environmental sensors

The air we breathe is precious yet neglected as anthropogenic pollutants continue to pour into the earth’s atmosphere. Still, there’s hope that greenhouse gas emissions – and the human behavior behind them – can be brought under control for the good of the planet with the help of gas sensors that gauge pollutant levels.Of the many air pollutants, some are more detrimental to our health than others. Figure 1 lists the top seven pollutants, their chief sources and health effects. The Air Quality Index is calculated by combining values from particles and four gases (carbon monoxide, ozone, sulfur dioxide, nitrogen dioxide). The good news is that gas sensors are available in the market that can monitor each of those pollutants.Figure 1 – Top seven pollutants and their health effects. Source: EPA Air Sensor Guidebook The challenge is that many gas sensor end users today have little understanding of how to compare the performance characteristics of sensors offered by various vendors. SEMI is working to help end users clear that hurdle. SEMI-MSIG this year created a group within its Device Working Group focused on developing gas sensor standards aimed at growing the market and defining guidelines affecting areas including testing methods, reliability requirements, packaging and communication interfaces. Importantly, the standards will also make it easier for end users to make a clear choice among rival products.The SEMI-MSIG Device Working Group comprises devoted experts from leading gas sensor companies as well as OEMs. We welcome companies involved in deploying gas sensors to join this fast-growing group to improve air quality standards in sectors including residential construction, factory automation, automotive, consumer electronics and healthcare. One potential market is consumer electronics such as smart phones since concerns about air quality is growing among device users.The MEMS Sensors Industry Group (MSIG) Device Working group was formed in early 2019. Its mission is to develop a series of technical specifications, industry standards and best practices for MEMS and Sensor devices and platforms. The goal is to advance the use and expansion of MEMS and sensors worldwide.Table 1 – Top seven pollutants and their health effects. Source: EPA Air Sensor Guidebook In the past, we focused on inertial sensors (See IEEE2700 standard for inertial sensors as an example of an output of this team). In 2020, our focus shifted to gas sensors and we plan to expand our work to include other types of sensors in the near feature. Industry leaders such as Bosch, TDK Invensense, Renesas, Infineon, Analog devices, STMicroelectronics, GE and Intel meet every month to strategize on a series of initiatives.If you’re interested in joining the SEMI-MSIG Device Working Group, please contact Carmelo Sansone, Director of MEMS Sensors Industry Group.The MEMS Sensors Industry Group (MSIG) is a SEMI technology community that enables the MEMS and sensor industry to address common challenges, innovate and accelerate business results.Carmelo Sansone is director of the SEMI-MSIG. He has focused his career on building products and system solutions that have large impact in the marketplace. Sansone launched several sensor processor platforms for low-power applications, including the first microcontrollers with DSP capabilities, the core of today’s portable devices intelligence. Sansone has led the successful integration of the MSIG organization into SEMI by expanding its services and global reach. Carmelo holds a master’s degree in Electronic Engineering with a specialization in Biomedical from the University of Pisa and an MBA from Golden Gate University, San Francisco.

Part 2 of 2-part series on MSEC 2019 highlights. Read Part 1. Neural Networks on ChipTo be sure, low power is king when bringing machine learning to the sensor edge. Battery-powered, always-on sensing devices require it since frequent recharging is the death knell of any electronic product. That’s why semiconductor companies are offering new ways to conserve power.“MEMS sensor suppliers have made significant strides in the power, size and performance of their devices,” said Aspinity CEO Tom Doyle. “Yet these gains deliver only incremental power improvements to the system.”Doyle advocates a new architectural model that uses an analog neuromorphic processor to analyze all sensor data at the start of the signal chain instead of sending it downstream so power-hungry chips such as DSPs can digitize it before analysis.“The technology industry wants to take advantage of the many benefits of always-on sensing applications,” said Doyle. “Before we can reach mass proliferation, however, we need to resolve the power issues that are deal-breakers for some applications. We believe the answer to this challenge is architectural. All the data gathered by always-on sensing systems is analog in nature, yet as soon as it’s captured, it’s digitized immediately for analysis. Determining which data is important up front eliminates the digitization and processing of irrelevant data so that voice-first devices such as smart speakers and wearables/hearables can run for long periods of time without requiring battery recharge.”Syntiant CTO Jeremy Holleman agreed that on-device intelligence is the future.“Did you just fall? Is your heartrate a bit off? Deep learning provides a toolset that yields vastly superior decisions,” said Holleman. “The problem is that deep learning is computationally intensive. The answer is a neural network that performs on-device edge inferencing.”Holleman added that Syntiant’s neural decision processor was recently certified as Amazon Voice Service (AVS)-compliant for wake-word detection, making it easier to design voice control in battery-powered devices such as earbuds and wearables.MSEC Technology Showcase WinnerWith the groundswell of interest in intelligence at the edge, it was no surprise that Cartesiam won top honors among all competitors in the MSEC Technology Showcase for its NanoEdge AI, software that brings AI to the edge of the signal chain, making it easier for designers to create intelligent objects that can learn and understand.“Unlike other AI algorithmic technologies for sensing devices, NanoEdge enables both learning and inference at the edge, providing accurate and adaptive intelligence,” said Cartesiam Managing Director and Co-founder Marc Dupaquier, who accepted the award. “It’s also the only tool of its kind that does not require data scientists on board for implementation, which saves a tremendous amount of money. Our clients can build a machine learning library and embed it into their own code within weeks to realize the same caliber of unsupervised neural network that was once the exclusive domain of AI cloud vendors.”MSIG 2019 Hall of FameAt this year’s conference, MSIG Director Carmelo Sansone recognized two longtime contributors to the commercialization of MEMS and sensors: Peter G. Hartwell, Ph.D., chief technology officer at InvenSense, a TDK group company; and Thomas Kenny, professor and senior associate dean of engineering at Stanford University.Hartwell leads technology strategy and the InvenSense advanced technology research group. He has more than 25 years’ experience commercializing silicon MEMS products, including advanced sensors and actuators, and developing MEMS testing techniques.Kenny’s academic accomplishments include authoring or co-authoring more than 250 scientific papers and holding 50 issued patents. He has also advised more than 50 graduated Ph.D. students from Stanford.MSEC 2020Mark your calendar for next year’s MSEC, October 12-14, at Coronado Island Marriott Resort Spa in Coronado, Calif. Get updates from MSIG on MSEC and other upcoming events including MSTC 2020.Stay in Touch with MSIGMEMS Sensors Industry Group (MSIG), a SEMI Strategic Association Partner, is the industry association representing the global MEMS and sensors supply chain. To learn how MSIG enables professionals in the MEMS and sensors industry to innovate, address common challenges and accelerate business results, visit us today.Connect with MSIG on Twitter and LinkedIn. Subscribe to SEMI Blog: Technology and Trends.Maria Vetrano is a public relations consultant at SEMI.

Air pollution is one of the grand challenges facing the entire planet — from the wealthiest nations to the least developed. The World Health Organization reports that nine out of 10 people breathe air containing high levels of pollutants, and that polluted air takes over seven million lives annually through stroke, heart disease and respiratory ailments.As a result, the world is thirsty for reliable, high-performing chemical and environmental sensors that can provide previously unavailable real-time awareness of environmental conditions. On one level, this seems like a relatively simple step, given that smartphones are already equipped with miniaturized sensing technologies that can monitor our living environment and activities.While highly desirable, embedding air pollution sensors in common mobile and wearable devices has not been feasible previously because the necessary trade-offs between high performance and miniaturization have made it impossible.This situation drove a CEA-Leti team to develop a novel generation of fully integrated optical chemical sensors that leverage MEMS technologies. The team successfully merged multiple functionalities on the same chip, using integrated optics and photonics, fluidics, acoustics and electromechanical transduction. How did the team overcome significant technical obstacles to design a proof-of-concept device that senses multiple environmental pollutants — housed in a minimal hardware footprint?Advancing Chemical Sensor Capabilities with Silicon Featuring high selectivity, real-time performance, and fully reversible capabilities, optical chemical sensors are perfect candidates for industrial, environmental and biomedical applications. Consequently, in recent years, worldwide R D initiatives have invested substantial effort to improve them.R D programs have focused particularly on the mid-infrared (Mid-IR) wavelength range (2.5 - 12 µm) — also known as the molecule fingerprint region, which provides a unique combination of fundamental absorption order-of-magnitude bands and unambiguous identification of specific chemicals. A multitude of molecules generate strong and distinct absorption lines in the Mid-IR, providing a foundation for accurate spectroscopic detection. Traditionally, however, these sensors have required large and expensive lenses for infrared (IR) light, making them too big and costly for resource-constrained wearables and mobile devices.Fortunately, recent advances in integrated silicon photonics and quantum cascade laser (QCL) technologies have spurred investigation of new chemical sensor architectures. Richard Soref, a research professor at the University of Massachusetts Boston’s department of engineering, introduced the extension of Near-IR technology into the longer-wave Mid-IR infrared region in 2006. Soref’s concept showed that highly sensitive and selective gas sensors could be fabricated on planar substrates at low cost by co-integrating silicon MEMS, group IV photonics, and specifically designed III-V hetero-structures.While this approach showed promise, it preceded the widespread availability of most mobile devices and wearables. Foreseeing today’s proliferation of those devices, CEA-Leti developed the different building blocks required to implement these concepts in real devices.A New Concept of Integrated OpticsLeveraging these interesting findings, the institute developed a new combination of integrated optics and multiple sensor functions on a single chip: QCL sources, a photo-acoustic (PA) cell, and a mid-IR photonic integrated circuit (PIC) combiner. Their integration on a planar substrate (Figure 1) helped to achieve higher performance, new capabilities, and higher reliability at lower cost, all in a smaller package (less than a 1 cm3 or smaller than a 1-cent coin) with reduced weight and power consumption (less than 100 mJ per measurement). Figure 1: Fully integrated optical sensor (Courtesy: CEA Leti) This configuration represents a multi-gas-detection enabler. The PIC replaces costly, fragile discrete optics while the PA detector uses a MEMS microphone to replace bulky multi-pass cells.PA spectroscopy is among the most sensitive techniques available for monitoring chemical emissions or detecting gas traces. It relies on excitation of the chemical with a pulsed light source emitting at the absorption wavelengths of such molecules. The relaxation process creates local periodic variations of the temperature, resulting in stationary pressure waves, which high-performance microphones can detect.This new generation of devices, fully fabricated on silicon, shows performance comparable with state-of-the-art systems, with the huge bonus of small size and power efficiency that work well for mobile and wearable electronics. By supporting integration onto common technological platforms, such as on-chip photoacoustic sensors, researchers have successfully realized these miniaturized and cost-effective Mid-IR photonic devices in silicon. Mobile device and wearables manufacturers can now take advantage of manufacturable integrated devices for applications that are highly sensitive to size, performance and cost. Adding gas sensing to mobile devices and wearables is now very feasible.For more information on chemical sensing at CEA-Leti, please visit or contact: http://www.leti-cea.com/cea-tech/leti/englishCEA-Leti is an active member of SEMI-MEMS Sensors Industry Group. The technology research institute, along with Fraunhofer and imec, recently joined SEMI’s family as a Strategic Association Partner under a memorandum of understanding (MOU). Under this agreement, CEA-Leti will work with SEMI to advance technology roadmaps, industry standards and cutting-edge technologies including Internet of Things (IoT), artificial intelligence (AI) and machine learning that enable new capabilities across healthcare, automotive and other electronics manufacturing ecosystems. Sergio Nicoletti has more than 20 years of experience in micro and nanofabrication, including magnetic, superconducting and chemical sensing devices and technologies. Having joined CEA-Leti in 2006 as project manager for optical sensing devices used in chemical detection, Nicoletti is currently business development manager at the institute.Previous positions include research and project management at CNR-IMM (Bologna, Italy) and at Hitachi Global Storage Technologies. Nicoletti was also a visiting scientist at HGST (San Jose, Calif.), where he worked on magnetic recording-head devices.Nicoletti holds more than 20 patents and has more than 70 publications in peer-reviewed journals. In 2016, he was appointed coordinator of the European H2020 project MIRPHAB and is director of the project’s pilot line.Nicoletti received his Ph.D. in physics, with a focus on HTc superconducting devices, from Université Joseph Fourier (Grenoble, France). References“Photoacoustic cell on silicon for mid-infrared QCL-based spectroscopic analysis,” JG Coutard, A Glière, JM Fedeli, O Lartigue, J Skubich, G Aoust, A Teulle, T Strahl, S Nicoletti, M Carras, L Duraffourg. Proceedings Volume 10931, MOEMS and Miniaturized Systems XVIII; 109310V (2019) https://doi.org/10.1117/12.2506514“Miniaturization of mid-IR sensors on Si: challenges and perspectives,” S Nicoletti, JM Fédéli, M Fournier, P Labeye, P Barritault, A Marchant, A Glière, A Teulle, J Coutard, L Duraffourg - Silicon Proceedings Volume 10923, Silicon Photonics XIV; 109230H (2019) https://doi.org/10.1117/12.2506759

Marcellino Gemelli, director of global business development at Bosch Sensortec, will present at the upcoming MEMS Sensors Executive Congress on October 29-30, 2018 in Napa, Calif. SEMI’s Maria Vetrano caught up with Gemelli to give MSEC attendees a preview of Gemelli’s feature presentation.Sensor fusion — the integration of different types of sensors through software algorithms to increase overall system performance and/or reduce power consumption— has come a long way since its inception. In those early days, sensor fusion generally involved MEMS inertial sensors only. The advent of new sensor varieties, including environmental sensors, is making new use cases a reality. Gemelli will explore the ways in which the next generation of sensor fusion is improving autonomous mobility devices. SEMI: Why are environmental sensors important to autonomous mobility devices?Gemelli: When most of us think of autonomous systems, we think that they are driven by motion sensors and proximity sensors (e.g., radar, Lidar). When vertical location comes into play, however, in applications such as drones or asset tracking, pressure sensors become an integral part of flight control, navigation and positioning in GPS-challenged areas.While not commonly considered an electronically enabled sense, the ability to “smell” the environment opens new opportunities. The quality of a user’s experience with personal cleaning robots and robo-taxis are good examples of where we might want to enable scent detection.SEMI: I’ve never thought much about using sensors to detect smell. How would a robo-taxi or a cleaning robot benefit from scent detection?Gemelli: Fully autonomous cars will inevitably give rise to robo-taxis. In fact, last month Volvo announced its fully electric robo-taxi, and in March 2018 Waymo announced that Jaguar Land Rover’s SUV would join Fiat Chrysler’s Chrysler Pacifica minivans in its planned fleet of robo-taxis, so we may see robo-taxis in the U.S. within the next five years.With robo-taxis fast-approaching, we need technologies that provide the same level of oversight that a taxi driver once fulfilled. Gas sensors would function like an electronic nose (e-nose) in a robo-taxi to inform the taxi’s owner of prohibited passenger behavior, such as eating, drinking or smoking in the vehicle, which could potentially damage the vehicle’s interior. Camera sensors could record the act as proof of the offense.Cleaning robots would be more sophisticated than they are today. In addition to leveraging image and range-finding sensors to more accurately map the rooms in your house, they could also detect scents from spilled red wine, pet urine or other foreign materials. When the cleaning robot, such as a vacuum, detects the foreign substance, it would navigate around the substance instead of going through it and spreading it all over the carpet.In addition to robo-taxis and cleaning robots, I will also discuss asset tracking and drones.SEMI: What role does sensor fusion play in autonomous mobility devices?Gemelli: Combining sensor fusion with artificial intelligence (AI) will generate new use cases and therefore new markets for sensor suppliers.There is another major benefit as well. With so many connected devices in our lives — including those with cameras, location awareness and always-listening capabilities — we are seeing growing concern about user privacy. Sensor fusion and AI can help to alleviate this concern: By supporting more local processing, they allow for greater control of data, safeguarding personal privacy.SEMI: Who is responsible for the AI part of the sensor-fusion equation?Gemelli: AI is a new frontier for MEMS and sensors suppliers. It benefits us and our customers to embrace AI algorithms through in-house development and/or partnerships.SEMI: What would you like MEMS Sensors Executive Congress attendees to take away from your presentation?Gemelli: I plan to issue a call to action to increase research in hybrid sensor-fusion software architectures, including AI, as suppliers’ collaboration will benefit the industry at large.Marcellino Gemelli is currently based in Palo Alto (CA) responsible for business development of Bosch Sensortec's MEMS product portfolio. He received the ‘Laurea’ degree in Electronic Engineering at the University of Pavia, Italy while in the Italian Army and an MBA from MIP, the Milano (Italy) Polytechnic business school. He previously held various engineering and product management positions at STMicroelectronics from 1995 to 2011 in the fields of MEMS, electronic design automation and data storage. He was contract professor for the Microelectronics course at the Milano (Italy) Polytechnic from 2000 to 2002.Marcellino Gemelli will present Environmental Sensors Systems Enabling Autonomous Mobility on Tuesday, October 30 at MEMS Sensors Executive Congress in Napa Valley, Calif.Register today to learn more about the connection between sensor fusion, AI and next-generation autonomous mobility devices.Maria Vetrano is a public relations consultant at SEMI.

2017 was a good year for the MEMS and sensors business, and that upward trend should continue. We forecast extended strong growth for the sensors and actuators market, reaching more than $100 billion in 2023 for a total of 185 billion units. Optical sensors, especially CMOS image sensors, will have the lion’s share with almost 40 percent of market value. MEMS will also play an important role in that growth: During 2018–2023, the MEMS market will experience 17.5 percent growth in value and 26.7 percent growth in units, with the consumer market accounting for more than 50 percent(1) share overall. Evolution of SensorsSensors were first developed and used for physical sensing: shock, pressure, then acceleration and rotation. Greater investment in R D spurred MEMS’ expansion from physical sensing to light management (e.g., micromirrors) and then to uncooled infrared sensing (e.g., microbolometers). From sensing light to sensing sound, MEMS microphones formed the next wave of MEMS development. MEMS and sensors are entering a new and exciting phase of evolution as they transcend human perception, progressing toward ultrasonic, infrared and hyperspectral sensing.Sensors can help us to compensate when our physical or emotional sensing is limited in some way. Higher-performance MEMS microphones are already helping the hearing-impaired. Researchers at Arizona State University are among those developing cochlear implants — featuring piezoelectric MEMS sensors — which may one day restore hearing to those with significant hearing loss. The visually impaired may take heart in knowing that researchers at Stanford University are collaborating on silicon retinal implants. Pixium Vision began clinical trials in humans in 2017 with its silicon retinal implants.It’s not science fiction to think that we will use future generations of sensors for emotion/empathy sensing. Augmenting our reality, such sensing could have many uses, perhaps even aiding the ability of people on the autism spectrum to more easily interpret the emotions of others.Through my years in the MEMS industry, I have identified three distinct eras in MEMS’ evolution: The “detection era” in the very first years, when we used simple sensors to detect a shock. The “measuring era” when sensors could not only sense and detect but also measure (e.g., a rotation). The “global-perception awareness era” when we increasingly use sensors to map the environment. We conduct 3D imaging with Lidar for autonomous vehicles. We monitor air quality using environmental sensors. We recognize gestures using accelerometers and/or ultrasonics. We implement biometry with fingerprint and facial recognition sensors. This is possible thanks to sensor fusion of multiple parameters, together with artificial intelligence. Numerous technological breakthroughs are responsible for this steady stream of advancements: new sensor design, new processes and materials, new integration approaches, new packaging, sensor fusion, and new detection principles.Global Awareness SensingThe era of global awareness sensing is upon us. We can either view global awareness as an extension of human sensing capabilities (e.g., adding infrared imaging to visible) or as beyond-human sensing capabilities (e.g., machines with superior environmental perception, such as Lidar in a robotic vehicle). Think about Professor X in Marvel’s universe, and you can imagine how human perception could evolve in the future! Some companies envisioned global awareness from the start. Movea (now part of TDK InvenSense), for example, began their development with inertial MEMS. Others implemented global awareness by combining optical sensors such as Lidar and night-vision sensors for robotic cars. A third contingent grouped environmental sensors (gas, particle, pressure, temperature) to check air quality. The newest entrant in this group, the particle sensor, could play an especially important role in air-quality sensing, particularly in wearable devices.Driven by increasing societal concern over mounting evidence of global air-quality deterioration, air pollution has become a major topic in our society. Studies show that there is no safe level of particulates. Instead, for every increase in concentration of PM10 or PM2.5 inhalable particles in the air, the lung cancer rate is rising proportionately. Combining a particle sensor with a mapping application in a wearable could allow us to identify the locations of the most polluted urban zones.The Need for Artificial Intelligence To realize global awareness, we also need artificial intelligence (AI), but first, we have challenges to solve. Activity tracking, for example, requires accurate live classification of AI data. Relegating all AI processing to a main processor, however, would consume significant CPU resources, reducing available processing power. Likewise, storing all AI data on the device would push up storage costs. To marry AI with MEMS, we must do the following: Decouple feature processing from the execution of the classification engine to a more powerful external processor. Reduce storage and processing demands by deploying only the features required for accurate activity recognition. Install low-power MEMS sensors that can incorporate data from multiple sensors (sensor fusion) and enable pre-processing for always-on execution. Retrain the model with system-supported data that can accurately identify the user’s activities. There are two ways to add AI and software in mobile and automotive applications. The first is a centralized approach, where sensor data is processed in the auxiliary power unit (APU) that contains the software. The second is a decentralized approach, where the sensor chip is localized in the same package, close to the software and the AI (in the DSP for a CMOS image sensor, for example). Whatever the approach, MEMS and sensors manufacturers need to understand AI, although they are unlikely to gain much value at the sensor-chip level.Heading to an Augmented WorldWe have achieved massive progress in sensor development over the years and are now reaching the point when sensors can mimic or augment most of our perception: vision, hearing, touch, smell and even emotion/empathy as well as some aesthetic senses. We should realize that humans are not the only ones to benefit from these developments. Enhanced perception will also allow robots to help us in our daily lives (through smart transportation, better medical care, contextually aware environments and more). We need to couple smart sensors’ development with AI to further enhance our experiences with the people, places and things in our lives.About the authorWith almost 20 years’ experience in MEMS, sensors and photonics applications, markets, and technology analyses, Dr. Eric Mounier provides in-depth industry insight into current and future trends. As a Principal Analyst, Technology Markets, MEMS Photonics, in the Photonics, Sensing Display Division, he contributes daily to the development of MEMS and photonics activities at Yole Développement (Yole). He is involved with a large collection of market and technology reports, as well as multiple custom consulting projects: business strategy, identification of investment or acquisition targets, due diligence (buy/sell side), market and technology analyses, cost modeling, and technology scouting, etc.Previously, Mounier held R D and marketing positions at CEA Leti (France). He has spoken in numerous international conferences and has authored or co-authored more than 100 papers. Mounier has a Semiconductor Engineering Degree and a PhD in Optoelectronics from the National Polytechnic Institute of Grenoble (France).Mounier is a featured speaker at SEMI-MSIG European MEMS Sensors Summit, September 20, 2018 in Grenoble, France. (1) Source: Status of the MEMS Industry report, Yole Développement, 2018

For medtech applications to flourish, sensors need a supporting infrastructure that translates the data they harvest into actionable insights, says Qualcomm Life director of business development Gene Dantsker, who will speak about the future of digital healthcare in the Medtech program at SEMICON West. “Rarely can one device give a complete diagnosis,” he notes. “What’s missing is the integration of all the sensor data into prescriptive information.” The maturing medtech sector has developed to the point where sensors can now capture massive amounts of data, conveniently collected from people via mobile devices. The sector now has higher compute capacity to process the data, and improving software can produce actionable insight from the information. The next challenge is to seamlessly integrate these components into legacy medical systems without disrupting existing workflow. “Doctors and nurses don’t have time for disruptive technology – a new system has to be invisible and frictionless to use, with one or fewer buttons, no training and truly automatic Bluetooth-like pairing,” he says. “So device makers need to pack all system intelligence into the circuits and software.”Getting actionable healthcare information from sensors requires integration into the existing medical infrastructure. Source: Qualcomm LifeOne interesting example is United Healthcare’s use of the Qualcomm Life infrastructure to collect data from the fitness trackers of 350,000 patients. The insurance company then pays users $4 a day, or ~$1500 a year, for standing, walking six times a day and other behaviors that clinical evidence shows will both improve patient health and reduce healthcare costs. “It’s a perfect storm of motivations for all stakeholders,” he says.Next hot MEMS topics: Piezoelectric devices, environmental sensors, near-zero power standbyWith sensor technology continuing to evolve, look for coming innovations in MEMS in piezoelectric devices, environmental sensors and near zero-power standby devices, says Alissa Fitzgerald, Founder and Managing Member of A.M. Fitzgerald and Associates, who will provide an update on emerging sensor technologies in the MEMS program at SEMICON West.Piezoelectric devices can potentially be more stable and perhaps even easier to ramp to volume than capacitive ones, with AlN devices for microphones and ultrasonic sensors finding quick success. Now the maturing infrastructure for lead zirconate titantate (PZT) is enabling the scaling of production of higher performing piezo material with thin film deposition equipment from suppliers like Ulvac Technologies and Solmates and in foundry processes at Silex and STMicroelectronics, she notes.In academic research, where most new MEMS emerge, market interest is driving development of environmental sensors and zero-power standby devices. With demand for environmental monitoring growing, much work is focusing on technologies that improve the sensitivity, selectivity and time of response of gas and particulate sensors. Research and funding is also focusing on zero or near-zero power standby sensors, using open circuits that draw no power until a physical stimulus such as vibration or heat wakes them up.MEMS, however, likely won’t find as much of a market in autonomous vehicles as once thought. “While the automotive sensor market will need many optical sensors, MEMS players are competing with other optical and mechanical solutions,” says Fitzgerald. “And here the usual MEMS advantage of small size may not matter much, and the devices will have to meet the challenging automotive requirements for extreme ruggedness.”Paula Doe, SEMI