next mobile computing platform must improve this situation. Instead of pulling us away from the moment, our devices need to embrace more human-centric engagement while still letting us access information that improves our quality of life. Mojo Vision has worked to understand this problem through our own studies and research so we can better develop an approach to address it. SEMI: How are key technical trends driving size, efficiency and capability advancements in mobile devices?Wiemer: Tiny low-power sensors are enabling ever-smaller feature-rich mobile devices that run longer on a battery charge. Smartwatches are a good example. Just a few years ago, smartwatches were not that much more than small screens on our wrists. Today, we have GPS, EKG/health monitoring, and cellular wireless interfaces all inside the same form factor.As this trend continues, we at Mojo Vision predict that our devices will continue to shrink and become even more personal: They’ll be more continuously worn and matched to our own needs and behaviors. This trend towards invisible personal devices is something we’re trying to accomplish with our solutions at Mojo Vision.SEMI: What is Mojo Vision’s concept of “Invisible Computing?” Wiemer: Our vision of Invisible Computing is based on the idea that our wearable devices should be invisible to those around us, encouraging more human interactions. These wearables should be invisible and unobtrusive to users themselves. Our Mojo Lens, which contains a full display and sensors housed inside a contact lens platform, exemplifies this vision. Using proprietary microelectronics and the world’s densest microdisplay to layer digital images and information seamlessly, Mojo Lens is redefining augmented reality. Our mobile devices today continue to increase the quantity and magnitude of interruptions. We think that shouldn’t happen. As a socially invisible device that delivers contextual, relevant content, the Mojo Lens lets us go about our daily lives, naturally interacting with other people while simultaneously enjoying the benefits of augmented reality. We think Invisible Computing can change our relationship with our devices, as well as seemingly give us superpowers. For more information, download the Mojo Vision report, Device Distraction: Understanding the Problem, Re-Thinking the Solution.SEMI: Can you tell us more about Mojo Lens?Wiemer: At its foundation, Mojo Lens is a nanoLED display, radio and sensor platform, integrated using flex technologies, and placed on your eye to provide important information. Mojo Lens can elevate or suppress this information to decrease reliance on your other devices.Unlike your smartwatch or smartphone, which react to you in a binary manner because they don’t have enough information to make autonomous decisions, Mojo Lens understands the context of your experience. That’s because it’s based on our Invisible Computing platform, which can understand your activity. Mojo Lens recognizes if you’re engaged in a conversation, driving or having a coffee, and it reacts with information accordingly.Mojo Lens could act like a real-time interpreter, for example. When someone speaks to me in a language I don’t understand, I should see “subtitles.” Or if I’m having a conversation with someone, Mojo Lens wouldn’t interrupt me with a notification at that moment. For the 92% of Americans who are interrupted by their devices during conversations every day, this prioritization can boost productivity. More importantly, it can improve the quality of our connections with the people around us.Mojo Vision’s microLED platform offers a world-record pixel pitch of over 14,000ppi and pixel density of over 200Mppi², making it the smallest, densest display for dynamic — or moving — content. SEMI: What would you like FLEX|MSTC attendees to take away from your presentation?Wiemer: It feels like the speed at which people are defining important problems and tackling them is increasing every year. And there are so many important problems to solve: space travel, autonomous driving, electric vehicles, alternative energy, quantum computing, lifespan extension, increased food production, brain-computer interfaces, AR/VR. All these problems seem impossible and “crazy,” until some group of people comes along to put a framework in place that can address them. Interestingly, these frameworks aren’t necessarily new. Rather, they build upon existing technologies and capabilities.MEMS sensors and FHE are good examples. From smart textiles, flexible displays and biological sensors to miniature radars, MEMS sensors and FHE technologies are essential building blocks. Many of the big problems we can imagine today will be solved by stacking today’s MEMs and FHE technologies in imaginative new ways. So what do we do next? I’d like to encourage FLEX|MSTC attendees to first define the problem to solve and then define the technology — rather than starting with the technology solution. Mike Weimer is a serial entrepreneur and proven science and technology leader in complex systems development and integration. Before co-founding Mojo Vision as CTO, Weimer co-founded and served as president at Solar Junction, a high-efficiency solar cell company (acquired) where he and his team set two world records for the highest-efficiency solar cells ever made by humans.After Solar Junction, Wiemer joined New Enterprise Associates (NEA) as an Entrepreneur in Residence where he sourced new investments and helped portfolio companies to develop their business and funding strategies. He is a board director at Stratio Corporation and an advisor at Stanford’s StartX Accelerator. He holds a B.S., M.S., and Ph.D. in Electrical Engineering from Stanford University.For more information, visit Mojo Vision.Interested in engaging with the MEMS sensors supply chain? MEMS Sensors Industry Group is a SEMI technology community that enables professionals in the MEMS and sensors industry to accelerate business results by addressing common challenges and opportunities.Nishita Rao is marketing manager for technology communities at SEMI.

Creating a custom Internet of Things (IoT) IC is challenging because it involves multiple design domains (digital, analog and RF). Creating a sensor-based IC that combines electronics that use the traditional CMOS IC design flow with a MEMS sensor on the same silicon die, however, can seem impossible. Couple the co-design and verification challenges with a lack of traditional process design kit (PDK) support for MEMS, and you have a tough road to travel to get your IoT designs to market.What can we do to make the sensor-based IoT design community successful?Understanding the ChallengesThe sensor-based IoT IC typically features a MEMS sensor (and optional actuator) that interact with the real world. Analog and digital circuitry processes the signals and sends them to a CPU. The CPU provides the “smarts” to process the data from the sensor and then sends processed data via a radio to the Internet; alternatively, the CPU could activate the actuator. A typical sensor-based IoT IC (Source: Mentor: A Siemens Business) Based on the complexity of the system, designers face many co-design challenges: Analog design requirements imposed by MEMS: MEMS devices often require high voltages and multiple power supplies; they emit small signals that need amplification and conditioning; and they are sensitive to the environment and require calibration. Design flow interactions: Parasitics from MEMS devices might affect circuits and vice versa. Circuit designers need MEMS models for impedance and timing. Integration: MEMS devices operate at different timescales than circuits, which adds a layer of complexity. Compounding the problem is a lack of MEMS PDKs and methods to tie together ICs and MEMS PDKs for integration and cross-verification. After conquering the co-design challenges, the design team has to address mixed-domain simulation challenges that include: Simulating the system: This requires verification of MEMS, digital, analog and RF circuitry with embedded software that runs on the CPU. Timescales: These vary widely, from a single deflection of the MEMS transducer in femtoseconds to a seconds-long simulation of the embedded software performing a measurement and transmitting data. Simulation time: Simulation of a behavioral digital design is extremely fast. However, the system simulation requires stand-in models that incorporate the behavior of the analog and MEMS block to simulate in an acceptable amount of time. The challenge of timescales for co-simulation. (Source: Mentor: A Siemens Business) MEMS is the KeyThe reality is that it’s the MEMS device that adds extra complexity to the sensor-based IC design and verification flow. To amplify the problem, the MEMS manufacturing process is not nearly as mature as the standardized IC process. For example, the standardized IC process includes ready-made PDKs that include everything designers need to move through design and verification flows. Foundries often provide soft and hard IP to quickly build-out design, and EDA tools provide high levels of automation enabled by abstraction and a standardized IC flow. How will MEMS-based design evolve?MEMS-based design must catch up to the standardized IC process. The first step is providing MEMS PDKs that include: Multi-physics domain design rules and material properties Packaging information Wafer and bonding information Fabrication information We must also tackle issues associated with these PDKs, including: Ownership, distribution and maintenance of the PDKs Consensus on the contents of the PDKs Merging of CMOS and MEMS PDKs The industry needs to move toward standardized MEMS manufacturing processes with available PDKs. Companies must provide IP and recommend structured design methods for co-design and verification of ICs that incorporate MEMS. How can EDA help with these flows?The EDA ContributionEDA companies must work with teams in the MEMS IC co-design space, collaborating with MEMS fabricators to help enable PDKs. By incorporating PDK support within their own tools, EDA companies can provide an integrated custom IC flow that allows teams to design and verify MEMS-based ICs. For details about this flow, click here to download the Mentor whitepaper: Fusing CMOS IC and MEMS Design for IoT Edge Devices.Greg Lebsack brings 25 years of executive and technical management experience — along with a proven track record of building strong teams and delivering predictable results — to his role as general manager of the ICDS division of Mentor, a Siemens Business. Lebsack joined Mentor in 2015 after that company acquired Tanner EDA, where he was president. Prior to Tanner EDA, he held management and technical positions in a number of different industries and companies, including Sprint, General Electric and McKinsey Co. Greg holds a bachelor’s degree in business administration from Northern Arizona University.Greg Lebsack recently presented on the topic of Integrated Co-design of MEMS/IC at the MEMS Sensors Technical congress, a technical conference organized by the MEMS Sensors Industry Group.