KLA

In 2021, SEMI member companies joined forces to partner with the world’s top startups to bring new sustainability technologies to semiconductor operations. The initiative, called Startups for Semiconductor Sustainability, covers three areas: Energy efficiency, water technologies, & material usage.

SEMI member companies joined forces to seek out and partner with the world’s top startups to bring new sustainability technologies to semiconductor operations. The initiative- Startups for Semiconductor Sustainability- covers three areas: Energy efficiency, water technologies, & materials usage.

The microelectronics industry works to make the most of the current boom and to manage crises and opportunities around the chip and talent shortage, data explosion, compliance requirements, digital innovation, environmental sustainability, remote work, and other pressing issues.

SEMICON Europa, SEMICON West, SEMICON Japan, & SEMICON Taiwan welcome back exhibitors and visitors to show floors starting in mid-November as four of SEMI’s seven flagship events gather visionaries and industry leaders to explore the latest semiconductor trends and innovations by the end of 2021.

The semiconductor industry – recognizing its own fabs can do much more to reduce their carbon footprint – is in a position to help turn the tide on rising temperatures worldwide and more chip companies are launching sustainability initiatives to contribute to the cause.

The pandemic unleashed by the coronavirus SARS-CoV-2 (which causes the disease COVID-19) has infected over 100 million and resulted in over 2.6 million deaths worldwide as of March 2021. It is well-established that this virus primarily spreads from person-to-person via respiratory droplets produced when an infected person coughs, sneezes or even breathes (see Ref. 1-3). Subsequently, the droplets meet the eyes, or enter nose or mouth of a nearby person, or transmit when a person touches an infected surface, then contacts their eyes, nose, or mouth. Since the virus is small, 0.06–0.14 microns in diameter, many copies can be contained in or attached to emitted respiratory droplets. Droplets as small as one micron can carry enough viral load to cause an infection. A particular concern is the interaction of droplets with ventilation systems, which potentially could enhance the propagation of pathogens. This has implications on situation-specific safe distancing and the design of building filtration systems, air distribution, heating, air-conditioning and decontamination systems. A particular instance of this is the semiconductor manufacturing cleanroom, where systems and protocols are specifically designed to minimize contamination. The $440 billion global semiconductor industry depends on these cleanrooms for integrated circuits (chips), and in turn, these chips form the lifeblood of the multi-trillion-dollar global electronic systems industry. Electronic systems are now critical for just about every aspect of human life, including health, work, finances, entertainment, transportation, power grids and many others. Thus, it is critical to understand how cleanrooms can operate more safely to ensure the health of workers while maintaining productivity levels to meet increasing global demand for semiconductors. In the work described here, we analyzed particle and droplet transport via modeling, simulation [Refs 1-3], and experimentation [Ref. 4] to help guide the industry. Modeling and Simulation In this part of the work, mathematical models were developed to simulate the progressive time-evolution of the distribution of locations of particles produced by a cough. Analytical and numerical studies were undertaken. The models ascertain the range, distribution and settling time of the particles under the influence of gravity and drag from the surrounding air. Beyond qualitative trends that illustrate that large particles travel far and settle quickly – versus small particles that do not travel far and settle slowly (yet can be carried far by ambient flow) – the models provide quantitative results for distances travelled and settling times, which are needed for constructing social distancing policies and workplace protocols. Figure 1 shows examples of the results of the modeling and simulation work. Figure 1: Model of particle spreading from a person coughing, with and without a mask. (Ref. 1) Following are key insights from the modeling and simulation work (Ref. 1): Large particles travel far (launched “ballistically”) and settle quickly, while small particles do not travel far and settle slowly (when there are no ambient externally-driven flow fields). Small particles do not settle even by the end of the simulation time (4 seconds in Ref. 1). Accordingly, the simulations were also run for extremely long periods to ascertain that the “mist” of small particles remained airborne for several minutes (as predicted by the theory). For strong opposing headwind, small particles move backwards, yet still remain airborne for extended periods of time. This is by far the most dangerous case since this will encounter other persons at the torso level. Ratio of the general drag to gravity indicates that at high velocities, the dynamics are dominated by drag. For general cough conditions, there can be cases where the change in the surrounding fluid’s behavior, due to the motion of the particles and cough, may be important. One major implication of this work is that the challenge of infection must be addressed both spatially and temporally. In other words, it is necessary to maintain social distancing based on how far the virus travels, but it is also important to account for how long the virus stays at the location because of specific air patterns. On the positive side, understanding these spatio-temporal patterns accurately will enable companies to design (or re-design) ventilation and decontamination systems precisely to improve worker safety. Other aspects of this analysis entail contact tracing (Ref. 2) and decontamination (Ref. 3). Further details, including simulations, are available at https://msol.berkeley.edu/publications/. Experimentation The major vector of coronavirus spread is through respiratory droplets expelled when coughing, speaking, and breathing; and the efficacy of any safety measures depends on accurate characterization of the dispersal of these droplets. The term particle describes objects that begin their journey as a solid. The term droplet is reserved specifically for objects that are initially liquid, albeit it is important to note that droplets can evaporate and effectively transform into solid particles composed of non-evaporative material. A purpose-built room, the Cal Covid Cube, C3, was set up and utilized for this research [Thatcher et al. 4]. The C3 is a parallelepiped room that is 232 centimeters tall, 376 centimeters long and 284 centimeters wide on the inside. For experimental results to be meaningful and repeatable for scientific and practical purposes, it is essential that the experimental setup be carefully controlled and calibrated. The following precautions were taken to ensure this: Charge-free: When solid particles are released, it is critical to eliminate (or thoroughly know) static charge effects for obtaining accurate deposition patterns. Static charge effects can manifest through particle-particle interactions (affecting particle motion in flight) or particle-surface interaction (affecting deposition pattern). Two methods for the elimination of charge effects on the deposition surface were found to be effective: (1) ionized non-conductive adhesive sampling strips, and (2) grounded aluminum backed carbon sampling strips. Isothermal: The room is a converted walk-in freezer with 10.5-13 centimeter thermal insulation and located in the middle of a building, at least 5 meters away from all building walls. Temperature uniformity was checked and the C3 room temperatures were found to be isothermal within uncertainty of measurements. Quiescent: It was ensured that the room did not create uncontrolled thermal convection due to isothermal nature. Quiescence was verified with both hot-wire measurements and with free-falling particle drift observations. Isopotential: The outer and inner surfaces, including the door of the C3 were conductive aluminum and stainless steel, and copper tape were used to ensure reliable electrical connection of door, interior and exterior panels. Electric fields were surveyed and found to be negligible within precision of instruments. Other design elements: All interior surfaces were coated with black matte paint to reduce scattered light and provide uniform background for imaging measurements. The facility was located on ground floor to limit vibrations. Repeatable Launch: To emulate the release from a true cough or sneeze, and to better understand droplet motion in a canonical turbulent jet versus a cough type release, we studied different layers of complexity for the release geometry: (i) Straight round pipe (ii) Smooth 90-degree curved pipe, with a changing radius along the length of the pipe (iii) Intubation trainer doll, with realistic airways and mouth/tongue structure Figure 2 shows the experimental setup with the intubation doll in C3, with the particle/droplet release being measured after deposition on the sampling strips that appear green. Figure 2: Experimental Setup in C3 with both charge neutralized (white appearing green) and conductive (black) sampling strips placed on a conductive and grounded alignment grid [Ref. 4] We utilized both liquid droplets and solid particles. For droplets, we explored and found promise in a method of deposition analysis based on fluorescence. For particles, we explored many ways in which the smallest of thermal gradients or electrostatic charge issues can affect the data and developed practical methods to address these issues. For accurate measurement free of static charge effects even in environments where high ambient flow velocities may cause a nonconductive surface to rapidly acquire charge (e.g., clean room environment), we developed carbon-tape-based sampling strips that are cleanroom-compatible, conductive, and grounded. For analysis, we developed a cost-effective method utilizing a commercial photo negative scanner followed by image enhancement by blind deconvolution. Figure 3 shows sample results for particle deposition location along our centerline for particles in the ballistic, intermediate and aerosol regime. Figure 3: Experimental Results [Thatcher et al. 4] Following are key insights from experimental work: Significance of both static charge effects and thermal gradients in rooms for validation tests are more than usually appreciated. For modelling, accounting for the non-uniform initial particle velocity matters for the ballistic particles. For all sizes of particles, simulating the transient versus steady state significantly impacts predicted particle spread. Thermal plumes alone from humans along particle flight path can transport 50 micron particles across the room. In some situations, this was observed up to ~6 meters. There is a significant effect of Relative Humidity (RH) and temperature on droplet evaporation. The practical consequence is that, in low RH, particles spread further, with all other things being equal. (The reason is that particles shrunk more and entered the aerosol regime.) In summary, a systematic analysis of particle and droplet transport was conducted by simulation, modeling, and experimentation. We were able to develop robust, rigorous, and repeatable methodologies and draw meaningful insights that will support safer operation and productivity of semiconductor cleanrooms globally. Further, these studies will help with the design (or re-design) of ventilation and de-contamination systems that help protect both the health of humans and the economy from current and future pandemics. This article provides a high-level overview of the work, and further details will be available through a series of scientific papers that are in various phases of publication. We gratefully acknowledge the following support: Gift of the Lam Research Corporation Gifts coordinated through SEMI and provided by Advanced Energy Industries, Applied Materials, ASM, Entegris, JSR, KLA, TEL, and Wonik The 2020 Seed Fund Award from the Center for Information Technology Research in the Interest of Society (CITRIS) and the Banatao Institute at the University of California Vision Research for providing a v2640 camera to help quantify the particle velocities Graduate students Eric Thacher and Tvetene Carlson who conducted the experiments in C3 Valuable discussions with Brett Singer, Thomas Kirchstetter, Michael Sohn, Chelsea Preble of Lawrence Berkeley National Laboratory regarding droplet transport and COVID, and Keith Hansen on particle sampling and charge neutralization DOE Office of Science through the National Virtual Biotechnology Laboratory, a consortium of DOE national laboratories focused on response to COVID-19, with funding provided by the Coronavirus CARES Act Steven Ruzin and the Biological Imaging Facility for their assistance in obtaining the high-quality fluorescence microscopy scans to validate the particle counting methodology. References Zohdi, T.I. (2020) Modeling and simulation of the infection zone from a cough, Computational Mechanics. https://doi.org/10.1007/s00466-020-01875-5 Zohdi, T.I. (2020). An agent-based computational framework for simulation of global pandemic and social response on planet X, Computational Mechanics. https://doi.org/10.1007/s00466-020-01886-2 Zohdi, T.I. (2020) Rapid simulation of viral decontamination efficacy with UV irradiation. Computer Methods Appl. Mech. Eng. https://doi.org/10.1016/j.cma.2020.113216 Thatcher, E., Carlson, J., Castellini, J., Sohn, M.D., Variano, E. and Makiharju S.A. (2021) Droplet and Particle Methods to Investigate Turbulent Particle Laden Jets (in preparation) Authors Evan A. Variano, Professor, Environmental Engineering, UC Berkeley Simo Mäkiharju, Assistant Professor of Mechanical Engineering, UC Berkeley Tarek I. Zohdi, Will C. Hall Endowed Chair of the UCB Computational Data Science Engineering Program, Professor of Mechanical Engineering, UC Berkeley Pushkar P. Apte, Director of Strategic Initiatives, Center for Information Technology Research in the Interest of Society (CITRIS) and the Banatao Institute, UC Berkeley; and Strategic Technology Advisor, SEMI

Like so much else these days, career mentoring in the semiconductor industry has gone virtual. And, among hiring managers, for good reason: Chip companies are facing a new urgency to hire skilled workers as recent SEMI forecasts spanning packaging materials and fab equipment spending show strong growth in 2021 – a trajectory that puts even more pressure on an industry confronted with a worker shortage to attract and recruit new talent.Enter SEMI Korea, which early this month gathered nearly 4,000 sheltered-in-place South Korea university students to offer tips from semiconductor industry insiders on how to kick-start their careers in the chip business. In 14 sessions over three days, industry powerhouses offered guidance across topics ranging from educational preparation and job skills to resume writing and interviewing. Like last year’s on-site event, students from Seoul accounted for the bulk of those online for Campus Outreach On-Air. But this year saw a far higher turnout of students in provincial cities thanks to the ease and convenience of virtual communications – a silver lining in the age of COVID-19.Establishing a successful career in the semiconductor industry starts with a mix of soft and hard skills, according to Changjin Kang, CEO of SEMES, one of the top 10 global semiconductor equipment companies. Keynoting the event, Kang pointed to six key attributes in particular – caring, resilience, execution, analysis, tenacity and experience – under the acronym C.R.E.A.T.E.Caring means empathy for colleagues, understanding their unique work environment and challenges, and building strong relationships. To help cope with the stress that can come with working in the industry, workers must be also be resilient by managing the emotional demands of a job and getting enough rest. Execution comes down to thorough, methodical planning. Carefully analyzing information to make data-driven decisions is a critical aspect of successful outcomes, while having the tenacity to push through difficult technical challenges helps engineers develop the right solutions. And getting out from behind the desk to learn from colleagues is important in building experience.Human resources representatives and engineers from Applied Materials, ASML, Dongjin Semichem, EO Technics, Jusung Engineering, KLA, Lam Research, Merck KGaA, Darmstadt, Germany, PSK, SEMES, SK Siltron, TEL and Wonik IPS shared with the students the key competencies needed to forge a career in the semiconductor industry. Engineers pointed to the benefits of improving their English skills through language training and continuing their education by pursuing engineering certificates. Human resources representatives stressed the importance of a global mindset since, as part of the global semiconductor ecosystem, engineers and other staff often communicate via conference calls with colleagues around the world.In a post-event survey, the students – all digital natives – awarded the event 4.3 out of 5 points for overall satisfaction and made clear that they prefer online Campus Outreach to the on-site event.“Thanks to SEMI and the companies for providing a great opportunity to meet experts and HR managers,” one student pointed out in the survey. “It was very useful because it opened up opportunities for many students to communicate with semiconductor companies.”“It was nice to know what works semiconductor engineers do,” said another, “and how as university students they prepared for employment.”SEMI Korea thanks the nine semiconductor companies that sponsored Campus Outreach On-Air to help build the industry’s talent pipeline and the students for their invaluable participation.Jaegwan Shim is a marketing specialist at SEMI Korea.

Solving challenges in semiconductor manufacturing requires an ongoing collaborative effort by customers, device makers, equipment and materials suppliers, and academia. ASMC 2021 will continue efforts to help the industry overcome these hurdles. To that end, we are now soliciting abstracts from industry experts across all areas of semiconductor manufacturing for presentations at the event, May 3-6, 2021 at the Saratoga Hilton/Saratoga Springs City Center in Saratoga Springs, New York.The conference provides an unparalleled platform for semiconductor professionals to network and learn the latest information in the practical application of advanced manufacturing strategies and methodologies. ASMC 2021 will be co-chaired by Ishtiaq Ahsan, Ph.D. of IBM Research and Alexa Greer of KLA.We’re looking for presentations in topic areas including the following: Advanced Metrology Advanced Equipment Processes and Materials Contamination Free Manufacturing Big Data Management and Mining Defect Inspection and Reduction Equipment Optimization Factory Automation Industrial Engineering Smart Manufacturing Yield Methodologies Click here to submit an abstract for a technical presentation. Provide an extended abstract of no more than two pages (max. of 1000 words, MS Word or PDF) with supporting data, charts, figures embedded in the last page. See author kit for details. Summarize the topic and theme in as much detail as allowed by the word count limitation. Include title, author(s), company affiliation(s), contact information, topic and five key words describing the work. The final technical manuscript must show a complete set of data to support initial abstract. Here are key deadlines and dates for industry experts to keep in mind: Abstracts Due: October 30, 2020 Author Notification: December 15, 2020 Manuscripts Due: February 9, 2021 Final Manuscripts Due: April 6, 2021 Presentations Due: April 20, 2021 Conference Dates: May 3-6, 2021 ASMC 2021 could be held as a virtual event depending on progress in containing COVID-19. Whether the event is on-site or virtual, all abstracts accepted for presentation will be published by IEEE. Speakers should be prepared to present live or online.Speakers also may be invited to publish their papers in a special section of ASMC 2021, which will be featured in IEEE Transactions on Semiconductor Manufacturing. All technical presentations will be considered for the ASMC Best Paper Award sponsored by Entegris. Students presenting an oral paper or poster will be considered for the ASMC Best Student Paper Award sponsored by GLOBALFOUNDRIES.For a complete overview of topics and other information, please visit the ASMC 2021 Call for Papers web page.Margaret Kindling is senior manager of Programs for SEMI Americas.

Internships provide a wealth of benefits for students and corporate managers as they work side-by-side in a real-world environment. Students gain practical, hands-on experience and employers get an infusion of fresh energy, diverse ideas and eager talent.The full value of an on-site internship – the ultimate job interview – flowers when it leads to full-time employment.That was before “everything went crazy,” said Tina Revels, university relations manager at KLA, during her Smart Workforce Pavilion presentation The New Reality: Digital Internships at the virtual SEMICON West 2020. Today, amid COVID-19 restrictions, everyone must adjust to a new reality – a virtual reality. Part of this substantial shift has led to internships going digital.“Internships are more important than ever as we shift to a virtual reality,” Revels said, explaining how today’s job seekers and companies alike can make sure digital internships sustain the same mutual benefits as traditional ones.At companies turning to digital internships, managers need to do more upfront planning to re-create real-world experiences that make interns “feel engaged and connected with one another,” Revels said. For prospective interns, digital internships require greater independence, self-management discipline, and responsibility than traditional internships – all critical skills that can lead to permanent employment.Watch Revels’ full presentation below to learn how to get the most out of digital internships. Register for virtual SEMICON West 2020 to access the additional Smart Workforce and Diversity, Equity and Inclusion sessions, which covered dynamic topics such as job searches during uncertain times, creating a culture of inclusivity, supplier diversity, and hiring military veterans. The content is available until September 20, 2020.Learn more about the SEMI Foundation and how its Workforce Development and Diversity, Equity and Inclusion initiatives are helping build the electronics manufacturing and design supply chain’s talent pipeline.Bryson Gauff is program manager for SEMI High Tech U.

Tracking and quickly diagnosing COVID-19 infections, working from home and telemedicine recently came into sharp focus as technology executives and other subject matter experts from microelectronics heavyweights recently gathered for the first-ever virtual SEMI CTO Forum to explore how the microelectronics industry and their own companies can leverage future technology trends to drive growth. Themed Intelligent Medtech and Wearable Technologies, the forum drew CTOs from ARM, Babblelabs, Brewer Science, Dell, Dow/Dupont, E-Ink, Hewlett Packard Enterprise, Intel, Lam Research, KLA, Microchip, ON Semiconductor, Qualcomm, Tokyo Electron, Ulvac, Veeco and Xilinx. The event is designed as a strategic driver of pre-competitive innovation. Following are key takeaways from the forum. Microfluidics Promises to Speed COVID-19 Diagnosis More than 240 companies worldwide are developing microfluidics solutions to improve diagnosis and treatment of COVID-19 and other conditions, said forum speaker Dr. Kurt Petersen, a member of Band of Angels, Silicon Valley's oldest angel investment group, with an illustrious background1 in technology. And their innovations are bearing fruit. Cepheid, a company founded by Dr. Petersen, has developed a disposable microfluidic cartridge, Xpert Xpress SARS-CoV-2, used by doctors to swab the inside of a patient’s mouth. Highlighting the vital role of MEMS in medical electronics, the tiny powerful devices are behind a test that can detect COVID-19 infection in under 40 minutes. Dr. Petersen also cited a few examples of implantables and injectables under development, including: In vivo chemical sensing: Profusa developed a continuous glucose monitoring sensor via an optical patch. Glaucoma pressure monitors: Injectsense built a silicon chip the size of a grain of rice that is embedded in the eye to measure eye pressure. Retinal implants: Second Sight implanted a 60-electrode array chip that projects images onto the retina to improve vision. Microelectronics Takes Aim at Battling COVID-19 The event’s CTO roundtable, a platform for discussing societal and technology issues, revealed microelectronics technology will likely give rise to solutions for combatting pandemics and new business opportunities both in the short and long run. Areas of the greatest interest included: Tracking and Security: Infection tracking accuracy is key to limiting the spread of viruses yet comes with inherent privacy and security challenges. The consensus view of the executives was that developing trusted hardware capabilities is critical for adoption of accurate infection-tracking technologies. Remote Operation: Executives expect working from home or the use of telehealth to continue building momentum long after pandemic. To give staying power to the remote communications at the heart of these trends, microelectronics ecosystems will need to boost compute performance, both at the edge and in the cloud, while increasing bandwidth to enable applications such as augmented reality/virtual reality (AR/VR), artificial intelligence (AI), machine learning and advanced data analytics. Edge intelligence: The challenge of remote communications spans both people and the Internet of Things (IoT). Questions persist about how hundreds of billions of sensors will connect to the cloud and how much power they will consume. The need to push computing to where data is generated – at the edge – is rising and the necessary underlying technologies will only come by combining various forms of distributed computing and analytics. The microelectronics industry’s ability to seize these opportunities will only be possible with huge strides in innovation, raising concerns among the CTOs about the financial viability of cutting-edge devices because of increasing device complexity and R D costs. Technology partnerships and collaborations – an area where SEMI is contributing and will continue to expand its efforts as it works with the CTO community – will be critical to containing R D costs. SEMI will help the executives identify and mobilize the resources key to future innovation. Improving Home, Work Productivity and Experiences Key to AR Adoption Smart wearables also offer great promise. In just over a decade, AR and VR have grown from science fiction to practical uses such as AR applications for smart contact lenses, said Dr. Mike Wiemer, Co-Founder and CTO of Mojo Vision2. Dr. Wiemer said that while many AR applications remain under development, the technology will only see widespread adoption once it starts to improve productivity and efficiency at home and work and the quality of other experiences. The smart augmented reality contact lens developed by Mojo Vision is a step in that direction. The product’s built-in display gives users timely information about everything they see while remaining invisible by packing 70,000 pixels into a space smaller than a half a millimeter across, making it the smallest and densest dynamic display ever made. The contact lens is powered by an ARM-based processor, with later versions adding an image sensor, eye-tracking sensors and a communications chip. SEMI thanks EMD Performance Materials and Telit for sponsoring the CTO Forum. For more information on the CTO Forum and SEMI’s Smart Data-AI initiative, please sign up on our webpage. 1 Dr. Kurt Petersen is a member of the National Academy of Engineering, an IEEE Medal of Honor winner, and a Life Fellow of the IEEE for his contributions to the commercialization of MEMS technology. 2 Dr. Wiemer also co-founded Solar Junction, where he led technical teams to two world records in solar cell efficiency (43.5% and 44%). He also has patents and papers in Semiconductor Devices Applications, Silicon Photonics, Materials Integration, Lasers, Solar Cells, Solar Systems, and Analog Circuits. Tom Salmon is Vice President of Collaborative Technology Platforms at SEMI. Pushkar P. Apte, Ph.D., is Strategic Technology Advisor for the Smart Data AI Initiative at SEMI.