France

The increasing complexity of IC manufacturing poses a number of challenges including the mask data preparation required to enable technology improvements such as multi-beam (MB) mask writers and extreme ultraviolet (EUV) lithography. Thiago Figueiro, VP of Sales & Marketing of Aselta weighs in.

The COVID-19 pandemic has inflicted major impacts on manufacturing operations worldwide including in the semiconductor industry. The virus has left millions of people confined to their homes, resulting in a massive shift to virtual work and online engagement. In Singapore, where AEM is headquartered, our management team took proactive measures to protect our workers by implementing best practices ahead of the Singapore Circuit Breakers.AEM is globally deemed an essential service, requiring us to maintain operations and minimize impact to our customers. Business continuity plans that include work-from-home and safe-distancing guidelines are in place. As of the time of this writing, we are very fortunate that all of our employees are safe and that we’ve seen only minimal impacts to our customer commitments. AEM has confined this impact by spreading operational risks across our facilities in Asia, Europe, the U.S. and divisions in Singapore, Malaysia, China, North America, Central America, Finland, France and Vietnam. All told, these facilities employ more than 550 people (Figure 1).Figure 1 – AEM Global Presence As a global leader, AEM offers application-specific intelligent system-level test and handling solutions for semiconductor and electronics companies that serve the advanced computing, 5G communications and artificial intelligence (AI) markets.Leveraging our decade of experience, the latest AMPS solutions provide asynchronous, modular, massively parallel and smart system-level testing to meet the new test challenges of complex ICs. The modularity and scalability of these systems enables customers to scale their existing engineering device validation solutions into high-volume, massively parallel production solutions that increase faults coverage, reduces time to market, and decreases cost of test and ownership (Figure 2).Figure 2 – AMPS System-Level Test Solution In meeting 5G infrastructure test needs, AEM developed a field-deployable fiber optics tester. Called WideOptix SR4, the system was initially developed in collaboration with a world leader to support the 5G fiber infrastructure deployment in China and has now been adopted for some Ethernet standards testing. With our WideOptix SR4 development, we cultivated Silicon Photonics (SiPh) testing expertise that complements our AMPS system-level test capability. As part of our business continuation and risk diversifications plan, we had also set up factories in Penang (5,200m2) and Suzhou (3,600m2). Penang’s rising influence in the Southeast Asia semiconductor industry has prompted AMM (AEM Malaysia) to expand its scope to include value-added services with a Center of SSD Excellence and Center of Photonic Excellence.ASZ (AEM Suzhou) will continue to focus on the domestic market in China for further expansion and penetration with products ranging from cost-sensitive testers to state-of-the-art test measurement instruments. In Europe, AEM is focused on wafer-level test and cost-effective ATE test solutions. Finland-based AFORE specializes in MEMS and application-specific wafer testing with the ability to add physical stimulus. The company's state-of-the-art instruments enable the testing of devices such as diced IMU’s (Inertia and Motion Units) in continuous rotation on a wafer mounting ring. Our process increased test throughput by 3X compared to the traditional pick-and-place methods (Figure 3).Figure 3 – Wafer-Level Test Throughput Advantage A specialist in application-specific wafer handling, AFORE developed its latest design to support quantum computing in collaboration with its partner BLUE FORS. The company’s probing equipment features a handling solution with temperature tolerances to 2K (-270’C) to support cryogenic testing (Figure 4).Figure 4 – Cryogenic Quantum Computing Probing Solution AFORE also gained critical insights into creating total darkness, enabling us to further explore opportunities for dark matter testing. AFORE is currently in talks with a member of the LUX Photonics Consortium funded by the National Research Foundation (Singapore) to provide a dark body testing environment and handling for its IR detectors.In Europe, our acquisition of Mu-TEST in France helps diversify our product and service offerings while spreading our business continuity risks. Mu-TEST enjoys collective test-development experience of more than 320 man-years thanks to various ATE suppliers including Schlumberger and Credence. To help combat rising costs of traditional ATE, Mu-TEST developed cost-effective solutions using FPGA-based instruments supported by a full suite of test development, debug and production test software with links to EDA and standard interfaces. This provides Mu-TEST an agile platform that can be easily re-configured for different customer needs.This Mu-Test acquisition expands AEM’s system-level testing capability to include Functional Test, allowing BIST, SCAN, JTAG to test structural failures and perform other application-level test that interface directly with the DUT using the EVM (Electronics Validation) boards to increase fault coverage within the same test environment. Mu-TEST has also enabled AEM to form the recent partnership with UTAC to develop a cost-effective CIS test solution that addresses UTAC’s test needs and complements its CIS advanced packaging solutions. Our U.S. headquarters based in Chandler, Arizona has expanded its capabilities to provide application engineering.In summary, AEM has been expanding its global footprint while managing risk and has been fortunate to be positioned to manage the recent COVID-19 excursions. While each geographical location specializes in core technologies, all sites have access to one another’s manufacturing facilities in times of need and a pool of IP available to address new opportunities. We believe this risk diversification positions us well to serve the needs and interests of our customers worldwide.Lo Wee Tick is Director, Business Development, and Stuart Pearce is Senior Director, Field Marketing, at AEM Holdings Ltd.

In an important step toward resuming business as usual in Japan, Prime Minister Shinzo Abe on May 14 lifted the state of emergency originally scheduled to expire at the end of May for 39 of Japan’s 47 prefectures, marking “the real beginning of our efforts toward a new normal in the era of the coronavirus” as new cases continue to decline. But with Tokyo, Osaka and six other prefectures still under the state of emergency, Abe urged citizens to remain cautious as the nation and world continue to confront the COVID-19 threat. Among criteria the remaining prefectures must meet for a state of emergency suspension is a reduction in new infections to no more than 0.5 cases weekly for every 100,000 citizens. The eight prefectures account for nearly half of Japan’s population and GDP, with Tokyo and Osaka the two largest urban areas in the island nation. Japan expects to contain its economic losses to 38 trillion yen, 15 percent less than the 45 trillion yen hit originally projected. The Japan government has planned a May 21 progress review[1] in the eight prefectures, a timeline that Abe said could lead to the lifting of the state of emergency before the original cutoff at the end of the month, a move that would help stem the drain on the domestic economy.Strict Immigration Controls Restricts International Travel to and from Japan by Supplier EngineersAs I reported on April 21, the Japan Foreign Ministry on March 31 raised its travel advisory to level 3 for 49 regions around the world including the U.S., prohibiting travel from Japan for any purpose. SEMI Japan is urging government officials to exempt Japanese supply chain engineers from the travel ban to allow visits to semiconductor manufacturing facilities in those regions in order to install, start up and service equipment.Starting May 14, Japan blocked immigration of foreign nationals and permanent residents from 100 countries and regions worldwide, a ban applying to anyone who spent time in their home region within 14 days of their planned arrival in Japan. The areas include China, Singapore, South Korea, and Taiwan in Asia; Canada and the U.S.; and Germany, France, Italy, Netherlands, Switzerland and the U.K. in Europe. For the complete list, see the Japan Ministry of Justice’s website.Japan’s immigration ban mirrors restrictions now in place in many other regions around the world. The immigration controls are well-intended – to restrict the spread of COVID-19 – but hamstring the global microelectronics supply chain. For example, the curbs bar engineers from international travel to install new tools and software in fabs. SEMI Japan has stressed the potential chip industry impacts of the ban in ongoing talks with the Ministry of Economy, Trade and Industry and is facilitating discussions between government representatives and SEMI members to help clear the way for travel by critical supply chain workers to Japan. SEMI Supports Members with COVID-19 ResourcesSEMI international headquarters and regional offices are here to help you, our members. For more information on our webinars, surveys, best practices and other information designed to help you meet the challenges of the pandemic, please visit the SEMI Coronavirus Updates Resources page.[1] The May 21 review found three prefectures in western area – Hyogo, Kyoto and Osaka – met the criteria to lift the state of the emergency. Four other prefectures – Chiba, Hokkaido, Saitama and Tokyo – remain under the emergency order that will be reviewed again as early as May 25.Jim Hamajima is president of SEMI Japan.

The recent World Economic Forum event in Davos ranked the unfolding climate crisis among the top three risks companies and governments must address in order to prevent irreversible environmental damage. With the stakes that high, it is becoming critical for organizations of all sizes to take into account climate change risks and opportunities as they develop their strategic and business continuity plans.Two fundamentally different schools of thought have emerged on how to address climate change. On one side, NGOs and climate activists such as Greta Thunberg are pressuring governments to abruptly divert away from fossil fuels, a shift that experts say would exact a deep economic impact. On the other side is the camp that believes capitalism will run its course and ultimately guide public and private entities to find climate change solutions.For their part, organizations are responding to rising pressure from shareholders and stakeholders to disclose their emissions mitigation strategies. The accuracy and completeness of environmental disclosures ranges widely. Some businesses adopt a conservative approach and limit the volume of information made public, while others announce aggressive targets for reducing emissions from their operations and supply chains.Formed 18 years ago, the Carbon Disclosure Project (CDP) has motivated companies (and now cities) to disclose their greenhouse gas (GHG) emissions. In 2019, more than 525 institutional investors representing $96 trillion in assets backed the CDP, whose annual CDP questionnaire is often recognized as the most “comprehensive collection of self-reported environmental data in the world.”As the list of signatory investors supporting the CDP has grown over the years, so has the number of companies responding to the annual CDP questionnaire – from 228 companies in 2003 to over 8,400 in 2019. Company scores are based on 14 disclosure areas such as C-suite level sign-off on the questionnaire content, producing GHG emission data verified by a third party, or publicizing their completed questionnaire on the CDP website. Among all respondents, 179 companies (2%) scored the highest in leadership by demonstrating the strongest commitments to reducing greenhouse gases emissions from their operations and supply chain.Among these 179 companies – referred to as the A-list companies – 10 are SEMI members headquartered in Japan, Taiwan, Korea and France. SEMI applauds these members for ranking among the most progressive companies in disclosing greenhouse gas emissions, an achievement that requires considerable work but puts them in a position of strength in conveying to customers, investors and other stakeholders their commitment to climate resiliency.Olivier Corvez is senior manager of Environment, Health, Safety and Sustainability at SEMI.

SEMI spoke with Dr. Mikko Söderlund, sales director for Beneq’s semiconductor business, about trends in Atomic Layer Deposition (ALD) applications. Söderlund shared his views ahead of his presentation at SEMI MEMS Imaging Sensors Summit, 25-27 September, 2019, at the WTC in Grenoble, France. Join us at the event to meet Beneq and other key industry influencers. Registration is open.SEMI: The Backside Illuminated (BSI) CMOS Image Sensors (CIS) market continues to experience steady growth. Which applications are currently driving market growth?Söderlund: BSI CMOS Image Sensor market continues to be driven by mobile, security, automotive and Internet of Things (IoT) applications – so there seems to be plenty of opportunities for BSI CIS market to grow further.SEMI: What is critical for advanced thin-film deposition methods to extract best electrical performance?Söderlund: It is critical to control the material properties of the deposited layer (such as charge density, resistivity or barrier property) and of course, film uniformity and conformality. Furthermore, controlling material interfaces is also important, especially for sensitive III-V materials. {% video_player "embed_player" overrideable=False, type='scriptV4', hide_playlist=True, viral_sharing=False, embed_button=False, width='350', height='197', player_id='12721134435', style='margin: 0px auto; display: block; float: right; margin-left: auto; margin-right: auto; width: 350px;' %} Coatings and material features based on existing standard techniques can be very expensive, or not feasible at all. What does Atomic Layer Deposition (ALD), as a thin film coating method, offer in particular?Söderlund: ALD offers dense, highly conformal and pinhole-free best-in-class functional layers for dielectrics, passivation, encapsulation and much more. As a gentle and precise layer-by-layer method, ALD is extremely well-suited for deposition of such performance critical layers over large surface areas such as a cassette of wafers.SEMI: Please describe the Atomic Layer Deposition (ALD) coating process. Söderlund: ALD is based on a self-limiting surface reaction controlled thin film deposition. During coating, two or more chemical vapors or gaseous precursors react sequentially on the substrate surface, producing a solid thin film (see schematic below). Most ALD coating systems use a flow-through traveling wave setup, where an inert carrier gas flows through the system and precursors are injected as very short pulses into this carrier flow. The carrier gas flow takes the precursor pulses as sequential waves through the reaction chamber, followed by a pumping line, filtering systems and, eventually, a vacuum pump.SEMI: What are the two leading edge ALD applications?Söderlund: Today’s leading-edge ALD applications are in logic (high-k/metal gate, multiple patterning) and memory (DRAM capacitor, 3D NAND). Within the More-than-Moore (MtM) markets, CIS and MEMS (actuators and sensors, RF) have been early adopters of ALD, and we also see ALD being introduced in GaN Power and RF, as well as photonics.SEMI: Give us one prediction about the opportunities offered by advanced imaging applications.Söderlund: The large diversity of imaging applications will continue to drive growth and innovation. For example, machine vision is expected to transform the imaging landscape. We see this as a big opportunity for advanced thin-film deposition methods such as ALD, provided that the tools are versatile enough to address the diverse manufacturing requirements.SEMI: What are your expectations for SEMI MEMS Imaging Sensors Summit and why do you invite your peers to attend? Söderlund: The summit brings together all key RF stakeholders in the MEMS and imaging sensors industry, and we are looking forward to a great event. It’s a special event for us as we are officially launching a new ALD cluster tool product specifically engineered for the MtM applications – so this brings great excitement that we want to share with the attendees.Dr. Mikko Söderlund is Sales Director for Beneq’s semiconductor business. He has more than 20 years of experience in product development, product management, technical sales and business development across the photonics, OLED, and semiconductor industries. Mikko received his Ph.D. in Micro- and Nanotechnology from the Helsinki University of Technology. Serena Brischetto is a marketing and communications manager at SEMI Europe.